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Development of integrated optic pressure sensors with high sensitivity and high withstanding pressure for tsunami detection

Research Project

Project/Area Number 15360186
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionNiigata University

Principal Investigator

OHKAWA Masashi  Niigata University, Faculty of Engineering, Professor, 工学部, 教授 (90213644)

Co-Investigator(Kenkyū-buntansha) SATO Takashi  Niigata University, Faculty of Engineering, Professor, 工学部, 教授 (10143752)
Project Period (FY) 2003 – 2004
Project Status Completed (Fiscal Year 2004)
Budget Amount *help
¥6,000,000 (Direct Cost: ¥6,000,000)
Fiscal Year 2004: ¥1,500,000 (Direct Cost: ¥1,500,000)
Fiscal Year 2003: ¥4,500,000 (Direct Cost: ¥4,500,000)
KeywordsPressure sensor / Integrated optics / Glass waveguide / Diaphragm / 光導波路 / 高耐圧 / 高感度 / 津波検出
Research Abstract

The proposed sensor is based on a conventional integrated optic pressure sensor using intermodal interference, with an added semi-closed space with a small hole under the bottom side of the diaphragm. By the addition of this semi-closed space, the sensor, unlike conventional sensors, can withstand high static pressure. When there is a sudden change in ambient pressure, pressure within the semi-closed space cannot quickly adjust due to the small hole that restricts fluid flow. So, pressure difference is induced on the diaphragm for a short while. Thus, the sensor shows a response only to changes in pressure, not to static pressure.
In the first year of this research project, we examined the step response of the sensor, that is, the output characteristics for sudden pressure change. The diaphragm dimensions of the fabricated sensor were 14mm×14mm×0.22mm, and the volume of the semi-closed space was 14mm×14mm×1.8mm. The sectional area of a small rectangular hole was 93μm×25μm. In this exper … More iment, the pressure in a 30cm×28cm×30cm closed box, in which the fabricated sensor was placed, was suddenly increased by 0.78 kPa. Due to the pressure change, the output intensity decreased by approximately 20% of the initial intensity level. Approximately 1.4 sec after the step-like change in pressure, output intensity returned to the initial level.
In the second year, it was found from the theoretical analysis that the duration of the induced pressure difference is proportional to the V/A ratio between the volume of the semi-closed space and the sectional area of the small hole, and proportional to the square root of the initial pressure difference. So, the relationship between the duration and the sectional area of the small hole was examined experimentally. The radii of the circular holes were 20μm,25μm, and 40μm. The measured duration of the induced pressure difference was approximately 2 sec when the ambient pressure was suddenly changed by 0.7 kPa, although the duration must be dependent on the hole radius according to the theoretical results. It is attributed to pressure leak from the closed box in which the sensor was placed. Less

Report

(3 results)
  • 2004 Annual Research Report   Final Research Report Summary
  • 2003 Annual Research Report
  • Research Products

    (15 results)

All 2005 2004 2003 Other

All Journal Article (14 results) Publications (1 results)

  • [Journal Article] Guided-wave optical pressure sensor responding only to changing pressure2005

    • Author(s)
      Y.Endo
    • Journal Title

      Proceedings of SPIE 5728

      Pages: 309-316

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] An optical microphone using a silicon-based guided-wave optical pressure sensor2005

    • Author(s)
      H.Nikkuni
    • Journal Title

      Proceedings of SPIE 5728

      Pages: 317-324

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Guided-wave optical pressure sensor responding only to changing pressure2005

    • Author(s)
      Y.Endo
    • Journal Title

      Proceedings of SPIE Vol.5728

      Pages: 309-316

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] An optical microphone using a silicon-based guided-wave optical pressure sensor2005

    • Author(s)
      H.Nikkuni
    • Journal Title

      Proceedings of SPIE Vol.5728

      Pages: 317-324

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Guided-wave optical pressure sensor responding only to changing pressure2005

    • Author(s)
      Y.Endo
    • Journal Title

      Proceedings of SPIE 5728(印刷中)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] An optical microphone using a silicon-based guided-wave optical pressure sensor2005

    • Author(s)
      H.Nikkuni
    • Journal Title

      Proceedings of SPIE 5728(印刷中)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Guided-wave optical pressure sensor with sensitivity for sudden pressure change only2004

    • Author(s)
      Y.Endo
    • Journal Title

      EM-NANO 2004

      Pages: 228-228

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] 瞬時圧力変化に感度を有する光導波型圧力センサ2004

    • Author(s)
      遠藤 義純
    • Journal Title

      平成16年度電子情報通信学会信越支部大会講演論文集

      Pages: 113-114

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Annual Research Report 2004 Final Research Report Summary
  • [Journal Article] Guided-wave optical pressure sensor with sensitivity for step-like pressure change2004

    • Author(s)
      Y.Endo
    • Journal Title

      2004 Convention Record, The Shin-Etsu Chapter of the Institute of Electronics, Information and Communication Engineers

      Pages: 113-114

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Guided-wave optical pressure sensor with sensitivity for sudden pressure change only2004

    • Author(s)
      Y.Endo
    • Journal Title

      2004 International symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies

      Pages: 228-228

    • Related Report
      2004 Annual Research Report
  • [Journal Article] シリコン基板光集積回路圧力センサを用いたカテーテル先端型圧センサプロトタイプの作成2003

    • Author(s)
      獨古 修一
    • Journal Title

      平成15年度電子情報通信学会信越支部大会講演論文集

      Pages: 201-202

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] リモートセンシング用光集積回路圧力センサに関する基礎研究2003

    • Author(s)
      岡本 裕美
    • Journal Title

      平成15年度電子情報通信学会信越支部大会講演論文集

      Pages: 203-204

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Development of an integrated optic pressure sensor incorporated into a small plastic tube in place of a catheter2003

    • Author(s)
      S.Dokko
    • Journal Title

      2003 Convention Record, The Shin-Etsu Chapter of the Institute of Electronics, Information and Communication Engineers

      Pages: 201-202

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Integrated optic pressure sensors for remote sensing2003

    • Author(s)
      Y.Okamoto
    • Journal Title

      2003 Convention Record, The Shin-Etsu Chapter of the Institute of Electronics, Information and Communication Engineers

      Pages: 203-204

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Publications] 岡本裕美: "リモートセンシング用光集積回路圧力センサに関する基礎研究"平成15年度電子情報通信学会信越支部大会講演論文集. 203-203 (2003)

    • Related Report
      2003 Annual Research Report

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Published: 2003-04-01   Modified: 2016-04-21  

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