| Project/Area Number |
15560099
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Toyama Prefectural University |
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Principal Investigator |
NOMURA Takashi Toyama Prefectural University, Faculty of Engineering, Professor, 工学部機械システム工学科, 教授 (00104977)
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| Co-Investigator(Kenkyū-buntansha) |
KAMIYA Kazuhide Toyama Prefectural University, Faculty of Engineering, Associate Professor, 工学部機械システム工学科, 講師 (00244509)
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| Project Period (FY) |
2003 – 2005
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| Project Status |
Completed (Fiscal Year 2005)
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| Budget Amount *help |
¥3,000,000 (Direct Cost: ¥3,000,000)
Fiscal Year 2005: ¥600,000 (Direct Cost: ¥600,000)
Fiscal Year 2004: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 2003: ¥1,500,000 (Direct Cost: ¥1,500,000)
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| Keywords | Aspherical / Shape measurement / On-machine / Shearing interferometer / Zone plate |
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| Research Abstract |
To measure an aspherical surface processed by an ultra precision lath, an on-machine measurement system was developed as follows:
1)Shearing interferometer : A shearing interferometer was developed to measure the asperical surface on the ultra precision lath just after the processing. Because a part of an interferogram was covered with a tool post, the intensity of the interferogram acquired by a line CCD camera was analyzed. And a zone plate was used to generate the aspherical wave front.
2)Software : Software was developed to analyze the interferograms. The interferograms were obtained every time that the measured surface was turned fixed angle. Therefore, each interferogram was analyzed to obtained a line shape passing through the turning center and the line shapes were assembled to construct aspherical surface. And an algorism was developed to fit a curve into measured shape.
3)Experiment and results : A spherical mirror with shape error in center point was measured to estimate an ability of developed system. The result obtained by developed system agree well with the result obtained by Fizeau interferometer.
4)Proposal of new principle : A method of measurement using many sphere wave fronts with various curvatures was proposed to measure these aspherical surfaces. Validity of proposed method was confirmed by simulations and experiments.
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