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Surface stress and electric properties of nitrided silicon oxide

Research Project

Project/Area Number 15560026
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionNational Institute for Materials Science

Principal Investigator

N.ITAKURA Akiko  National Institute for Materials Science, Materials Engineering Laboratory, Senior Researcher, 材料研究所, 主幹研究員 (20343858)

Co-Investigator(Kenkyū-buntansha) SHIMODA Masahiko  National Institute for Materials Science, Materials Engineering Laboratory, Senior Researcher, 材料研究所, 主席研究員 (60343836)
Project Period (FY) 2003 – 2005
Project Status Completed (Fiscal Year 2005)
Budget Amount *help
¥3,600,000 (Direct Cost: ¥3,600,000)
Fiscal Year 2005: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 2004: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 2003: ¥2,100,000 (Direct Cost: ¥2,100,000)
KeywordsSurface Stress / Silicon Oxide / Plasma Nitridation / 表面応力 / シリコン酸化 / シリコン酸窒化 / 窒素ラジカル / 窒素イオン / 応力緩和
Research Abstract

We have investigated the surface stress evolution under nitridation process of silicon oxide by plasma exited nitrogen. The compressive surface stress, which had been formed by thin oxide on Si (100) were relaxed by the nitridation. During the nitridation, more than 40% of the initial compressive stress in 3nm oxide was relaxed. We measured the stress evolution for plasma oxide films and thermal oxide films with thickness of 2-5 nm and found the same amount of the relaxation of oxide stress. Less than 3 % of nitrogen was incorporated in SiO_2, and not located at the SiO_2/Si interface but uniformly distributed in the film with forming a N- Si_2O bonding.

Report

(4 results)
  • 2005 Annual Research Report   Final Research Report Summary
  • 2004 Annual Research Report
  • 2003 Annual Research Report
  • Research Products

    (13 results)

All 2006 2005 2004 Other

All Journal Article (11 results) Patent(Industrial Property Rights) (1 results) Publications (1 results)

  • [Journal Article] Surface stress control using ultraviolet light irradiation of plasma-polymerized thin films2006

    • Author(s)
      S.Igarashi, A.N.Itakura, M.Kitajima, A.N.Chifen, R.Forch, R.Berger
    • Journal Title

      Applied Physics Letters 88

      Pages: 143119-143119

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Local oxidation Induced by Inhomogenious Stress on Blisteredsi Surfase2006

    • Author(s)
      S.Igarashi, A.N.Itakura, M.Kitajima, S.Nakano, S.Muto, T.Tanabe, H.Yamamoto, K.Hojo
    • Journal Title

      Japanese Jounal of Applied Physics 45

      Pages: 4179-4179

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Surface stress of polyelectrolyte adsorption measured by micromechanical cantilever sensors2006

    • Author(s)
      M.Toda, A.N.Itakura, K.Buscher, K.Graf, R.Berger
    • Journal Title

      e-Journal of Surface Science and Nanotechnology 4

      Pages: 96-96

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Swelling signals of polymer films measured by a combination of micromechannical cantilever sensor and surface plasmon resonance spectroscopy2006

    • Author(s)
      S.Igarashi, A.N.Itakura, M.Tosa, M.Kitajima, L.Chu, A.N.Chifen, R.Forch, R.Berger
    • Journal Title

      Sensors and Actuators B-Chemical in printing, Available online 20 December 2005

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Swelling signals of polymer films measured by a combination of micromechanical cantilever sensor and surface plasmon resonance spectroscopy2006

    • Author(s)
      S.Igarashi, A.N.Itakura, M.Toda, M.Kitajima, L.Chu, A.N.Chifen, R.Forch, R.Berger
    • Journal Title

      Sensors and Actuators B-Chemical (Available online 20 December 2005) (In printing)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Local Oxidation Induced by Inhomogenious Stress on BlisteredSi Surfase2006

    • Author(s)
      S.Igarashi, A.N.Itakura, M.Kitajima, S.Nakano, S.Muto, T.Tanabe, H.Yamamoto, K.Hojo
    • Journal Title

      Japanese Jounal of Applied Physics 45

      Pages: 4179-4179

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Surface stress control using ultraviolet light irradiation of plasma-polymerized thin films2006

    • Author(s)
      S.Igarashi, A.N.Itakura, M.Kitajima, A.N.Chifen, R.Forch, R.Berger
    • Journal Title

      Applied Physics Letters 88(in printing)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Swelling signals of polymer films measured by a combination of micromechanical cantilever sensor and surface plasmon resonance spectroscopy2006

    • Author(s)
      S.Igarashi, A.N.Itakura, M.Toda, M.Kitajima, L.Chu, A.N.Chifen, R.Forch, R.Berger
    • Journal Title

      Sensors and Actuators B-Chemical SNB8977(in printing)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Relationship between Ozone Oxidation and Stress Evolution on an H-Terminated Si Surface2005

    • Author(s)
      A.Kurokawa, T.Narushima, K.Nakamura, H Nonaka, S.Ichimura, A.N.Itakura, M.Kitajima
    • Journal Title

      Japanese journal of Applied Physics 43

      Pages: 281-281

    • Related Report
      2005 Annual Research Report
  • [Journal Article] ブリスタリングによる応力変調を利用した局所シリコン酸化の観察2004

    • Author(s)
      五十嵐慎一, 板倉明子, 北島正弘, 中野伸祐, 武藤俊介, 田辺哲朗, 北條喜一
    • Journal Title

      日本表面科学会学会誌 25(9)

      Pages: 562-567

    • NAID

      10013510655

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Relationship between Ozone Oxidation and Stress Evolution on an H-Terminated Si Surface2004

    • Author(s)
      A.Kurokawa, T.Narushima, K.Nakamura, H.Nonaka, S.Ichimura, A.N.Itakura, M.Kitajima
    • Journal Title

      Japanese Journal of Applied Physics 43(1)

      Pages: 281-286

    • Related Report
      2004 Annual Research Report
  • [Patent(Industrial Property Rights)] 二次パターニング方法並びにそれを用いた電子デバイス及び磁気デバイスの作製方法2004

    • Inventor(s)
      五十嵐慎一, 中村明子, 北島正弘
    • Industrial Property Rights Holder
      JST及び物質・材料研究機構
    • Filing Date
      2004-07-27
    • Related Report
      2004 Annual Research Report
  • [Publications] A.N.Itakura, M.Shimoda, M.Kitajima: "Surface stress relaxation in SiO2 film by plasma nitridation and nitrogen distribution in the film."Applied Surface Science. 216. 41-45 (2003)

    • Related Report
      2003 Annual Research Report

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Published: 2003-04-01   Modified: 2016-04-21  

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