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Development of Picometer Positioning System and its Application for Ultraprecision Machining

Research Project

Project/Area Number 15360071
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionTottori University

Principal Investigator

MIZUMOTO Hiroshi  Tottori University, Fac. of Engineering, Professor, 工学部, 教授 (80108795)

Co-Investigator(Kenkyū-buntansha) ARII Shiro  Tottori University, Fac. of Engineering, Ass. Professor, 工学部, 助教授 (80222751)
Project Period (FY) 2003 – 2005
Project Status Completed (Fiscal Year 2005)
Budget Amount *help
¥15,400,000 (Direct Cost: ¥15,400,000)
Fiscal Year 2005: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 2004: ¥4,900,000 (Direct Cost: ¥4,900,000)
Fiscal Year 2003: ¥9,600,000 (Direct Cost: ¥9,600,000)
KeywordsPositioning / Machine Tool / Nanotechnology / Aerostatic bearing / Ultraprecision Machining / Friction Drive / Active Control / 超精密計測
Research Abstract

For ultraprecision machine tool of the next generation, a tri-mode picometer positioning system is proposed. The positioning system has three positioning modes, namely coarse, fine and ultra-fine mode. The coarse mode for nanometer positioning with long stroke is executed by a twist-roller friction drive (TFD) mechanism and an ordinary AC servomotor. The fine mode for sub-nanometer positioning is also executed by the twist-roller friction drive mechanism, however the mechanism is driven by a piezoelectric actuator. The ultra-fine mode using an active inherent restrictor (AIR) incorporated into the aerostatic guideway realizes the picometer positioning.
Two tri-mode positioning units are arranged in perpendicular, and each mode of the positioning system is controlled by a DSP (motion controller) with a microcomputer. Measured positioning resolution in the coarse mode is 5nm and that in the fine mode is 0.2nm. In the ultra-fine mode, current positioning resolution is 25pm.
For improving the performance of the tri-mode picometer positioning system, we devise an active aerostatic coupling, where the air film thickness on the thrust bearing surface is controlled by the active inherent restrictors (AIRs) and the thrust stiffness of the bearing can be infinite. Therefore, while isolating the lateral vibration from the TFD, the active aerostatic coupling operates as a rigid coupling. The active coupling can also be used as a fine positioning device.
To conclude our research, we expect that the picometer order of positioning resolution will be realized in due course, and the technological knowledge obtained in this research will contribute to the improvement of the positioning technology for ultraprecision machine tools.

Report

(4 results)
  • 2005 Annual Research Report   Final Research Report Summary
  • 2004 Annual Research Report
  • 2003 Annual Research Report
  • Research Products

    (17 results)

All 2006 2005

All Journal Article (16 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Proposal of Active Aerostatic Coupling for Ultraprecision Positioning System2006

    • Author(s)
      H.MIZUMOTO, Y.YABUTA, S.ARII, Y.TAZOE, Y.KAMI
    • Journal Title

      Proceedings of 6th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen) Vol.1(in press)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] An Improvement of Control Tactics for Pico-positioning System2006

    • Author(s)
      T.FUJITA, H.MIZUMOTO, S.ARII, Y.TAZOE
    • Journal Title

      Proceedings of 8th International Conference on Progress of Machining Technology (ICPMT2006) Vol.1(in press)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] An improvement of control tactics for Pico-positioning System2006

    • Author(s)
      T.FUJITA, H.MIZUMOTO, S.ARII, Y.TAZOE
    • Journal Title

      Proceedings of 8th International Conference on Progress of Machining Technology (ICPMT2006) Vol.1(in press)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Proposal of Active Aerostatic Coupling for Ultraprecision Positioning System2006

    • Author(s)
      H.MIZUMOTO, Y.YABUTA, S.ARII, Y.TAZOE, Y.KAMI
    • Journal Title

      Proceedings of 6th international conference of euspen Vol.1(in press)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] An improvement of control tactics for Pico-positioning System2006

    • Author(s)
      T.FUJITA, H.MIZUMOTO, S.ARII, Y.TAZOE
    • Journal Title

      Proceedings of international conference of ICPMT 2006 Vol.1(in press)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 2軸-3モード超精密位置決めシステムの開発2005

    • Author(s)
      水本 洋, 田添洋一
    • Journal Title

      先端加工 23巻1号

      Pages: 63-69

    • NAID

      40016179017

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] A Tow-axis Tri-mode Ultraprecision Positioning System for Picometer Positioning2005

    • Author(s)
      H.MIZUMOTO, Y.YABUTA, S.ARII, Y.TAZOE, Y.KAMI
    • Journal Title

      Proceedings of 5th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen) Vol.2

      Pages: 495-498

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] A Novel Picometer Positioning System for Machine Tools and Measuring Machines2005

    • Author(s)
      H.MIZUMOTO, Y.YABUTA, S.ARII, Y.TAZOE, Y.KAMI
    • Journal Title

      Proceedings of International Conference on Control, Automation and Systems (ICCAS2005) Vol.1

      Pages: 123-128

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] A Picometer Positioning System using Active Aerostatic Guideway2005

    • Author(s)
      H.MIZUMOTO, Y.YABUTA, S.ARII, Y.TAZOE, Y.KAMI
    • Journal Title

      Proceedings of International Conference on Leading Edge Manufacturing in 21st (LEM21) Vol.1

      Pages: 1009-1014

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] A Two-axis Tri-mode Picometer Positioning System2005

    • Author(s)
      H.MIZUMOTO, Y.TAZOE
    • Journal Title

      J.of the Japan Society of Advanced Producing Technology (in Japanese) Vol.23, No.1

      Pages: 63-69

    • NAID

      40016179017

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] A Two-axis Tri-mode Ultraprecision Positioning System for Picometer Positioning2005

    • Author(s)
      H.MIZUMOTO, Y.YABUTA, S.ARII, Y.TAZOE, Y.KAMI
    • Journal Title

      Proceedings of 5^<th> International Conference of the European Society for Precision Engineering and Nanotechnology (euspen) Vol.2

      Pages: 495-498

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] A Novel Picometer Positioning System for machine Tools and Measuring Machines2005

    • Author(s)
      H.MIZUMOTO, Y.YABUTA, S.ARII, Y.TAZOE, Y.KAMI
    • Journal Title

      Proceedings of International Conference on Control, Automation and Systems (ICCAS2005) Vol.1

      Pages: 123-128

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] A Picometer Positioning System using Active Aerostatic Guideway2005

    • Author(s)
      H.MIZUMOTO, Y.YABUTA, S.ARII, Y.TAZOE, Y.KAMI
    • Journal Title

      Proceedings of Proceedings of International Conference on Leading Edge Manufacturing in 21^<st> Vol.1(LEM21)

      Pages: 1009-1014

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] 2軸-3モード超精密位置決めシステムの開発2005

    • Author(s)
      水本洋, 田添洋一
    • Journal Title

      先端加工 23巻1号(印刷予定)

    • NAID

      40016179017

    • Related Report
      2004 Annual Research Report
  • [Journal Article] A Two-axis Tri-mode Ultraprecision Positioning System for Picometer Positioning2005

    • Author(s)
      H.MIZUMOTO, Y.YABUTA, S.ARII, Y.TAZOE, Y.KAMI
    • Journal Title

      Proceedings of 5^<th> international conference of euspen Vol.1(in press)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] A Novel Picometer Positioning System for Machine Tools and Measuring Machines2005

    • Author(s)
      H.MIZUMOTO, Y.YABUTA, S.ARII, Y.TAZOE, Y.KAMI
    • Journal Title

      Proceedings of ICCAS 2005 (in press)

    • Related Report
      2004 Annual Research Report
  • [Patent(Industrial Property Rights)] 静圧継手2005

    • Inventor(s)
      水本 洋
    • Industrial Property Rights Holder
      鳥取大学不二越
    • Industrial Property Number
      2005-257643
    • Filing Date
      2005-08-21
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Annual Research Report 2005 Final Research Report Summary

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Published: 2003-04-01   Modified: 2016-04-21  

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