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Fabrication of ErSiO self-organized superlattice thin films and evaluation of the 1.54μm optical waveguide amplification characteristics

Research Project

Project/Area Number 15360005
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionThe University of Electro-Communications

Principal Investigator

KIMURA Tadamasa  The University of Electro-Communications, Faculty of Electro-Communications, Professor, 電気通信学部, 教授 (50017365)

Co-Investigator(Kenkyū-buntansha) ISSHIKI Hideo  The University of Electro-Communications, Faculty of Electro-Communications, Associate Professor, 電気通信学部, 助教授 (60260212)
Project Period (FY) 2003 – 2005
Project Status Completed (Fiscal Year 2005)
Budget Amount *help
¥8,800,000 (Direct Cost: ¥8,800,000)
Fiscal Year 2005: ¥1,800,000 (Direct Cost: ¥1,800,000)
Fiscal Year 2004: ¥2,800,000 (Direct Cost: ¥2,800,000)
Fiscal Year 2003: ¥4,200,000 (Direct Cost: ¥4,200,000)
Keywords1.54μm luminescence / self-organization / ErSiO superlattice structure / sol-gel method / MOMBE / laser ablation / radiative lifetime / optical waveguide / ErSiO / 超格子構造 / 1.54μm室温発光 / 多孔質シリコン / MOMBE成長 / 1.54μm光導波路 / MBE成長 / ErSiO自己組織化薄膜 / Er1.54μm室温発光 / 有機金属分子線エピタキシー / 温度消光 / 濃度消光 / 蛍光寿命
Research Abstract

This study deals with the ErSiO new materials with a self-organized superlattice structure and its possibility for the 1.54μm optical waveguide amplification.
In the fiscal year 2003, fabrication of ErSiO new thin films were developed using MOMBE, nano-structured porous silicon and sol-gel methods. ErSiO crystalline materials could be successfully formed by every method. They all show crystalline structures characteristics of ErSiO superlattice and also sharp and fine-structured 1.54μm luminescence spectra at room temperature due to Stark splittings in the Er 4f-4f transitions.
In the fiscal year 2004, developments of a new fabrication method and the process improvements for ErSiO films thicker than 100 nm were studied. Using these improved ErSiO thin films, the self-organization mechanisms of ErSiO superlattice, detailed crystalline structures, electrical properties, and the origins of the peculiar luminescence spectra and the short fluorescence lifetime were investigated. First, contro … More l of the ratio of Er, Si and O at 1:2:2.4, especially control of O, was found to be most important for the growth of ErSiO crystalline superlattices with their peculiar luminescence spectra and fast fluorescence lifetime. A laser ablation method was also attempted to obtained improved ErSiO superlattice at lower process temperature together with process improvements of sol-gel and MOMBE methods. ErSiO crystalline thin films were obtained at 900-1000℃, about 200℃ lower than before. Possibility of epitaxial growth on tilted Si(100) by MOMBE was shown.
In the fiscal year 2005, origins of very fast fluorescence lifetimes, 10-20μs compared to several ms in Er-doped Si-related materials, were studied in detail. By varying the optical density in ErSiO thin films, it was found that the fast fluorescence lifetime was the radiative lifetime itself of ErSiO, which may be due to very uniform and strong crystalline fields on Er^<3+> ions. ErSiO optical waveguides were formed and the transmission properties and up-conversion characteristics were studied.
In conclusion, ErSiO with the Er concentration higher than 10^<20>/cm^3 and the radiative lifetime of 10-20μs is a very promising materials for the stimulated emission and light amplification at 1.54μm. Less

Report

(4 results)
  • 2005 Annual Research Report   Final Research Report Summary
  • 2004 Annual Research Report
  • 2003 Annual Research Report
  • Research Products

    (31 results)

All 2006 2005 2004 2003 Other

All Journal Article (23 results) Publications (8 results)

  • [Journal Article] Towards epitaxial growth of ErSiO nanostructured crystalline films on Si substrates2006

    • Author(s)
      H.Isshiki, M.Masaki, K.Ueda, K.Tateishi, T.Kimura
    • Journal Title

      Optical Materials 28

      Pages: 855-858

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] The effect of annealing conditions on the crystallization of Er-Si-O formed by solid phase reaction2006

    • Author(s)
      K.Masaki, T.Kawaguchi, H.Isshiki, T.Kimura
    • Journal Title

      Optical Materials 28

      Pages: 831-834

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Quasi-coherence and the field effect in Ga(As,P) "fractal" superlattice for functional photonic devices2006

    • Author(s)
      H.Isshiki
    • Journal Title

      ECTI-ECC Transactions (Selected Paper) 4・1

      Pages: 56-58

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Towards epitaxial growth of ErSiO nanostructured crystalline films on Si substrates2006

    • Author(s)
      H.Isshiki M.Masaki, K.Ueda, K.Tateishi, T.Kimura
    • Journal Title

      Optical Materials 28

      Pages: 855-858

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Quasi-coherence and the field effect in Ga(As, P) fractal superlattice for functional photonic devices2006

    • Author(s)
      H.Isshiki
    • Journal Title

      ECTI-ECC Transactions vol.4, No.1

      Pages: 56-58

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Towards epitaxial growth of ErSiO nanostructured crystalline films on Si substrates2006

    • Author(s)
      H.Isshiki M.Masaki, K.Ueda, K.Tateishi, T.Kimura
    • Journal Title

      Optical Materials 28・6-7

      Pages: 855-858

    • Related Report
      2005 Annual Research Report
  • [Journal Article] The effect of annealing conditions on the crystallization of Er-Si-O formed by solid phase reaction2006

    • Author(s)
      K.Masaki, H.Isshiki, T.Kawaguchi, T.Kimura
    • Journal Title

      Optical Materials 28・6-7

      Pages: 831-883

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Erbium-Silicon-Oxide crystalline films prepared by MOMBE2005

    • Author(s)
      K.Masaki, H.Isshiki, T.Kimura
    • Journal Title

      Optical Materials 27

      Pages: 876-879

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary 2004 Annual Research Report
  • [Journal Article] Self-assembled infrared-luminescent Er-Si-O crystallites on silicon2005

    • Author(s)
      H.Isshiki, MJA de Dood, A.Polman, T.Kimura
    • Journal Title

      Appl. Phys. Lett. 85・19

      Pages: 4343-4345

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Erbium-silicon-oxide nano-crystalline waveguide formation based on nano-porous silicon2005

    • Author(s)
      T.Kimura, K.Ueda, R.Saito, K.Masaki, H.Isshiki
    • Journal Title

      Optical Materials 27

      Pages: 880-883

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Self-assembled infrared luminescent Er-Si-O crystallites on silicon2005

    • Author(s)
      H.Isshiki, MJA de Dood, A.Polman, T.Kimura
    • Journal Title

      Appl.Phys.Lett. 85(19)

      Pages: 4343-4345

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Erbium-silicon-oxide nano-crystallinte waveguide formation based on nano-porous silicon2005

    • Author(s)
      T.Kimura, K.Ueda, R.Saito, K.Masaki, H.Isshiki
    • Journal Title

      Optical Materials 27

      Pages: 880-883

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Self-organized formation of Er-Si-O superlattice2004

    • Author(s)
      H.Isshiki, A.Polman, T.Kimura
    • Journal Title

      Transactions of the Material Research Society of Japan 29・1

      Pages: 135-138

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Self-organized formation of Er-Si-O superlattice2004

    • Author(s)
      H.Isshiki, A.Polman, T.Kimura
    • Journal Title

      Transactions of the Material Research Society of Japan 29(1)

      Pages: 135-138

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Self-assembled infrared-luminescent Er-Si-O crystallites on silicon2004

    • Author(s)
      H.Isshiki, MJA de Dood, A.Polman, T.Kimura
    • Journal Title

      APPLIED PHYSICS LETTERS 85・19

      Pages: 4343-4345

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Self-organized formation of Er-Si-O superlattice2004

    • Author(s)
      H.Isshiki.et al.
    • Journal Title

      Transactions of the Material Research Society of Japan 29・1

      Pages: 135-138

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Fine structure in the Er-related emission spectrum from Er-Si-O matrices at room temperature under carrier mediated excitation2003

    • Author(s)
      H.Isshiki, A.Polman, T.Kimura
    • Journal Title

      Journal of Luminescence 102-103

      Pages: 323-331

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Preferential suppression of Auger energy backflow by separation of Er ions from carriers with a thin oxide interlayer in Er-doped porous silicon2003

    • Author(s)
      T.Kimura, H.Isshiki, T.Ishida, T.Shimizu, S.Ide, R.Saito, S.Yugo
    • Journal Title

      Journal of Luminescence 102-103

      Pages: 156-161

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Suppression of Auger deexcitation and temperature quenching of the Er-related 1.54 μm emission with an ultrathin oxide interlayer in and Er/SiO_2/Si structure2003

    • Author(s)
      T.Kimura, H.Isshiki, S.Ide, T.Shimizu, T.Ishida, R.Saito
    • Journal Title

      J. APPL. PHYS 93・5

      Pages: 2595-2601

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Optical characterization of Er-implanted ZnO films formed by sol-gel method2003

    • Author(s)
      T.Fukudome, A.Kaminaka, H.Isshiki, R.Saito, S.Yugo, T.Kimura
    • Journal Title

      Nuclear Instruments and Methods in Physics Research, Section B : Beam Interactions with Materials and Atoms 206

      Pages: 287-290

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Ge Dot Formation on Si by MOVPE using Tetra-methyl germanium (Ge(CH_3)_4)2003

    • Author(s)
      M.Ohtake, M.Wada, M.Sugiyama, H.Isshiki, R.Saito, S.Yugo, T.Kimura
    • Journal Title

      Physica Status Solidi(c), 0(4) 0・4

      Pages: 1113-1116

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Suppression of Auger deexcitation and temperature quenching of the Er-related 1.54μm emission with an ultrathin oxide interlayer in an Er/SiO_2/Si structure2003

    • Author(s)
      T.Kimura, H.Isshiki, S.Ide, T.Shimizu, T.Ishida, R.Saito
    • Journal Title

      J.APPL.PHYS 93(5)

      Pages: 2595-2601

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Ge Dot Formation on Si by MOVPE using Tetra-methyl germanium (Ge(CH_3)_4)2003

    • Author(s)
      M.Ohtake, M.Wada, M.Sugiyama, H.Isshiki, R.Saito, S.Yugo, T.Kimura
    • Journal Title

      Physica Status Solidi (c) 0(4)

      Pages: 1113-1116

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Publications] T.Kimura: "Suppression of Auger deexcitation and temperature quenching of the Er-related 1.54 mm emission with an ultrathin oxide interlayer in an Er/SiO2/Si structure"J.Appl.Phys. 93・No.5. 2595-2601 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] H.Isshiki: "Fine structure in the Er-related emission spectra from Er-Si-O complexes at room temperature under carrier mediated excitation"J.Luminescence. 102-103. 819-824 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] T.Kimura: "Preferential suppression of Auger energy backflow by separation of Er ions from carriers with a thin oxide interlayer in Er-doped porous silicon"J.Luminescence. 102-103. 156-161 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] H.Isshiki: "Self-organized formation of Er-Si-O superlattice"Transactions of the Material Research Society of Japan. Vol.29(in pres). (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] H.Isshiki: "Erbium-silicon-oxide nano-complexes prepared by wet chemical synthesis"Proc.of 2003 MRS Spring Meeting. Vol.770. 133-138 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 正木克明: "MOMBEにより作製したEr-Si-O混晶薄膜の特性評価(2)"第51回応用物理学会関係連合講演会講演予稿集. No.3(掲載予定). (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] 正木克明: "MOMBE法により作製したEr-Si-O混晶の特性評価"第64回応用物理学会学術講演会講演予稿集. No.3. 1310 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 上田啓介: "多層ポーラスSiを利用したEr-Si-O光導波路構造の光学的特性"第64回応用物理学会学術講演会講演予稿集. No.3. 1311 (2003)

    • Related Report
      2003 Annual Research Report

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Published: 2003-04-01   Modified: 2016-04-21  

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