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Spectro-ellipsometric Analysis of Periodically Structured Samples

Research Project

Project/Area Number 15560031
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied optics/Quantum optical engineering
Research InstitutionShizuoka University

Principal Investigator

YAMAGUCHI Tomuo  Shizuoka University, Research Institute of Electronics, Professor, 電子工学研究所, 教授 (40010938)

Project Period (FY) 2003 – 2006
Project Status Completed (Fiscal Year 2006)
Budget Amount *help
¥3,400,000 (Direct Cost: ¥3,400,000)
Fiscal Year 2006: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 2005: ¥600,000 (Direct Cost: ¥600,000)
Fiscal Year 2004: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 2003: ¥1,100,000 (Direct Cost: ¥1,100,000)
Keywordsscatterometry / spectroellipsometry / periodic nano-structure / lithography / optical mesurement / rectangular array / periodic wire / magneto-optics / scatterometry / spectroscopic ellipsometry / nanostructure / magneto optics / anisotropic nanostructures / ellipsometry / 光散乱分光 / 周期的幾何学構造 / 断面構造 / 磁気光学分光 / インコヒーレント / 周期的矩形溝構造
Research Abstract

1) Recent ultra fine structures in integrated circuits require new optical monitoring technology called optical scatterometry. In this research project, the scatterometry based on spectroscopic ellipsometry and also based on magneto-optic spectroscopy was applied to the analysis of periodically structured samples. In the theoretical calculations, coupled wave theory for gratings was introduced. Although integration circuits have a complicated structure, periodic structure is fabricated on a portion called teg for the monitoring of each lithography step.
2) Results on the spectroscopic ellipsometry : Rectangular gratings with 250 nm period and 500 nm depth with various width ratio fabricated on a fused quartz substrate using an electron beam lithography and similar gratings with 130 nm period fabricated on a Si surface were analyzed and showed a good correspondence with cross sectional SEM images. Rectangular Ta wires fabricated on a fused quartz substrate required barreled cross section in the analysis and correspond well with SEM images. Two dimensionally distributed circular holes with 94 nm diameter, 180 nm pitch and 100 nm depth fabricated on a Si surface were analyzed by keeping lattice parameters. Values of the diameter and the depth correspond well with the SEM image of the cross section.
3) Results on the magneto-optical spectroscopy: Nano-structures fabricated with ferromagnetic materials were analyzed. The magnetic nano-structure is aimed to monitor fabrication process of magneto-optic memory and magnetic random access memory (MRAM) and also aimed to study basic properties of magnetic nano-structure. They have anisotropic properties, so that optical response of magnetic nano-structure was summerized.

Report

(5 results)
  • 2006 Annual Research Report   Final Research Report Summary
  • 2005 Annual Research Report
  • 2004 Annual Research Report
  • 2003 Annual Research Report
  • Research Products

    (46 results)

All 2007 2006 2005 2004

All Journal Article (46 results)

  • [Journal Article] Evaluation of the quality of Permalloy gratings by diffracted magneto-optical spectroscopy2007

    • Author(s)
      R.Antos, J.Mistrik, T.Yamaguchi, S.Visnovsky, S.O.Demokritov, B.Hillebrands
    • Journal Title

      Opt. Express 13

      Pages: 4651-4656

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Optics of anisotropic nanostructures2006

    • Author(s)
      K.Rokushima, R.Antos, J.Mistrik, S.Visnovsky, T.Yamaguchi
    • Journal Title

      Czech. J. Phys.(760)(9) 56・7

      Pages: 665-764

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Magneto-optical polar Kerr effect spectroscopy on 2D-periodic subwavelength arrays of magnetic dots2006

    • Author(s)
      R.Antos, S.Visnovsky, J.Mistrik, T.Yamaguchi
    • Journal Title

      Intern. J. of Microwave and Opt. Technol.(759)(10) 1・2

      Pages: 905-909

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Total reflection ellipsometry of lamellar gratings2006

    • Author(s)
      J.Pistora, J.Vlcek, K.Watanabe, K.Postava, S.Visnovsky, R.Antos, T.Yamaguchi
    • Journal Title

      Intern. J. of Microwave and Opt. Technol.(757)(11) 1・2

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Convergence properties of critical dimension measurementsby spectroscopic ellipsometry on gratings made of various materials2006

    • Author(s)
      R.Antos, J.Pistora, J.Mistrik, T.Yamaguchi, S.Yamaguchi., M.Horie, S.Visnovsky, Y.Otani
    • Journal Title

      J. Appl. Phys.(754)(12) 100

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Magneto-optical spectroscopic scatterometry for analyzing patterned magnetic nanostructures2006

    • Author(s)
      R.Antos, J.Mistrik, T.Yamaguchi, M.Veis, E.Liskova, S.Visnovsky, J.Pistora, B.Hillebrands, S.O.Demokritov, T.Kimura, Y.Otani
    • Journal Title

      J. Magn. Soc. Japan(756)(13) 30・6-2

      Pages: 630-636

    • NAID

      110004857412

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Characterization of permalloy wires by optical and magneto-optical spectroscopy2006

    • Author(s)
      R.Antos, J.Mistrik, S.Visnovsky, M.Aoyama, T.Yamaguchi, B.Hillebrands
    • Journal Title

      Trans. Magn. Soc. Japan 4

      Pages: 282-285

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Optics of anisotropic nanostructures2006

    • Author(s)
      K.Rokushima, R.Antos, J.Mistrik, S.Visnovsky, T.Yamaguchi
    • Journal Title

      Czech. J. Phys 56,7

      Pages: 665-764

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Magneto-optical polar Kerr effect spectroscopy on 2D-periodic subwavelength arrays of magnetic dots2006

    • Author(s)
      R.Antos, S.Visnovsky, J.Mistrik, T.Yamaguchi
    • Journal Title

      International Journal of Microwave and Optical Technology 1,2

      Pages: 905-909

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Total reflection ellipsometry of lamellar gratings2006

    • Author(s)
      J.Pistora, J.Vlcek, K.Watanabe, K.Postava, S.Visnovsky, R.Antos, T.Yamaguchi
    • Journal Title

      International Journal of Microwave and Optical Technology 1,2

      Pages: 910-913

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Convergence properties of critical dimension measurements by spectroscopic ellipsometry on gratings made of various materials2006

    • Author(s)
      R.Antos, J.Pistora, J.Mistrik, T.Yamaguchi, S.Yamaguchi, M.Horie, S.Visnovsky, Y.Otani
    • Journal Title

      J. Appl. Phys. 100

      Pages: 54906-54906

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Magneto-optical spectroscopic scatterometry for analyzing patterned magnetic nanostructures2006

    • Author(s)
      R.Antos, J.Mistrik, T.Yamaguchi, M.Veis, E.Liskova, S.Visnovsky, J.Pistora, B.Hillebrands, S.O.Demokritov, T.Kimura, Y.Otani
    • Journal Title

      J. Magn. Soc. Jpn. 30,6-2

      Pages: 630-636

    • NAID

      110004857412

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Optics of anisotropic nanostructures2006

    • Author(s)
      K.Rokushima, R.Antos, J.Mistrik, S.Visnovsky, T.Yamaguchi
    • Journal Title

      Czech. J. Phys. 56・7

      Pages: 665-764

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Magneto-optical polar Kerr effect spectroscopy on 2D-periodic subwavelength arrays of magnetic dots2006

    • Author(s)
      R.Antos, S.Visnovsky, J.Mistrik, T.Yamaguchi
    • Journal Title

      International J. of Microwave and Opt. Technol. 1・2

      Pages: 905-909

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Spectroscopic ellipsometry : its accuracy and potentiality2006

    • Author(s)
      J.Mistrik, T.Yamaguchi, R.Antos, Z.-T.Jiang, I.Ohlidal, M.Aoyama
    • Journal Title

      International J. of Microwave and Opt. Technol. 1・2

      Pages: 523-527

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Magneto-optical spectroscopic scatterometry for analyzing patterned magnetic nanostructures2006

    • Author(s)
      R.Antos, J.Mistrik, T.Yamaguchi, M.Veis, E.Liskova, S.Visnovsky, J.Pistora, B.Hillebrands, S.O.Demokritov, T.Kimura, Y.Otani
    • Journal Title

      J. Magn. Soc. Japan 30・6-2

      Pages: 630-636

    • NAID

      110004857412

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate2005

    • Author(s)
      R.Antos, J.Pistora, I.Ohlidal, K.Postava, J.Mistrik, T.Yamaguchi, S.Visnovsky, M.Horie
    • Journal Title

      J. Appl. Phys.(640)(3) 97

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Generalized scatterometry of laterally patterned periodic nanostructures based on spectroscopic ellipsometry2005

    • Author(s)
      R.Antos, J.Mistrik, M.Aoyama, S.Visnovsky, T.Yamaguchi
    • Journal Title

      Reports of the Graduate School of Electronic Science and Technology(Shizuoka University)(705)(4) 26

      Pages: 55-61

    • NAID

      40006997285

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Spectroscopic ellipsometry on sinusoidal surface-relief gratings2005

    • Author(s)
      R.Antos, I.Ohlidal, J.Mistrik, T.Yamaguchi
    • Journal Title

      Appl. Surf. Sci.(646)(5) 244 (1-4)

      Pages: 221-224

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Spectroscopic ellipsometry on lamellar gratings.2005

    • Author(s)
      R.Antos, I.Ohlidal, J.Mistrik, T.Yamaguchi, J.Pistora, M.Horie
    • Journal Title

      Appl. Surf. Sci(647)(6) 244 (1-4)

      Pages: 225-229

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Evidence of native oxides on the capping and substrate of Permalloy gratings by magneto-optical spectroscopy in the zeroth- andf irst-diffraction orders2005

    • Author(s)
      R.Antos, J.Mistrik, T.Yamaguchi, S.Visnovsky, S.O.Demokritov, B.Hillebrands
    • Journal Title

      Appl. Phys. Lett.(724)(7) 86

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Evaluation of the quality of Permalloy gratings by diffracted magneto-optical spectroscopy2005

    • Author(s)
      R.Antos, J.Mistrik, T.Yamaguchi, S.Visnovsky, S.O.Demokritov, B.Hillebrands
    • Journal Title

      Optics Express(729)(8) 13・12

      Pages: 4651-4656

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Optical metrology of patterned magnetic structures : deep versus shallow gratings2005

    • Author(s)
      R.Antos, M.Veis, E.Liskova, M.Aoyama, J.Hamrle, T.Kimura, P.Gustafik, M.Horie, J.Mistrik, T.Yamaguchi, S.Visnovsky, N.Okamoto
    • Journal Title

      Proc. SPIE. (San Jose, Feb. 17-May 2005)(667)(14) 5752(国際会議プロシーディングス)

      Pages: 1050-1059

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Airy-like internal reflection series applied in scatterometry and simulations of gratings2005

    • Author(s)
      R.Antos, J.Mistrik, T.Yamaguchi, M.Horie, S.Visnovsky
    • Journal Title

      Proc. SPIE (Munich, 12-16 June 2005)(773)(15) 5858(国際会議プロシーディングス)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Optical metrology of binary arrays of holes in semiconductor media using microspot spectroscopic ellipsometry2005

    • Author(s)
      R.Antos, I.Ohlidal, J.Mistrik, T.Yamaguchi, S.Visnovsky, S.Yamaguchi, M.Horie
    • Journal Title

      Proc. SPIE (Jena, 12-16 Sept. 2005)(772)(3) 5965(国際会議プロシーディングス)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate2005

    • Author(s)
      R.Antos, J.Pistora, I.Ohlidal, K.Postava, J.Mistrik, T.Yamaguchi, S.Visnovsky, M.Horie
    • Journal Title

      J. Appl. Phys. 97

      Pages: 53107-53107

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Generalized scatterometry of laterally patterned periodic nanostructures based on spectroscopic ellipsometry2005

    • Author(s)
      R.Antos, J.Mistrik, M.Aoyama, S.Visnovsky, Yamaguchi
    • Journal Title

      ISSN 0388-5070 (Reports of the Graduate School of Electronic Science and Technology, Shizuoka University) 26

      Pages: 55-61

    • NAID

      40006997285

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Spectroscopic ellipsometry on sinusoidal surface-relief gratings2005

    • Author(s)
      R.Antos, I.Ohlidal, D.Franta, P.Klapetek, J.Mistrik, T.Yamaguchi, S.Visnovsky
    • Journal Title

      Appl. Surf. Sci. 244,1-244,4

      Pages: 221-224

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Spectroscopic ellipsometry on lamellar gratings2005

    • Author(s)
      R.Antos, I.Ohlidal, J.Mistrik, K.Murakami, T.Yamaguchi, J.Pistora, M.Horie, S.Visnovsky
    • Journal Title

      Appl. Surf Sci 244,1-244,4

      Pages: 225-229

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Evidence of native oxides on the capping and substrate of Permalloy gratings by magneto-optical spectroscopy in the zeroth-and first-diffraction orders2005

    • Author(s)
      R.Antos, J.Mistrik, T.Yamaguchi, S.Visnovsky, S.O.Demokritov, B.Hillebrands
    • Journal Title

      Appl. Phys. Lett. 86

      Pages: 231101-231101

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Optical metrology of patterned magnetic structures : deep versus shallow gratings," presented at the 30th SPIE International Symposium on Microlithography-Metrology, Inspection, and Process Control for Microlithography XIX, February 27-March 4,2005, San Jose, California USA2005

    • Author(s)
      R.Antos, M.Veis, E.Liskova, M.Aoyama, J.Hamrle, T.Kimura, P.Gustafik, M.Horie, J.Mistrik, T.Yamaguchi, S.Visnovsky, N.Okamoto
    • Journal Title

      Proc. SPIE 5752

      Pages: 1050-1059

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Airy-like internal reflection series applied in scatterometry and simulations of gratings," presented at SPIE International Symposium on Optical Metrology-Micro-and Nano-Metrology the World of Photonics Congress 2005 (17th International Conference on Photonics in Europe Co-located with LASER 2005, World of Photonics); 12-16 June 2005, Munich, Germany2005

    • Author(s)
      R.Antos, J.Mistrik, T.Yamaguchi, M.Horie, S.Visnovsky
    • Journal Title

      Proc. SPIE 5858

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate2005

    • Author(s)
      R.Antos, J.Pistora, I.Ohlidal, K.Postava, J.Mistrik, T.Yamaguchi, S.Visnovsky, M.Horie
    • Journal Title

      J.Appl.Phys. 97

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Evidence of native oxides on the capping and substrate of Permalloy gratings by magneto-optical spectroscopy in the zeroth- and first-diffraction orders2005

    • Author(s)
      R.Antos, J.Mistrik, T.Yamaguchi, S.Visnovsky, S.O.Demokritov, B.Hillebrands
    • Journal Title

      Appl.Phys.Lett. 86

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Evidence of refractive index change in glass substrates induced by high-density reactive ion plating deposition of SiO2 film2005

    • Author(s)
      J.Mistrik, I.Ohlidal, R.Antos, M.Aoyama, T.Yamaguchi.
    • Journal Title

      Appl.Surf.Sci. 244(1-4)

      Pages: 51-54

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Spectroscopic ellipsometry on lamellar diffraction gratings on a thick transparent plate2005

    • Author(s)
      R.Antos, I.Ohlidal, J.Mistrik, T.Yamaguchi, J.Pistora, M.Horie
    • Journal Title

      Appl.Surf.Sci. 244(1-4)

      Pages: 225-229

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Spectroscopic ellipsometry on sinusoidal gratings2005

    • Author(s)
      R.Antos, I.Ohlidal, J.Mistrik, T.Yamaguchi
    • Journal Title

      Appl.Surf.Sci. 244(1-4)

      Pages: 221-224

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Evaluation of the quality of Permalloy gratings by diffracted magneto-optical spectroscopy2005

    • Author(s)
      Roman Antos, Jan Mistrik, Tomuo Yamaguchi, Stefan Visnovsky, Sergej O.Demokritov, Burkard Hillebrands
    • Journal Title

      Optics Express 13・12

      Pages: 4651-4656

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate2005

    • Author(s)
      R.Antos, J.Pistora, I.Ohlidal, K.Postava, J.Mistrik, T.Yamaguchi, S.Visnovsky, M.Horie
    • Journal Title

      Journal of Applied Physics, 2005 97・53107(in press)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Spectroscopic ellipsometry of lamellar diffraction gratings on a thick transparent plate2005

    • Author(s)
      R.Antos, I.Ohlidal, J.Mistrik, T.Yamaguchi, J.Pistora, M.Horie
    • Journal Title

      Appl.Surf.Sci. (in press)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Spectroscopic ellipsometry of sinusoidal gratings2005

    • Author(s)
      R.Antos, I.Ohlidal, J.Mistrik, T.Yamaguchi
    • Journal Title

      Appl.Surf.Sci. (in press)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Magneto-optical spectroscopy on permalloy wires in 0th and 1st diffraction orders2004

    • Author(s)
      R.Antos, J.Mistrik, M.Aoyama, T.Yamaguchi, S.Visnovsky, B.Hillebrands
    • Journal Title

      J. Magn. Magn. Mater.(617)(1) 272-276

      Pages: 1670-1671

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Characterization of permalloy wires by optical and magneto-optical spectroscopy2004

    • Author(s)
      R.Antos, J.Mistrik, S.Visnovsky, M.Aoyama, T.Yamaguchi, B.Hillebrands
    • Journal Title

      Trans. Magn. Soc. Japan(627)(2) 4 (4-2)

      Pages: 282-285

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Magneto-optical spectroscopy on permalloy wires in 0th and 1st diffraction orders2004

    • Author(s)
      R.Antos, J.Mistrik, M.Aoyama, T.Yamaguchi, S.Visnovsky, B.Hillebrands
    • Journal Title

      J. Magn. Magn. Mater 272-276

      Pages: 1670-1671

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Characterization of permalloy wires by optical and magneto-optical spectroscopy2004

    • Author(s)
      R.Antos, J.Mistrik, S.Visnovsky, M.Aoyama, T.Yamaguchi, B.Hillebrands
    • Journal Title

      Trans.Magn.Soc.Japan 4・4-2

      Pages: 282-285

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Magneto-optical spectroscopy on permalloy wires in 0th and 1st diffraction orders2004

    • Author(s)
      R.Antos, J.Mistrik, M.Aoyama, T.Yamaguchi, S.Visnovsky, B.Hillebrands
    • Journal Title

      J.Magn.Magn.Mater. 272-276

      Pages: 1670-1671

    • Related Report
      2004 Annual Research Report

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Published: 2003-04-01   Modified: 2016-04-21  

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