Establishment of novel materials surface treatment/modification technology with using supercritical fluid plasma beam
| Project/Area Number |
15360380
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Material processing/treatments
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| Research Institution | The University of Tokyo |
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Principal Investigator |
TERASHIMA Kazuo The University of Tokyo, School of Frontier Science, Department of Advanced Materials science, Associate Professor, 大学院・新領域創成科学研究科, 助教授 (30176911)
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| Co-Investigator(Kenkyū-buntansha) |
KOSHIZAKI Naoto Agency of Industrial Science & Technology, (AIST), Center of Nano-architectonics, Research Team Leader, 界面ナノアーキテクトニクスセンター, 研究チーム長 (40344197)
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| Project Period (FY) |
2003 – 2004
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| Project Status |
Completed (Fiscal Year 2004)
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| Budget Amount *help |
¥15,400,000 (Direct Cost: ¥15,400,000)
Fiscal Year 2004: ¥5,200,000 (Direct Cost: ¥5,200,000)
Fiscal Year 2003: ¥10,200,000 (Direct Cost: ¥10,200,000)
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| Keywords | supercritical fluid / supercritical fluid plasma / low-temperature plasma / dielectric barrier discharge / surface modification / thin film deposition / materials synthesis / carbon nanostructured materials / 超臨界プラズマ / プラズマ / 材料表面処理 / 材料加工 |
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| Research Abstract |
(1)Development of a Supercritical Fluid Dielectric Barrier Discharge Microplasma Processing Device
We have developed a supercritical fluid dielectric barrier discharge (DBD) microplasma processing device. Using this device, we applied optical emission spectroscopy (OES) to plasmas generated in high-pressure CO_2 environments up to supercritical condition. Two types of plasmas, namely, dielectric barrier discharge (DBD) and DC discharge were employed. Up to supercritical conditions, the spectra of C_2 molecule and atomic O were remarkable by optical emission spectroscopy of both types of discharge. Rotational temperature of C_2 was estimated as approximately 4000 K in DBD at 2.0 MPa.
(2)Application of supercritical fluid plasmas to novel materials surface treatment & fabrication
We have applied two types of supercritical fluid plasmas, namely arc type & DBD type, to materials surface treatment and fabrication. Their dependences of process parameters, such as temperature, pressure, and frequency, on synthesized materials have been intensively investigated. Through these experiments, we have succeeded in carbon nanostructured materials, such as carbon nanotube and carbon nano-onion, synthesis and their thin films from scCO_2 as raw-materials at around 400K. In addition, metal film deposition has been also succeeded at around 400K.
(3)Generation of Laser-induced supercritical fluid plasma
The generation of laser-induced supercritical fluid plasma (for scCO_2 and scH_2O) has been successfully achieved. Moreover, SRS(Stimulated Raman Scattering) phenonema has been observed.
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Report
(3 results)
Research Products
(14 results)
