• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Development of semiconductor gas sensor ultra-sensitive in ppb level

Research Project

Project/Area Number 15350084
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Functional materials chemistry
Research InstitutionKYUSHU UNIVERSITY

Principal Investigator

SHIMANOE Kengo (2004)  Kyushu University, Faculty of Engineering Sciences, Professor, 大学院・総合理工学研究院, 教授 (10274531)

山添 昇 (2003)  九州大学, 大学院・総合理工学研究院, 教授 (40037817)

Co-Investigator(Kenkyū-buntansha) 酒井 剛  宮崎大学, 工学部, 助教授 (40284567)
島ノ江 憲剛  九州大学, 大学院・総合理工学研究院, 助教授 (10274531)
Project Period (FY) 2003 – 2004
Project Status Completed (Fiscal Year 2004)
Budget Amount *help
¥15,300,000 (Direct Cost: ¥15,300,000)
Fiscal Year 2004: ¥2,600,000 (Direct Cost: ¥2,600,000)
Fiscal Year 2003: ¥12,700,000 (Direct Cost: ¥12,700,000)
KeywordsHigher order structure / Structure controlled / Hydrothermal treatment / Thin oxide / Sol / Grain size / Fine structure / Utility factor / 担持効果 / 半導体ガスセンサ / ナノ粒子 / ゾル粒子 / ガス拡散 / 薄膜 / 高感度化
Research Abstract

In order to develop gas sensors for very high sensitivity, three key factors have been recognized to control the sensitivity (sensor response) of the sensors of this type, i.e., receptor function, transducer function and utility factor. The importance of the last factor is made obvious when one considers that the target gas (reducing gas) reacts with the oxide surface on its way of diffusion into the sensor device. In this study, we have been investigating new ways of processing for sensing materials from the viewpoint of the above three factors.
The thin films derived from the neat sols of SnO_2 appeared to have pores rather small in size. It was then tried to modify the pore structure by dispersing various amounts of poly ethylene glycol (PEG) into the SnO_2 sol prior to spin-coating. It was observed that, under the same spin-coating conditions, the responses of the resulting thin films to H_2 increased with increasing PEG content, in parallel with the increase of pore size, although … More film thickness increased correspondingly in this case. Obviously larger pore sizes are favorable for increasing utility factor.
We have tried to grow the size of SnO_2 crystallites in the sols and succeeded in it by adjusting the conditions of hydrothermal treatments. Now the sols of mono-dispersed SnO_2 with a crystallite size up to about 16 nm are available. We have shown that the thin films derived tend to increase sensor response to H_2 rather sharply as the crystallite size increases and the pore size increases accordingly. In addition, more strong dependence on the crystallite size and film thickness was disclosed for the sensor response to H_2S. This gas has larger molecular weight than H_2 and at the same time it is more reactive on the oxide surface as well. These features make this gas more sensitive to microstructure of the films.
We have investigated sensor responses of thick films derived from Co_3O_4 (typically 0.5 wt%)-SnO_2 composite powders, which were prepared by mixing the component oxides thoroughly in a planet ball mill. What is of interest here was that the response, especially to CO, increased rather drastically with an increase in ball-milling time. It turned out that the promotion of response was almost in parallel with an increase in pore size. It follows that enlarged pores would make it more favorable for CO molecules to diffuse through the films, leading to the extremely large responses. The sensor responses to various concentrations of CO are compared among several SnO_2 based devices so far reported. The outstandingly large responses of the present film appear to assure the relevance of sensor response with microstructure.
We investigated also gas sensors for detecting other gases. Less

Report

(3 results)
  • 2004 Annual Research Report   Final Research Report Summary
  • 2003 Annual Research Report
  • Research Products

    (56 results)

All 2005 2004 2003 Other

All Journal Article (52 results) Publications (4 results)

  • [Journal Article] Hydrogen sulfide gas sensing properties of thin films derived from SnO_2 sols different in grain size2005

    • Author(s)
      D.Duc Vuong et al.
    • Journal Title

      Sensors and Actuators B 105

      Pages: 437-442

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Sensing properties of Au-loaded SnO_2-Co_3O_4 composites to CO and H_22005

    • Author(s)
      U-S.Choi et al.
    • Journal Title

      Sensors and Actuators B (in press)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Influences of ball-milling time on gas-sensing properties of Co_3O_4-SnO_2 composites2005

    • Author(s)
      S.Abe et al.
    • Journal Title

      Sensors and Actuators B (in press)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Effects of various metal additives on the gas sensing performances of TiO_2 nanocrystals obtained from hydrothermal treatments2005

    • Author(s)
      A.M.Ruiz et al.
    • Journal Title

      Sensors and Actuators B (in press)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Development of SnO_2-based gas sensor sensitive to dilute ethylene oxide in air2005

    • Author(s)
      M.Kugishima et al.
    • Journal Title

      Sensors and Actuators B (in press)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Toward innovations of gas sensor technology2005

    • Author(s)
      N.Yamazoe
    • Journal Title

      Sensors and Actuators B (in press)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Hydrogen sulfide gas sensing properties of thin films derived from SnO_2 sols different in grain size2005

    • Author(s)
      D.D.Vuong, G.Sakai, K.Shimanoe, N.Yamazoe
    • Journal Title

      Sensors and Actuators B Vol.105

      Pages: 437-442

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Hydrogen sulfide gas sensing properties of thin films derived from SnO_2 sols different in grain size2005

    • Author(s)
      Dang Duc Vuong et al.
    • Journal Title

      Sensors and Actuators B 105

      Pages: 437-442

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Sensing properties of Au-loaded SnO_2-Co_3O_4 composites to CO and H_22005

    • Author(s)
      U.-Sung Choi et al.
    • Journal Title

      Sensors and Actuators B (in press)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Influences of ball-milling time on gas-sensing properties of Co_3O_4-SnO_2 composites2005

    • Author(s)
      Shunji Abe et al.
    • Journal Title

      Sensors and Actuators B (in press)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Effects of various metal additives on the gas sensing performances of TiO_2 nanocrystals obtained from hydrothermal treatments2005

    • Author(s)
      Ana M.Ruiz et al.
    • Journal Title

      Sensors and Actuators B (in press)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] development of SnO_2-based gas sensors sensitive to dilute ethylene oxide in air2005

    • Author(s)
      Masahiro Kugishima et al.
    • Journal Title

      Sensors and Actuators B (in press)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Toward innovations of gas technology2005

    • Author(s)
      Noboru Yamazoe
    • Journal Title

      Sensors and Actuators B (in press)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Sensing properties of SnO_2-Co_3O_4 composites to CO and H_22004

    • Author(s)
      U-Sung Choi
    • Journal Title

      Sensors and Actuators B 98

      Pages: 166-173

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Wet process-based fabrication of WO_3 thin film for NO_2 detection2004

    • Author(s)
      Y.-G.Choi
    • Journal Title

      Sensors and Actuators B 101

      Pages: 107-111

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Microstructure control of thermally stable TiO_2 obtained by hydrothermal process for gas sensors2004

    • Author(s)
      A.M.Ruiz et al.
    • Journal Title

      Sensors and Actuators B 103

      Pages: 312-317

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Preparation of grain size-controlled tin oxide sols by hydrothermal treatment for thin film sensor application2004

    • Author(s)
      D.D.Vuong et al.
    • Journal Title

      Sensors and Actuators B 103

      Pages: 386-391

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Higher order structure control for semiconductor gas sensors2004

    • Author(s)
      N.Yamazoe
    • Journal Title

      Chemical Sensors VI : Chemical and Biological Sensors and Analytical Methods, Electrochemical Society Proceedings 2004-08

      Pages: 1-9

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Sensitization of SnO_2-based thick film sensor for ethylene oxide gas2004

    • Author(s)
      M.Kugishima et al.
    • Journal Title

      Chemical Sensors VI : Chemical and Biological Sensors and Analytical Methods, Electrochemical Society Proceedings 2004-08

      Pages: 43-48

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Microstructural control of SnO_2 thin films by using polyethylene glycol-mixed sols2004

    • Author(s)
      G.Sakai et al.
    • Journal Title

      Ceramic Engineering and Science Proceedings 25(3)

      Pages: 477-482

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Sensing properties of SnO_2-Co_3O_4 composites to CO and H_22004

    • Author(s)
      U-S.Choi, G.Sakai, K.Shimanoe, N.Yamazoe
    • Journal Title

      Sensors and Actuators B, Vol.98

      Pages: 166-173

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Wet process-based fabrication of WO_3 thin film for NO_2 detection2004

    • Author(s)
      Y.-G.Choi, G.Sakai, K.Shimanoe, N.Yamazoe
    • Journal Title

      Sensors and Actuators B Vol.101

      Pages: 107-111

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Microstructure control of thermally stable TiO_2 obtained by hydrothermal process for gas sensors2004

    • Author(s)
      A.M.Ruiz, G.Sakai, A.Cornet, K.Shimanoe, J.R.Morante, N.Yamazoe
    • Journal Title

      Sensors and Actuators B Vol.103

      Pages: 312-317

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Preparation of grain size-controlled tin oxide sols by hydrothermal treatment for thin film sensor application2004

    • Author(s)
      D.D.Vuong, G.Sakai, K.Shimanoe, N.Yamazoe
    • Journal Title

      Sensors and Actuators B Vol.103

      Pages: 386-391

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Higher order structure control for semiconductor gas sensors2004

    • Author(s)
      N.Yamazoe
    • Journal Title

      Chemical Sensors VI : Chemical and Biological Sensors and Analytical Methods, Electrochemical Society Proc. Volume 2004-08

      Pages: 1-9

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Sensitization of SnO_2-based thick film sensor for ethylene oxide gas2004

    • Author(s)
      M.Kugishima, K.Shimanoe, N.Yamazoe
    • Journal Title

      Chemical Sensors VI : Chemical and Biological Sensors and Analytical Methods, Electrochemical Society Proc. Volume 2004-08

      Pages: 43-48

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Microstructural control of SnO_2 thin films by using polyethylene glycol-mixed sols2004

    • Author(s)
      G.Sakai, C.Sato, K.Shimanoe, N.Yamazoe
    • Journal Title

      Ceramic Engineering and Science Proc. Vol.25, Issue 3

      Pages: 477-482

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Wet process-based fabrication of WO_3 thin film for NO_2 detection2004

    • Author(s)
      Yong-Gyu Choi et al.
    • Journal Title

      Sensors and Actuators B 101

      Pages: 107-111

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Microstructure control of thermally stable TiO_2 obtained by hydrothermal process for gas sensors2004

    • Author(s)
      Ana M.Ruiz et al.
    • Journal Title

      Sensors and Actuators B 103

      Pages: 312-317

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Preparation of grain size-controlled tin oxide sols by hydrothermal treatment for thin film sensor application2004

    • Author(s)
      Dang Duc Vuong et al.
    • Journal Title

      Sensors and Actuators B 103

      Pages: 386-391

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Higher order structure control for semiconductor gas sensors2004

    • Author(s)
      Noboru Yamazoe
    • Journal Title

      Chemical Sensors VI : Chemical and Biological Sensors by Analytical Methods, Electrochemical Society Proceedings 2004-08

      Pages: 1-9

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Sensitization of SnO_2-based thick film sensor for ethylene oxide gas2004

    • Author(s)
      Masahiro Kugishima et al.
    • Journal Title

      Chemical Sensors VI : Chemical and Biological Sensors and Analytical Methods, Electrochemical Society Proceedings 2004-8

      Pages: 43-48

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Microstructural control of SnO_2 thin films by using polyethylene glycol-mixed sols2004

    • Author(s)
      Go Sakai et al.
    • Journal Title

      Ceramic Engineering and Science Proceedings 25・3

      Pages: 477-482

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Oxide semiconductor gas sensors2003

    • Author(s)
      N.Yamazoe et al.
    • Journal Title

      Catalysis Surveys from Asia 7(1)

      Pages: 63-75

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] 酸化物半導体ガスセンサ2003

    • Author(s)
      山添 昇
    • Journal Title

      Electrochemistry 71(7)

      Pages: 509-510

    • NAID

      130007696767

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Preparation of size and habit-controlled nano crystallites of tungsten oxide2003

    • Author(s)
      Y.-G.Choi et al.
    • Journal Title

      Sensors and Actuators B 93

      Pages: 486-494

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Cr-doped TiO_2 gas sensor for exhaust NO_2 monitoring2003

    • Author(s)
      A.M.Ruiz et al.
    • Journal Title

      Sensors and Actuators B 93

      Pages: 509-518

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Wet process-prepared thick films of WO_3 for NO_2 sensing2003

    • Author(s)
      Y.-G.Choi et al.
    • Journal Title

      Sensors and Actuators B 95

      Pages: 258-265

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Formulation of gas diffusion dynamics for thin film semiconductor gas sensor based on simple reaction-diffusion equation2003

    • Author(s)
      N.Matsunaga et al.
    • Journal Title

      Sensors and Actuators B 96

      Pages: 226-233

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Ultrasensitive gas sensor using Co_3O_4-modified SnO_22003

    • Author(s)
      U-S.Choi et al.
    • Journal Title

      Ceramic Engineering and Science Proc. 24(4)

      Pages: 101-106

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Oxide semiconductor gas sensors2003

    • Author(s)
      N.Yamazoe, G.Sakai, K.Shimanoe
    • Journal Title

      Catalysis Surveys from Asia Vol.7, No.1

      Pages: 63-75

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Oxide semiconductor gas sensors2003

    • Author(s)
      N.Yamazoe
    • Journal Title

      Electrochemistry Vol.71 (No.7)

      Pages: 509-510

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Preparation of size and habit-controlled nano crystallites of tungsten oxide2003

    • Author(s)
      Y.-G.Choi, G.Sakai, K.Shimanoe, Y.Teraoka, N.Miura, N.Yamazoe
    • Journal Title

      Sensors and Actuators B Vol.93

      Pages: 486-494

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Cr-doped TiO_2 gas sensor for exhaust NO_2 monitoring2003

    • Author(s)
      A.M.Ruiz, G.Sakai, A.Cornet, K.Shimanoe, J.R.Morante, N.Yamazoe
    • Journal Title

      Sensors and Actuators B Vol.93

      Pages: 509-518

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Wet process-prepared thick films of WO_3 for NO_2 sensing2003

    • Author(s)
      Y.-G.Choi, G.Sakai, K.Shimanoe, N.Miura, N.Yamazoe
    • Journal Title

      Sensors and Actuators B Vol.95

      Pages: 258-265

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Formulation of gas diffusion dynamics for thin film semiconductor gas sensor based on simple reaction-diffusion equation2003

    • Author(s)
      N.Matsunaga, G.Sakai, K.Shimanoe, N.Yamazoe
    • Journal Title

      Sensors and Actuators B Vol.96

      Pages: 226-233

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Ultrasensitive gas sensor using Co_3O_4-modified SnO_22003

    • Author(s)
      U-S.Choi, G.Sakai, K.Shimanoe, N.Yamazoe
    • Journal Title

      Ceramic Engineering and Science Proc. Vol.24, Issue 4

      Pages: 101-106

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Sensing properties of Au-loaded SnO_2-Co_3O_4 composites to CO and H_2

    • Author(s)
      U-S.Choi, G.Sakai, K.Shimanoe, N.Yamazoe
    • Journal Title

      Sensors and Actuators B (in press)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Influences of ball-milling time on gas-sensing properties of Co_3O_4-SnO_2 composites

    • Author(s)
      S.Abe, U-S.Choi, K.Shimanoe, N.Yamazoe
    • Journal Title

      Sensors and Actuators B (in press)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Effectsof various metal additives on the gas sensing performances of TiO_2 nanocrystals obtained from hydrothermal treatments

    • Author(s)
      A.M.Ruiz, A.Comet, K.Shimanoe, J.R.Morante, N.Yamazoe
    • Journal Title

      Sensors and Actuators B (in press)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Development of SnO_2-based gas sensor sensitive to dilute ethylene oxide in air

    • Author(s)
      M.Kugishima, G.Sakai, K.Shimanoe, N.Yamazoe
    • Journal Title

      Sensors and Actuators B (in press)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Toward innovations of gas sensor technology

    • Author(s)
      N.Yamazoe
    • Journal Title

      Sensors and Actuators B (in press)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Publications] Y.-G.Choi, G.Sakai, K.Shimanoe, N.Miura, N.Yamazoe: "Wet process-prepared thick films of WO_3 for NO_2 Sensing"Sensors and Actuators B. 95. 258-265 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] A.Ruiz, G.Sakai, A.cornet, K.Shimanoe, J.R.Morante, N.yamazoe: "Microstructure control of thermally stable TiO_2 obtained by hydrothermal process for gas sensors"Proc. of EUROSENSORS XVII. 117-120 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] D.D.Vuong, G.Sakai, K.Shimanoe, N.Yamazoe: "Preparation of grain size-controlled tin oxide sols for gas sensor application"Proc.of EUROSENSORS XVII. 343-346 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] U.-S.Choi, G.Sakai, K.Shimanoe, N.Yamazoe: "Sensing properties of SnO_2-Co_3O_4 composites to CO and H_2"Sensors and Actuators B. 98. 166-173 (2004)

    • Related Report
      2003 Annual Research Report

URL: 

Published: 2003-04-01   Modified: 2016-04-21  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi