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Study on Multi-scale Nano-measurement of Microparts using Optically Oscillated Microprobe

Research Project

Project/Area Number 15206016
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionOsaka University

Principal Investigator

TAKAYA Yasuhiro  Osaka University, Graduate School of Engineering, Professor, 大学院工学研究科, 教授 (70243178)

Co-Investigator(Kenkyū-buntansha) MIYOSHI Takashi  Osaka University, Graduate School of Engineering, Professor, 大学院工学研究科, 教授 (00002048)
HAYASHI Terutake  Osaka University, Graduate School of Engineering, Assistant Professor, 大学院工学研究科, 助手 (00334011)
Project Period (FY) 2003 – 2006
Project Status Completed (Fiscal Year 2006)
Budget Amount *help
¥49,790,000 (Direct Cost: ¥38,300,000、Indirect Cost: ¥11,490,000)
Fiscal Year 2006: ¥13,130,000 (Direct Cost: ¥10,100,000、Indirect Cost: ¥3,030,000)
Fiscal Year 2005: ¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
Fiscal Year 2004: ¥11,180,000 (Direct Cost: ¥8,600,000、Indirect Cost: ¥2,580,000)
Fiscal Year 2003: ¥20,020,000 (Direct Cost: ¥15,400,000、Indirect Cost: ¥4,620,000)
KeywordsMicroparts / Radiation pressure / Microprobe / Laser trapping / Three dimensional surface / Surface fine figure / Nanometrology / Multi-scale measurement
Research Abstract

Investigations to establish assessment technologies for nanometer order accuracy of a micropart based on the concept of the nano-CMM (Coordinate Measuring Machine) are summarized as follows ;
1.The single-beam gradient-force sustains an optically oscillating microprobe in air. The position sensing method is proposed by introducing a PSD (Position Sensing detector) as an oscillation detector. The change of the damping effect is brought by the thin layer of air between the probe sphere surface and the specimen's surface. The phase delay increases also according to changing of the damping effect close to the specimen's surface. So, the probe detects a position based on the response amplitude reduction together with the phase delay increase.
2.To verify the validity of the vibrational probing method, the vibrating conditions such as the amplitude and the phase delay are measured by lateral probing of the as-cleaved silicon wafer edge using a probe sphere with diameter of 8 μm. The measurement results suggest that the proposed probing technique is useful for detecting a lateral position with the actual resolution of finer than 23 nm and the repeatability of 13.7 nm.
3.Motion accuracy of the stage system for measuring 3D-coordinate system is evaluated by using a heterodyne laser interferometer of which the wave length of the He-Ne laser is traceable to the standard length. The usefulness of the stage system with positioning resolution of 5 nm and lost-motion accuracy of better than 16 nm is verified for establishing the nano-CMM system.
4.In order to estimate total uncertainty for the developed nano-CMM system, three dimensional form measurement. of a standard micro glass sphere of 168 ±8.5 μm in diameter is performed. The diameter is evaluated 162.9 μm. This suggests that the measurement system is effective for micro-form measurement with an accuracy of nanometer order.

Report

(5 results)
  • 2006 Annual Research Report   Final Research Report Summary
  • 2005 Annual Research Report
  • 2004 Annual Research Report
  • 2003 Annual Research Report
  • Research Products

    (44 results)

All 2006 2005 2004 2003 Other

All Journal Article (40 results) Publications (4 results)

  • [Journal Article] A Novel Surface Finishing Technique for Microparts Using an Optically Controlled Microparticle Tool2006

    • Author(s)
      Yasuhiro Takaya, Kenshiro Hida, Takashi Miyoshi, Terutake Hayashi
    • Journal Title

      CIRP ANNALS VOL. 55/1

      Pages: 613-616

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] The 3D manipulation of a microsphere for nano-CMM probe using single fiber optical trapping2006

    • Author(s)
      Sang In Eom, Yasuhiro Takaya, Takashi Miyoshi, Terutake Hayashi
    • Journal Title

      Proceedings of Optics and Photonics 2006 (SPIE) Vol. 6326(CD-ROM)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Evaluation of Laser Trapping Probe Properties for Coordinate Measurement2006

    • Author(s)
      Masaki Michihata, Yasuhiro Takaya, Takashi Miyoshi, Terutake Hayashi
    • Journal Title

      Instrumentation and Computer-Vision System (SPIE) Vol. 6375

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] レーザトラップを用いたナノ3次元位置検出プローブに関する研究? 2次元振動プローブの特性評価?2006

    • Author(s)
      長坂雄人, 高谷裕浩, 三好隆志, 林照剛
    • Journal Title

      日本機械学会第6回生産加工・工作機械部門講演会 葉山

      Pages: 129-130

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] レーザトラッピングプローブを用いた高精度3次元座標計測に関する研究2006

    • Author(s)
      道畑正岐, 高谷裕浩, 三好隆志, 林照剛
    • Journal Title

      2006年度精密工学会春季大会学術講演会講演論文集 東京

      Pages: 1053-1054

    • NAID

      130005027106

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary 2005 Annual Research Report
  • [Journal Article] A Novel Surface Finishing Technique for Microparts Using an Optically Controlled Microparticle Tool2006

    • Author(s)
      Yasuhiro Takaya, Kenshiro Hida, Takashi Miyoshi, Torutake Hayashi
    • Journal Title

      CIRP ANNALS VOL.55/1

      Pages: 613-616

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] The 3D) manipulation of a microsphere for nano-CMM probe using single fiber optical trapping2006

    • Author(s)
      Sang In Eom, Yasuhiro Takaya, Takashi Miyoshi, Terutake Hayashi
    • Journal Title

      Proceedings of Optics and Photonics 2006 (SPIE) Vol.6326, (CD_ROM)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Evaluation of Laser Trapping Probe Properties for Coordinate Measurement2006

    • Author(s)
      Masaki Michihata, Yasuhiro Takaya, Takashi Miyoshi, Terutake Hayashi
    • Journal Title

      Instrumentation and Computer-Vision System (SPIE) Vol.6375

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Study on nano-3D position detection using laser trapping probe with circular motion2006

    • Author(s)
      Yuto Nagasaka, Yasuhiro TAKAYA, Takashi MIYOSHI, Terutake Hayashi
    • Journal Title

      The 6th Manufacturing & Machine Tool Conference, Hayama

      Pages: 129-130

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Study on High Precise-3-Dimensional Coordinate Measurement with Laser Trapping Probe2006

    • Author(s)
      Masaki MICHIHATA, Yasuhiro TAKAYA, Takashi MIYOSHI, Terutake HAYASHI
    • Journal Title

      Proceedings of 2006 JSPE general meeting in spring, Tokyo

      Pages: 1053-1054

    • NAID

      130005027106

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] レーザトラップを用いたナノ3次元位置検出プローブに関する研究-2次元振動プローブの特性評価-2006

    • Author(s)
      長坂雄人, 高谷裕浩, 三好隆志, 林照剛
    • Journal Title

      日本機械学会第6回生産加工・工作機械部門講演会 葉山

      Pages: 129-130

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Nano-Position Sensing Using Optically Motion-controlled Microprobe with PSD Based on Laser Trapping Technique2005

    • Author(s)
      Yasuhiro Takaya, Keijiro Imai, Syuichi Dejima, Takashi Miyoshi
    • Journal Title

      CIRP ANNALS VOL. 54/1

      Pages: 467-470

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Dynamic Properties Measurement of Vibrating Microprobe for Nano-Position Sensing Using Radiation Pressure Control2005

    • Author(s)
      Yasuhiro Takaya, Keijiro Imai, Shuichi Dejima, Takashi Miyoshi
    • Journal Title

      SPIE Vol. 5930(CD-ROM)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Study on the Nano-CMM Probe based on Laser Trapping Technology using an Optical Fiber - Fundamental Analysis of the Optical Fiber Trapping2005

    • Author(s)
      Sang In EOM, Yasuhiro TAKAYA, Takashi MIYOSHI
    • Journal Title

      Proceedings of The 3nd International Conference on Leading Edge Manufacturing in 21st Century(LEM21) Nagoya

      Pages: 365-370

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] レーザトラッピングによるナノCMMプローブに関する研究(第13報)-横方向強制振動型プローブの振動検出系の改良-2005

    • Author(s)
      今井 敬次郎, 高谷 裕浩, 三好 隆志
    • Journal Title

      2005年度精密工学会春季大会学術講演会講演論文集 東京

      Pages: 1013-1014

    • NAID

      130004657757

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Nano-Position Sensing Using Optically Motion-controlled Microprobe with PSD) Based on Laser Trapping Technique2005

    • Author(s)
      Yasuhiro Takaya, Keijiro Imai, Shuichi Dejima, Takashi Miyoshi
    • Journal Title

      CIRP ANNALS VOL.54/1

      Pages: 467-470

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Dynamic Properties Measurement of Vibrating Microprobe for Nano-Position Sensing Using Radiation Pressure Control2005

    • Author(s)
      Yasuhiro Takaya, Keijiro Imai, Shuichi Dejima, Takashi Miyoshi
    • Journal Title

      SPIE Vol. 5930, (CD-ROM)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Study on the Nano-CMM Probe based on Laser Trapping Technology using an Optical Fiber-Fundamental Analysis of the Optical Fiber Trapping2005

    • Author(s)
      Sang In EOM, Yasuhiro TAKAYA, Takashi MIYOSHI
    • Journal Title

      Proceedings of The 3nd International Conference on Leading Edge Manufacturing in 21st Century(LEM21), Nagoya

      Pages: 365-370

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Study of probing technique for nano-CMM using laser trap- improvement of vibration detection unit-2005

    • Author(s)
      Keijiro IMAI, Yasuhiro TAKAYA, Takashi MIYOSH1
    • Journal Title

      Proceedings of 2005 JSPE general meeting in spring, Tokyo

      Pages: 1003-1004

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Nano-Position Sensing Using Optically Motion-controlled Microprobe with PSD Based on Laser Trapping Technique2005

    • Author(s)
      Yasuhiro Takaya, Keijiro Imai, Syuichi Dejima, Takashi Miyoshi
    • Journal Title

      CIRP ANNALS VOL.54/1

      Pages: 467-470

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Dynamic Properties Measurement of Vibrating Microprobe for Nano-Position Sensing Using Radiation Pressure Control2005

    • Author(s)
      Yasuhiro Takaya, Keijiro Imai, Shuichi Dejima, Takashi Miyoshi
    • Journal Title

      SPIE Vol.5930(CD-ROM)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Study on the Nano-CMM Probe based on Laser Trapping Technology using an Optical Fiber -Fundamental Analysis of the Optical Fiber Trapping2005

    • Author(s)
      Sang In EOM, Yasuhiro TAKAYA, Takashi MIYOSHI
    • Journal Title

      Proceedings of The 3nd International Conference on Leading Edge Manufacturing in 21st Century(LEM21) Nagoya

      Pages: 365-370

    • Related Report
      2005 Annual Research Report
  • [Journal Article] レーザトラッピングによるナノCMMプローブに関する研究(第13報)-横方向強制振動型プローブの振動検出系の改良-2005

    • Author(s)
      今井敬次郎, 高谷裕浩, 三好隆志
    • Journal Title

      2005年度精密工学会春季大会学術講演会論文集 東京(発表予定)

    • NAID

      130004657757

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Vibrational Probing Technique for the Nano-CMM based on Optical Radiation Pressure Control2004

    • Author(s)
      Yasuhiro Takaya, K.Imai, Taeho Ha, Takashi Miyoshi
    • Journal Title

      CIRP ANNALS VOL. 53/1

      Pages: 389-392

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Position Sensitivity of Micro Probe with Transverse Vibration Using Optical Trap2004

    • Author(s)
      Keijiro Imai, Yasuhiro Takaya, Takashi Miyoshi, Taeho Ha, Keiichi Kimura
    • Journal Title

      Proceedings of International Symposium on Photonics in Measurement 2004 VDI-Berich te 1844

      Pages: 277-284

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] レーザトラッピングによるナノCMMプローブに関する研究(第12報)?横方向強制振動型プローブの測定物近傍での振動特性?2004

    • Author(s)
      今井敬次郎, 高谷裕浩, 三好隆志
    • Journal Title

      2004年度精密工学会秋季大会学術講演会論文集 島根

      Pages: 993-994

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] 光ファイバを用いたナノCMMプローブの研究(第2報)-光ファイバによるレーザトラッピング基礎特性解析-2004

    • Author(s)
      橋本隆希, 高谷裕浩, 三好隆志
    • Journal Title

      2004年度精密工学会春季大会学術講演会講演論文集 東京

      Pages: 673-674

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Vibrational Probing Technique for the Nano-CMM based on Optical Radiation Pressure Control2004

    • Author(s)
      Yasuhiro Takaya, K.Imai, Taeho Ha, Takashi Miyoshi
    • Journal Title

      CIRP ANNALS VOL.53/1

      Pages: 389-392

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Position Sensitivity of Micro Probe with Transverse Vibration Using Optical Trap2004

    • Author(s)
      Keijiro Imai, Yasuhiro Takaya, Takashi Miyoshi, Taeho Ha, Keiichi Kimura
    • Journal Title

      Proceedings of International Symposium on Photonics in Measurement 2004, VDI-Berichte 1844

      Pages: 277-284

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Study of Probing Technique for Nano-CMM Using Laser Trap(12nd Report)-Basic Characteristic of Vibration Probe-2004

    • Author(s)
      Keijiro IMAI, Yasuhiro TAKAYA, Takashi MIYOSHI
    • Journal Title

      Proceedings of 2004 JSPE general meeting in autumn, Shimane

      Pages: 993-994

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Nano-CMM probing technique using optical fiber trapping (2nd report)-Fundamental analysis of laser trapping using optical fiber-2004

    • Author(s)
      Takaki HASHIMOTO, Yasuhiro TAKAYA, Takashi MIYOSHI
    • Journal Title

      Proceedings of 2004 JSPE general meeting in spring, Tokyo

      Pages: 673-674

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Vibrational Probing Technique for the Nano-CMM based on Optical Radiation Pressure Control2004

    • Author(s)
      Yasuhiro Takaya, K.Imal, Taeho Ha, Takashi Miyoshi
    • Journal Title

      CIRP ANNALS VOL.53/1

      Pages: 389-392

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Position Sensitivity of Micro Probe with Transverse Vibration Using Optical Trap2004

    • Author(s)
      Keijiro Imai, Yasuhiro Takaya, Takashi Miyoshi, Taeho Ha, Keiichi
    • Journal Title

      Proceedings of International Symposium on Photonics in Measurement 2004 Frankfurt

      Pages: 277-284

    • Related Report
      2004 Annual Research Report
  • [Journal Article] レーザトラッピングによるナノCMMプローブに関する研究(第12報)-横方向強制振動型プローブ測定物近傍での振動特性-2004

    • Author(s)
      今井敬次郎, 高谷裕浩, 三好隆志
    • Journal Title

      2004年度精密工学会秋季大会学術講演会論文集 島根

      Pages: 993-994

    • Related Report
      2004 Annual Research Report
  • [Journal Article] 強制振動型ナノCMMレーザトラッピングプローブの基本特性2003

    • Author(s)
      高谷裕浩, 今井 敬次郎, 河 兌坪, 三好隆志
    • Journal Title

      2003年度精密工学会北海道支部学術講演会講演論文集 室蘭

      Pages: 3-4

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] 光ファイバを用いたナノCMMプローブの研究 -トラップカのFDTDシミユレーションー2003

    • Author(s)
      橋本隆希, 高谷裕浩, 三好隆志, 中島隆介
    • Journal Title

      2003年度精密工学会関西地方定期学術講演会講演論文集 大阪

      Pages: 71-72

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Fundamental Analysis on the Novel 3-D Probing Technique for Microparts Using the Optical Fiber Trapping2003

    • Author(s)
      Takaki Hashimoto, Yasuhiro Takaya, Takashi Miyoshi, Ryusuke Nakajima
    • Journal Title

      Proceedings of the 18th American Society for Precision Engineering Annual Meeting Portland

      Pages: 83-86

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Fundamental Properties of The Forced Vibrational Laser Traooing Probe for The Nano-CMM2003

    • Author(s)
      Yasuhiro TAKAYA, Keijiro IMAI, Taeho Ha, Takashi MIYOSHI
    • Journal Title

      Proceedings of 2003 JSPE Hokkaido branch meeting, Muroran

      Pages: 3-4

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Nano-CMM Probe using' Optical Fiber Trapping-Trapping Force Simulation using FDTD Method-2003

    • Author(s)
      Takaki HASHIMOTO, Yasuhiro TAKAYA, Takashi MIYOSHI, Ryuusuke NAKAJIMA
    • Journal Title

      Proceedings of 2003 JSPE Kansai Branch regular meeting, Osaka

      Pages: 71-72

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Fundamental Analysis on the Novel 3-D Probing Technique for Microparts Using the Optical Fiber Trapping2003

    • Author(s)
      Takaki Hashimoto, Yasuhiro Takaya, Takashi Miyoshi. Ryusuke Nakajima
    • Journal Title

      Proceedings of the 18th American Society for Precision Engineering Annual Meeting, Portland

      Pages: 83-86

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Publications] 高谷裕浩, 今井敬次郎, 河兌坪, 三好隆志: "強制振動型ナノCMMレーザトラッピングプローブの基本特性"2003年度精密工学会北海道支部学術講演会講演論文集. 室蘭. 3-4 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 橋本隆希, 高谷裕浩, 三好隆志, 中島隆介: "光ファイバを用いたナノCMMプローブの研究-トラップ力のFDTDシミュレーション-"2003年度精密工学会関西地方定期学術講演会講演論文集. 大阪. 71-72 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Takaki Hashimoto, Yasuhiro Takaya, Takashi Miyoshi, Ryusuke Nakajima: "Fundamental Analysis on the Novel 3-D Probing Technique for Microparts Using the Optical Fiber Trapping"Proceedings of the 18th American Society for Precision Engineering Annual Meeting. Portland. 83-86 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 橋本隆希, 高谷裕浩, 三好隆志: "光ファイバを用いたナノCMMプローブの研究(第2報)-光ファイバによるレーザトラッピング基礎特性解析-"2004年度精密工学会春季大会学術講演会講演論文集. 東京(発表予定). (2004)

    • Related Report
      2003 Annual Research Report

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Published: 2003-04-01   Modified: 2016-04-21  

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