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Development of ultra high sensitive terahertz imaging system

Research Project

Project/Area Number 15360197
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionNagoya University (2005)
The Institute of Physical and Chemical Research (2003-2004)

Principal Investigator

KAWASE Kodo  Graduate School of Nagoya University, Department of Engineering, professor, 大学院・工学研究科, 教授 (00296013)

Co-Investigator(Kenkyū-buntansha) OTANI Chiko  Kawase Initiative Research Unit, Unit Researcher, 川瀬独立主幹研究ユニット, ユニット研究員 (50281663)
YAMASHITA Masatsugu  Kawase Initiative Research Unit, Special Postdoctral Researcher, 川瀬独立主幹研究ユニット, 基礎科学特別研究員 (10360661)
DOBROIU ADRIAN. C  Kawase Initiative Research Unit, Unit Researcher, 川瀬独立主幹研究ユニット, ユニット研究員 (90391846)
MAKI Kenichiro  Kawase Initiative Research Unit, Unit Researcher, 川瀬独立主幹研究ユニット, ユニット研究員 (50392121)
小川 雄一  独立行政法人理化学研究所, 川瀬独立主幹研究ユニット, ユニット研究員
DOBROIU Adrian  独立行政法人理化学研究所, 川瀬独立主幹研究ユニット, ユニット研究員
森田 康之  独立行政法人理化学研究所, 川瀬独立主幹研究ユニット, ユニット研究員
Project Period (FY) 2003 – 2005
Project Status Completed (Fiscal Year 2005)
Budget Amount *help
¥15,200,000 (Direct Cost: ¥15,200,000)
Fiscal Year 2005: ¥2,600,000 (Direct Cost: ¥2,600,000)
Fiscal Year 2004: ¥6,200,000 (Direct Cost: ¥6,200,000)
Fiscal Year 2003: ¥6,400,000 (Direct Cost: ¥6,400,000)
Keywordsterahertz wave / imaging / STJ / parametric oscillation / spectroscopy / YAGレーザー
Research Abstract

In our project, THz-waves continue to broaden their range of applications as following. The absence of non-destructive inspection techniques for illicit drugs hidden in mail envelopes has resulted in such drugs being freely smuggled across international borders. We have developed a basic technology for THz imaging which allows detection and identification of drugs concealed in envelopes by introducing the component spatial pattern analysis^2. The spatial distribution and the composition of the targets are obtained from THz multispectral transillumination images, using absorption spectra measured with a tunable THz wave source. We further demonstrated a component spatial pattern analysis of chemicals using 2-dimensional electro-optic THz imaging which can capture real-time THz images^3. By changing the optical delay of the pump beam, the CCD camera records time-dependent THz images. The multispectral images and the spectral data set were measured between 0.1 and 1.0 THz ; the chemical composition, the spatial distribution, and the difference in concentration were clearly determined. On the other hand, for inspecting electrical failures in large scale integration circuit (LSI), we developed the laser-THz emission microscope (LTEM), which records the map of THz emission amplitude in a sample upon excitation with fs laser pulses^4. Clear two-dimensional THz-emission images of the IC chip are recorded as the chip is scanned with laser beam. The LTEM images of damaged chips show different patterns from those of normal chips. Also, by modulating the input signal of the IC chip, the signal lines can be traced. These results suggest that the LTEM could become a useful tool for inspecting and monitoring IC quality. As a demonstration, we succeeded in obtaining the THz emission image of a MOSFET sample under zero bias condition.

Report

(4 results)
  • 2005 Annual Research Report   Final Research Report Summary
  • 2004 Annual Research Report
  • 2003 Annual Research Report
  • Research Products

    (25 results)

All 2005 2004 Other

All Journal Article (16 results) Book (2 results) Publications (7 results)

  • [Journal Article] Terahertz parametric sources and imaging applications2005

    • Author(s)
      K.Kawase, Y.Ogawa, H.Minamide, Hiromasa Ito
    • Journal Title

      Semiconductor Science and Technology, 20

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Annual Research Report 2005 Final Research Report Summary
  • [Journal Article] Imaging of large-scale integrated circuits using laser-terahertz emission microscopy2005

    • Author(s)
      M.Yamashita, K.Kawase, C.Otani, T.Kiwa, M.Tonouchi
    • Journal Title

      Optics Express 13

      Pages: 115-120

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Annual Research Report 2005 Final Research Report Summary
  • [Journal Article] Terahertz wideband spectroscopic imaging based on 2D electro-optic sampling technique2005

    • Author(s)
      M.Usami, M.Yamashita, K.Fukushima, C.Otani, K.Kawase
    • Journal Title

      Applied Physics Letters 86

      Pages: 141109-141109

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Annual Research Report 2005 Final Research Report Summary
  • [Journal Article] Monolithic Fabry-Perot resonator for the measurement of optical constants in the terahertz range2005

    • Author(s)
      A.Dobroiu, R.Beigang, C.Otani, K.Kawase
    • Journal Title

      Applied Physics Letters 86

      Pages: 261107-261107

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Annual Research Report 2005 Final Research Report Summary
  • [Journal Article] A broad-band THz radiation detector using a Nb-based superconducting tunnel junction2005

    • Author(s)
      C.Otani, et al.
    • Journal Title

      IEEE Transactions on Applied Superconductivity 15

      Pages: 591-594

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Annual Research Report 2005 Final Research Report Summary
  • [Journal Article] Component spatial pattern analysis of chemicals by use of two-dimensional electro-optic terahertz imaging"2005

    • Author(s)
      M.Yamashita, M.Usami, R.Fukasawa, C.Otani, K.Kawase
    • Journal Title

      Applied Optics 44・25

      Pages: 5198-5201

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Terahertz parametric sources and imaging applications2005

    • Author(s)
      K.Kawase, Y.Ogawa, H.Minamide, Hiromasa Ito
    • Journal Title

      Semiconductor Science and Technology 20

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] A broad-band THz radiation detector using a Nb-based superconducting tunnel junction2005

    • Author(s)
      C.Otani, T.Taino, R.Nakano, K.Hoshino, T.Shibuya, et al.
    • Journal Title

      IEEE Transactions on Applied Superconductivity 15-2

      Pages: 591-594

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Component spatial pattern analysis of chemicals by use of two-dimensional electro-optic terahertz imaging2005

    • Author(s)
      M.Yamashita, M.Usami, R.Fukasawa, C.Otani, K.Kawase
    • Journal Title

      Applied Optics 44

      Pages: 5198-5201

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Component spatial pattern analysis of chemicals by use of two-dimensional electro-optic terahertz imaging2005

    • Author(s)
      M.Yamashita, M.Usami, R.Fukasawa, C.Otani, K.Kawase
    • Journal Title

      Applied Optics 44・25

      Pages: 5198-5201

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Terahertz specroscopic imaging and its application to drug detection2004

    • Author(s)
      K.Kawase, Y.Ogawa, Y.Watanabe
    • Journal Title

      IEICE Transactions on Electronics E87-C・7

      Pages: 1186-1191

    • Related Report
      2004 Annual Research Report
  • [Journal Article] テラヘルツ分光イメージングによる試薬の成分解析2004

    • Author(s)
      川瀬晃道, 渡部裕輝, 小川雄一, 伊藤弘昌
    • Journal Title

      電気学会論文誌C 124・7

      Pages: 1339-1344

    • NAID

      10013268005

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Component analysis of chemical mixture using terahertz spectroscopic imaging, vol.234, no.1-6, pp.125-129(2004).2004

    • Author(s)
      Y.Watanabe, K.Kawase, T.Ikari, H.Ito, Y.Ishikawa, H.Minamide
    • Journal Title

      Optics Communications 234・1-6

      Pages: 125-129

    • Related Report
      2004 Annual Research Report
  • [Journal Article] 植物内水分の非破壊リアルタイム計測2004

    • Author(s)
      小川雄一, 川瀬晃道, 水野麻弥, 山下将嗣, 大谷知行
    • Journal Title

      電気学会論文誌C 124・9

      Pages: 1672-1677

    • NAID

      10013538429

    • Related Report
      2004 Annual Research Report
  • [Journal Article] THz-imaging for drug detection and LSI inspection2004

    • Author(s)
      K.Kawase
    • Journal Title

      Optics & Photonics News 15・10

      Pages: 34-39

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Terahertz imaging system based on a backward wave oscillator2004

    • Author(s)
      A.Dobroiu, M.Yamashita, Y.Ohshima, Y.Morita, C.Otani, K.Kawase
    • Journal Title

      Applied Optics 43・30

      Pages: 5637-5646

    • Related Report
      2004 Annual Research Report
  • [Book] テラヘルツ波の基礎と応用2005

    • Author(s)
      川瀬晃道(分担)
    • Total Pages
      280
    • Publisher
      工業調査会
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Annual Research Report 2005 Final Research Report Summary
  • [Book] The base and the Application of Terahertz Wave2005

    • Author(s)
      K.Kawase
    • Total Pages
      280
    • Publisher
      Kougyoutyousakai
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Publications] Y.Watanabe, K.Kawase, T.Ikari, H.Ito, Y.Ishikawa, H.Minamide: "Component spatial pattern analysis of chemicals using terahertz spectroscopic imaging"Optics & Photonics News (OPN), Optics in 2003. 14・12. 43 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] T.Kiwa, M.Tonouchi, M.Yamashita, K.Kawase: "Laser-terahertz emission microscope for inspecting electrical faults in integrated circuits"Optics Letters. 28・21. 2058-2063 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Y.Watanabe, K.Kawase, T.Ikari, H.Ito, H.Minamide: "Spatial pattern separation of chemicals and frequency-independent components using terahertz spectroscopic imaging"Applied Optics. 42・28. 5744-5748 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Kawase, Y.Ogawa, Y.Watanabe, H.Inoue: "Non-destructive terahertz imaging of illicit drugs using spectral fingerprints"Optics Express. 11・20. 2549-2554 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Y.Watanabe, K.Kawase, T.Ikari, H.Ito, H.Minamide: "Component spatial pattern analysis of chemicals using terahertz spectroscopic imaging"Applied Physics Letters. 83・4. 800-802 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] J.Shikata, K.Kawase, H.Ito: "The generation and linewidth control of terahertz waves by parametric processes"Electronics and Communications in Japan, Part2. 86・5. 52-65 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Kawase, J.Shikata, H.Ito: "Solid-state mid infrared laser sources, Topics Applied Physics 89(Edited by I.T.Sorokina and K.L.Vodopyanov)"Springer-Verlag, Berlin. 397-423 (2003)

    • Related Report
      2003 Annual Research Report

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Published: 2003-04-01   Modified: 2021-04-07  

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