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Formation of Functional Materials coated with Laminated Thin-Film and Establishment of Procedure to Evaluate Integrity Incorporating Material Microstructure

Research Project

Project/Area Number 15560070
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Materials/Mechanics of materials
Research InstitutionKYOTO UNIVERSITY

Principal Investigator

HOSHIDE Toshihiko  KYOTO UNIVERSITY, Graduate School of Energy Science, Professor, エネルギー科学研究科, 教授 (80135623)

Project Period (FY) 2003 – 2004
Project Status Completed (Fiscal Year 2004)
Budget Amount *help
¥4,200,000 (Direct Cost: ¥4,200,000)
Fiscal Year 2004: ¥1,100,000 (Direct Cost: ¥1,100,000)
Fiscal Year 2003: ¥3,100,000 (Direct Cost: ¥3,100,000)
KeywordsFunctional Material / Thin-Film Laminated Material / Mechanical Properties / Sputtering / Integrity Assessment / Microstructure / Surface Characteristics / Ceramics
Research Abstract

Functional materials coated with laminating films were produced by using an RF magnetron sputtering apparatus. In this study, ceramic material system of SiC/Al_2O_3 was selected as target material, and glass for electronic usage was as substrate. Two-layered film coating materials were generated under different sputtering conditions. The surface roughness and porosity were measured on the surface of two-layered films of SiC/Al_2O_3. As sputtering time became longer, the surface roughness was observed to be coarser. On the other hand, the porosity hardly depended on the sputtering condition, and its value was extremely low. Strength characteristics of materials coated with two-layered SiC/Al_2O_3 films were investigated. It was clarified that the strength in a lower strength region was improved in each coated material compared with the strength distribution of glass substrate. The strength in a higher strength region was, however, not improved so much. It was suggested that sputtering time gave great influence to a strength characteristic of coating materials ; i.e. longer sputtering time resulted in the decrease in the mechanical reliability which was associated with deteriorating homogeneity of coated films. Although a delamination phenomenon observed in SiC single coating film, such a delamination could be avoided by coating Al_2O_3 between glass substrate and SiC. In producing functional materials coated with laminating films, sputtering condition should be adopted so that sputtering time was reduced by considering conformity of substrate and coating materials. By selecting such a condition, strength characteristics of coated materials in service could be improved, and its integrity could be guaranteed. Furthermore, it was revealed that strength characteristics as index of integrity of coated materials could be evaluated by a measurement of the dynamic microhardness including substrate hardness.

Report

(3 results)
  • 2004 Annual Research Report   Final Research Report Summary
  • 2003 Annual Research Report
  • Research Products

    (5 results)

All 2004 2003 Other

All Journal Article (4 results) Publications (1 results)

  • [Journal Article] Mechanical Properties of Borosilicate Glass Coated with Pure Aluminum by Sputtering2004

    • Author(s)
      Toshihiko Hoshide, Maki Akamatsu
    • Journal Title

      Journal of Materials Engineering and Performance 13・5

      Pages: 588-592

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Annual Research Report 2004 Final Research Report Summary
  • [Journal Article] Mechanical Properties of Borosilicate Glass Coated with Pure Aluminum by Sputtering2004

    • Author(s)
      T.Hoshide, M.Akamatsu
    • Journal Title

      Journal of Materials Engineering and Performance Vol.13, No.5

      Pages: 588-592

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] A Statistical Approach to Strength Evaluation Incorporating Porosity Effect for Porous Ceramics2003

    • Author(s)
      Toshihiko Hoshide, Junko Abe
    • Journal Title

      Fatigue and Fracture of Engineering Materials and Structures 26

      Pages: 383-389

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] A Statistical Approach to Strength Evaluation Incorporating Porosity Effect for Porous Ceramics2003

    • Author(s)
      T.Hoshide, J.Abe
    • Journal Title

      Fatigue and Fracture of Engineering Materials and Structures Vol.26

      Pages: 383-389

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Publications] T.Hoshide, J.Abe: "A Statistical Approach to Strength Evaluation Incorporating Porosity Effect for Porous Ceramics"Fatigue and Fracture of Engineering Materials and Structures. 26. 383-389 (2003)

    • Related Report
      2003 Annual Research Report

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Published: 2003-04-01   Modified: 2016-04-21  

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