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Evaluation Method for Metal Line Failure Induced by High Current Density in Order to Ensure ULSI Reliability

Research Project

Project/Area Number 15560058
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Materials/Mechanics of materials
Research InstitutionHirosaki University

Principal Investigator

SASAGAWA Kazuhiko  Hirosaki University, Faculty of Science and Technology, Associate Professor, 理工学部, 助教授 (50250676)

Co-Investigator(Kenkyū-buntansha) SAKA Masumi  Tohoku University, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 (20158918)
Project Period (FY) 2003 – 2004
Project Status Completed (Fiscal Year 2004)
Budget Amount *help
¥3,300,000 (Direct Cost: ¥3,300,000)
Fiscal Year 2004: ¥1,700,000 (Direct Cost: ¥1,700,000)
Fiscal Year 2003: ¥1,600,000 (Direct Cost: ¥1,600,000)
KeywordsElectronic Package / electromigration / Metal Line / Line Failure / Bamboo Line / Passivation / Numerical Simulation / Governing Parameter / 数直シミュレーション
Research Abstract

1.The parameter governing electromigration damage in the passivated bamboo line was newly formulated by adding the effect of stress on atomic diffusion to the governing parameter which has already been developed for unpassivated line. Using the parameter the simple and accurate method for derivation of film characteristic constants was developed.
2.Acceleration ration tests of electromigration damage were performed where high-density electric current was supplied to the passivated aluminum bamboo line of submicron width for a certain period of time. Inputting the obtained velocity into the derivation method utilizing the governing parameter described in item 1 the film characteristic constants were obtained and the constants were concluded to be valid. From this fact, the governing parameter for electromigration damage newly developed was verified.
3.It is known that there is a threshold current density of the electromigration damage in the via-connected line. Utilizing the governing parameter for electromigration damage a numerical simulation of the building-up process of the atomic density distribution was developed and thus we achieved the construction of the evaluation method of the threshold current density. This method is applicable to not only straight shape line but also the two-dimensionally shaped line such as angled line.
4.Concerning the straight lines, the evaluation result that the threshold was in inverse proportion to the line length was obtained, and regarding an angled line the evaluation result that threshold of the angled line was greater than that of straight line was obtained. From experimental results the same tendency was obtained as the evaluation results, and thus the evaluation method was verified. It was found out that two-dimensional shape of the line affected threshold current density, and valuable knowledge for ensuring ULSI reliability was obtained.

Report

(3 results)
  • 2004 Annual Research Report   Final Research Report Summary
  • 2003 Annual Research Report
  • Research Products

    (43 results)

All 2005 2004 2003 Other

All Journal Article (37 results) Publications (6 results)

  • [Journal Article] Electromigration Failure of Metal Lines2005

    • Author(s)
      H.Abe, (K.Sasagawa, M.Saka)
    • Journal Title

      Abstracts of 11th International Conference on Fracture

      Pages: 17-17

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Derivation of Film Characteristic Constants by Using Governing Parameter for Electromigration Damage in Passivated Bamboo Line2005

    • Author(s)
      M.Hasegawa, (K.Sasagawa, M.Saka)
    • Journal Title

      Proceedings of 11th International Conference on Fracture (CD-ROM)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Effect of Line-Shape on Threshold Current Density of Electromigration Damage in Bamboo Lines2005

    • Author(s)
      K.Sasagawa, (S.Uno, N.Yamaji, M.Saka)
    • Journal Title

      Proceedings of IPACK2005, ASME (CD-ROM)(掲載予定)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Electromigration Failure of Metal Lines2005

    • Author(s)
      H.Abe (K.Sasagawa, M.Saka)
    • Journal Title

      Abstracts of 11th International Conference on Fracture

      Pages: 17-17

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Derivation of Film Characteristic Constants by Using Governing Parameter for Electromigration Damage in Passivated Bamboo Line2005

    • Author(s)
      M.Hasegawa (K.Sasagawa, M.Saka)
    • Journal Title

      Proc.11th International Conference on Fracture Paper ID 3699 (CD-ROM)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Effect of Line-Shape on Threshold Current Density of Electromigration Damage2005

    • Author(s)
      K.Sasagawa (S.Uno, N.Yamaji, M.Saka)
    • Journal Title

      Proc.IPACK2005, ASME Paper ID IPACK2005-73133 (CD-ROM)(in press)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Electromigration Failure of Metal Lines2005

    • Author(s)
      H.Abe, K.Sasagawa, M.Saka
    • Journal Title

      Proceedings of 11th International Conference on Fracture (CD-ROM)(Plenary lecture)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Derivation of Film Characteristic Constants by Using Governing Parameter for Electromigration Damage in Passivated Bamboo Line2005

    • Author(s)
      M.Hassegawa, K.Sasagawa, M.Saka
    • Journal Title

      Proceedings of 11th International Conference on Fracture (CD-ROM)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] ドリフト速度計測によるAl多結晶配線の物性定数の導出としきい電流密度の評価2004

    • Author(s)
      長谷川昌孝, (笹川和彦, 宇野茂雄, 坂 真澄)
    • Journal Title

      応用物理学会薄膜・表面物理分科会第10回LSI配線における原子輸送および応力問題研究会講演論文集

      Pages: 38-39

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] 配線端のドリフト速度計測による配線物性定数の導出法2004

    • Author(s)
      長谷川昌孝, (笹川和彦, 宇野茂雄, 坂 真澄)
    • Journal Title

      日本機械学会2004年度年次大会講演論文集(I) No.04-1

      Pages: 403-404

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] エレクトロマイグレーション前後におけるアルミバルク材の熱電能の検討2004

    • Author(s)
      笹川和彦, (佐藤 匠, 坂 真澄)
    • Journal Title

      日本機械学会東北支部第10期秋季講演会講演論文集 No.041-2

      Pages: 29-30

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] LSI配線のエレクトロマイグレーション特性に関する物性定数の導出としきい電流密度の評価2004

    • Author(s)
      笹川和彦, (長谷川昌孝, 宇野茂雄, 坂 真澄)
    • Journal Title

      日本材料学会第2回マイクロマテリアルシンポジウム講演論文集

      Pages: 80-83

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Verification of Prediction Method for Electromigration Failure Using Angled Polycrystalline Line2004

    • Author(s)
      S.Uno (M.Hasegawa, K.Sasagawa, M.Saka)
    • Journal Title

      Abstracts of Asian Pacific Conference for Fracture and Strength '04

      Pages: 105-105

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] ドリフト速度計測によるバンブー金属配線の物性定数の導出2004

    • Author(s)
      長谷川昌孝, (笹川和彦, 宇野茂雄)
    • Journal Title

      日本機械学会第17回計算力学講演会講演論文集 No.04-40

      Pages: 805-806

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Derivation of Film Constants of Al Polycrystalline Line by Drift Velocity Measurement and Evaluation of Threshold Current2004

    • Author(s)
      M.Hasegawa (K.Sasagawa, S.Uno, M.Saka)
    • Journal Title

      Proc.10th Conf.Atomic Transportation and Stress Problem in LSI Metallization

      Pages: 38-39

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Derivation of Film Characteristic Constants by Drift Velocity Measurement2004

    • Author(s)
      M.Hasegawa (K.Sasagawa, S.Uno, M.Saka)
    • Journal Title

      Proc.Mechanical Engineering Congress Japan 04 (I) No.04-1

      Pages: 403-404

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Absolute Thermopower of Aluminum Wire before and after Electromigration2004

    • Author(s)
      K.Sasagawa (T.Sato, M.Saka)
    • Journal Title

      Proc.the Autumn Meeting of JSME Tohoku Division No.041-2

      Pages: 29-30

    • NAID

      110004059830

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Derivation of Film Constants Concerning Electromigration Characteristics and Evaluation of Threshold Current Density2004

    • Author(s)
      K.Sasagawa (M.Hasagawa, S.Uno, M.Saka)
    • Journal Title

      Proc.the 2nd Symposium on Micromaterials, JSMS

      Pages: 80-83

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Derivation of Film Characteristic Constants in Bamboo Line by Drift Velocity Measurement2004

    • Author(s)
      M.Hasegawa (K.Sasagawa, S.Uno)
    • Journal Title

      Proc.the 17th Computational Mechanics Conference No.04-40

      Pages: 805-806

    • NAID

      110004070593

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] ドリフト速度計測によるAl多結晶配線の物性定数の導出としきい電流密度の評価2004

    • Author(s)
      長谷川昌孝, 笹川和彦, 宇野茂雄, 坂 真澄
    • Journal Title

      応用物理学会薄膜・表面物理分科会第10回LSI配線における原子輸送および応力問題研究会講演論文集

      Pages: 38-39

    • Related Report
      2004 Annual Research Report
  • [Journal Article] 配線端のドリフト速度計測による配線物性定数の導出法2004

    • Author(s)
      長谷川昌孝, 笹川和彦, 宇野茂雄, 坂 真澄
    • Journal Title

      日本機械学会2004年度年次大会講演論文集(I) No.04-1

      Pages: 403-404

    • Related Report
      2004 Annual Research Report
  • [Journal Article] LSI配線のエレクトロマイグレーション特性に関する物性定数の導出としきい電流密度の評価2004

    • Author(s)
      笹川和彦, 長谷川昌孝, 宇野茂雄, 坂 真澄
    • Journal Title

      第2回マイクロマテリアルシンポジウム講演論文集

      Pages: 80-83

    • Related Report
      2004 Annual Research Report
  • [Journal Article] ドリフト速度計測によるバンブー金属配線の物性定数の導出2004

    • Author(s)
      長谷川昌孝, 笹川和彦, 宇野茂雄
    • Journal Title

      日本機械学会第17回計算力学講演会講演論文集 No.04-40

      Pages: 805-806

    • Related Report
      2004 Annual Research Report
  • [Journal Article] 保護膜の厚さを考慮した保護膜被覆多結晶配線の断線故障予測2003

    • Author(s)
      笹川和彦, (長谷川昌孝, 坂 真澄)
    • Journal Title

      M&M2003日本機械学会材料力学部門講演会講演論文集 No.03-11

      Pages: 609-610

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] 保護膜厚さを考慮した集積回路配線の断線故障予測法2003

    • Author(s)
      笹川和彦, (長谷川昌孝, 吉田直樹, 坂 真澄)
    • Journal Title

      日本材料学会第11回破壊力学シンポジウム講演論文集

      Pages: 127-132

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Evaluation Method of the Threshold Current Density for Electromigration Damage in IC Metal Lines2003

    • Author(s)
      M.Hasegawa, (K.Sasagawa, M.Saka)
    • Journal Title

      Proceedings of The Second Japan-Taiwan Workshop on Mechanical and Aerospace Engineering

      Pages: 129-137

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] 配線端部におけるエレクトロマイグレーション損傷支配パラメータを用いた配線物性値の導出2003

    • Author(s)
      長谷川昌孝, (笹川和彦, 渡邊祥達, 宇野茂雄, 坂 真澄)
    • Journal Title

      日本機械学会第16回計算力学講演会講演論文集 No.03-26

      Pages: 665-666

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] 配線端部のドリフト速度計測に基づいた金属薄膜配線物性値の導出2003

    • Author(s)
      長谷川昌孝, (笹川和彦, 宇野茂雄, 坂 真澄)
    • Journal Title

      日本金属学会第2回東北支部大会講演論文集

      Pages: 10-11

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] エレクトロマイグレーション2003

    • Author(s)
      笹川和彦
    • Journal Title

      日本実験力学会誌「実験力学」 3・4

      Pages: 71-72

    • NAID

      10011869583

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Derivation of the Film Characteristic Constants Using the Governing Parameter for Electromigration Damage at Metal Line Ends2003

    • Author(s)
      M.Hasegawa, (K.Sasagawa, S.Uno, M.Saka)
    • Journal Title

      Proceedings of ISMME2003, The International Symposium on Micro-Mechanical Engineering, JSME

      Pages: 433-439

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Failure Prediction in Passivated Polycrystalline Line Considering Passivation Thickness2003

    • Author(s)
      K.Sasagawa (M.Hasegawa, M.Saka)
    • Journal Title

      Proc.2003 Annual Meeting of the JSME/MMD No.03-11

      Pages: 609-610

    • NAID

      110002489465

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Failure Prediction of the Metal Line in IC Considering Passivation Thickness2003

    • Author(s)
      K.Sasagawa (M.Hasegawa, N.Yoshida, M.Saka)
    • Journal Title

      Proc.the.11th Symposium on Fracture and Fracture Mechanics

      Pages: 127-132

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Evaluation Method of the Threshold Current Density for Electromigration Damage in IC Metal Lines2003

    • Author(s)
      M.Hasegawa (K.Sasagawa, M.Saka)
    • Journal Title

      Proc.the Second Japan-Taiwan Workshop on Mechanical and Aerospace Engineering, Tokyo Institute of Technology & Tohoku University

      Pages: 129-137

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Film Characteristics Derived by the Governing Parameter for Electromigration Damage at Metal Line End2003

    • Author(s)
      M.Hasegawa (K.Sasagawa, Y.Watanabe, S.Uno, M.Saka)
    • Journal Title

      Proc.the 16th Computational Mechanics Conference No.03-02

      Pages: 665-666

    • NAID

      110002489045

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Derivation of the Film Characteristic Constants Based on Drift Velocity Measurement2003

    • Author(s)
      M.Hasegawa (K.Sasagawa, S.Uno, M.Saka)
    • Journal Title

      Proc.the Second Tohoku Division Conference of the JIM

      Pages: 10-11

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Electromigration2003

    • Author(s)
      K.Sasagawa
    • Journal Title

      Journal of the Japanese Society for Experimental Mechanics 3(4)

      Pages: 71-72

    • NAID

      10011869583

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Derivation of the Film Characteristic Constants Using the Governing Parameter for Electromigration Damage at Metal Line Ends2003

    • Author(s)
      M.Hasegawa (K.Sasagawa, S.Uno, M.Saka)
    • Journal Title

      Proc.of ISMMMIE2003, The International Symposium on Micro-Mechanical Engineering, JSME

      Pages: 433-439

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Publications] M.Hasegawa, K.Sasagawa, M.Saka, H.Abe: "Expression of a Governing Parameter for Electromigration Damage on Metal Line Ends"Proc. of InterPACK '03, The Pacific Rim/ASME Int. Electronic Packaging Technical Conference & Exhibition. (CD-ROM). IPack2003-35064 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Sasagawa, M.Haseawa, M.Saka, H.Abe: "Prediction of Electromigration Failure in Passivated Polycrystalline Line Considering Passivation Thickness"Proc. of InterPACK '03, The Pacific Rim/ASME Int. Electronic Packaging Technical Conference & Exhibition. (CD-ROM). IPack2003-35065 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 長谷川昌孝, 笹川和彦, 坂 真澄: "配線端部におけるエレクトロマイグレーション損傷の支配パラメータ"日本機械学会2003年度年次大会講演論文集. VolVI・No.03-1. 239-240 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 笹川和彦, 長谷川昌孝, 吉田直樹, 坂 真澄: "保護膜厚さを考慮した集積回路配線の断線故障予測法"日本材料学会第11回破壊力学シンポジウム講演論文集. 127-132 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 長谷川昌孝, 笹川和彦, 渡邊祥達, 宇野茂雄, 坂 真澄: "配線端部におけるエレクトロマイグレーション損傷支配パラメータを用いた配線物性値の導出"日本機械学会第16回計算力学講演会講演論文集. No.03-02. 665-666 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 長谷川昌孝, 笹川和彦, 宇野茂雄, 坂 真澄: "配線端部のドリフト速度計測に基づいた金属薄膜配線物性値の導出"日本金属学会第2回東北支部大会講演論文集. 10-11 (2003)

    • Related Report
      2003 Annual Research Report

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Published: 2003-04-01   Modified: 2016-04-21  

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