| Project/Area Number |
15360063
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Tohoku University |
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Principal Investigator |
GAO Wei Tohoku University, Graduate School of Engineering, Associate Professor, 大学院・工学研究科, 助教授 (70270816)
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| Co-Investigator(Kenkyū-buntansha) |
KIYONO Satoshi Tohoku University, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 (40005468)
SHIMIZU Hiroki Tohoku University, Graduate School of Engineering, Research Associate, 大学院・工学研究科, 助手 (50323043)
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| Project Period (FY) |
2003 – 2004
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| Project Status |
Completed (Fiscal Year 2004)
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| Budget Amount *help |
¥13,400,000 (Direct Cost: ¥13,400,000)
Fiscal Year 2004: ¥5,000,000 (Direct Cost: ¥5,000,000)
Fiscal Year 2003: ¥8,400,000 (Direct Cost: ¥8,400,000)
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| Keywords | Nanometrology / Nanofabrication / Micro-structured surface / Three-dimensional / measurement force / Stiffness / Force sensor / fast tool servo |
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| Research Abstract |
A nanomachining instrument with nanometrology function for precision nanofabrication of large area micro-structured metrology surfaces. A single crystal diamond tool for diamond turning is mounted on one end of a hollow-type piezoelectric (PZT) ring actuator with a stroke of 10μm. The other end of the PZT is attached to a compact piezoelectric force sensor. The diamond tool is actuated by the PZT for nanomachining of micro-structures over a large area surface through employing the fast-tool-servo technique. The depth-of-cut, which is the displacement of the PZT actuator, is measured accurately by a capacitance-type displacement probe with a resolution of 1nm situated inside the PZT and used as the servo signal for the fast tool servo machining. The instrument is designed to be stiff enough for nanomachining on a diamond turning machine. The same instrument can also be used for nanometrology of the machined surface through utilizing the force sensor output. To measure the surface profil
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e, the diamond tool is scanned along the surface and the contact force is detected by the force sensor. During the scanning, the diamond tool is servo controlled by the PZT so that the tool tip is kept contact with the surface with a constant contact force based on the force sensor output. The displacement of the PZT, which corresponds to the profile height of the machined surface, can thus be obtained from the capacitance sensor inside the PZT. To reduce the contact force so that the surface will not be damaged in the measurement process, the diamond tool is oscillated with a small amplitude of 1nm and a certain frequency of 500 Hz to modulate the output of the force sensor into an AC signal for high sensitivity detection with a lock-in amplifier. Experimental results have shown that the machined surface can be measured with a small contact force on the order of 0.01 mN. The frequency bandwidths in the thrust direction and the cutting direction have been evaluated to be 2.5 kHz and 1 kHz, respectively. A large area sinusoidal metrology surface with amplitude of 15 nm and wavelength of 100 μm has successfully been fabricated on a optical glass plate. Less
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