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Fabrication of high dimensional structured nanoceramic by the liquid phase deposition method

Research Project

Project/Area Number 15205026
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Inorganic industrial materials
Research InstitutionKobe University

Principal Investigator

DEKI Shigehito  Kobe University, Faculty of Engineering, Professor, 工学部, 教授 (10101065)

Co-Investigator(Kenkyū-buntansha) MIZUHATA Minoru  Kobe University, Faculty of Engineering, Associate Professor, 工学部, 助教授 (10283871)
KAJINAMI Akihiko  Kobe University, Faculty of Engineering, Research Associate, 工学部, 助手 (10169443)
Project Period (FY) 2003 – 2006
Project Status Completed (Fiscal Year 2006)
Budget Amount *help
¥50,960,000 (Direct Cost: ¥39,200,000、Indirect Cost: ¥11,760,000)
Fiscal Year 2006: ¥6,370,000 (Direct Cost: ¥4,900,000、Indirect Cost: ¥1,470,000)
Fiscal Year 2005: ¥5,720,000 (Direct Cost: ¥4,400,000、Indirect Cost: ¥1,320,000)
Fiscal Year 2004: ¥17,680,000 (Direct Cost: ¥13,600,000、Indirect Cost: ¥4,080,000)
Fiscal Year 2003: ¥21,190,000 (Direct Cost: ¥16,300,000、Indirect Cost: ¥4,890,000)
KeywordsLiquid phase deposition method / Metal oxide thin films ceramics / High dimensional structured / Nano-arrayed ceramics / Inversed-opal structure / Photonic crystals / Metalfluoro complex equilibrium / Deep-RIE process / 酸化モリブデン / Dcep-RIE法 / 酸化タングステン / 金含有酸化チタン / 酸化チタン / 参加スズ / 酸化鉄
Research Abstract

Liquid Phase Deposition (LPD) method has been studied for the fabrication of metal oxide thin films using equilibrium reaction of metal-fluoro complex in aqueous solution systems. Various kinds of metal oxide can be deposited with a good step coverage on substrates having various and high structure ordering. The high dimensional structured metal oxide thin films were fabricated among the template substrate by the Liquid Phase Infiltration (LPI) method. This method has a various advantages in fabrication process, such as low energy, low cost solution reaction, high adhesive and step coverage performance, etc.
We developed a novel technique for the direct synthesis of two-dimensional metal oxide films with highly ordered periodic structure. TiO2 films with highly nano-ordered architectures were directly deposited on substrates at room temperature by LPI method. 2D arrays of several kinds of metal oxide rods with diameters ranging from ca. 100 to 1000 nm are fabricated by filling the holes in a Si wafer designed by Deep-RIE method. A novel soft solution process for the direct synthesis of large-area well-crystallized oxides with 3D ordered periodic structure of polystyrene colloidal crystal has been developed based on the LPI method. Metal oxide thin films were deposited directly into the nanospace, and thus the nanospace was completely infiltrated with metal oxide. In such systems, the crystallinity of the metal oxide is higher than conventional thin films prepared on the surface of the planer substrate. It is suggested that the limited reaction region caused the hindrance of diffusion of the dissolving species and high crystallinity during the crystal growth in the Liquid Phase Deposition reaction. The LPI process provides a direct fabrication route for metal oxide films with highly ordered structures, enabling nanoscale modification of optical properties of photonic crystals.

Report

(5 results)
  • 2006 Annual Research Report   Final Research Report Summary
  • 2005 Annual Research Report
  • 2004 Annual Research Report
  • 2003 Annual Research Report
  • Research Products

    (68 results)

All 2007 2006 2005 2004 2003 Other

All Journal Article (52 results) Book (3 results) Patent(Industrial Property Rights) (6 results) Publications (7 results)

  • [Journal Article] Fabrication of Copper Ferrite Thin Films from Aqueous Solution by the Liquid-phase Deposition Method2007

    • Author(s)
      Shigehito Deki
    • Journal Title

      Chem. Lett. 36・4

      Pages: 518-519

    • NAID

      10018880915

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Fabrication of Copper Ferrite Thin Films from Aqueous Solution by the Liquid-phase Deposition Method2007

    • Author(s)
      S.Deki
    • Journal Title

      Chem. Lett. 36(4)

      Pages: 518-519

    • NAID

      10018880915

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Synthesis and Luminescence Property of Eu^<3+>/ZrO_2 Thin Film by the Liquid Phase Deposition (LPD) Method2006

    • Author(s)
      Kentaro Kuratani
    • Journal Title

      J. Alloys and Compounds 408-412

      Pages: 711-716

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] High Quality Monodispersed Oxide Nanoparticles Prepared by the Liquid Phase Deposition Method in Aqueous Polymer Solution2006

    • Author(s)
      Shigehito Deki
    • Journal Title

      ECS Transactions 3・9

      Pages: 29-35

    • NAID

      120006629930

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Liquid phase infiltration (LPI) process for fabrication of highly nano ordered materials2006

    • Author(s)
      Shigehito Deki
    • Journal Title

      Proceedings of Chemical Solution Deposition of Semiconducting and Non-Metallic films PV2003-32

      Pages: 187-194

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] 液相析出法(Liquid Phase Deposition; LPD法)による水溶液からの機能性酸化物の調製と形状制御2006

    • Author(s)
      出来成人
    • Journal Title

      日本結晶成長学会誌 33・3

      Pages: 162-168

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Synthesis and Luminescence Property of Eu^<3+>/ZrO_2 Thin Film by the Liquid Phase Deposition (LPD) Method2006

    • Author(s)
      K.Kuratani
    • Journal Title

      J. Alloys and Compounds 408-412

      Pages: 711-716

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] High Quality Monodispersed Oxide Nanoparticles Prepared by the Liquid Phase Deposition Method in Aqueous Polymer Solution2006

    • Author(s)
      S.Deki
    • Journal Title

      ECS Trans. 3 (9)

      Pages: 29-35

    • NAID

      120006629930

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Liquid phase infiltration (LPI) process for fabrication of highly nano ordered materials2006

    • Author(s)
      S.Deki
    • Journal Title

      Proceedings of Chemical Solution Deposition of Semiconducting and Non-Metallic films(The Electrochemical Society Inc) PV 2003-32

      Pages: 187-194

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Preparation and characterization of alkyl sulfate and alkylbenzene sulfonate surfactants / TiO2 hybrid thin films by the liquid phase deposition (LPD) method2005

    • Author(s)
      Lin Li
    • Journal Title

      Applied Surface Sci. 239・3-4

      Pages: 292-301

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Fabrication and Structural Control of Fe/Ti Oxide Thin Films with Graded Compositional Profiles by Liquid Phase Deposition2005

    • Author(s)
      Shigehito Deki
    • Journal Title

      J. Am. Ceram. Soc 88・3

      Pages: 731-736

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Novel Fabrication of High Quality ZrO_2 Ceramic Thin Films from Aqueous Solution2005

    • Author(s)
      Kentaro Kuratani
    • Journal Title

      J. Am. Ceram. Soc. 88・10

      Pages: 2923-2927

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Fabrication of nano-structured materials from aqueous solution by liquid phase deposition2005

    • Author(s)
      Shigehito Deki
    • Journal Title

      J. Electroanal. Chem. 584・1

      Pages: 38-43

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Development of fabrication process for metal oxide with nano-structure by the liquid-phase infiltration (LPI) Method2005

    • Author(s)
      Sachihiko Iizuka
    • Journal Title

      Electrochimica Acta 51・5

      Pages: 802-808

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] The dispersion of Au nanoparticles in SiO_2/TiO_2 layered films by the liquid phase deposition (LPD) method2005

    • Author(s)
      Hnin Yu Yu Ko
    • Journal Title

      Thin Solid Films 491・1-2

      Pages: 86-90

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary 2005 Annual Research Report
  • [Journal Article] Fabrication of two-dimensional arrays of graded oxide thin films by LPI method2005

    • Author(s)
      Sachihiko Iizuka
    • Journal Title

      Proceedings of Nanoscale Devices, Materials, and Biological Systems : Fundamental and Applications PV2004-13

      Pages: 351-362

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Preparation and characterization of alkyl sulfate and alkylbenzene sulfonate surfactants / TiO_2 hybrid thin films by the liquid phase deposition (LPD) method2005

    • Author(s)
      L.Li
    • Journal Title

      Applied Surface Sci. 239(3-4)

      Pages: 292-301

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Fabrication and Structural Control of Fe/Ti Oxide Thin Films with Graded Compositional Profiles by Liquid Phase Deposition2005

    • Author(s)
      S.Deki
    • Journal Title

      J. Am. Ceram. Soc. 88(3)

      Pages: 731-736

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Novel Fabrication of High Quality ZrO_2 Ceramic Thin Films from Aqueous Solution2005

    • Author(s)
      K.Kuratani
    • Journal Title

      J. Am. Ceram. Soc. 88(10)

      Pages: 2923-2927

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Fabrication of nano-structured materials from aqueous solution by liquid phase deposition2005

    • Author(s)
      S.Deki
    • Journal Title

      J. Electroanal. Chem. 584(1)

      Pages: 38-43

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Development of fabrication process for metal oxide with nano-structure by the liquid-phase infiltration (LPI) Method2005

    • Author(s)
      S.Iizuka
    • Journal Title

      Electrochimca Acta 51(5)

      Pages: 802-808

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] The dispersion of Au nanoparticles in SiO_2/TiO_2 layered films by the liquid phase deposition (LPD) method2005

    • Author(s)
      Hnin Yu Yu Ko
    • Journal Title

      Thin Solid Films 491(1-2)

      Pages: 86-90

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Fabrication of two-dimensional arrays of graded oxide thin films by LPI method2005

    • Author(s)
      S.Iizuka
    • Journal Title

      Proceedings of Nanoscale Devices, Materials, and Biological Systems : Fundamental and Applications(The Electrochemical Society Inc) PV2004-13

      Pages: 351-362

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Fabrication of nano-structured materials from aqueous solution by liquid phase deposition2005

    • Author(s)
      Shigehito Deki
    • Journal Title

      J.Electroanal.Chem. 584・1

      Pages: 38-43

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Development of fabrication process for metal oxide with nano-structure by the liquid-phase infiltration (LPI) Method2005

    • Author(s)
      Sachihiko Iizuka
    • Journal Title

      Electrochimca Acta 51・5

      Pages: 802-808

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Fabrication of two-dimensional arrays of graded oxide thin films by LPI method2005

    • Author(s)
      Sachihiko Iizuka
    • Journal Title

      Proceedings of Nanoscale Devices, Materials, and Biological Systems : Fundamental and Applications

      Pages: 351-362

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Liquid phase infiltration (LPI) process for fabrication of highly nano-ordered material2004

    • Author(s)
      Shigehito Deki
    • Journal Title

      Chem. Mater. 16・9

      Pages: 1747-1750

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Synthesis and properties of the inorganic/organic hybrid composite thin film by liquid-phase deposition method2004

    • Author(s)
      Lin Li
    • Journal Title

      J. Ceram. Soc. Jpn. 112・5

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Fabrication of Metal-oxide Nanoparticles by the Liquid Phase Deposition Method in the Heterogeneous System2004

    • Author(s)
      Shigehito Deki
    • Journal Title

      Electrochemistry 72・6

      Pages: 452-454

    • NAID

      10012362748

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Aqueous solution-based synthesis of rare earth-doped metal oxide thin films2004

    • Author(s)
      Shigehito Deki
    • Journal Title

      Thin Solid Films 460・1-2

      Pages: 83-86

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Different effects of alkyl sulfate and alkylbenzene sulfonate surfactants on the synthesis and properties of CuPc/TiO_2 composite films by Liquid-Phase Deposition Method (LPD) method2004

    • Author(s)
      Lin Li
    • Journal Title

      Synthetic Metals 146・1

      Pages: 17-27

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Nanofabrication of Metal Oxide Thin Films and Nano-Ceramics from Aqueous Solution2004

    • Author(s)
      Shigehito Deki
    • Journal Title

      J. Mater. Chem. 14・21

      Pages: 3127-3132

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Liquid phase infiltration (LPI) process for fabrication of highly nano-ordered material2004

    • Author(s)
      S.Deki
    • Journal Title

      Chem. Mater. 16(9)

      Pages: 1747-1750

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Synthesis and properties of the inorganic/organic hybrid composite thin film by liquid-phase deposition method2004

    • Author(s)
      L.Li
    • Journal Title

      J. Ceram. Soc. Jpn. 112(5)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Fabrication of Metal-oxide Nanoparticles by the Liquid Phase Deposition Method in the Heterogeneous System2004

    • Author(s)
      S.Deki
    • Journal Title

      Electrochemistry 72(6)

      Pages: 452-454

    • NAID

      10012362748

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Aqueous solution-based synthesis of rare earth-doped metal oxide thin films2004

    • Author(s)
      S.Deki
    • Journal Title

      Thin Solid Films 460(1-2)

      Pages: 83-86

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Different effects of alkyl sulfate and alkylbenzene sulfonate surfactants on the synthesis and properties of CuPc/TiO_2 composite films by Liquid-Phase Deposition Method (LPD) method2004

    • Author(s)
      L.Li
    • Journal Title

      Synthetic Metals 146(1)

      Pages: 17-27

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Nanofabrication of Metal Oxide Thin Films and Nano-Ceramics from Aqueous Solution2004

    • Author(s)
      S.Deki
    • Journal Title

      J. Mater. Chem. 14(21)

      Pages: 3127-3132

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Liquid phase infiltration (LPI) Process for fabrication of highly nano ordered materials2004

    • Author(s)
      Shigehito Deki et al.
    • Journal Title

      Chemistry of Materials. 16・9

      Pages: 1747-1750

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Synthesis and properties of the inorganic/organic hybrid composite thin film by liquid-phase deposition method2004

    • Author(s)
      Lin Li et al.
    • Journal Title

      J.Ceram.Soc.Jpn., Suppliment 112-1, PasRim5 Special Issue. 112・5

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Fabrication of Metal-oxide Nanoparticles by the Liquid Phase Deposition Method in the Heterogeneous System2004

    • Author(s)
      Shigehito Deki et al.
    • Journal Title

      Electrochemistry 72・6

      Pages: 452-454

    • NAID

      10012362748

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Aqueous solution-based synthesis of rare earth-doped metal oxide thin films2004

    • Author(s)
      Shigehito Deki et al.
    • Journal Title

      Thin Solid Films 460・1

      Pages: 83-86

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Different effects of alkyl sulfate and alkylbenzene sulfonate surfactants on the synthesis and properties of CuPc/TiO_2composite films by Liquid-Phase Deposition Method (LPD) method2004

    • Author(s)
      Lin Li et al.
    • Journal Title

      Synthetic Metals 146・1

      Pages: 17-27

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Nanofabrication of Metal Oxide Thin Films and Nano-Ceramics from Aqueous Solution2004

    • Author(s)
      Shigehito Deki et al.
    • Journal Title

      J.Mater.Chem. 14・21

      Pages: 3127-3132

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Control of composition gradient in functionally graded Ti/Fe oxide film prepared by the liquid phase deposition method2003

    • Author(s)
      Sachihiko lizuka
    • Journal Title

      Trans. MRSJ 28・2

      Pages: 385-388

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] The effect of EDTA and EDTA rare earth metal complex on TiO2 film deposition by the liquid phase deposition (LPD) method2003

    • Author(s)
      Kentaro Kuratani
    • Journal Title

      Trans. MRSJ 28・2

      Pages: 389-392

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Preparation of Au nanoparticle dispersed Nb2O5composite film by liquid phase deposition2003

    • Author(s)
      Hnin Yu Yu Ko
    • Journal Title

      J. Electroanal. Chem. 559・15

      Pages: 91-98

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Control of composition gradient in functionally graded Ti/Fe oxide film prepared by the liquid phase deposition method2003

    • Author(s)
      S.Iizuka
    • Journal Title

      Trans. MRSJ 28(2)

      Pages: 385-388

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] The effect of EDTA and EDTA rare earth metal complex on TiO_2 film deposition by the liquid phase deposition (LPD) method2003

    • Author(s)
      K.Kuratani
    • Journal Title

      Trans. MRSJ 28(2)

      Pages: 389-392

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Preparation of Au nanoparticle dispersed Nb2O5composite film by liquid phase deposition2003

    • Author(s)
      Hnin Yu Yu Ko
    • Journal Title

      J. Electroanal. Chem. 559(15)

      Pages: 91-98

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Preparation and luminescence property of transparent Eu^<3+>/ZrO_2 thin films by the liquid phase deposition(LPD) method

    • Author(s)
      Kentaro Kuratani
    • Journal Title

      Proceedings of Thin Film Materials, Processes, and Reliability PV2003-13(印刷中)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Preparation and luminescence property of transparent Eu^<3+>/ZrO_2 thin films by the liquid phase deposition(LPD) method

    • Author(s)
      K.Kuratani
    • Journal Title

      Proceedings of Thin Film Materials, Processes, and Reliability(The Electrochemical Society Inc) PV 2003-13 (in press)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Book] 日本化学会編第5版実験化学講座27機能性材料,5.機能性材料の合成1.機能薄膜材料6.セラミック薄膜2004

    • Author(s)
      出来成人
    • Total Pages
      465
    • Publisher
      丸善
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Book] フッ素化学入門-先端テクノロジーに果すフッ素化学の役割,第5章無機フッ素系機能材料5.2薄膜生成-金属フッ化物錯体を用いた液相析出法2004

    • Author(s)
      出来成人
    • Total Pages
      447
    • Publisher
      三共出版
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Book] 第5版実験化学講座27「機能性材料」 5.機能性材料の合成 1.機能薄膜材料 6.セラミック薄膜2004

    • Author(s)
      出来成人, 水畑穣
    • Publisher
      丸善
    • Related Report
      2004 Annual Research Report
  • [Patent(Industrial Property Rights)] 微細構造キャパシタ及びその製造方法、高密度記録媒体及びその製造方法2005

    • Inventor(s)
      出来成人
    • Industrial Property Rights Holder
      財団法人新産業創造研究機構
    • Patent Publication Number
      2005-277118
    • Filing Date
      2005-10-06
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 酸化物被膜の製造方法2005

    • Inventor(s)
      出来成人
    • Industrial Property Rights Holder
      日本板硝子・財団法人新産業創造研究機構
    • Patent Publication Number
      2006-256896
    • Filing Date
      2005-03-16
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 多孔質酸化物被膜の製造方法2005

    • Inventor(s)
      出来成人
    • Industrial Property Rights Holder
      日本板硝子・財団法人新産業創造研究機構
    • Patent Publication Number
      2006-256897
    • Filing Date
      2005-03-16
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 希土類含有金属酸化物薄膜の製造方法2005

    • Inventor(s)
      出来成人
    • Industrial Property Rights Holder
      財団法人新産業創造研究機構
    • Patent Publication Number
      2006-256916
    • Filing Date
      2005-03-17
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 微細構造体の製造方法2003

    • Inventor(s)
      出来成人
    • Industrial Property Rights Holder
      出来成人, 日本板硝子
    • Patent Publication Number
      2005-089852
    • Filing Date
      2003-09-19
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 微細構造体の製造方法2003

    • Inventor(s)
      出来成人
    • Industrial Property Rights Holder
      出来成人, 日本板硝子
    • Patent Publication Number
      2005-092083
    • Filing Date
      2003-09-19
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Publications] Shigehito Deki: "Liquid phase infiltration (LPI) process for fabrication of highly nanoordered materials"Proceeding of Chemical Solution Deposition of Semiconducting and Non-metallic Films. 未定. (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] Shigehito Deki: "Control of composition gradient in functionally graded Ti/Fe oxide film prepared by the liquid phase deposition method"Transactions of MRSJ. 第28巻・第2号. 385-388 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Shigehito Deki: "The effect of EDTA and EDTA rare earth metal complex on TiO_2 film deposition by the liquid phase deposition (LPD) method"Transactions of MRSJ. 第28巻・第2号. 389-392 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Hnin Yu Yu Ko: "Preparation of Au nanoparticle dispersed Nb_2O_5 composite film by liquid phase deposition"J.Electroanal.Chem.. 第559巻・第15号. 91-98 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Shigehito Deki: "Aqueous solution-based synthesis of rare earth-doped metal oxide thin films"Thin Solid Films. 未定. (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] 出来成人: "水溶液からの機能性材料合成"GS News Technical Report. 第62巻・第2号. 46-53 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 出来成人: "実験化学講座 第27巻機能性物質(日本化学会編)"丸善(未定). (2004)

    • Related Report
      2003 Annual Research Report

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Published: 2003-04-01   Modified: 2016-04-21  

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