• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Molecular-level fundamentals for ultra-planarization and ultra-cleaning processes

Research Project

Project/Area Number 15206085
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Properties in chemical engineering process/Transfer operation/Unit operation
Research InstitutionKyoto University

Principal Investigator

HIGASHITANI Ko  Kyoto Univ., Chem.Eng., Professor, 工学研究科, 教授 (10039133)

Co-Investigator(Kenkyū-buntansha) KANDA Yoichi  Kyoto Univ., Chem.Eng., Assistant Professor, 工学研究科, 助手 (60243044)
SHINTO Hiroyuki  Kyoto Univ., Chem.Eng., Assistant Professor, 工学研究科, 助手 (80324656)
SUZUKI Michitaka  Univ.of Hyogo, Mech.System Eng., Associate Professor, 工学研究科, 助教授 (20137251)
IIMURA Kenji  Univ.of Hyogo, Mech.System Eng., Assistant Professor, 工学研究科, 助手 (30316046)
宮原 稔  京都大学, 工学研究科, 教授 (60200200)
Project Period (FY) 2003 – 2005
Project Status Completed (Fiscal Year 2005)
Budget Amount *help
¥44,330,000 (Direct Cost: ¥34,100,000、Indirect Cost: ¥10,230,000)
Fiscal Year 2005: ¥5,980,000 (Direct Cost: ¥4,600,000、Indirect Cost: ¥1,380,000)
Fiscal Year 2004: ¥8,840,000 (Direct Cost: ¥6,800,000、Indirect Cost: ¥2,040,000)
Fiscal Year 2003: ¥29,510,000 (Direct Cost: ¥22,700,000、Indirect Cost: ¥6,810,000)
KeywordsAtomic Force Microscope / Frictional Forces / Hydration Layers / Lateral Force Microscope / Molecular Dynamics Method / Discrete Element Method / Chemical Mechanical Polishing / LFM / CMP
Research Abstract

Fine particles are frequently used as abrasives in ultra-planarization and ultra-cleaning processes for substrates, that is, chemical mechanical polishing (CMP). Understanding of the mechanism of CMP is indispensable for finer polishing. It is therefore necessary to understand surface forces and frictional forces between a particle and a substrate and between the particles. In this research project, we have elucidated at the molecular level the mechanism of frictional forces between a silica particle and a silicon wafer in aqueous electrolyte solutions. It is found that (1)as for monovalent electrolytes, the frictional force significantly decreases with increasing the electrolyte concentration and this order corresponds to the absolute value of hydration energy of the cations, indicating that the frictional force depends on the amount of free water around the cations ; (2)the frictional force is extremely sensitive to the molecular-scale roughness of the silica surfaces and significantly depends on the cleaning procedure of the surfaces ; (3)the frictional force complicatedly varies with the cationic valency, where it decreases with the hydration energy of divalent cations and then increases ; (4)as for trivalent cations, the mechanism of the frictional force is more complex due to the interaction of anions with the cations ; (5)the frictional force significantly decreases with increasing the solution pH, due to the presence of hairy layer with thickness of 1.0-1.5 nm formed at the silica surfaces at pH>10 ; (6)the relationship between the hairy layer and the electrolytes is rather complicated. Using computer simulations, we have investigated (1)how the frictional force between a particle and a smooth substrate depends on the force load and (2)how to remove the particulate contaminants on the smooth substrate.

Report

(4 results)
  • 2005 Annual Research Report   Final Research Report Summary
  • 2004 Annual Research Report
  • 2003 Annual Research Report
  • Research Products

    (29 results)

All 2006 2005 2004 Other

All Journal Article (27 results) Publications (2 results)

  • [Journal Article] Effects of cleaning procedures of silica wafers on their friction characteristics2006

    • Author(s)
      B.C.Donose
    • Journal Title

      Journal of Colloid and Interface Science 299(1)

      Pages: 233-237

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Single-nanoparticle-terminated tips for scanning probe microscopy2006

    • Author(s)
      I.U.Vakarelski
    • Journal Title

      Langmuir 22(7)

      Pages: 2931-2934

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] pH dependence of friction forces between silica surfaces in solutions2006

    • Author(s)
      E.Taran
    • Journal Title

      Journal of Colloid and Interface Science 297(1)

      Pages: 199-203

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Lateral capillary forces between solid bodies on liquid surface : A lattice Boltzmann study2006

    • Author(s)
      H.Shinto
    • Journal Title

      Langmuir 22(5)

      Pages: 2058-2064

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Single-Nanoparticle-Terminated Tips for Scanning Probe Microscopy2006

    • Author(s)
      Ivan U.Vakarelski
    • Journal Title

      Langmuir 22(7)

      Pages: 2931-2934

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Lateral Capillary Forces between Solid Bodies on Liquid Surface : A Lattice Boltzmann Study2006

    • Author(s)
      Hiroyuki Shinto
    • Journal Title

      Langmuir 22(5)

      Pages: 2058-2064

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Growth mechanism of soap-free polymerization of styrene investigated by AFM2006

    • Author(s)
      Tetsuya Yamamoto
    • Journal Title

      Journal of Colloid and Interface Science 297(1)

      Pages: 112-121

    • Related Report
      2005 Annual Research Report
  • [Journal Article] pH dependence of friction forces between silica surfaces in solutions2006

    • Author(s)
      Elena Taran
    • Journal Title

      Journal of Colloid and Interface Science 297(1)

      Pages: 199-203

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 陰溶媒モデルを用いた電解質水溶液中におけるコロイド粒子間力の分子動力学計算2005

    • Author(s)
      森貞 真太郎
    • Journal Title

      化学工学論文集 31(5)

      Pages: 295-300

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Annual Research Report 2005 Final Research Report Summary
  • [Journal Article] Interactions between colloidal particies in NaCl aqueous solutions : Molecular dynamics simulations with an implicit solvent model2005

    • Author(s)
      S.Morisada
    • Journal Title

      Advanced Power Technology 16(5)

      Pages: 473-494

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Fragile structured layers on surfaces in highly concentrated solutions of electrolytes of various valencies2005

    • Author(s)
      Y.Li
    • Journal Title

      Colloids and Surfaces A 260(1-3)

      Pages: 39-43

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Fragile structured layers on surfaces detected by dynamic atomic force microscopy in aqueous electrolyte solutions2005

    • Author(s)
      Y.Li
    • Journal Title

      Advanced Powder Technology 16(3)

      Pages: 213-229

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Revised implicit solvent model for the simulation of surfactants in aqueous solutions2005

    • Author(s)
      S.Morisada
    • Journal Title

      Journal of Physical Chemistry B 109(23)

      Pages: 11762-11769

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Silica surfaces lubrication by hydrated cations adsorption from electrolyte solutions2005

    • Author(s)
      B.C.Donose
    • Journal Title

      Langmuir 21(5)

      Pages: 1834-1839

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Simulation of the hydrodynamic drag force on aggregates2005

    • Author(s)
      K.Iimura
    • Journal Title

      Advanced Powder Technology 16(1)

      Pages: 87-96

    • NAID

      10015585597

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Molecular dynamics calculation of interaction forces between colloids in aqueous electrolyte solutions using an implicit solvent model2005

    • Author(s)
      S.Morisada
    • Journal Title

      Kagaku Kogaku Ronbunshu 31(5)

      Pages: 295-300

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Interactions between colloidal particles in NaCl aqueous solutions : Molecular dynamics simulations with an implicit solvent model2005

    • Author(s)
      S.Morisada
    • Journal Title

      Advanced Powder Technology 16(5)

      Pages: 473-494

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Revised Implicit Solvent Model for the Simulation of Surfactants in Aqueous Solutions2005

    • Author(s)
      Shintaro Morisada
    • Journal Title

      The Journal of Physical Chemistry B 109(23)

      Pages: 11762-11769

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Interactions between Colloidal Particles in NaCl Aqueous Solutions : Molecular Dynamics Simulations with an Implicit Solvent Model2005

    • Author(s)
      Shintaro Morisada
    • Journal Title

      Advanced Powder Technology 16(5)

      Pages: 473-494

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Molecular-scale observation of the surface of polystyrene particles by AFM2005

    • Author(s)
      Tetsuya Yamamoto
    • Journal Title

      Journal of Colloid and Interface Science 292(2)

      Pages: 392-396

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Fragile structured layers on surfaces in highly concentrated solutions of electrolytes of various valencies2005

    • Author(s)
      Ying Li
    • Journal Title

      Colloids and Surfaces A 260(1-3)

      Pages: 39-43

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Fragile structured layers on surfaces detected by dynamic atomic force microscopy in aqueous electrolyte solutions2005

    • Author(s)
      Ying Li
    • Journal Title

      Advanced Powder Technology 16(3)

      Pages: 213-229

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Silica surfaces lubrication by hydrated cations adsorption from electrolyte solutions2005

    • Author(s)
      Ko Higashitani
    • Journal Title

      Langmuir 21(5)

      Pages: 1834-1839

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Interaction forces between hydrophilic surfaces in electrolyte dimethyl sulfoxide solutions measured by atomic force microscopy2004

    • Author(s)
      Y.Li
    • Journal Title

      Advanced Powder Technology 15(2)

      Pages: 165-180

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] A reexamination of mean force potentials for the constituent ion pairs of tetramethylammonium chloride in water2004

    • Author(s)
      Hiroyuki Shinto
    • Journal Title

      Journal of Chemical Engineering of Japan 37(11)

      Pages: 1345-1356

    • NAID

      130000019628

    • Related Report
      2004 Annual Research Report
  • [Journal Article] AFM observation of growing poly isobutyl methacrylate (PiBMA) particles2004

    • Author(s)
      Yoichi Kanda
    • Journal Title

      Chemistry Letters 33(11)

      Pages: 1440-1441

    • NAID

      10013771727

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Interaction forces between hydrophilic surfaces in electrolyte dimethyl sulfoxide solutions measured by atomic force microscopy2004

    • Author(s)
      Ko Higashitani
    • Journal Title

      Advanced Powder Technology 15(2)

      Pages: 165-180

    • NAID

      10012872963

    • Related Report
      2004 Annual Research Report
  • [Publications] Hiroyuki Shinto: "Langevin dynamics simulations of cationic surfactants in aqueous solutions using potentials of mean force"Langmuir. 20(5). 2017-2025 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] Minoru Miyahara: "Adsorption and order formation of colloidal nanoparticles on a substrate : A Brownian dynamics study"Journal of Chemical Physics. 120(3). 1524-1534 (2004)

    • Related Report
      2003 Annual Research Report

URL: 

Published: 2003-04-01   Modified: 2016-04-21  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi