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The establishment of the way of processing nano size high precision on the surface of polymer thin films by the low temperature plasma

Research Project

Project/Area Number 15560635
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Material processing/treatments
Research InstitutionKitakyushu National College of Technology

Principal Investigator

YAMANE Hirokazu  Kitakyushu National College of Technology, Department of Materials Science and Chemical Engineering, Assosiate Professor, その他部局等, 助教授 (70332096)

Project Period (FY) 2003 – 2004
Project Status Completed (Fiscal Year 2004)
Budget Amount *help
¥1,900,000 (Direct Cost: ¥1,900,000)
Fiscal Year 2004: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 2003: ¥1,000,000 (Direct Cost: ¥1,000,000)
Keywordslow-temperature plasma / plasma processing / fine surface morphology / high precision processing / polymer thin film / plasma etchig / nano size processing / plasma polymerization / 表面・界面
Research Abstract

The surface finishing by the low temperature plasma, such as plasma etching and plasma polymerization is very effective in polymer surface improvement physically and chemically. However, the technology where as for low temperature plasma finishing is still unclear and process control to design the polymer surface precisely is not established. Then in this research, in order to investigate the relationship between the surface morphologies and the functions of polymer thin films, the process to design the fine surface morphologies of polymer thin films was controlled by both the cold plasma etching and the cold plasma polymerization. Both the bell jar-type reactor and the chamber-type reactor were used for the cold plasma treatment. PVA thin films spin-coated from 1 or 3wt% PVA aqueous solution on the glass substrates was prepared. The surface morphology of the PVA thin film after annealing at 488 K for 1 h was flat and smooth in all regions compared to that before annealing. Plasma irra … More diation condition was at 50 W and 0.1 Torr. Plasma irradiation times were 30, 60, 90, 120, 180 s after annealing at 383 K and 488 K, respectively. The surface morphologies of the PVA thin films were observed by using atomic force microscopy (AFM). The surface morphology of the thin film after Ar plasma irradiation at 50 W and 0.1 Torr for 60 s was unevenness of the order of 50 nm. The surface morphology of the thin film after Ar plasma irradiation at 50 W and 0.1 Torr for 600 s was flat and smooth in all regions again because of the long period of the plasma etching. In the case of low-crystalline PVA thin films annealed at 383 K, the magnitude of the roughness parameter (the center line average roughness), Ra decreased with the elapse of plasma irradiation time. On the other hand, in the case of the high-crystalline PVA thin films annealed at 488 K, the magnitude of the Ra increased with the elapse of plasma irradiation time up to 60 s, then it decreased. It has been found that the surface morphologies of the thin films obtained by Ar plasma treatment were strongly influenced by the thermal pretreatment of the films. On the other hand, the surface morphologies of the PI thin films graft-polymerized with vinylimidazole were observed by using AFM and X-ray photoelectron spectroscopy (XPS) analysis. It confirmed that polyimidazole which grafted by plasma graft polymerization on the PI thin films formed. Less

Report

(3 results)
  • 2004 Annual Research Report   Final Research Report Summary
  • 2003 Annual Research Report
  • Research Products

    (21 results)

All 2005 2003 Other

All Journal Article (17 results) Publications (4 results)

  • [Journal Article] Fine Surface Morphology Control of Polymer Thin Films by Plasma Surface Modification2005

    • Author(s)
      Hirokazu Yamane, Yuki Ohba, Kenji Yamada, Tisato Kajiyama
    • Journal Title

      The IPC 2005 Preprints

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Annual Research Report 2004 Final Research Report Summary
  • [Journal Article] 低温プラズマ重合法による高分子薄膜表面の高精度微細加工2005

    • Author(s)
      山根大和, 大場佑樹, 山田憲二, 梶山千里
    • Journal Title

      第54回高分子年次大会予稿集 54

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] 低温プラズマ重合法による高分子薄膜表面の高精度微細加工制御2005

    • Author(s)
      山根大和, 大場佑樹, 山田憲二, 梶山千里
    • Journal Title

      第42回化学関連支部合同九州大会予稿集

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Fine Surface Morphology Control of Polymer Thin Films by Plasma Surface Modification2005

    • Author(s)
      Hirokazu Yamane, Yuki Ohba, Kenji Yamada, Tisato Kajiyama
    • Journal Title

      The IPC 2005 Preprints 28P1G4-078b

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Fine Surface Morphology Control of Polymer Thin Films by Using Low-Temperature Plasma Technique2005

    • Author(s)
      Hirokazu Yamane, Yuki Ohba, Kenji Yamada, Tisato Kajiyama
    • Journal Title

      54^<th> SPSJ Annual Meeting Polymer Preprints, Japan 54,1

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Surface Modification of Liquid-Crystalline Polymer Film by Plasma Treatment2005

    • Author(s)
      Kenji Yamada, Hirokazu Yamane, Shigenori Matsushima, Hiroyuki Nakamura, Shunsuke Ide, Takeshi Uchida, Kiyoshi Kumada, Ryuma Nakamura^1, Tisato Kajiyama
    • Journal Title

      Research Report of Kitakyushu National college of Technology 38

      Pages: 81-85

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] 低温プラズマ重合法による高分子薄膜表面の高精度微細加工2005

    • Author(s)
      山根大和, 大場佑樹, 山田憲二, 梶山千里
    • Journal Title

      第54回高分子年次大会予稿集

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Effect of Thermal Pretreatment on Fine Surface Morphology Control of Polymer Thin Films by Using Cold Plasma Treatment2003

    • Author(s)
      H.Yamane, K.Kumada, K.Yamada, T.Kaiiyama
    • Journal Title

      Proceedings of 2003 Pusan-Kyeongnam/Kyushu-Seibu Joint Symposium on High Polymers(11^<th> and fibers(9^<th>)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] 低温プラズマによる液晶高分子フィルムの表面改質2003

    • Author(s)
      中村 竜馬, 熊田 清, 山根 大和, 山田 憲二, 梶山 千里
    • Journal Title

      2003年日本化学会西日本大会 講演予稿集

      Pages: 172-172

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Plasma-Graft Polymerization of a Monomer with Double Bonds onto the Surface of Carbon Fiber and Its Adhesion to a Vinyl Ester Resin2003

    • Author(s)
      K.Yamada, H.Yamane, K.Kumada, S.Tanabe, T.Kajiyama
    • Journal Title

      Journal of Applied Polymer Science 90

      Pages: 2415-2419

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Effect of Thermal Pretreatment on Fine Surface Morphology Control of Polymer Thin Films by Using Cold Plasma Treatment2003

    • Author(s)
      Hirokazu Yamane, Kiyoshi Kumada, Kenji Yamada, Tisato Kajiyama
    • Journal Title

      Proceedings of 2003 Pusan-Kyeongnam/Kyushu-Seibu Joint Symposium on High Polymers(11^<th>) and fibers(9^<th>)

      Pages: 23-23

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Plasma-Graft Polymerization of a Monomer with Double Bonds onto the Surface of Carbon Fiber and Its Adhesion to a Vinyl Ester Resin2003

    • Author(s)
      Kenji Yamada, Hirokazu Yamane, Kiyoshi Kumada, Seiji Tanabe, Tisato Kajiyama
    • Journal Title

      Journal of Applied Polymer Science 90

      Pages: 2415-2419

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Effect of Thermal Pretreatment on Fine Surface Morphology Control of Plymer Thin Films by Using Low-Temperature Plasma Technique2003

    • Author(s)
      Hirokazu Yamane, Seiji Tanabe, Kiyoshi Kumada, Kenji Yamada, Tisato Kajiyama
    • Journal Title

      Research Report of Kitakyushu National college of Technology 36

      Pages: 95-98

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Effect of Thermal Pretreatment on Fine Surface Morphology Control of Polymer Thin Films by Using Cold Plasma Treatment2003

    • Author(s)
      H.Yamane, K.Kumada, K.Yamada, T.Kajiyama
    • Journal Title

      Proceedings of 2003 Pusan-Kyeongnam/Kyushu-Seibu Joint Symposium on High Polymers(11^<th>) and fibers(9^<th>)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] 低温プラスマによる液晶高分子フィルムの表面改質2003

    • Author(s)
      中村 竜馬, 熊田 清, 山根 大和, 山田 憲二, 梶山 千里
    • Journal Title

      2003年日本化学会西日本大会講演予稿集

      Pages: 172-172

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Plasma-Graft Polymerization of a Monomer with Double Bonds onto the Surface of Carbon Fiber and Its Adhesion to a Vinyl Ester Resin2003

    • Author(s)
      K.Yamada, H.Yamane, K.Kumada, S.Tanabe, T.Kajiyama
    • Journal Title

      Journal of Applied Polymer Science Vol.90

      Pages: 2415-2419

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Plasma Surface Modification of Titanium Dioxide Particles for Improved Light Cleaning2003

    • Author(s)
      K.Yamada, H.Nakamura, S.Matsushima, H.Yamane, K.Kumada, T.Kajiyama
    • Journal Title

      Abstracts of The 8^<th> IUMRS International Conference on Advanced Materials

      Pages: 95-95

    • Related Report
      2004 Annual Research Report
  • [Publications] H.Yamane, K.Kumada, K.Yamada, T.Kajiyama: "Effect of Thermal Pretreatment on Fine Surface Morphology Control of Polymer Thin Films by Using Cold Plasma Treatment"Proceedings of 2003 Pusan-Kyeongnam/Kyushu-Seibu Joint Symposium on High Polymers (11^<th>) and fibers (9^<th>). 023 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Yamada, H.Yamane, K.Kumada, S.Tanabe, T.Kajiyama: "Plasma-Graft Polymerization of a Monomer with Double Bonds onto the Surface of Carbon Fiber and Its Adhesion to a Vinyl Ester Resin"Journal of Applied Polymer Science. Vol.90. 2415-2419 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Yamada, H.Nakamura, S.Matsushima, H.Yamane, T.Kajiyama: "Surface Modification of Titanium Dioxide Particles in RF Plasmas"Book of Abstracts of 21^<st> International Conference on Photochemistry. 582 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Yamada, H.Nakamura, S.Matsushima, H.Yamane, K.Kumada, T.Kajiyama: "Plasma Surface Modification of Titanium Dioxide Particles for Improved Light Cleaning"Abstracts of The 8^<th> IUMRS International Conference on Advanced Materials. 95 (2003)

    • Related Report
      2003 Annual Research Report

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Published: 2003-04-01   Modified: 2016-04-21  

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