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Development of Tera-bit class high speed nonvolatile magentic memories

Research Project

Project/Area Number 15360192
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionKYUSHU UNIVERSITY

Principal Investigator

MATSUYAMA Kimihide  Kyushu University, Faculty of Information Science and Electrical Engineering, Professor, 大学院・システム情報科学研究院, 教授 (80165919)

Co-Investigator(Kenkyū-buntansha) NOZAKI Yukio  Kyushu University, Faculty of Information Science and Electrical Engineering, Research associate, 大学院・システム情報科学研究院, 助手 (30304760)
Project Period (FY) 2003 – 2005
Project Status Completed (Fiscal Year 2005)
Budget Amount *help
¥10,300,000 (Direct Cost: ¥10,300,000)
Fiscal Year 2005: ¥1,400,000 (Direct Cost: ¥1,400,000)
Fiscal Year 2004: ¥1,900,000 (Direct Cost: ¥1,900,000)
Fiscal Year 2003: ¥7,000,000 (Direct Cost: ¥7,000,000)
KeywordsSpintronics / Nonvolatile memory / Field programmable logic device / MRAMs / 不揮発メモリ
Research Abstract

Experimental and numerical studies on a novel device concept of sharing function have been performed to realize a magnetic nonvolatile memory with terabit density and high access speed. In the proposed cell structure, data storage layer for bit information carrier and switching layer for data writing are vertically integrated through magnetic coupling.
1)Two different functional integrating mechanism of dipole coupling and inter-layer exchange coupling have been compared by numerical simulation, and it was found that the exchange coupling exhibits superior torque transmitting from switching to storage layer in the fine cell.
2)A cross-point (CP) memory cell with the minimum pattern size of 200 nm was fabricated by a self-aligned process, where a magnetic mulilayer strip was structured with an over-laid conductor pattern used as a mask for dry-etching. Well defined dipole coupling was confirmed from magnetoresistive measurements for the fabricated CP cell, which leads to the drastic reduc … More tion of the magnetization reversal field.
3)Thermally assisted magnetization reversal was performed for an exchange coupled bi-layer cell, consisted of soft magnetic CoFe and hard magnetic TbFe layer. The current induced local Joule heating decreases the magnetic anisotropy in the TbFe layer, which results in the marked decrease of the magnetization reversal field of the bi-layer. A high speed operation was also confirmed with the pulsed laser heating.
4)Numerical analysis for the magnetization process at high temperature was carried out with the newly developed program introducing a macro scale model. Detailed mechanism of thermally assisted magnetization reversal in the exchange coupled bi-layer has been clarified. Magnetic properties, the layer structure and the inter-layer exchange coupling stiffness have been optimized to realize the superior functional sharing performance. Practical data stability and low power memory operation have been confirmed for the optimized perpendicularly magnetized cell with an order of 10 nm lateral dimension. Less

Report

(4 results)
  • 2005 Annual Research Report   Final Research Report Summary
  • 2004 Annual Research Report
  • 2003 Annual Research Report
  • Research Products

    (49 results)

All 2005 2004 2003 Other

All Journal Article (41 results) Patent(Industrial Property Rights) (3 results) Publications (5 results)

  • [Journal Article] CPP transport properties of polycrystalline Fe_3O_4 thin films psuttered on Cu underlayers2005

    • Author(s)
      F.Qin et al.
    • Journal Title

      Journal of Applied Physics 97・10

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Numerical simulation of write-operation in MRAM memory cell array with magnetostatic interaction2005

    • Author(s)
      Y.Nozaki et al.
    • Journal Title

      Journal of Applied Physics 97・10

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Annual Research Report 2005 Final Research Report Summary
  • [Journal Article] Fabrication nad Characterization of Ferromagnetic Tunnel Junction with Transition Metal Oxides2005

    • Author(s)
      F.Qin et al.
    • Journal Title

      Research Reports on ISEE of Kyushu Univ. 10・1

      Pages: 63-66

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Thickness dependence of interlayer fringe field coupling in sub micron NiFe/Cu multilayered pillars2005

    • Author(s)
      M.Zhang et al.
    • Journal Title

      IEEE Transactions on Magnetics 41・10

      Pages: 2583-2585

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Reconfigurable ferromagnetic resonance properties in nanostructured multilayers2005

    • Author(s)
      M.Zhang et al.
    • Journal Title

      Journal of Applied Physics (印刷中)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] CPP transport properties of polycrystalline Fe_3O_4 thin films sputtered on Cu underlayers2005

    • Author(s)
      F.Qin et al.
    • Journal Title

      Journal of Applied Physics Vol.97,No.10

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Numerical simulation of write-operation in MRAM memory cell array with magnetostatic interaction2005

    • Author(s)
      Y.Nozaki et al.
    • Journal Title

      Journal of Applied Physics Vol.97,No.10

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Fabrication and Characterization of Ferromagnetic Tunnel Junction with Transition Metal Oxides2005

    • Author(s)
      F.qin et al.
    • Journal Title

      Research Reports on ISEE of Kyushu Univ. Vol.10,No.1

      Pages: 63-66

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Thickness dependence of interlayer fringe field coupling in sub micron NiFe/Cu multilayered pillars2005

    • Author(s)
      M.Zhang et al.
    • Journal Title

      IEEE Transaction on Magnetics Vol.41,No.10

      Pages: 2583-2585

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] CPP transport properties of polycrystalline Fe_3O_4 thin films sputtered on Cu underlayers.2005

    • Author(s)
      F.Qin et al.
    • Journal Title

      Journal of Applied Physics 97・10

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Fabrication nad Characterization of Ferromagnetic Tunnel Junction with Transition Metal Oxides.2005

    • Author(s)
      F.Qin et al.
    • Journal Title

      Research Reports on ISEE of Kyushu Univ. 10・1

      Pages: 63-66

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Thickness dependence of interlayer fringe field coupling in sub micron NiFe/Cu multilayered pillars.2005

    • Author(s)
      M.Zhang et al.
    • Journal Title

      IEEE Transactions on Magnetics 41・10

      Pages: 2583-2585

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Reconfigurable ferromagnetic resonance properties in nanostructured multilayers.2005

    • Author(s)
      M.Zhang et al.
    • Journal Title

      Journal of Applied Physics (印刷中)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] CPP transport properties of polycrystalline Fe_3O_4 thin films sputtered on Cu underlayers2005

    • Author(s)
      F.Qin et al.
    • Journal Title

      Journal of Applied Physics (印刷中)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Magnetic and Electric Properties of Fe_3O_4 Thin Films Sputtered on Metallic Underlayer2004

    • Author(s)
      F.Qin et al.
    • Journal Title

      IEICE Transactions on Electronics E87-C・2

      Pages: 189-192

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary 2004 Annual Research Report
  • [Journal Article] Effect of matallic under-layer on structural and magnetic properties of sputtered Fe_3O_4 films2004

    • Author(s)
      F.Qin et al.
    • Journal Title

      Journal of Magnetism and Magnetic Materials 272-276

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Effect of magnetostatic fringe field coupling on magnetic properties of nano-structured single domain particle arrays2004

    • Author(s)
      H.Oishi et al.
    • Journal Title

      Journal of Magnetism and Magnetic Materials 272-276

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary 2004 Annual Research Report
  • [Journal Article] Thermal stability of Co_90Pt_10 islands with relief-structured samples2004

    • Author(s)
      Y.Nozaki et al.
    • Journal Title

      Journal of Magnetism and Magnetic Materials 272-276

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Controlling of spin orientation in a pseudo spin valve MRAM cell with pulsed conductor currents2004

    • Author(s)
      J.Kikuchi et al.
    • Journal Title

      Journal of Magnetism and Magnetic Materials 272-276

      Pages: 1895-1897

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary 2004 Annual Research Report
  • [Journal Article] Electrically Induced Conductivity Switching in Sputtered Fe_3O_4 Thin Film2004

    • Author(s)
      F.Qin et al.
    • Journal Title

      Research Reports on ISEE of Kyushu Univ. 9・2

      Pages: 85-88

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Magnetic and Electric Properties of Fe_3O_4 Thin Films Sputtered on Metallic Underlayer2004

    • Author(s)
      F.Qin et al.
    • Journal Title

      IEICE Transactions on Electronics Vol.E87-C, No.2

      Pages: 189-192

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Effect of metallic under-layer on structural and magnetic properties of sputtered Fe_3O_4 films2004

    • Author(s)
      F.Qin et al.
    • Journal Title

      Journal of Magnetism and Magnetic Materials Vol.272-276

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Effect of magnetostatic fringe field coupling on magnetic properties of nano-structured single domain particle arrays2004

    • Author(s)
      H.Oishi et al.
    • Journal Title

      Journal of Magnetism and Magnetic Materials Vol.272-276

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Thermal stability of Co_<90>Pt_<10>islands with relief-structured samples2004

    • Author(s)
      Y.Nozaki et al.
    • Journal Title

      Journal of Magnetism and Magnetic Materials Vol.272-276

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Controlling of spin orientation in a pseudo spin valve MRAM cell with pulsed conductor currents2004

    • Author(s)
      J.Kikuchi et al.
    • Journal Title

      Journal of Magnetism and Magnetic Materials Vol.272-276

      Pages: 1895-1897

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Electrically Induced Conductivity Switching in Sputtered Fe_3O_4 Thin Film2004

    • Author(s)
      F.Qin et al.
    • Journal Title

      Research Reports on ISEE of Kyushu Univ. Vol.9,No.2

      Pages: 85-88

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Thermal stability of Co_<90>Pt_<10> islands with relief-structured samples2004

    • Author(s)
      Y.Nozaki et al.
    • Journal Title

      Journal of Magnetism and Magnetic Materials 272-276

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Effect of metallic under-layer on structural and magnetic properties of sputtered Fe_3O_4 films2004

    • Author(s)
      F.Qin et al.
    • Journal Title

      Journal of Magnetism and Magnetic Materials 272-276

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Gbit級MRAM機能動作の計算機シミュレーション2003

    • Author(s)
      Y.Nozaki et al.
    • Journal Title

      電子情報通信学会技術研究報告 102・723

      Pages: 35-40

    • NAID

      110003175303

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] MRAMにおける書き込みの課題への研究開発動向2003

    • Author(s)
      K.Matsuyama et al.
    • Journal Title

      電子技術 45・6

      Pages: 40-43

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Size dependence of switching current and energy barrier in the magnetization reversal of rectangular MRAM cell2003

    • Author(s)
      Y.Nozaki et al.
    • Journal Title

      Journal of Applied Physics 93・10

      Pages: 7295-7297

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Switching behavior of cross contacting CPP-GMR structure fabricated by two-step ion milling technique2003

    • Author(s)
      H.Oishi et al.
    • Journal Title

      Journal of Applied Physics 93・10

      Pages: 7613-7615

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] 極微構造磁性体の物理と不発揮メモリへの応用2003

    • Author(s)
      K.Matsuyama et al.
    • Journal Title

      第31回研究会資料(将来加工技術第136委員会)

      Pages: 1-6

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Non-linear temperature dependence of switching fields in relief-structured Co/Ni_80 Fe_20 particles2003

    • Author(s)
      Y.Nozaki et al.
    • Journal Title

      Journal of Applied Physics 93・11

      Pages: 9182-8185

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Numerical simulation of functional operation in Gbit class MRAMs2003

    • Author(s)
      Y.Nozaki et al.
    • Journal Title

      IEICE Technical Research Report Vol.102,No.723

      Pages: 35-40

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Trend of recent research and development for the problem in write operation of MRAMs2003

    • Author(s)
      K.Matsuyama et al.
    • Journal Title

      Electronics Technology Vol.45,No.6

      Pages: 40-43

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Size dependence of switching current and energy barrier in the magnetization reversal of rectangular MRAM cell2003

    • Author(s)
      Y.Nozaki et al.
    • Journal Title

      Journal of Applied Physics Vol.93,No.10

      Pages: 7295-7297

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Switching behavior of cross contacting CPP-GMR structure fabricated by two-step ion milling technique2003

    • Author(s)
      H.Oishi et al.
    • Journal Title

      Journal of Applied Physics Vol.93,No.10

      Pages: 7613-7615

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Physics on ultla-fine ferromagnet and its application for nonvolatile memory2003

    • Author(s)
      K.Matsuyama et al.
    • Journal Title

      Research report of 136^<th> committee on novel micro-fabrication technique

      Pages: 1-6

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Non-linear temperature dependence of switching fields in relief-structured Co/Ni_<80>Fe_<20> particles2003

    • Author(s)
      Y.Nozaki et al.
    • Journal Title

      Journal of Applied Physics Vol.93,No.11

      Pages: 9182-8185

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Reconfigurable ferromagnetic resonance properties in nanostructured multilayers

    • Author(s)
      M.Zhang et al.
    • Journal Title

      Journal of Applied Physics (in press)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 磁気連想メモリ及び磁気連想メモリからの情報読み出し方法2004

    • Inventor(s)
      松山公秀, 能崎幸雄
    • Industrial Property Rights Holder
      科学技術振興機構
    • Patent Publication Number
      2005-259206
    • Filing Date
      2004-03-09
    • Acquisition Date
      2005-09-22
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 磁気連想メモリ及び磁気連想メモリからの情報読み出し方法2004

    • Inventor(s)
      松山 公秀, 能崎 幸雄
    • Industrial Property Rights Holder
      科学技術振興機構
    • Patent Publication Number
      2005-259206
    • Filing Date
      2004-03-09
    • Acquisition Date
      2005-09-22
    • Related Report
      2005 Annual Research Report
  • [Patent(Industrial Property Rights)] 静磁気結合を利用した磁性ランダムアクセスメモリアル2003

    • Inventor(s)
      松山公秀, 能崎幸雄
    • Industrial Property Rights Holder
      科学技術振興機構
    • Patent Publication Number
      2005-174969
    • Filing Date
      2003-12-05
    • Acquisition Date
      2005-06-30
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Publications] K.Matsuyama: "MRAMにおける書き込みの課題への研究開発動向"電子技術. 45・6. 40-43 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Y.Nozaki et al.: "Gbit級MRAM機能動作の計算機シュミレーション"電子情報通信学会技術研究報告. 102・723. 35-40 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Y.Nozaki et al.: "Size dependence of switching current and energy barrier in the magnetization reversal of rectangular MRAM cell"Journal of Applied Physics. 93・10. 7295-7297 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] H.Oishi et al.: "Switching behavior of cross contacting CPP-GMR structure fabricated by two-step ion milling technique"Journal of Applied Physics. 93・10. 7613-7615 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Y.Nozaki et al.: "Non-linear temperature dependence of switching fields in relief-structured Co/Ni_<80>Fe_<20> particles"Journal of Applied Physics. 93・11. 9182-9185 (2003)

    • Related Report
      2003 Annual Research Report

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Published: 2003-04-01   Modified: 2016-04-21  

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