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Development of X-Ray Multilayer Aspheric Mirrors by Replication Technology and Nano-Structure Analysis

Research Project

Project/Area Number 15360075
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionChubu University

Principal Investigator

NAMBA Yoshiharu  Chubu University, Dept.of Mech.Engg., Professor, 工学部, 教授 (40029129)

Co-Investigator(Kenkyū-buntansha) OHNISHI Naoyuki  Chubu University, Dept.of Mech.Engg., Professor, 工学部, 教授 (60201977)
Project Period (FY) 2003 – 2005
Project Status Completed (Fiscal Year 2005)
Budget Amount *help
¥15,300,000 (Direct Cost: ¥15,300,000)
Fiscal Year 2005: ¥2,900,000 (Direct Cost: ¥2,900,000)
Fiscal Year 2004: ¥3,200,000 (Direct Cost: ¥3,200,000)
Fiscal Year 2003: ¥9,200,000 (Direct Cost: ¥9,200,000)
KeywordsAspheric molding die / Replicated mirror / Pt / C multilayer / Separation / Transmission electron microscopy / Atomic force microscopy / X-ray optics / Single point diamond turning / 超高圧透過型電子顕微鏡 / 斜入射X線望遠鏡 / X線多層膜の設計 / 無電解ニッケル非球面金型
Research Abstract

After depositing Pt/C multilayer on a glass cylinder, we glued aluminum foil on it and cured in a vacuum chamber with an infrared heater. Pt/C multilayer mirrors on aluminum foils were separated from the glass cylinder and were used in a hard X-ray telescope as replicated thin foil mirrors. The telescope was lunched several times in U.S.A.by balloons for observing hard X-ray objects in a space.
The float-polished electroless nickel plane was coated with Pt/C multilayer and glued with a flat grass plate using epoxy resin, and we could separate the Pt/C multilayer from the electroless nickel plane perfectly. The surface roughness was 0.14nm rms on the electroless nickel plane and 0.16nm rms on the Pt/C multilayer mirror, respectively.
The high resolution transmission electron microscopy (TEM) sectional observation of Pt/C multilayer coated on a silicon wafer cleared that C layer showed an amorphous structure and Pt layer showed an oriented polycrystalline nano structure which causes the surface roughness at the interface between two layers. The interface roughness is increased with the decrease of layer spacing less than 3nm in the Pt/C multilayer.
By adding an intermediate Ti layer between the electroless nickel aspheric die and the first Pt layer, we could separate the Pt/C multilayer from the electroless nickel die and obtain Pt/C multilayer replicated internal mirrors for hard X-ray application.
This technology was used in making a gold plated aspheric inner mirror of 6 mm in diameter and we obtained aspheric X-ray replicated collecting mirrors of 72nm in shape accuracy and 1nm Ra in surface roughness. Then we made a soft X-ray microscope of less than 50nm in image resolution.

Report

(4 results)
  • 2005 Annual Research Report   Final Research Report Summary
  • 2004 Annual Research Report
  • 2003 Annual Research Report
  • Research Products

    (59 results)

All 2006 2005 2004 2003 Other

All Journal Article (53 results) Publications (6 results)

  • [Journal Article] High Resolution Transmission Electron Microscopy Study of Calcium Fluoride Single Crystal (111) Surfaces Processed by Ultraprecision Machining2006

    • Author(s)
      N.Ohnishi
    • Journal Title

      Mater. Trans. 47, 2

      Pages: 267-270

    • NAID

      10017282839

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Compact soft x-ray transmission microscopy with sub-50 nm spatial resolution2006

    • Author(s)
      K.W.Kim
    • Journal Title

      Phys. Med. Biol. 51

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Precision Machining of Electroless Nickel Mandrel and Fabrication of Replicated Mirrors for a Soft Z-Ray Microscope2006

    • Author(s)
      K.S.Chon
    • Journal Title

      JSME International Journal, Series C 49, 1

      Pages: 56-62

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Optimization of a Wolter type I mirror for a soft X-ray microscope2006

    • Author(s)
      K.S.Chon
    • Journal Title

      Prec. Eng. 30, 2

      Pages: 223-230

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Wolter type I x-ray focusing mirror using multilayer coatings2006

    • Author(s)
      K.S.Chon
    • Journal Title

      Appl. Opt. 45, 19

      Pages: 1-8

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] High Resolution Transmission Electron Microscopy Study of Calcium Fluoride Single Crystal (111) Surfaces Processed by Ultraprecision Machining2006

    • Author(s)
      N.Ohnishi, Y.Namba, M.Saeki
    • Journal Title

      Mater.Trans. 47,2

      Pages: 267-270

    • NAID

      10017282839

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Compact soft x-ray transmission microscopy with sub-50 nm spatial resolution2006

    • Author(s)
      K.W.Kim, Y.Kwon, K.Y.Nam, J.H.Lim, K.G.Kim, K.S.Chon, B.H.Kim, D.E.Kim, J.G.Kim, B.N.Ahn, H.J.Shin, S.Rah, K.H.Kim, J.S.Chae, D.G.Gweon, D.W.Kang, S.H.Kang, J.Y.Min, K.Choi, S.E.Yoon, E.A.Kim, Y.Namba, K.H.Yoon
    • Journal Title

      Phys.Med.Biol. 51

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Precision Machining of Electroless Nickel Mandrel and Fabrication of Replicated Mirrors for a Soft X-Ray Microscope2006

    • Author(s)
      Kwon Su Chon, Yoshiharu Namba, Kwon-Ha Yoon
    • Journal Title

      JSME International Journal, Series C 49,1

      Pages: 56-62

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Optimization of a Wolter type I mirror for a soft X-ray microscope2006

    • Author(s)
      Kwon Su Chon, Yoshiharu Namba, Kwon-Ha Yoon
    • Journal Title

      Prec.Eng. 30,2

      Pages: 223-230

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Wolter type I x-ray focusing mirror using multilayer coatings2006

    • Author(s)
      Kwon Su Chon, Yoshiharu Namba, Kwon-Ha Yoon
    • Journal Title

      Appl.Opt. 45,19

      Pages: 1-8

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] High Resolution Transmission Electron Microscopy Study of Calcium Fluoride Single Crystal (111) Surfaces Processed by Ultraprecision Machining2006

    • Author(s)
      N.Ohnishi
    • Journal Title

      Mater.Trans. 47,2

      Pages: 267-270

    • NAID

      10017282839

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Compact soft x-ray transmission microscopy with sub-50 nm spatial resolution2006

    • Author(s)
      K.W.Kim
    • Journal Title

      Phys.Med.Biol. 51

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Precision Machining of Electroless Nickel Mandrel and Fabrication of Replicated Mirrors for a Soft X-Ray Microscope2006

    • Author(s)
      K.S.Chon
    • Journal Title

      JSME International Journal, Series C 49,1

      Pages: 56-62

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Optimization of a Wolter type I mirror for a soft X-ray Microscope2006

    • Author(s)
      K.S.Chon
    • Journal Title

      Prec.Eng. 30,2

      Pages: 223-230

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Nanoscale structures on ultra-precision machined fluorite surfaces2005

    • Author(s)
      S.Gritschneder
    • Journal Title

      Nanotechnology 16, 6

      Pages: 883-887

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Surfaces of Calcium Fluoride Single Crystals Ground with an Ultra-Precision Surface Grinder2005

    • Author(s)
      Y.Namba
    • Journal Title

      Annals of the CIRP 54, 1

      Pages: 503-506

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Measurements of Spindle Parameters and Tool Positioning on a Diamond Turning Machine to Nanometer Resolution2005

    • Author(s)
      S.F.Soares
    • Journal Title

      Proc. 3rd International Conference on Leading Edge Manufacturing in 21st Century (LEM21)

      Pages: 999-1002

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Precision Machining of Electroless Nickel Mandrels and Fabrication of Replicated Mirrors for Soft X-Ray Microscopes2005

    • Author(s)
      K.S.Chon
    • Journal Title

      Proc. 3rd International Conference on Leading Edge Manufacturing in 21st Century (LEM21)

      Pages: 1047-1050

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Nanoscale structures on ultra-precision machined fluorite surfaces2005

    • Author(s)
      S.Gritschneder, Y.Namba, M.Reichling
    • Journal Title

      Nanotechnology 16,6

      Pages: 883-887

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Surfaces of Calcium Fluoride Single Crystals Ground with an Ultra-Precision Surface Grinder2005

    • Author(s)
      Y.Namba, T.Yoshida, S.Yoshida, K.Yoshida
    • Journal Title

      Annals of the CIRP 54,1

      Pages: 503-506

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Measurements of Spindle Parameters and Tool Positioning on a Diamond Turning Machine to Nanometer Resolution2005

    • Author(s)
      S.Soares, A.Fushiki, Y.Namba
    • Journal Title

      Proc.3rd International Conference on Leading Edge Manufacturing in 21st Century (LEM21)

      Pages: 999-1002

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Precision Machining of Electroless Nickel Mandrels and Fabrication of Replicated Mirrors for Soft X-Ray Microscopes2005

    • Author(s)
      Kwon Su Chon, Y.Namba, Kwon-Ha Yoon
    • Journal Title

      Proc.3rd International Conference on Leading Edge Manufacturing in 21st Century (LEM21)

      Pages: 1047-1050

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Nonoscale structure on ultra-precision machined fluorite surfaces2005

    • Author(s)
      S.Gritschneder
    • Journal Title

      Nanotechnology 16,6

      Pages: 883-887

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Surfaces of Calcium Fluoride Single Crystals Ground with an Ultra-Precision Surface Grinder2005

    • Author(s)
      Y.Namba
    • Journal Title

      Annals of the CIRP 54,1

      Pages: 503-506

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 多層膜スーパーミラー硬X線望遠鏡2004

    • Author(s)
      山下廣順
    • Journal Title

      日本物理学会誌 59、2

      Pages: 77-83

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Experimental Quantization of Surface and Sub-Surface Structure in Float Polished Crystalline Quartz2004

    • Author(s)
      S.F.Soares
    • Journal Title

      JSME International Journal, Series C 47, 1

      Pages: 93-97

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Ultra-Precision Float Polishing of calcium Fluoride Single Crystals for Deep Ultra Violet Applications2004

    • Author(s)
      Y.Namba
    • Journal Title

      Annals of the CIRP 53, 1

      Pages: 459-462

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Laser-Induced Bulk Damage of Various Types of Silica Glasses at 532 and 355 nm2004

    • Author(s)
      N.Kuzuu
    • Journal Title

      Jpn. J. Appl. Phys. 43, 5A

      Pages: 2547-2548

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Laser-Induced Bulk Damage of Various Types of Silica Glasses at 266 nm2004

    • Author(s)
      N.Kuzuu
    • Journal Title

      Jpn. J. Appl. Phys. 43, 10

      Pages: 7174-7175

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Single-point diamond turning of DAST crystals2004

    • Author(s)
      Y.Namba
    • Journal Title

      Proc. SPIE 5180

      Pages: 55-63

    • NAID

      130004656260

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] HRTEM analysis of Pt/C multilayers2004

    • Author(s)
      N.Ohnishi
    • Journal Title

      Proc. SPIE 5168

      Pages: 508-517

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Upgraded hard x-ray telescope with mutilayer supermirror for the InFOCuS balloon experiment2004

    • Author(s)
      R.Shibata
    • Journal Title

      Proc. SPIE 5488

      Pages: 313-324

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Fabrication of X-Ray Microscope Mirrors2004

    • Author(s)
      K.S.Chon
    • Journal Title

      Proc. ASPE 19^th Annual Meeting

      Pages: 510-513

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Multilayer Supermirror Hard X-ray Telescope2004

    • Author(s)
      K.Yamashita, H.Kunieda, Y.Tawara, Y.Namba
    • Journal Title

      Butsuri 59,2

      Pages: 77-83

    • NAID

      10015430442

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Experimental Quantization of Surface and Sub-Surface Structure in Float Polished Crystalline Quartz2004

    • Author(s)
      S.F.Soares, Y.Namba
    • Journal Title

      JSME International Journal, Series C 47,1

      Pages: 93-97

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Ultra-Precision Float Polishing of Calcium Fluoride Single Crystals for Deep Ultra Violet Applications2004

    • Author(s)
      Y.Namba, N.Ohnishi, S.Yoshida, K.Harada, K.Yoshida
    • Journal Title

      Annals of the CIRP 53,1

      Pages: 459-462

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Laser-Induced Bulk Damage of Various Types of Silica Glasses at 532 and 355 nm2004

    • Author(s)
      N.Kuzuu, K.Yoshida, K.Ochi, Y.Tsuboi, T.Kamimura, H.Yoshida, Y.Namba
    • Journal Title

      Jpn.J.Appl.Phys. 43,5A

      Pages: 2547-2548

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Laser-Induced Bulk Damage of Various Types of Silica Glasses at 266 nm2004

    • Author(s)
      N.Kuzuu, K.Yoshida, K.Ochi, Y.Tsuboi, T.Kamimura, H.Yoshida, Y.Namba
    • Journal Title

      Jpn.J.Appl.Phys. 43,10

      Pages: 7174-7175

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Single-point diamond turning of DAST crystals2004

    • Author(s)
      Y.Namba, M.Tsukahara, A.Fushiki, K.Suizu, H.Ito
    • Journal Title

      Proc.SPIE 5180

      Pages: 55-63

    • NAID

      130004656260

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] HRTEM analysis of Pt/C multilayers2004

    • Author(s)
      N.Ohnishi, Y.Nonomura, Y.Ogasaka, Y.Tawara, Y.Namba, K.Yamashita
    • Journal Title

      Proc.SPIE 5168

      Pages: 508-517

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Upgraded hard x-ray telescope with multilayer supermirror for the InFOCuS balloon experiment2004

    • Author(s)
      R.Shibata, Y.Ogasaka, K.Tamura, A.Furuzawa, Y.Tawara, K.Yamashita, R.Takahashi, M.Sakashita, T.Miyazawa, K.Shimoda, C.Sakai, N.Yamada, M.Naitou, T.Futamura, P.J.Serlemitsos, Y.Soong, K.-W.Chan, T.Okajima, J.Tueller, H.A.Krimm, S.D.Barthelmy, S.M.Owens, H.Kunieda, Y.Namba
    • Journal Title

      Proc.SPIE 5488

      Pages: 313-324

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Fabrication of X-Ray Microscope Mirrors2004

    • Author(s)
      K.S.Chon, Y.Namba
    • Journal Title

      Proc.ASPE 19th Annual Meeting

      Pages: 494-497

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Fabrication and Microstructure Analysis of Pt/C Multilayers for Hard X-Ray Optics2004

    • Author(s)
      Y.Nonomura, N.Ohnishi, Y.Namba, K.Yamashita
    • Journal Title

      Proc.ASPE 19th Annual Meeting

      Pages: 510-513

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Ultra-Precision Float Polishing of Calcium Fluoride Single Crystals for Deep Ultra Violet Applications2004

    • Author(s)
      Y.Namba
    • Journal Title

      Annals of the CIRP 53, 1

      Pages: 459-462

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Upgraded hard x-ray telescope with multilayer supermirror for the InFOCuS balloon experiment2004

    • Author(s)
      R.Shibata
    • Journal Title

      Proc.SPIE 5488

      Pages: 313-324

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Ultra-Precision Float Polishing of Optical Materials2004

    • Author(s)
      Y.Namba
    • Journal Title

      Proc.ASPE 19th Annual Meeting

      Pages: 72-75

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Fabrication of X-Ray Microscope Mirrors2004

    • Author(s)
      K.S.Chon
    • Journal Title

      Proc.ASPE 19th Annual Meeting

      Pages: 494-497

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Fabrication and Microstructure Analysis of Pt/C Multilayers for Hard X-Ray Optics2004

    • Author(s)
      Y.Nonomura
    • Journal Title

      Proc.ASPE 19th Annual Meeting

      Pages: 510-513

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Atomic Structure of Float Polished Surfaces of Calcium Fluoride Single Crystals for Ultra Violet Applications2004

    • Author(s)
      N.Ohnishi
    • Journal Title

      Proc.ASPE 19th Annual Meeting

      Pages: 733-736

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Optical Surface Generation of Organic Nonlinear Crystals by Single-Point Diamond Turning2003

    • Author(s)
      Y.Namba
    • Journal Title

      Annals of the CIRP 52, 1

      Pages: 475-478

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] 加工学・加工機器概論2003

    • Author(s)
      難波義治
    • Journal Title

      日本機械学会誌 106, 1017

      Pages: 630-630

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Optical Surface Generation of Organic Nonlinear Crystals by Single-Point Diamond Turning2003

    • Author(s)
      Y.Namba, M.Saeki
    • Journal Title

      Annals of the CIRP 52,1

      Pages: 475-478

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Over view of modern machining and machine tools2003

    • Author(s)
      Y.Namba
    • Journal Title

      J.JSME 106,1017

      Pages: 630-630

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Publications] Y.Namba: "Optical Surface Generation of Organic Nonlinear Crystals by Single-Point Diamond Turning"Annals of the CIRP. 52, 1. 475-478 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 難波義治: "加工学・加工機器概論"日本機械学会誌. 106, 1017. 630-630 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 山下廣順: "多層膜スーパーミラー硬X線望遠鏡"物理学会誌. 59, 2. 77-83 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] S.F.Soares: "Experimental Quantization of Surface and Sub-Surface Structure in Float Polished Crystalline Quartz"JSME Int'l Journal. 47, 1. 93-97 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] Y.Namba: "Single-point diamond turning of DAST crystals"Proc.of SPIE. 5180. 55-63 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] N.Ohnishi: "HRTEM analysis of Pt/C multilayers"Proc.of SPIE. 5168. 508-517 (2004)

    • Related Report
      2003 Annual Research Report

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Published: 2003-04-01   Modified: 2016-04-21  

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