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Structural and micromechanical analysis of ceramics and glass by Raman microprobe and cathodoluminescence spectroscopy.

Research Project

Project/Area Number 15360345
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Inorganic materials/Physical properties
Research InstitutionKyoto Institute of Technology

Principal Investigator

PEZZOTTI Giuseppe  Kyoto Institute of Technology, Department of Chemistry and materials Engineering, Professor, 工芸学部, 教授 (70262962)

Co-Investigator(Kenkyū-buntansha) TANAKA Katsuhisa  Kyoto University, Department of Materials Chemistry, Professor, 大学院, 教授 (80188292)
Project Period (FY) 2003 – 2004
Project Status Completed (Fiscal Year 2004)
Budget Amount *help
¥13,500,000 (Direct Cost: ¥13,500,000)
Fiscal Year 2004: ¥4,200,000 (Direct Cost: ¥4,200,000)
Fiscal Year 2003: ¥9,300,000 (Direct Cost: ¥9,300,000)
KeywordsNano-mechanics / Microscopic stress measurement / Piezo-spectroscopy / Electron Microscope / Cathodo Luminescence / Glass Structure / Ceramics
Research Abstract

Recent achievements in high spatial resolution characterization of residual stress fields stored near the surface of ceramic and glass materials/devices have been reviewed in this project. Measurements are based on the piezo-spectroscopic effect (i.e., the light wavelength shift occurring due to the presence of a superimposed stress field) observed for selected photoluminescence(PL) and cathodoluminescence(CL) bands of ceramic and glass materials. Nano-scale stress assessments can be performed, independent of the particular mechanism behind the PL/CL emission, by exploiting the superior in-depth resolution of the Raman microprobe device and the high lateral resolution of a field-emission-gun scanning electron microscopes(FEG-SEM) specially designed for low-voltage measurements. Automatic scanning routines have been developed and expanded in order to collect and to process in nearly real time a large number of acquisition data (up to 10^6 data point per □ m^2). This capability is well suited for the nano-scale assessment of residual stresses on the surface of ceramic and glass devices. The micromechanical information achieved by this technique (referred here to as cathodoluminescence piezo-spectroscopy) lies on a significantly smaller scale than that probed by photo-stimulated luminescence and can be regarded as the natural counterpart of chemical elemental mapping routinely operated into conventional SEM devices according to electron-stimulated X-ray emission. Experimental nano-scale mechanical assessments in the FEG-SEM may provide an additional degree of freedom in the microstructural design of novel materials and also the accessibility that is essential for developing new ceramic and glass devices with high efficiency and reliability.

Report

(3 results)
  • 2004 Annual Research Report   Final Research Report Summary
  • 2003 Annual Research Report
  • Research Products

    (51 results)

All 2005 2004 2003 Other

All Journal Article (45 results) Publications (6 results)

  • [Journal Article] Time-Resolved Study of Luminescence in Soda-Lime Silicate Glasses Co-Doped with Gd^<3+> and Eu^<3+>2005

    • Author(s)
      Y.Kondo, K.Tanaka, R.Ota, T.Fujii, Y.Ishikawa
    • Journal Title

      Optical Materials (印刷中)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Annual Research Report 2004 Final Research Report Summary
  • [Journal Article] Time-Resolved Study of Luminescence in Soda-Lime Silicate Glasses Co-Doped with Gd^<3+> and Eu^<3+>.2005

    • Author(s)
      Y.Kondo, K.Tanaka, R.Ota, T.Fujii, Y.Ishikawa
    • Journal Title

      Optical Materials (in printing)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Cathode-Ray Luminescence of Oxide Glasses Doped with Rare-Earth Ions.2005

    • Author(s)
      K.Fukuta, K.Tanaka, G.Pezzotti
    • Journal Title

      (in preparation)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] ナノ応力顕微鏡の開発:高波長分解能カソードルミネッセンス分光法を用いた応力解析2004

    • Author(s)
      G.Pezzotti, 西片健太郎, 柿沼繁
    • Journal Title

      Readout 28

      Pages: 28-33

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Probing nanoscale stress field in Er3+-doped optical fibers using their native luminescence2004

    • Author(s)
      G.Pezzotti, A.Leto
    • Journal Title

      J.Phys.: Condens.Matter 16

      Pages: 4907-4920

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Effect of Nucleation Agent and Optical Absorption and Fluorescence Spectra for Chromium-Doped Glass-Ceramics2004

    • Author(s)
      H.Nomura, K.Tanaka, T.Wakasugi, R.Ota
    • Journal Title

      Journal of the Ceramic Society of Japan, Supplement 112

    • NAID

      130004610052

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Annual Research Report 2004 Final Research Report Summary
  • [Journal Article] Micromechanical analysis of silicon nitride by cathodoluminescence spectroscopy2004

    • Author(s)
      K.Akazawa, G.Pezzotti
    • Journal Title

      New Frontiers of Process Science and Engineering in Advanced Materials, Part 2. 2

      Pages: 348-348

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Development of nano-scale measurement techniques for stress assessment in Si-based semiconductors2004

    • Author(s)
      A.Leto, A.Loreto, T.Hosokawa, Y.Yabuuchi, T.Valente, G.Pezzotti
    • Journal Title

      New Frontiers of Process Science and Engineering in Advanced Materials, Part 2. 2

      Pages: 355-358

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Cathodoluminescence analysis of nano-scale stress in Si/SiOx semiconductors2004

    • Author(s)
      A.Matsutani, A.Leto, T.Hosokawa, Y.Yabuuchi, K.Nishikata, S.Kakinuma, G.Pezzotti
    • Journal Title

      New Frontiers of Process Science and Engineering in Advanced Materials, Part 2. 2

      Pages: 359-363

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Development of piezo-spectroscopic calibration procedures for microscopic stress assessments in thin films2004

    • Author(s)
      K.WAN, G.PEZZOTTI
    • Journal Title

      New Frontiers of Process Science and Engineering in Advanced Materials, Part 2. 2

      Pages: 387-392

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Development of piezo-spectroscopic techniques for hydroxyapatite biomaterials based2004

    • Author(s)
      K.YAMADA, G.PEZZOTTI
    • Journal Title

      New Frontiers of Process Science and Engineering in Advanced Materials, Part 2. 2

      Pages: 393-396

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Phase-selective cathodoluminescence spectroscopy of Er:YAG glass-ceramic2004

    • Author(s)
      M.NISHI, S.TANABE, K.FUJITA, K.HIRAO, G.PEZZOTTI
    • Journal Title

      Solid State Communications 132

      Pages: 19-23

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Annual Research Report 2004 Final Research Report Summary
  • [Journal Article] 走査型電子顕微鏡を用いたセラミックスおよびガラスのナノスケール応力解析2004

    • Author(s)
      G.PEZZOTTI
    • Journal Title

      セラミックス 39[11]

      Pages: 935-939

    • NAID

      10013791607

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Annual Research Report 2004 Final Research Report Summary
  • [Journal Article] Residual stress mapping of epoxy molding compound in ball grid array microelectronic package using a fluorescent sensor2004

    • Author(s)
      N.MURAKI, N.MATOBA, T.HIRANO, M.YOSHIKAWA, G.PEZZOTTI
    • Journal Title

      Appl.Spectrosc. 58[2]

      Pages: 152-159

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Raman microprobe mapping of residual microstress in 3C-SiC film epitaxially grown on patterned Si(111) substrate2004

    • Author(s)
      C-J.LEE, G.PEZZOTTI, Y.OKUI, S.NISHINO
    • Journal Title

      Appl.Surface Sci. 228

      Pages: 10-16

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Annual Research Report 2004 Final Research Report Summary
  • [Journal Article] Nano stress measurement and microstructural characterization of silicon-based optical devices using their native luminescence.2004

    • Author(s)
      A.LETO, G.PEZZOTTI
    • Journal Title

      Key Eng.Mater. 287

      Pages: 317-322

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Annual Research Report 2004 Final Research Report Summary
  • [Journal Article] Measurements of microscopic stresses in Si-based polycrystalline ceramics2004

    • Author(s)
      G.PEZZOTTI
    • Journal Title

      Key Eng.Mater. 287

      Pages: 438-448

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Annual Research Report 2004 Final Research Report Summary
  • [Journal Article] Development of nano-stress microscope : stress analysis by high spectral resolution cathodoluminescence spectroscopy2004

    • Author(s)
      G.Pezzotti, K.Nishikata, S.Kakinuma
    • Journal Title

      Readout 28

      Pages: 28-33

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Probing nanoscale stress field in Er3+-doped optical fibers using their native luminescence.2004

    • Author(s)
      G.Pezzotti, A.Leto
    • Journal Title

      J.Phys. : Condens.Matter 16

      Pages: 4907-4920

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Effect of Nucleation Agent and Optical Absorption and Fluorescence Spectra for Chromium-Doped Glass-Ceramics.2004

    • Author(s)
      H.Nomura, K.Tanaka, T.Wakasugi, R.Ota
    • Journal Title

      J.Ceram.Soc.Japan (Supplement) 112

    • NAID

      130004610052

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Micromechanical analysis of silicon nitride by cathodoluminescence spectroscopy.2004

    • Author(s)
      K.Akazawa, G.Pezzotti
    • Journal Title

      New Frontiers of Process Science and Engineering in Advanced Materials Part 2

      Pages: 348-348

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Development of nano-scale measurement techniques for stress assessment in Si-based semiconductors.2004

    • Author(s)
      A.Leto, A.Loreto, T.Hosokawa, Y.Yabuuchi, T.Valente, G.Pezzotti
    • Journal Title

      New Frontiers of Process Science and Engineering in Advanced Materials Part 2

      Pages: 355-358

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Cathodoluminescence analysis of nano-scale stress in Si/SiOx semiconductors.2004

    • Author(s)
      A.Matsutani, A.Leto, T.Hosokawa, Y.Yabuuchi, K.Nishikata, S.Kakinuma, G.Pezzotti
    • Journal Title

      New Frontiers of Process Science and Engineering in Advanced Materials Part 2

      Pages: 359-363

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Development of piezo-spectroscopic calibration procedures for microscopic stress assessments in thin films.2004

    • Author(s)
      K.WAN, G.PEZZOTTI
    • Journal Title

      New Frontiers of Process Science and Engineering in Advanced Materials Part 2

      Pages: 387-392

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Development of piezo-spectroscopic techniques for hydroxyapatite biomaterials based.2004

    • Author(s)
      K.YAMADA, G.PEZZOTTI
    • Journal Title

      New Frontiers of Process Science and Engineering in Advanced Materials Part 2

      Pages: 393-396

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Phase-selective cathodoluminescence spectroscopy of Er:YAG glass-Ceramic.2004

    • Author(s)
      M.NISHI, S.TANABE, K.FUJITA, K.HIRAO, G.PEZZOTTI
    • Journal Title

      Solid State Communications 132

      Pages: 19-23

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Nanoscale stress analysis of ceramics and glasses using the scanning electron microscope.2004

    • Author(s)
      G.PEZZOTTI
    • Journal Title

      Ceramics 39[11]

      Pages: 935-939

    • NAID

      10013791607

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Residual stress mapping of epoxy molding compound in ball grid array microelectronic package using a fluorescent sensor.2004

    • Author(s)
      N.MURAKI, N.MATOBA, T.HIRANO, M.YOSHIKAWA, G.PEZZOTTI
    • Journal Title

      Appl.Spectrosc. 58[2]

      Pages: 152-159

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Raman microprobe mapping of residual microstress in 3C-SiC film epitaxially grown on patterned Si(111) substrate.2004

    • Author(s)
      C-J.LEE, G.PEZZOTTI, Y.OKUI, S.NISHINO
    • Journal Title

      Appl.Surface Sci. 228

      Pages: 10-16

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Measurements of microscopic stresses in Si-based polycrystalline ceramics.2004

    • Author(s)
      G.PEZZOTTI
    • Journal Title

      Key Eng.Mater. 287

      Pages: 438-448

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Micromechanical analysis of silicon nitride by cathodoluminescence spectroscopy2004

    • Author(s)
      K.AKAZAWA, G.PEZZOTTI
    • Journal Title

      New Frontiers of Process Science and Engineering in Advanced Materials, Part 2.

      Pages: 348-348

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Development of nano-scale measurement techniques for stress assessment in Si-based semiconductors2004

    • Author(s)
      A.LETO, A.LORETO, T.HOSOKAWA, Y.YABUUCHI, T.VALENTE, G.PEZZOTTI
    • Journal Title

      New Frontiers of Process Science and Engineering in Advanced Materials, Part 2.

      Pages: 355-358

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Cathodoluminescence analysis of nano-scale stress in Si/SiOx semiconductors2004

    • Author(s)
      A.MATSUTANI, A.LETO, T.HOSOKAWA, Y.YABUUCHI, K.NISHIKATA, S.KAKINUMA, G.PEZZOTTI
    • Journal Title

      New Frontiers of Process Science and Engineering in Advanced Materials, Part 2.

      Pages: 359-363

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Development of piezo-spectroscopic calibration procedures for microscopic stress assessments in thin films2004

    • Author(s)
      K.WAN, G.PEZZOTTI
    • Journal Title

      New Frontiers of Process Science and Engineering in Advanced Materials, Part 2.

      Pages: 387-392

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Development of piezo-spectroscopic techniques for hydroxyapatite biomaterials based2004

    • Author(s)
      K.YAMADA, G.PEZZOTTI
    • Journal Title

      New Frontiers of Process Science and Engineering in Advanced Materials, Part 2.

      Pages: 393-396

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Residual stress mapping of epoxy molding compound in ball grid array microelectronic package using a fluorescent sensor2004

    • Author(s)
      N.MURAKI, N.MATOBA, T.HIRANO, M.YOSHIKAWA, G.PEZZOTTI
    • Journal Title

      Appl.Spectrosc. 58

      Pages: 152-159

    • Related Report
      2004 Annual Research Report
  • [Journal Article] ナノ応力顕微鏡の開発-I 高波長分解能カソードルミネッセンス分光法を用いた応力解析2004

    • Author(s)
      G.PEZZOTTI, 西方健太郎, 柿沼繁
    • Journal Title

      Readout 28[3]

      Pages: 28-33

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Probing nanoscopic stresses in glass using luminescent atoms2003

    • Author(s)
      G.Pezzotti
    • Journal Title

      Microscopy and Analysis 5

      Pages: 5-7

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] The scanning electron microscope as a tool for experimental nanomechanics2003

    • Author(s)
      G.Pezzotti
    • Journal Title

      JEOL News 38

      Pages: 13-19

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Piezo-spectroscopic assessment of nanoscopic residual stresses in Er3+-doped optical fibers2003

    • Author(s)
      G.Pezzotti, A.Leto, K.Tanaka, O.Sbaizero
    • Journal Title

      J.Phys.: Condens.Matter 15

      Pages: 7687-7695

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Crack-tip microstress field in Cr3+-doped sapphire single crystral2003

    • Author(s)
      W.Zhu, C-J.Lee, S.Tochino, G.Pezzotti
    • Journal Title

      8^<th> Japan International SAMPE Symposium and Exhibition 2

      Pages: 865-868

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Probing nanoscopic stresses in glass using luminescent atoms.2003

    • Author(s)
      G.Pezzotti
    • Journal Title

      Microscopy and Analysis 5

      Pages: 5-7

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Piezo-spectroscopic assessment of nanoscopic residual stresses in Er3+-doped optical fibers2003

    • Author(s)
      G.Pezzotti, A.Leto, K.Tanaka, O.Sbaizero
    • Journal Title

      J.Phys. : Condens.Matter 15

      Pages: 7687-7695

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Crack-tip microstress field in Cr3+-doped sapphire single crystral.2003

    • Author(s)
      W.Zhu, C-J.Lee, S.Tochino, G.Pezzotti
    • Journal Title

      8^<th> Japan International SAMPE Symposium and Exhibition 2

      Pages: 865-868

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Cathode-Ray Luminescence of Oxide Glasses Doped with Rare-Earth Ions

    • Author(s)
      K.Fukuta, K.Tanaka, G.Pezzotti
    • Journal Title

      (投稿準備中)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Publications] G.Pezzotti: "Probing nanoscopic stresses in glass using luminescent atoms"Microscopy and Analysis. 5. 5-7 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] G.Pezzotti: "The scanning electron microscope as a tool for experimental nanomechanics"JEOL News. 38. 13-19 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] G.Pezzotti, A.Leto, K.Tanaka, O.Sbaizero: "Piezo-spectroscopic assessment of nanoscopic residual stresses in Er3+-doped optical fibers"J.Phys. : Condens.Matter. 15. 7687-7695 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] G.Pezzotti, 西方健太郎, 柿沼繁: "ナノ応力顕微鏡の開発:高波長分解能カソードルミネッセンス分光法を用いた応力解析"Readout. 28. 28-33 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] G.Pezzotti, A.Leto: "Probing nanoscale stress field in Er3+-doped optical fibers using their native luminescence"J.Phys. : Condens.Matter. (in press). (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] W.Zhu, C-J.Lee, S.Tochino, G.Pezzotti: "Crack-tip microstress field in Cr3+-doped sapphire single crystral"8^<th> Japan International SAMPE Symposium and Exhibition. 2. 865-868 (2003)

    • Related Report
      2003 Annual Research Report

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Published: 2003-04-01   Modified: 2016-04-21  

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