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225nm UV light emitting BN at the room temperature prepared by laser-plasma synergetic deposition

Research Project

Project/Area Number 15360039
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied physics, general
Research InstitutionNational Institute for Materials Science

Principal Investigator

KOMATSU Shojiro  National Institute for Materials Science, Advanced materials Laboratory, Senior Researcher, 物質研究所, 主席研究員 (70343845)

Co-Investigator(Kenkyū-buntansha) OKADA Katsuyuki  National Institute for Materials Science, Advanced materials Laboratory, Senior Researcher, 物質研究所, 主幹研究員 (10354432)
Project Period (FY) 2003 – 2005
Project Status Completed (Fiscal Year 2005)
Budget Amount *help
¥15,000,000 (Direct Cost: ¥15,000,000)
Fiscal Year 2005: ¥3,200,000 (Direct Cost: ¥3,200,000)
Fiscal Year 2004: ¥3,200,000 (Direct Cost: ¥3,200,000)
Fiscal Year 2003: ¥8,600,000 (Direct Cost: ¥8,600,000)
KeywordsBN / UV light emission / photoluminescence / cathodeluminescence / electron field emission / Plasma / laser / self-organization / 窒化ホウ素 / ナノ構造 / 熱力学的臨界点 / 非線形力学系
Research Abstract

(1)We have carried out the research on a new type of BN, namely, sp^3-bonded 5H-BN, which was originally found at the NIMS for the first time and reported in 1999. This BN is prepared in the forms of powder as well as films by synergetic deposition methods using plasma and laser. This BN shows a UV emission sharply at 225nm and broadly at 300nm. The former band is observed only in the powder samples most, probably due to the high crystallinity. On the other hand, film samples show only the 300 nm broad band. It is noteworthy that both bands are excited at room temperatures. To achieve the final goal of application of these samples to UV light emission devices, it is important to understand the growth mechanism and the relationship between the structural characteristics and the UV properties.
(2)Since the structural properties originate from the growth dynamics, we invented a new in-situ observation method of the growth rates of films by utilizing photoluminescence (PL) from the samples … More excited by the processing excimer laser. We could find the transition of the growth mode from initial fibrous growth to the micro-cone formation at the mid stage by scanning electron microscopy and the corresponding change of the growth rate was clearly seen in the in-situ PL observation.
(3)As for the growth of powder samples, we observed transmission electron microscopic (TEM) images corresponding to some different stages of the growth. Based on them, we concluded the existence of a precursor which is most likely in the supercritical fluid state of BN. We built a growth model using the mathematics of 2-dimensional nonlinear dynamical system, and by which we showed a synergetic effect of plasma and laser to induce the nonequilibrium phase formation of sp^3-bonded 5H-BN.
(4)As for the film growth mechanism, based on experimental observations, we could demonstrate that it was a photochemically-activated growth where precursor radicals were supplied from a plasma. We build a model where forced-oscillatory photochemical reactions compete with surface diffusion of the precursor radicals. By the model, we could explain the temperature-dependent uniform-fractal transition of the micro-cone distribution observed on Si(100) substrates, and the origin of the observed fractal morphology.
(5)The lifetime of the UV emission was short enough to indicate that this material is a direct-transition semiconductor and applicable to future solid state UV LED. Less

Report

(4 results)
  • 2005 Annual Research Report   Final Research Report Summary
  • 2004 Annual Research Report
  • 2003 Annual Research Report
  • Research Products

    (41 results)

All 2006 2005 2004 Other

All Journal Article (29 results) Patent(Industrial Property Rights) (6 results) Publications (6 results)

  • [Journal Article] Fractal growth of sp3-bonded 5H-BN micro cones by plasma-assisted laser chemical vapor deposition2006

    • Author(s)
      S.Komatsu, K.Kazami, H.Tanaka, Y.Moriyoshi, M.Shiratani, K.Okada
    • Journal Title

      J. Appl. Phys. (in press)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] BN micro-fibers grown by plasma-assisted laser chemical vapor deposition without a metal catalyst2006

    • Author(s)
      S.Komatsu, K.Kazami, H.Tanaka, Y.Shimizu, Y.Moriyosi, M.Shiratani
    • Journal Title

      Appl. Phys. Lett. 88

      Pages: 151914-151914

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] 窒化ホウ素の新世界 : sp3-結合性5H-BNのレーザー・プラズマ複合化プロセスによる成長機構及紫外発光・電界電子放出特性2006

    • Author(s)
      小松正二郎
    • Journal Title

      表面技術 57(1)

      Pages: 9-9

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Fractal growth of sp3-bonded 5H-BN micro cones by plasma-assisted laser chemical vapor deposition2006

    • Author(s)
      S.Komatsu, K.Kazami, H.Tanaka, Y.Moriyoshi, M.Shiratani, K.Okada
    • Journal Title

      J.Appl.Phys. (in press)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] BN micro-fibers grown by plasma-assisted laser chemical vapor deposition without a metal catalyst2006

    • Author(s)
      S.Komatsu, K.Kazami, H.Tanaka, Y.Shimizu, Y.Moriyoshi, M.Shiratan
    • Journal Title

      Appl.Phys.Lett. 88

      Pages: 151914-151914

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] BN micro-fibers grown by plasma-assisted laser chemial vapor deposition without a metal catalyst2006

    • Author(s)
      S.Komatsu, D.Kazami, N.Tanaka, Y.Shimizu, Y.Moriyoshi, M.Shiratani, K.Okada
    • Journal Title

      Appl.Phys.Lett. (accepted for publication)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Electron field emission as a cooperative phenomenon : studies in sp^3-bonded 5H-BN micro-cone emitters prepared by plasma-assisted laser CVD2006

    • Author(s)
      S.Komatsu, D.Kazami, N.Tanaka, Y.Moriyoshi, M.Shiratani, T.Chikyo, K.Okada
    • Journal Title

      Proceedings of the ICRP-6/SPP-23 1・1

      Pages: 503-503

    • Related Report
      2005 Annual Research Report
  • [Journal Article] レーザ・プラズマ複合化プロセスによる新規-機能性窒化ホウ素(sp3-結合性5H-BN) : その機能性と生成機構2005

    • Author(s)
      小松正二郎
    • Journal Title

      New Diamond 21(1)

      Pages: 5-5

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] ナノチューブを超えるFED向け新型窒化ホウ素電子エミッター薄膜2005

    • Author(s)
      小松正二郎
    • Journal Title

      工業材料 53(5)

      Pages: 41-41

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] 新型BNミクロコーンエミッター : 次世代高精細ディスプレイ向き高性能電界電子放出材料2005

    • Author(s)
      小松正二郎
    • Journal Title

      月刊ディスプレイ 11(10)

      Pages: 62-62

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Recent developments in BN ; the synthesis and properties of sp3-bonded 5H-BN2005

    • Author(s)
      S.Komatsu
    • Journal Title

      Hyoumen Gijyutu (in Japanese) 57

      Pages: 9-9

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Novel functional BN prepared by laser-plasma hybrid process2005

    • Author(s)
      S.Komatsu
    • Journal Title

      New Diamond (in Japanese) 21

      Pages: 5-5

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] The elecron emitter films made of new BN for FED2005

    • Author(s)
      S.Komatsu
    • Journal Title

      Kougyou Zairyou (in Japanese) 53

      Pages: 41-41

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] New BN microcone emitter films : an FE material for the next generation displays.2005

    • Author(s)
      S.Komatsu
    • Journal Title

      Gekkan Display (in Japanese) 11

      Pages: 62-62

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] ナノチューブを超えるFED向け電子材料 新型窒化ホウ素電子エミッター薄膜2005

    • Author(s)
      小松正二郎
    • Journal Title

      工業材料 53巻5号

      Pages: 41-41

    • Related Report
      2005 Annual Research Report
  • [Journal Article] The model for the electron field emission from 5H-BN micro-cones2005

    • Author(s)
      S.Komatsu
    • Journal Title

      The 16^<th> Symposium of the MRS Japan Program and Abstracts 1・1

      Pages: 179-179

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Novel sp^3-bonded BN films of 5H-polytypic crystal structure prepared by laser-assisted plasma CVD and their excellent electron field emission2005

    • Author(s)
      S.Komatsu, K.Okada, D.Kazami, A.Okudo, Y.Moriyoshi, M.Shiratani
    • Journal Title

      15^<th> internat.Colloquium on Plasma processes Abstract booklets 1・1

      Pages: 20-20

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 新型BNミクロコーンエミッター:次世代高精細ディスプレイ向き高性能電界電子放出材料2005

    • Author(s)
      小松正二郎
    • Journal Title

      月刊ディスプレイ 11巻10号

      Pages: 62-62

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Fractal-arrangements of electron field emitters in sp3-bonded 5H-BN films prepared by pulsed laser assisted plasma CVD2005

    • Author(s)
      S.Komatsu, D.Kazami, A.Okudo, Y.Moriyoshi, K.Okada
    • Journal Title

      Proceedings of plasmas sience 2005/the 22^<nd> symposium on plasma processing

      Pages: 588-589

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Electron field emission from self-organized micro emitters of sp3-bonded 5H-BN films and its applications2005

    • Author(s)
      S.Komatsu, D.Kazami, A.Okudo, Y.Moriyoshi, K.Okada
    • Journal Title

      Proceedings of plasma science 2005/the 22^<nd> symposium on plasma processing

      Pages: 657-658

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Synthesis of new type BN by using synchronously pulsed-laser and modulated-reactive plasma : its new properties and applications2005

    • Author(s)
      S.Komatsu
    • Journal Title

      25^<th> annual meeting of laser society of Japan Digest of technical papers(invited paper)

      Pages: 102-103

    • NAID

      130004465620

    • Related Report
      2004 Annual Research Report
  • [Journal Article] レーザ・プラズマ複合化プロセスによる新規-機能性窒化ホウ素(sp3-結合性5H-BN):その機能性と生成機構2005

    • Author(s)
      小松正二郎
    • Journal Title

      New Diamond 21(1)

      Pages: 5-11

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Electron field emission from self-organized micro-emitters of sp3-bonded 5H boron nitoride with very high current density at low electric field2004

    • Author(s)
      S.Komatsu, A.Okudo, D.Kazami, D.Golberg, Y.Li, Y.Moriyoshi, M.Shiratani, K.Okada
    • Journal Title

      J. Phys. Chem. B 108

      Pages: 5182-5182

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Condensation of sp3-bonded boron nitride through a highly nonequilibrium fluid state2004

    • Author(s)
      S.Komatsu, K.Kurashima, Y.Shimizu, Y.Moriyoshi, M.Shiratani, K.Okada
    • Journal Title

      J. Phys. Chem. B 108

      Pages: 205-205

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] ナノチューブを超えるFED向け電子材料 新型窒化ホウ素薄膜の開発2004

    • Author(s)
      小松正二郎
    • Journal Title

      レーザ加工学会誌 11(3)

      Pages: 34-34

    • NAID

      40006623858

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Electron field emission from self-organized micro-emitters of sp3-bonded 5H boron nitride with very high current density at low electric field2004

    • Author(s)
      S.Komatsu, A.Okudo, D.Kazami, D.Golberg, Y.Li, Y.Moriyoshi, M.Shiratani, K.Okada
    • Journal Title

      J.Phys.Chem.B 108

      Pages: 5182-5182

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Condensation of sp3-bonded boron nitride through a highly nonequilibrium fluid state2004

    • Author(s)
      S.Komatsu, K.Kurashima, Y.Shimizu, Y.Moriyoshi, M.Shiratani, K.Okda
    • Journal Title

      J.Phys.Chem.B 108

      Pages: 205-205

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] new type of BN films for FED that exceeds CNT2004

    • Author(s)
      S.Komatsu
    • Journal Title

      Laser Kakou Gakkai-shi (in Japanase) 11

      Pages: 34-34

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Self-organized elecctron field emitters made of sp3-bonded 5H-BN nanostructures : its synthesis and applications to device electronic2004

    • Author(s)
      S.Komatsu
    • Journal Title

      Technical report of IEICE(invited paper) 104(519)

      Pages: 23-24

    • Related Report
      2004 Annual Research Report
  • [Patent(Industrial Property Rights)] 電界電子放出を利する自己造形的表面形状を有するsp3結合性窒化ホウ素薄膜とその製造方法及びその用途2006

    • Inventor(s)
      小松正二郎 他
    • Industrial Property Rights Holder
      物資・材料研究機構
    • Acquisition Date
      2006-03-24
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 窒化ホウ素薄膜エミッターとその製造方法、及び該窒化ホウ素薄膜エミッターを使用する電子放出方法2005

    • Inventor(s)
      小松正二郎 他
    • Industrial Property Rights Holder
      物資・材料研究機構
    • Acquisition Date
      2005-12-21
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 一般式;BNで示され、六方晶系5H型ないしは6H型多形構造を有し、紫外域で発光するsp3結合型窒化ホウ素とその製造方法、及びこれを利用した機能性材料2004

    • Inventor(s)
      小松正二郎 他
    • Industrial Property Rights Holder
      物資・材料研究機構
    • Acquisition Date
      2004-09-24
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 窒化ホウ素膜表面に先端の尖った結晶が自己相似性フラクタル模様を呈して電子放出に適った密度で二次元分布してなる窒化ホウ素薄膜エミッターとその製造方法2004

    • Inventor(s)
      小松正二郎 他
    • Industrial Property Rights Holder
      物資・材料研究機構
    • Industrial Property Number
      2004-371693
    • Filing Date
      2004-12-22
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 自己造形性電子放出BN薄膜を使用してなる発光・表示デバイスとその製作方法2004

    • Inventor(s)
      小松正二郎 他
    • Industrial Property Rights Holder
      物資・材料研究機構
    • Industrial Property Number
      2004-361150
    • Filing Date
      2004-12-14
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 電界電子放出特性を利する自己造形的表面形状を有するsp3結合性窒化ホウ素薄膜2004

    • Inventor(s)
      小松正二郎
    • Industrial Property Rights Holder
      物質・材料研究機構
    • Filing Date
      2004-08-27
    • Related Report
      2004 Annual Research Report
  • [Publications] K.Okada, K.Kimoto, S.Komatsu, S.Matsumoto: "Sp^2 bonding distributions in nanocrystalline diamond particles by electron energy loss spectroscopy"J.Appl.Phys.. 93(5). 3120-3122 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Okada, S.Komatsu, S.Matsumoto: "Ion energy distributions and the density of CH_3 radicals in a low pressure inductively coupled CH_4/H_2 plasma used for nanocrystalline diamond deposition"J.Vac.Sci.Technol. A21(6). 1988-1992 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Okada, K.Kimoto, S.Komatsu, S.Matsumoto: "Preparation of nanocrystalline diamond in a low pressure inductively coupled plasma"Trans.MRS-Japan. 印刷中. (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Okada, S.Komatsu, S.Matsumoto: "Characteristics of Broad-Band Frequency Low Pressure Inductively Coupled Plasma Used for Nanostructured Carbon Deposition"Proceedings of 16th Inter.Symp.Plasma Chemistry. CD-ROM. (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] S.Komatsu, K.Kurashima, Y.Shimizu, Y.Moriyoshi, M.Shiratani, K.Okada: "Condensation of sp^3-bonded boron nitride through a highly nonequilibrium fluid state"Journal of Physical Chemistry B. 108(1). 205-211 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] S.Komatsu, A.Okudo, D.Golberg, D.Kazami, Y.Li, Y.Moriyoshi, M.Shiratani, K.Okada: "Electron field emission from self-organized micro-emitters of sp^3-bonded 5H boron nitride with very high current density at low electric field"Journal of Physical Chemistry B. To be published. (2004)

    • Related Report
      2003 Annual Research Report

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Published: 2003-04-01   Modified: 2016-04-21  

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