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Super Highly Sensitive Non visible Imaging Devices Using Vacuum Nano Technology

Research Project

Project/Area Number 15360190
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionToyohashi University of Technology

Principal Investigator

SAWADA Kazuaki  Toyohashi University of Technology, Faculty of Engineering, Associate Professor, 工学部, 助教授 (40235461)

Co-Investigator(Kenkyū-buntansha) ISHIDA Makoto  Toyohashi University of Technology, Faculty of Engineering, Professor, 工学部, 教授 (30126924)
TAKAO Hidekuni  Toyohashi University of Technology, Faculty of Engineering, Associate Professor, 工学部, 助手 (40314091)
Project Period (FY) 2003 – 2005
Project Status Completed (Fiscal Year 2005)
Budget Amount *help
¥13,200,000 (Direct Cost: ¥13,200,000)
Fiscal Year 2005: ¥2,200,000 (Direct Cost: ¥2,200,000)
Fiscal Year 2004: ¥3,700,000 (Direct Cost: ¥3,700,000)
Fiscal Year 2003: ¥7,300,000 (Direct Cost: ¥7,300,000)
Keywordsvacuum / nano technology / Pyroelectric sensor / field emitter / image sensor / photocathode / silicon emitter / ferroelectric material / 焦電センサ
Research Abstract

The porous of this project was realization of a visible photocathode with high sensitivity, and infrared photocathode which can detect above 2 micron wavelength.
A new type photodetector called "photosensitive floating field emitter, PFFE" has been proposed. The PFFE was combined the n-type cone-shaped triode field emitter with Si p-n photodiode area. The device was fabricated on a thinned silicon substrate to irradiate from the backside. A p-n photodiode was constructed in a field emitter, and the n+ region was separated by p+ regions to detect two- dimensional light distributions. The quantum efficiency reached to 70%. The efficiency will increase to provide non refractive film on the surface.
An infrared light sensor based on principle of a field emission from Pb(Zr,Ti)O3 (PZT) thin plate has been studied. The sensitivity is able to be improved to perform a surface polish, and the emission efficiency of polished emission plane increased to twice than that of the unpolished emission plane. On a low infrared light irradiation condition, a noise level of emission current was very large. To use a Micro-Channel-Plate (MCP) device, the amplification of the emission electrons was carried out. The emission electrons could be multiplied 40 times, the emission electron was clearly observed under low irradiation conditions. The electron emission type infrared light sensor is also useful to detect an infrared light on low irradiation condition.

Report

(4 results)
  • 2005 Annual Research Report   Final Research Report Summary
  • 2004 Annual Research Report
  • 2003 Annual Research Report
  • Research Products

    (59 results)

All 2006 2005 2004 2003 Other

All Journal Article (53 results) Patent(Industrial Property Rights) (1 results) Publications (5 results)

  • [Journal Article] electrical Characteristics of Epitaxial γ-Al_2O_3/Si for Quantum Tunneling Device2006

    • Author(s)
      Jang-Seop Kim, Mohammad Shahjahan, Halima Khatun Mosammat, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      Japanese Journal of Applied Physics Vol.45, No.6A (in press)

    • NAID

      10018148817

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Electrical Characteristics of Epitaxial y-Al_2O_3/Si for Quantum Tunneling Device2006

    • Author(s)
      Jang-Seop Kim, Mohammad Shahjahan, Halima Khatun Mosammat, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      Japanese Journal of Applied Physics Vol.45, No.6A(in press)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Electrical charactersitics of epitaxial γ-Al2O3/Si for quantum tunneling device2006

    • Author(s)
      Jang-Seop Kim, Kazuaki Sawada, Makoto Ishida, Mohammad Shahjahan
    • Journal Title

      Jpn.J.Appl.Phys (Publish)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] ferroelectric properties of sol-gel delivered epitaxial Pb(Zr_x,Ti_1-x)O_3 thin films on Si using epitaxial γ-Al_2O_3 Layers2005

    • Author(s)
      Daisuke Akai, Mikako Yokawa, Keisuke Hirabayashi, Koji Matsushita, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      Applied Physics Letters Vol.86, No.20

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] fabrication of Si field emitter array in local vacuum package2005

    • Author(s)
      Daiji Noda, Masanori Hatakeyama, Masanori Kyogoku, Kimiya Ikusima, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      Journal of Vacuum Science & technology B Vol.23, No.2

      Pages: 864-867

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] HIGHLY SENSITIVE ELECTRON-EMISSION-TYPE INFRARED SENSOR USING A SINGLE CRYSTALLINE LiNbO_32005

    • Author(s)
      Daisuke Takamuro, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS'05)

      Pages: 581-584

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Electrical Characteristics of epitaxial γ-Al_2O_3 Films for Quantum device2005

    • Author(s)
      Jang-Seop Kim, Kazuaki Sawada, Makoto Ishida, Mohammad Shahjahan
    • Journal Title

      International semiconductor Device Research symposium

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] 強誘電体を用いた電子放出型焦電赤外線センシングデバイスの高感度化2005

    • Author(s)
      高室 大介, 高尾 英邦, 澤田 和明, 石田 誠
    • Journal Title

      第2回赤外放射の応用関連学会

    • NAID

      10015516999

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] 赤外線照射による単結晶LiNbO_3からの電子放出現象を用いた赤外イメージャ2005

    • Author(s)
      高室大介, 澤田和明, 石田 誠
    • Journal Title

      カーボンナノチューブ-FED プロジェクト公開シンポジウム, 第2回真空ナノエレクトロニクスシンポジウム[招待講演]

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Fabrication of evaporation type getter in local vacuum package2005

    • Author(s)
      Masanori Hatakeyama, Kazuaki Sawada, Daiji Noda, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      The Japan Society of Applied Physics (The 66rd Fall meeting) No.2

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Electron Emission Characteristics from LiNbO_3 Thin Plate by Infrared Light Irradiation2005

    • Author(s)
      Shoji Saito, Daisuke Takamuro, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      The Japan Society of Applied Physics (The 66rd Fall meeting) No.2

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Ferroelectric properties of sol-gel delivered epitaxial Pb(Zrx,Til-X)O3 thin films on Si using epitaxial y-Al_2O_3 Layers2005

    • Author(s)
      Daisuke Akai, Mikako Yokawa, Keisuke Hirabayashi, Koji Matsushita, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      Applied Physics Letters Vol.86, No.20

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Fabrication of Si field emitter array in local vacuum package2005

    • Author(s)
      Daiji Noda, Masanori Hatakeyama, Masanori Kyogoku, Kimiya Ikushima, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      Journal of Vacuum Science & Technology B Vol.23, No.2

      Pages: 864-867

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] HIGHLY SENSITIVE ELECTRON-EMISSION-TYPE INFRARED SENSOR USING A SINGLE CRYSTALLINE LiNbO_32005

    • Author(s)
      Daisuke Takamuro, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS'05), Seoul, Korea, 05-09, June

      Pages: 581-584

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Electrical Characteristics of Epitaxial y-Al_2O_3 Films for Quantum Device2005

    • Author(s)
      Jang-Seop Kim, Kazuaki Sawada, Makoto Ishida, Mohammad Shahjahan
    • Journal Title

      International Semiconductor Device Research Symposium, Maryland, USA, 7-9 December

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Fabrication of Si field emitter array in local vacuum package2005

    • Author(s)
      Daiji Noda, Masanori Hatakeyama, Masanori Kyogoku, Kimiya Ikusima, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      Journal of Vacuum Science & Technology B Vol.23, No.2

      Pages: 864-867

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Electrical Characteristics of Epitaxial γ-Al2O3 Films for Quantum Device2005

    • Author(s)
      Jang-Seop Kim, Kazuaki Sawada, Makoto Ishida, Mohammad Shahjahan
    • Journal Title

      International Semiconductor Device Research Symposium

    • Related Report
      2005 Annual Research Report
  • [Journal Article] A Si nano-micro-wire array on a Si(111) substrate and field emission device applications2004

    • Author(s)
      Makoto Ishida, Takeshi Kawano, Masato Futagawa, Yuji Arai, Hidekuni Takao, Kazuaki Sawada
    • Journal Title

      Superlattices and Microstructures 34

      Pages: 567-575

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Planar metal-insulator-semiconductor type field emitter fabricated on an epitaxial Al/Al_2O_3/Si(111) structure2004

    • Author(s)
      Jang-Seop Kim, Tomohiro Hoshi, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      Journal of Vacuum Science & Technology B Vol.22, No.3

      Pages: 1358-1361

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Electron emission characteristic from a single crystalline ferroelectric material by an infrared light irradiation2004

    • Author(s)
      Daisuke Takamuro, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      Journal of Vacuum Science & Technology B Vol.22, No.3

      Pages: 1396-1401

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Improvement of an infrared light sensitivity in PZT photosensitive field emitter2004

    • Author(s)
      Daisuke Takamuro, Hidekuni Takao, Kazuaki Sawada, Makoto
    • Journal Title

      SENSORS AND ACTUATORS A 114

      Pages: 230-235

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Epitaxial Growth of Pt(001) Thin Films on Si Substrates using an Epitaxial γ-Al_2O_3(001) Buffer Layer2004

    • Author(s)
      Daisuke Akai, Keisuke Hirabayashi, Mikako Yokawa, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      Journal of Crystal Growth 264

      Pages: 463-467

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] FABRICATION AND CHARACTERIZATION OF A PIXEL LEVER MICRO VACUUM PACKAGE FOR INFARED IMAGER2004

    • Author(s)
      Kimiya Ikushima, Asako Baba, Masanori Kyogoku, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      The 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2004)

      Pages: 520-523

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Fabrication of Si field emitter array in local vacuum package2004

    • Author(s)
      Daiji Noda, Masanori Hatakeyama, Masanori Kyogoku, Kimiya Ikushima, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      17th International Vacuum Nanoelectronics Conference

      Pages: 292-293

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] 微小電子源を用いた背面入射型フォトカソードの製作と高性能化2004

    • Author(s)
      丹田 喜雄, 小野 貴史, 澤田 和明, 高尾 英邦, 石田 誠
    • Journal Title

      映像情報メディア学会 情報センシング研究会

    • NAID

      10014032874

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Fabrication of local high vacuum package s for smart Field Emitter device2004

    • Author(s)
      Masanori Kyogoku, Masanori Hatakeyama, Kimiya Ikushima, Kazuaki Sawada, Hidekuni Takao, Makoto Ishida
    • Journal Title

      The Japan Society of Applied Physics (The 51st Spring meeting) No.2

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Improvement of Electron-Emission-Type Infrared Sensor Using Ferroelectric Materials2004

    • Author(s)
      Daisuke Takamuro, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      PROCEEDINGS OF THE 21_ST SENSOR SYMPOSIUM

      Pages: 343-346

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Improvement of an infrared light sensitivity in PZT photosensitive field emitter2004

    • Author(s)
      Daisuke Takamuro, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      SENSORS AND ACTUATORS A 114

      Pages: 230-235

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Epitaxial Growth of Pt(001) Thin Films on Si Substrates using an Epitaxial y-Al2O3(001) Buffer Layer2004

    • Author(s)
      Daisuke Akai, Keisuke Hirabayashi, Mikako Yokawa, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      Journal of Crystal Growth Vol.264, No.1-3

      Pages: 463-467

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] FABRICATION AND CHARACTERIZATION OF A PIXEL LEVEL MICRO VACUUM PACKAGE FOR INFARED IMAGER2004

    • Author(s)
      Kimiya Ikushima, Asako Baba, Masanori Kyogoku, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      The 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2004), Maastricht, Holland, January 25-29

      Pages: 520-523

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Fabrication of Si field emitter array in local vacuum Package2004

    • Author(s)
      Daiji Noda, Masanori Hatakeyama, Masanori Kyogoku, Kimiya Ikushima, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      17th International Vacuum Nanoelectronics Conference, Ray and Maria Stata Center, Massachusetts Institute of Technology, Cambridge, MA, USA, 11-16 July

      Pages: 292-293

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Improvement of an infrared light sensitivity in PZT photo sensitive field emitter2004

    • Author(s)
      D.Takamuro, H.Takao, K.Sawada, M.Ishida
    • Journal Title

      SENSORS AND ACTUATORS A 114

      Pages: 230-235

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Planar metal-insulator-semiconductor type field emitter fabricated on an epitaxial Al/Al_2O_3/Si(111) structure2004

    • Author(s)
      J.S.Kim, T.Hoshi, K.Sawada, M.Ishida
    • Journal Title

      Journal of Vacuum Science & Technology B 22(3)

      Pages: 1358-1361

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Electron emission characteristic from a single crystalline ferroelectric material by an infrared light irradiation2004

    • Author(s)
      D.Takamuro, H.Takao, K.Sawada, M.Ishida
    • Journal Title

      Journal of Vacuum Science & Technology B 22(3)

      Pages: 1396-1401

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Epitaxial Growth of Pt(001) Thin Films on Si Substrates using an Epitaxial _Y-Al_2O_3(001) Buffer Layer2004

    • Author(s)
      D.Akai, K.Hirabayashi, M.Yokawa, K.Sawada, M.Ishida
    • Journal Title

      Journal of Crystal Growth 264(1-3)

      Pages: 463-467

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Fabrication of Epitaxial PZT/Pt/_Y-Al_2O_3/Si Structure and its Ferroelectric Characterisics2004

    • Author(s)
      D.Akai, K.Sawada, M.Ishida et al.
    • Journal Title

      2004 MRS Fall Meeting, Boston, MA, USA

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Fabrication of Si Field Emitter Array in Local Vacuum Package2004

    • Author(s)
      D.Noda, K.Sawada, M.Ishida
    • Journal Title

      Technocal Digest of the 17th International Vacuum Nanoelectronics Conference (Cambridge, MA,)

      Pages: 292-293

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Back-irradiation Type Photo-Detector Arrays Using Field Emitter Device2003

    • Author(s)
      Takashi Ono, Kazuaki Sawada, Y.C Jung, Yoshitaka Moriyasu, Hidekuni Takao, Makoto Ishida
    • Journal Title

      IEICE Transactions on Electronics Vol.E86-C, No.9

      Pages: 1805-1809

    • NAID

      110003214736

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Electron Emission Characteristic from pb(Zr,Ti)O_3 Thin Plate by Infrared Light Irradiation2003

    • Author(s)
      Daisuke Takamuro, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      Japanese Journal of Applied Vol.42 Part.1, No.9A

      Pages: 5741-5746

    • NAID

      10011614898

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Fabrication of Pb(Zr, Ti)O_3 films on epitaxial γ-Al_2O_3(001)/Si(001) substrates2003

    • Author(s)
      Daisuke Akai, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      Journal of Crystal Growth 259

      Pages: 90-94

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] IMPROVEMENT OF INFRARED LIGHTS SENSITIVITY ON PZT EMITTER2003

    • Author(s)
      Daisuke Takamuro, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      The 12th International Conference on Solid-State Sensors and Actuators (TRANSDUCERS'03) No.2

      Pages: 1622-1625

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Electron Emission Characteristics from A Single Crystalline Ferroelectric Material by An Infrared Light Irradiation2003

    • Author(s)
      Daisuke Takamuro, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      The 16th International Vacuum Microelectronics Conference (IVMC2003)

      Pages: 69-70

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Planar MIS Type Field emitter Fabricated on Epitaxial Al/Al_2O_3/Si(111) structure2003

    • Author(s)
      Jang-Seop Kim, Tomohiro Hoshi, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      The 16th International Vacuum Microelectronics Conference (IVMC2003)

      Pages: 269-270

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Novel Photo-Cathodes Using Vacuum Nano-Technology2003

    • Author(s)
      Kazuaki Sawada, Daisuke Takamuro, Hidekuni Takao, Makoto Ishida
    • Journal Title

      International Sensor Conference 2003 [ISC 2003] (Invited)

      Pages: 90-91

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] 強誘電体直接電界放出型赤外イメージセンサの原理2003

    • Author(s)
      冨田勝彦, 高室大介, 高尾英邦, 澤田和明, 石田 誠
    • Journal Title

      電子情報通信学会技術研究報告

    • NAID

      10019078431

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Electron emission of Characteristics from pyroelectric materials by infrared irraditation2003

    • Author(s)
      Daisuke Takamuro, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      The Japan Society of Applied Physics (The 64th Fall Meeting)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Back-irradiation Type Photo-Detector Arrays Using Field Emitter Device2003

    • Author(s)
      Takashi Ono, Kazukai Sawada, Y.C Jung, Yoshitaka Moriyasu, Hidekuni Takao, Makoto Ishida
    • Journal Title

      IEICE Transactions on Electronics Vol.E86-C, No.9

      Pages: 1805-1809

    • NAID

      110003214736

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Electron Emission Characteristic from pb(Zr,Ti)O_3 Thin Plate by Infrared Light Irradiation2003

    • Author(s)
      Daisuke Takamuro, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      Japanese Journal of Applied Physics Vol.42 Part.1, No.9A

      Pages: 5741-5746

    • NAID

      10011614898

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Fabrication of Pb(Zr,Ti)O_3 films on epitaxial y-Al_2O_3(001)/Si(001) substrates2003

    • Author(s)
      Daisuke Akai, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      Journal of Crystal Growth 259

      Pages: 90-94

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] IMPROVEMENT OF INFRARED LIGHTS SENSITIVITY ON PZT EMITTER2003

    • Author(s)
      Daisuke Takamuro, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      The 12th International Conference on Solid-State Sensors and Actuators (TRANSDUCERS'03), Boston Massachusetts, USA, 8-12 June No.2

      Pages: 1622-1625

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Electron Emission Characteristics from A Single Crystalline Ferroelectric Material by An Infrared Light Irradiation2003

    • Author(s)
      Daisuke Takamuro, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      The 16th International Vacuum Microelectronics Conference (IVMC2003), Osaka, Japan, 7-11 July

      Pages: 69-70

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Planar MIS Type Field Emitter Fabricated on Epitaxial Al/Al_2O_3/Si(11l) structure2003

    • Author(s)
      Jang-Seop Kim, Tomohiro Hoshi, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      The 16th International Vacuum Microelectronics Conference (IVMC2003), Osaka, Japan, 7-11 July

      Pages: 269-270

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Novel Photo-Cathodes Using Vacuum Nano-Technology2003

    • Author(s)
      Kazuaki Sawada, Daisuke Takamuro, Hidekuni Takao, Makoto Ishida
    • Journal Title

      International Sensor Conference 2003 [ISC 2003] (Invited), Daegu EXCO, Korea, 14-15 November

      Pages: 90-91

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Patent(Industrial Property Rights)] HIGHLY SENSITIVE, PYROELECTRIC INFRARED SENSING METHOD AND APPARATUS2003

    • Inventor(s)
      Kazuaki SAWADA, Makoto ISHIDA
    • Industrial Property Rights Holder
      独立行政法人 科学技術振興機構
    • Filing Date
      2003-03-10
    • Acquisition Date
      2006-04-11
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Publications] D.Takamuro, H.Takao, K.Sawada, M.Ishida: "Improvement of an Infrared Light Sensitivity in PZT Photosensitive Field Emitter"Transducers'03, Digest of Technical Papers, Massachusetts, USA. VOL.2. 1622-1625 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Daisuke Akai, Kazuaki Sawada, Makoto Ishida: "Fabrication of Pb(Zr,Ti)O_3 Films on Epitaxial γ-Al_2O_3(001)/Si(001) Substrates"Journal of Crystal Growth. Vol.259, No.1-2. 90-94 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Daisuke Akai, Keisuke Hirabayashi, Mikako Yokawa, Kazuaki Sawada, Makoto Ishida: "Epitaxial Growth of Pt(001) Thin Films on Si Substrates using an Epitaxial γ-Al_2O_3(001) Buffer Layer"Journal of Crystal Growth. Vol.264, No.1-3. 463-467 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] D.Takamuro, H.Takao, K.Sawada, M.Ishida: "Electron Emission Characteristics from A Single Crystalline Ferroelectric Material by An Infrared Light Irradiation"Technical Digest of the 1 6th International Vacuum Microelectronics Conference (Osaka, Japan). 69-70 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] D.Takamuro, H.Takao, K.Sawada, M.Ishida: "Electron Emission Characteristic from Pb(Zr,Ti)O3 Thin Plate by Infrared Light Irradiation"Jpn.J.Appl.Phys.. Vol.42, No.9A. 5741-5746 (2003)

    • Related Report
      2003 Annual Research Report

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Published: 2003-04-01   Modified: 2016-04-21  

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