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Development of deep UV light emitting devices using nano-technology and the application

Research Project

Project/Area Number 15GS0207
Research Category

Grant-in-Aid for Creative Scientific Research

Allocation TypeSingle-year Grants
Research InstitutionRitsumeikan University (2007)
Tokyo Institute of Technology (2003-2006)

Principal Investigator

AOYAGI Yoshinobu  Ritsumeikan University, Center for Promotion of the COE Program, Professor (70087469)

Co-Investigator(Kenkyū-buntansha) TAKEUCHI Misaichi  Riken Institute, Nano-science Research Program, Researcher (60284585)
INOUE Shinnichiro  Kyushu University, Institute of Materials Chemistry and Engineering, Assistant Professor (20391865)
HIRAYAMA Hideki  Riken Institute, Tera-Hertz Quantum Device Group, Team Leader (70270593)
MATSUMOTO Yuji  Tokyo Institute of Technology, Interdisciplinary Graduate School of Science and Engineering, Associate Professor (60302981)
KOINUMA Hideomi  The University of Tokyo, Graduate School of Frontier Science, Professor (70011187)
前田 瑞夫  東京工業大学, 理化学研究所・バイオ工学研究室, 主任研究員 (10165657)
川崎 宏治  東京工業大学, 大学院総合理工学研究科, 助手 (10234056)
荒川 泰彦  東京大学, 先端科学技術研究センター, 教授 (30134638)
Project Period (FY) 2003 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥474,890,000 (Direct Cost: ¥365,300,000、Indirect Cost: ¥109,590,000)
Fiscal Year 2007: ¥95,680,000 (Direct Cost: ¥73,600,000、Indirect Cost: ¥22,080,000)
Fiscal Year 2006: ¥96,590,000 (Direct Cost: ¥74,300,000、Indirect Cost: ¥22,290,000)
Fiscal Year 2005: ¥95,940,000 (Direct Cost: ¥73,800,000、Indirect Cost: ¥22,140,000)
Fiscal Year 2004: ¥91,650,000 (Direct Cost: ¥70,500,000、Indirect Cost: ¥21,150,000)
Fiscal Year 2003: ¥95,030,000 (Direct Cost: ¥73,100,000、Indirect Cost: ¥21,930,000)
Keywordsdeep UV LED / two light beam in-situ monitoring system / vertical type Deep UV LED / hetero nonlinear photonic crystal / anti-surfactant method / flax crystal growth technique / boron oxide material / temperature modulation technique / 縦型深紫外LED / 良質AlGaN / 表面核生成機構 / 量子ドットAlInGaN / 非線型フォトニック結晶 / 高効率深紫外波長変換 / フラックス法 / p型ZnO / MOCVD / Al GaN / 深紫外線 / 結晶成長 / 縦型LED / 低転移化 / レーザーリフトオフ / AlGaN / 低転位化 / 深紫外 / 半導体発光デバイス / ナノテクノロジー / Al N / p型 / ドーピング / LED / ワイドバンドギャップ
Research Abstract

In this project we have proposed several new technologies on development of solid state high power deep UV (DUV) light emitting devices (LEDs), which could essentially solve a lot of environmental problems concerned by many people nowadays, and have proven the real possibility of our proposal toward the high power DUV light emitting devices. Epitaxial crystal growth procedures have fundamentally been clarified by some scientific approaches. Highly-doping technologies for p-type widegap semiconductors and highly-efficient nonlinear photonic crystals have been developed. Our results are as follows:
1.Epitaxial growth mechanism of A1GaN-based materials and hetero structures has scientifically been revealed by a newly developed in-situ monitoring system instead of previous experiential approach.
2.Development of vertical-type DUV LEDs emitting at 280 nm has been succeeded, which promise future high-power operation.
3.InAlGaN quantum dot DUV LEDs have firstly been operated at 355nm.
4.Extremely enhanced SHG has been generated by newly developed hetero nonlinear photonic crystals. The efficiency was more than 300 times compared with balk nonlinear materials. DUV laser was operated at 325 nm by this technology.
5.Epitaxial growth of new nonlinear-photonic-crystal thin films (RECa4O(BO3)3RECOB) has been succeeded by flax crystal growth technique.
6.P-type doping of ZnO materials has been accomplished by introducing growth temperature modulation with combinatorial technique.
These results are published in about 50 original papers and presented in international conference of more than 65 including 8 invited papers. About 75 papers are presented in domestic conference. Patents obtained or required are 13. Typical examples for each are listed in following sheets

Report

(6 results)
  • 2007 Annual Research Report   Final Research Report Summary
  • 2006 Annual Research Report
  • 2005 Annual Research Report
  • 2004 Annual Research Report
  • 2003 Annual Research Report
  • Research Products

    (182 results)

All 2008 2007 2006 2005 2004 2003

All Journal Article (107 results) (of which Peer Reviewed: 66 results) Presentation (55 results) Book (7 results) Patent(Industrial Property Rights) (13 results) (of which Overseas: 2 results)

  • [Journal Article] Excitation-Density Dependence of Photoluminescence from 3i-dopedAIGaN/AIGaN Multiple Quantum Wells at Low Temperature2008

    • Author(s)
      R.Kajitani
    • Journal Title

      Jpn.J.Appl.Pbys. 47

      Pages: 47-50

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] First Operation of AIGaN Channel High Electron Mobility Transistors2008

    • Author(s)
      T.Nanjo
    • Journal Title

      Appl.Phys.Express 1

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Improvement of Al-Polar AIN Layer Quality by Three-StageFlow-Modulation Metalorganic Chemical Vapor Deposition2008

    • Author(s)
      M.Takeuchi
    • Journal Title

      Appl.Phys.Express 1

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Direct determination of photonic band structure for waveguiding modes intwo-dimensional photonic crystals2008

    • Author(s)
      S.Inoue
    • Journal Title

      Optics Express 16

      Pages: 2461-2468

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Quaternary InAIGaN quantum-dot ultraviolet light-emitting diode emitting at 335 nm fabricated by an anti-surfactant method2008

    • Author(s)
      H.Hirayama
    • Journal Title

      Physica Status Solidi(c) 5

      Pages: 2312-2315

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Excitation-Density Dependence of Photo-luminescence from Si-doped AIGaN/GaN Multiple Quantum Wells at Low Temperature2008

    • Author(s)
      R. Kajitani
    • Journal Title

      Jpn. J. Appl. Phys. 47

      Pages: 47-501

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] First Operation of AIGaN Channel High Electron Mobility Transistors2008

    • Author(s)
      T. Nanjo
    • Journal Title

      Appl. Phys. Express 1

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Improvement of Al-Polar MN Layer Quality by Three-Stage Flow-Modulation Metalorganic Chemical Vapor Deposition2008

    • Author(s)
      M. Takeuchi
    • Journal Title

      Appl. Phys. Express 1

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Direct determination of photonic band structure for waveguiding modes in two-dimensional photonic crystals2008

    • Author(s)
      S. Inoue
    • Journal Title

      Optics Express 16

      Pages: 2461-2468

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Quaternary InAIGaN quantum-dot ultraviolet light-emitting diode emitting at 335 nm fabricated by an anti-surfactant method2008

    • Author(s)
      H. Hirayama
    • Journal Title

      Physica Status Solidi(a) (in press)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Excitation-Density Dependence of Photoluminescence from Si-doped AlGaN/AlGaN Multiple Quantum Wells at Low Temperature2008

    • Author(s)
      R. Kajitani,
    • Journal Title

      Jpn, J. Appl. Phys. 47

      Pages: 47-50

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] First Operation of AlGaN Channel High Electron Mobility Transistors2008

    • Author(s)
      T. Nanjo
    • Journal Title

      Appl. Phys. Express 1

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Improvement of Al-Polar AlN Layer Quality by Three-Stage Flow-Modulati on Metalorganic Chemical Vapor Deposition2008

    • Author(s)
      M. Takeuchi
    • Journal Title

      Appl. Phys. Express 1

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Quaternary InAlGaN quantum-dot ultraviolet light-emitting diode emitting at 335 nm fabricated by an anti-surfactant method2008

    • Author(s)
      H. Hirayama
    • Journal Title

      Phys. Stat. Solidi QDQ0760

      Pages: 1-10

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Direct determination of photonic band structure for waveguiding modes in two-dimensional photonic crystals2008

    • Author(s)
      S. Inoue,
    • Journal Title

      Optics Express Vol.16

      Pages: 2461-2468

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] フラックスエピタキシー:酸化物完全単結晶薄膜への挑戦2008

    • Author(s)
      松本 祐司
    • Journal Title

      機能材料 28

      Pages: 1-10

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 高効率大面積AlGaN深紫外発光素子実現のためのMOCVD成長2008

    • Author(s)
      武内道一、
    • Journal Title

      日本結晶成長学会特別講演会・日本学術振興会第161委員会第54回研究会資料

      Pages: 21-28

    • Related Report
      2007 Annual Research Report
  • [Journal Article] Barrier-height and well-width dependence of photoluminescence from AIGaN-based quantum well structures for deep-UV emitters2007

    • Author(s)
      R.Kajitani
    • Journal Title

      Materials Science&Engineering B 139

      Pages: 186-191

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Al-and N-polar AIN layers grown on c-plane sapphire substrates bymodified flow-modulation MOCVD2007

    • Author(s)
      M.Takeuchi
    • Journal Title

      J.Crystal Growth 305

      Pages: 360-365

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Polarity dependence of AIN{0001}decomposition in flowing H_22007

    • Author(s)
      Y.Kumagai
    • Journal Title

      J.Crystal Growth 305

      Pages: 366-371

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] TEM analysis of an interface layer by the anti-surfactant treatment on a GaN template2007

    • Author(s)
      N.Kuwano
    • Journal Title

      J.Crystal Growth 298

      Pages: 284-287

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Improvement of crystalline quality of N-polar AIN layers on c-planesapphire by low-pressure flow-modulated MOCVD2007

    • Author(s)
      M.Takeuchi
    • Journal Title

      J.Crystal Growth 298

      Pages: 336-340

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Defect-free two-dimensional-photonic crystal structures on a nonlinearoptical polymer patterned by nanoimprint lithography2007

    • Author(s)
      M.Okinaka
    • Journal Title

      J.Vac.Sci.Technol B25

      Pages: 899-901

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] フラックスエピタキシー法を用いたScAlMgO_4薄膜成長2007

    • Author(s)
      石井 誉
    • Journal Title

      Journal of Flux Growth 2

      Pages: 75-75

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Barrier-height and well-width dependence of photoluminescence from AIGaN-based quantum well structures for deep-UV emitters2007

    • Author(s)
      R. Kajitani
    • Journal Title

      Materials Science & Engineering B 139

      Pages: 186-191

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Al- and N-polar A1N layers grown on c-plane sapphire substrates by modified flow-modulation MOCVD2007

    • Author(s)
      M. Takeuchi
    • Journal Title

      Crystal Growth 305

      Pages: 360-365

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] TEM analysis of an interface layer formed by the anti-surfactant treatment on a GaN template2007

    • Author(s)
      N. Kuwano
    • Journal Title

      J. Crystal Growth 298

      Pages: 284-287

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Improvement of crystalline quality of N-polar MN layers on c-plane sapphire by low-pressure flow-modulated MOCVD2007

    • Author(s)
      M. Takeuchi
    • Journal Title

      J. Crystal. Growth 298

      Pages: 336-340

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Defect-free two-dimensional-photonic crystal structures on a nonlinear optical polymer patterned by nanoimprint lithography2007

    • Author(s)
      M. Okinaka
    • Journal Title

      J. Vac. Sci. Technol., B 25

      Pages: 899-901

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Al-and N-polar AlN layers grown on c-plane sapphire substrates by modified flow-modulation MOCVD2007

    • Author(s)
      M. Takeuchi,
    • Journal Title

      J. Crystal Growth 305

      Pages: 360-365

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Polarity dependence of AlN {0001} decomposition in flowing H_22007

    • Author(s)
      Y. Kumagai
    • Journal Title

      J. Crystal Growth 305

      Pages: 360-365

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Barrier-height and well-width dependence of photoluminescence from AlGaN-based quantum well structures for deep-UV emitters2007

    • Author(s)
      R. Kajitani,
    • Journal Title

      Materials Science & Engineering B 139

      Pages: 186-191

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Defect-free two-dimensional-photonic crystal structures on a nonlinear optical polymer patterned by nanoimprint lithography2007

    • Author(s)
      M. Okinaka,
    • Journal Title

      J. Vac. Sci. Technol. B Vol.25

      Pages: 899-901

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] フラックスエピタキシー法を用いたScAlMgO_4薄膜成長2007

    • Author(s)
      H. Ishii
    • Journal Title

      Journal of Crystal Growth. 2

      Pages: 75-78

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 「深紫外半導体発光素子およびTHz量子カスケードレーザの開発」2007

    • Author(s)
      平山秀樹
    • Journal Title

      電気学会、光・量子デバイス研究会資料 OQD-07-60

      Pages: 1-10

    • NAID

      10025660536

    • Related Report
      2007 Annual Research Report
  • [Journal Article] Binary composition spread approach for parallel pulsed laser deposition synthesis and highthroughput characterization of transparent and semiconducting oxide thin films2007

    • Author(s)
      Joshi, U.S.
    • Journal Title

      Indian Journal of Pure & Applied Physics 45

      Pages: 62-65

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Oxide materials research for global environment and energy with a focus on CO2 fixation into polymers2007

    • Author(s)
      Koinuma, H.
    • Journal Title

      Reactive & Functional Polymers 11

      Pages: 1129-1136

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Improvement of crystalline quality of N-polar AlN layers on c-plane sapphire by low-pressure flow-modulated MOCVD2007

    • Author(s)
      M.Takeuchi, H.Shimizu, R.Kajitani, K.Kawasaki, Y.Kumagai, A.Koukits, Y.Aoyagi
    • Journal Title

      J. Crystal Growth, 298

      Pages: 336-336

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Fabrication of GaN-based striped structures along the<11-20>direction bythe combination of RIE dry-etching and KOH wet-etching techniques torecover dam-etching damage2006

    • Author(s)
      M.Itoh
    • Journal Title

      Phys.Stat.Sol.(c) 3

      Pages: 1624-1628

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Straight and Smooth Etching of GaN(1-100)Plane by Combination ofReactive Ion Etching and KOH Wet Etching Techniques2006

    • Author(s)
      M.Itoh
    • Journal Title

      Jpn.J.Appl.Phys. 45

      Pages: 3988-3991

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] TEM analysis of annihilation process of threading dislocations in GaN thinfilms grown by MOVPE with anti-surfactant treatment2006

    • Author(s)
      M.Hijikuro
    • Journal Title

      Phys.Stat.Sol.(c) 3

      Pages: 1832-1835

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Vertical AIGaN deep ultraviolet light a mitting diode emitting at 322 nmfabricated by the laser lift-off technique2006

    • Author(s)
      K.Kawasaki
    • Journal Title

      Appl.Phys.Lett. 89

      Pages: 261114-261116

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] 深紫外窒化物系発光デバイス2006

    • Author(s)
      川崎 宏治
    • Journal Title

      光学 35

      Pages: 264-253

    • NAID

      10017484853

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Ultraviolet second-harmonic generation and sum-frequency mixing in atwo-dimensional nonlinear optical polymer photonic crystal2006

    • Author(s)
      S.Inoue
    • Journal Title

      Jpn.J.Appl.Phys. 45

      Pages: 6103-6107

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Nonlinear optical polymer patterned by nanoimprint lithography as aphotonic crystal waveguide structure2006

    • Author(s)
      M.Okinaka
    • Journal Title

      J.Vac.Sci.Technol. B24

      Pages: 271-273

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Investigation of defects in GaNwith varying Mg doping concentrations2006

    • Author(s)
      T.Obata
    • Journal Title

      Phys.Stat.Sol.(c) 3

      Pages: 1775-1778

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Combinatorial Experimentation and Materials Informatics2006

    • Author(s)
      I.Takeuchi
    • Journal Title

      MRS Bulletin 31

      Pages: 999-1003

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] A combinatorial approach to the discover and opimization of YCa_4O(BO_3)_3-basead liminsescent materials2006

    • Author(s)
      H.Sano
    • Journal Title

      Appl.Surf.Sci. 252

      Pages: 2493-2496

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Shifting donor-acceptor photoluminescence in N-doped ZnO2006

    • Author(s)
      T.Makino
    • Journal Title

      J.Physical Society of Japan 75

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] '光学設計2006

    • Author(s)
      青柳 克信
    • Journal Title

      情報機構

      Pages: 455-465

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Fabrication of GaN-based striped structres along the<11-20> direction by the combination of RIE dry-etching and KOH wet-etching techniques to recover dry-etching damage2006

    • Author(s)
      M. Itoh
    • Journal Title

      Phys. Stat. Sol.(c) 3

      Pages: 1624-1628

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Straight and Smooth Etching of GaN(1-100) Plane by Combination of Reactive Ion Etching and KOH Wet Etching Techniques2006

    • Author(s)
      M. Itoh
    • Journal Title

      Jpn. J. Appl. Phys. 45

      Pages: 3988-3991

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] TEM analysis optannihilation process or threading dislocations in GaN thin films grown by MOVPE with anti-surfactant treatment2006

    • Author(s)
      M. Hijikuro
    • Journal Title

      Phys. Stat. Sol.(c) 3

      Pages: 1832-1835

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Vertical AlGaN deep ultraviolet light emitting diode emitting at 322nm fabricated by the laser lift-off technique2006

    • Author(s)
      K. Kawasaki
    • Journal Title

      Appl. Phys. Lett. 89

      Pages: 261114-261114

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Ultraviolet second-harmonic generation and sum-frequency mixing in a two-dimensional nonlinear optical polymer photonic crystal2006

    • Author(s)
      S. Inoue
    • Journal Title

      Jpn. J. Appl. Phys. 45(Special Issue)

      Pages: 6103-6107

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Nonlinear optical polymer patterned by nanoimprint lithography as a photonic crystal waveguide structure2006

    • Author(s)
      M. Okinaka
    • Journal Title

      J. Vac. Sci. Technol. B 24

      Pages: 271-273

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Investigation of defects in GaN with varying Mg doping concentrations2006

    • Author(s)
      T. Obata
    • Journal Title

      Phys. Stat. Sol.(c) 3

      Pages: 1775-1778

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Combinatorial Experimentation and Materials Informatics2006

    • Author(s)
      I. Takeuchi
    • Journal Title

      MRS Bulletin. 31

      Pages: 999-1003

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] A combinatorial approach to the discovery and optimization of RECa_4O(BO_3)_3-based luminescent matPrialc2006

    • Author(s)
      H. Sano
    • Journal Title

      Appl. Surf. Sci. 252

      Pages: 2493-2496

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Shifting donor-acceptor photoluminescence in N-doped ZnO2006

    • Author(s)
      T. Makino
    • Journal Title

      J. Phys. Soc. Jpn 75

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Ultraviolet Second-Harmonic Generation and sum-Frequency Mixing in Two-Dimensional Nonlinear Optical Polymer Photonic Crystals2006

    • Author(s)
      Shin-ichiro Inoue, Y. Aoyagi
    • Journal Title

      Jpn. J. Appl. Phys. 45・8A

      Pages: 6103-6107

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Vertical AlGaN deep ultraviolet light emitting diode emitting at 322 nm fabricated by the laser lift-off technique2006

    • Author(s)
      K.Kawasaki, C.Koike, Y.Aoyagi, M.Takeuchi
    • Journal Title

      Appl. Phys. Lett. 89・25

      Pages: 261114-261114

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Nano-Skyscrapers of Ferroelectric Bi_4Ti_3O_<12>2006

    • Author(s)
      R.Takahashi, Y.Yonezawa, K.Nakajima, T.Chikyow, H.Koinuma
    • Journal Title

      Appl. Phys. Lett. 88・15

      Pages: 152904-152904

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Flex-mediated epitaxy for ferroelectric Bi_4Ti_3O_<12> single crystal film growth2006

    • Author(s)
      R.Takahashi, Y.Yonezawa, Y.Matsumoto, H.Koinuma
    • Journal Title

      J. Electroceram 17

      Pages: 189-195

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Epitaxial ScAlMgO_4(0001)films grown on sapphire substrates by flux-mediated epitaxy2006

    • Author(s)
      T.Obata, R.Takahashi, I.Ohkubo, M.Oshima, K.Nakajima, T.Chikyow, H.Koinuma, Y.Matsumoto
    • Journal Title

      Appl. Phys. Lett. 89

      Pages: 191910-191910

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Local photocurrent detection on InAs wires by conductive AFM2005

    • Author(s)
      H.Masuda
    • Journal Title

      Ultramicroscopy 105

      Pages: 137-142

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Design and fabrication of two-dimensional photonic crystals withpredetermined nonlinear optical properties2005

    • Author(s)
      S.Inoue
    • Journal Title

      Phys.Rev.Lett 94

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Fabrication of nonlinear photonic crystals and their applications(Invited Paper)2005

    • Author(s)
      S.Inoue
    • Journal Title

      Proc.SPIE Int.Soc.Opt.Eng. 5732

      Pages: 438-448

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Quaternary InAlGaN-based high-efficiency ultraviolet light-emittingdiodes2005

    • Author(s)
      H.Hirayama
    • Journal Title

      J.Appl.Phys. 97

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] RECa_40(BO3_)_3 thin films as new Luminescent materials screened by the combinatorial method2005

    • Author(s)
      H.Sano
    • Journal Title

      J.of Phys.and Chem.of Solids 66

      Pages: 2112-2115

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Computer Design of Combinatorial Shadow Mask for Ternary CompositionトSpread Library2005

    • Author(s)
      R.Takahashi
    • Journal Title

      Meas.Sci.Technol 16

      Pages: 292-295

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Y_<1-x>EuxCa4O(BO_3)_3 thin film as a luminescent material screened by the combinatorial method2005

    • Author(s)
      H.Sano
    • Journal Title

      Appl.Phys.Lett. 86

      Pages: 21104-21106

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Repeated temperature modulation epitaxy for p-type dopingand light-emitting diode based on ZnO2005

    • Author(s)
      A.Tsukazaki
    • Journal Title

      Nature Materials 4

      Pages: 42-46

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] 'LED最新技術動向〜性能向上、課題解決集〜、第5章、紫外LEDの短波長化と高効率化の課題と展望2005

    • Author(s)
      平山 秀樹
    • Journal Title

      情報機構

      Pages: 91-104

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Local photocurrent detection on InAs wires by conductive AFM2005

    • Author(s)
      H. Masuda
    • Journal Title

      Ultramicroscopy 105

      Pages: 137-142

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Design and fabrication of two-dimensional photonic crystals with predetermined nonlinear optical properties2005

    • Author(s)
      S. Inoue
    • Journal Title

      Phys. Rev. Lett. 94

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Fabrication of nonlinear photonic crystals and their applications(Invited Paper)2005

    • Author(s)
      S. Inoue
    • Journal Title

      Proc. SPIE Int. Soc. Opt. Eng. 5732

      Pages: 438-448

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Design and fabrication of two-dimensional photonic crystals with predetermined nonlinear optical properties2005

    • Author(s)
      S.Inoue, Y.Aoyagi
    • Journal Title

      Physical Review letters 94・10

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Fabrication of nonlinear photonic crystals and their applications2005

    • Author(s)
      S.Inoue, Y.Aoyagi
    • Journal Title

      Proc. SPIE Int. Soc. opt. Eng. 5732

      Pages: 438-448

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Quaternary InAlGaN-based high-efficiency ultraviolet light-emitting diodes2005

    • Author(s)
      H.Hirayama
    • Journal Title

      J. App1. Phys. 97

    • Related Report
      2005 Annual Research Report
  • [Journal Article] C-axis oriented epitaxial Ru (Eu.5CeO.5)Sr2Cu2010-d thin films grown by flux-mediated solid phase epitaxy2005

    • Author(s)
      W.Q.Lu, Y.Yamamoto, V.V.Peyrykin, M.Kakihana, Y.Matsumoto, U.S.Joshi, H.Koinuma, T.Hasegawa
    • Journal Title

      Thin Solid Films 486

      Pages: 79-81

    • Related Report
      2005 Annual Research Report
  • [Journal Article] ナノテクノロジーと深紫外発光素子の開発2004

    • Author(s)
      青柳 克信
    • Journal Title

      固体物理 39

      Pages: 265-278

    • NAID

      40006228114

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Photonic band structure and related properties of photonic crystalwaveguides in nonlinear optical polymers with metallic cladding2004

    • Author(s)
      S.Inoue
    • Journal Title

      Phys.Rev. B69

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Growth and Annealing Condition of high Al Content p-type AlGaN fordeep UV-LEDs2004

    • Author(s)
      T.Obata
    • Journal Title

      Phys, Stat.Sol.(a) 201

      Pages: 2803-2807

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Quaternary InAlGaN based deep UV LED with high-Al-content P-type AlGaN2004

    • Author(s)
      H.Hirayama
    • Journal Title

      Proc.SPIE Int.Soc.Opt.Eng. 5359

      Pages: 422-433

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] InAlGaN4元混晶を用いた紫外LEDの短波長化と高出力化2004

    • Author(s)
      平山 秀樹
    • Journal Title

      レーザー研究(「短波長LED・LD、紫外のLED」特集号) 32

      Pages: 402-409

    • NAID

      10013161084

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Surprisingly low built-in electric fields in quaternary AlInGaN heterostructures2004

    • Author(s)
      S.Anceau
    • Journal Title

      Phys.Stat.Sol.(a) 201

      Pages: 190-194

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Combinatorial synthesis and luminescent characteristics of RECa40(BO3)3 epitaxial thin films2004

    • Author(s)
      H.Kubota
    • Journal Title

      Appl.Surf.Sci 223

      Pages: 241-244

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Development of a new combinatorial mask for addressable ternary phase diagramming2004

    • Author(s)
      R.Takahashi
    • Journal Title

      Appl.Surf.Sci. 223

      Pages: 249-252

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Design of Combinatorial Shadow Masks for Complete Ternary PhaseDiagramming of Solid State Materials2004

    • Author(s)
      R.Takahashi
    • Journal Title

      J.Combi.Chem. 6

      Pages: 50-53

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Mathematical design of linear action masks for binary and ternarycomposition spread film library2004

    • Author(s)
      Y.Yamamoto
    • Journal Title

      Appl.Surf.Sci. 223

      Pages: 9-13

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Electric Field effect in Pulsed Laser Deposition of Epitaxial ZnO thin film2004

    • Author(s)
      C.Hirose
    • Journal Title

      Applied Physics A 79

      Pages: 807-809

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Modeling of grain boundary barrier modulation in ZnO invisible thinfilm transistors2004

    • Author(s)
      F.M.Hossain
    • Journal Title

      Physica E 21

      Pages: 911-915

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Internal Electric Field Effect on Luminescence Properties of ZnO/(Mg,Zn)O Quantum Wells2004

    • Author(s)
      T.Makino
    • Journal Title

      Physica E 21

      Pages: 671-675

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Reduced defect densities in the ZnO epilayer grown on Si substrates bylaser-assisted molecular-beam epitaxy using a ZnS epitaxial buffer layer2004

    • Author(s)
      T.Onuma
    • Journal Title

      Appl.Phys.Lett 85

      Pages: 5586-5588

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Emission from the higher member of exciton(n=2)in ZnO films grownon annealed buffer templates2004

    • Author(s)
      A.Tsukazaki
    • Journal Title

      Appl.Phys.Lett. 84

      Pages: 3858-3860

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Vdefects of ZnO thin films grown on Si as an ultraviolet optical path2004

    • Author(s)
      Y.-Z.Yoo
    • Journal Title

      Appl.Phys.Lett. 84

      Pages: 502-504

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Pressure-dependent ZnO nanocrsytal growth in a chemical vapor deposition process2004

    • Author(s)
      B.P.Zhang
    • Journal Title

      J.Phys.Chem.B 108

      Pages: 10899-10902

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Second harmonic generation in self-assembled ZnO microcrystallite thinfilms2004

    • Author(s)
      X.Q.Zhang
    • Journal Title

      Thin Solid Films 450

      Pages: 320-323

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] 'Quaternary InAlGaN-based UV LEDs, Optoelectronic Devices:III-V Nitres Chaper112004

    • Author(s)
      H.Hirayama
    • Journal Title

      Elsevier

      Pages: 285-322

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] 'コンビナトリアルテクノロジー明日を開く'ものつくり'の世界6.3.3エピタキシャル蛍光体薄膜のコンビ合成と最適化2004

    • Author(s)
      山本 幸生
    • Journal Title

      丸善

      Pages: 143-145

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Light-illuminated STM studies on photo-absorption in InAs nanowires2003

    • Author(s)
      T.Takahashi
    • Journal Title

      Ultramicroscopy 97

      Pages: 1-6

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Surface Potential Imaging on InAs L,ow-Dimensional NanostructuresStudied by Kelvin Probe Force Microscopy2003

    • Author(s)
      S.Ono
    • Journal Title

      Jpn.J.Appl.Phys. 42

      Pages: 4869-4873

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Inductivity coupled plasma etching to fabricate the nonlinear opticalpolymer photonic crystal waveguides2003

    • Author(s)
      S.Inoue
    • Journal Title

      Mater.Sci.Eng.B 103

      Pages: 170-176

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Dry-etching method fabricating photonic-crystal waveguides in nonlinearoptical polymers2003

    • Author(s)
      S.Inoue
    • Journal Title

      Appl.Phys.Lett. 82

      Pages: 2966-2968

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] '「次世代エレクトロニクス薄膜技術」、第6章コンビナトリアルテクノロジー集積化薄膜技術による材料開発の革新2003

    • Author(s)
      松本 祐司
    • Journal Title

      株式会社シーエムシー出版

      Pages: 120-144

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] '先端化学シリーズ「海洋天然物 錯体 コンビナトリアル 全合成」10「固体材料、デバイス開発を高速化する集積化マテリアルチソプ技術」2003

    • Author(s)
      鯉沼 秀臣
    • Journal Title

      丸善株式会社

      Pages: 231-237

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 「窒化物半導体による深紫外およびテラヘルツ発光素子開発の現状と展望」2008

    • Author(s)
      平山秀樹
    • Organizer
      ワイドギャップ半導体光・電子デバイス、日本学術振興会第162委員会、特別講演会(第56回研究会)
    • Place of Presentation
      主婦会館プラザエフ
    • Year and Date
      2008-01-25
    • Related Report
      2007 Annual Research Report
  • [Presentation] 深紫外発光デバイス・超高耐圧電子デバイス対応A1GaN層用A1N/サファイアテンプレート2008

    • Author(s)
      武内 道一,
    • Organizer
      第55回応用物理学会関係連合講演会
    • Place of Presentation
      日本大学理工学部
    • Related Report
      2007 Annual Research Report
  • [Presentation] A1GaNチャネルHEMTにおける残留キャリアのバッファ層構造依存性2008

    • Author(s)
      南條 拓真,
    • Organizer
      第55回応用物理学会関係連合講演会
    • Place of Presentation
      日本大学理工学部
    • Related Report
      2007 Annual Research Report
  • [Presentation] A1GaNチャネルHEMTにおけるドレイン耐圧の向上2008

    • Author(s)
      南條 拓真
    • Organizer
      第55回応用物理学会関係連合講演会
    • Place of Presentation
      日本大学理工学部
    • Related Report
      2007 Annual Research Report
  • [Presentation] 「深紫外半導体発光素子およびTHz量子カスケードレーザの開発」2007

    • Author(s)
      平山秀樹
    • Organizer
      電気学会、光・量子デバイス研究会
    • Place of Presentation
      九州大学
    • Year and Date
      2007-12-14
    • Related Report
      2007 Annual Research Report
  • [Presentation] 分極反転ドメインの選択的化学エッチングによるLiNb03非線形フォトニック結晶の作製2007

    • Author(s)
      井上振一郎
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      札幌市
    • Year and Date
      2007-09-08
    • Related Report
      2007 Annual Research Report
  • [Presentation] "Development of Deep-UV and Terahertz Semiconductor Emitting Devices and their Applications"2007

    • Author(s)
      H. Hirayama
    • Organizer
      The 13Th International Micromachine/Nanotech Symposium, -MEMS Frontier: Innovative Devices by Micro and Nano-Bio Fusion Create New Lifestyles-,
    • Place of Presentation
      Tokyo
    • Year and Date
      2007-07-26
    • Related Report
      2007 Annual Research Report
  • [Presentation] N-polar AIN sacrificial layers grown by MOCVD for free-standing AlNsubstrates(Invited Talk2007

    • Author(s)
      M.Takeuchi
    • Organizer
      5th International Workshop on Bulk Nitride Semiconductors(IWBNS-5)
    • Place of Presentation
      Salvador,Brazil
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 深紫外発光素子の開発(招待講演)2007

    • Author(s)
      青柳 克信
    • Organizer
      電子情報通信学会2007年総合大会
    • Place of Presentation
      名古屋
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 高効率大面積AlGaN深紫外発光素子実現のためのMOCVD成長(招待講演)2007

    • Author(s)
      武内 道一
    • Organizer
      日本結晶成長学会特別講演会、日本学術振興会第161委員会第54会研究会「窒化物半導体の結晶成長の現状と課題
    • Place of Presentation
      東京
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] N-polar AIN sacrificial layers grown by MOCVD for free-standing A1N substrates, (invited talk)2007

    • Author(s)
      M. Takeuchi
    • Organizer
      Semiconductors(IWBNS-5)
    • Place of Presentation
      Salvador, Brazil
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of Deep UV LED(invited talk)2007

    • Author(s)
      Y. Aoyagi
    • Organizer
      Society of electro-information
    • Place of Presentation
      Nagoya
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] MOCVD crystal growth for large scalc high efficient A1GaN Deep UV LED(invited talk)2007

    • Author(s)
      M. Takeuchi
    • Organizer
      Jpn. Society of Crystal growth
    • Place of Presentation
      Tokyo
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Photoluminescence study of AlGaN/AlGaN quantum well structures for deep UV emitters - barrier height and well width dependence, and growth interruption effect -2007

    • Author(s)
      M. Takeuchi,
    • Organizer
      7th International Conference on Nitride Semiconductores (ICNS-7)
    • Place of Presentation
      Las Vegas, USA
    • Related Report
      2007 Annual Research Report
  • [Presentation] Two-dimensional electron gas formation in AlGaN/AlGaN heterostructures grown by MOCVD2007

    • Author(s)
      M. Takeuchi,
    • Organizer
      7th International Conference on Nitride Semiconductores (ICNS-7)
    • Place of Presentation
      Las Vegas, USA
    • Related Report
      2007 Annual Research Report
  • [Presentation] N-polar A1N sacrificial layers grown by MOCVD for free-standing A1N substrates2007

    • Author(s)
      M. Takeuchi,
    • Organizer
      5th International Workshop on Bulk Nitride Semiconductors (IWBNS-5)
    • Place of Presentation
      Salvador, Brazil
    • Related Report
      2007 Annual Research Report
  • [Presentation] First operation of A1GaN channel high electron mobility transistors with sufficiently low resistive source/drain contact formed by Si ion implantation2007

    • Author(s)
      T. Nanjo,
    • Organizer
      2007 International Conference on Solid State Devices and Materials (SSDM 2007)
    • Place of Presentation
      Tsukuba, Japan
    • Related Report
      2007 Annual Research Report
  • [Presentation] Remarkable Breakdown Voltage Enhancement in A1GaN Channel HEMTs operation of A1GaN channel high electron mobility transistors with sufficiently low resistive source/drain contact formed by Si ion implantation2007

    • Author(s)
      T. Nanjo,
    • Organizer
      2007 International Electron Devices Meeting (IEDM2007)
    • Place of Presentation
      Washington, DC, USA
    • Related Report
      2007 Annual Research Report
  • [Presentation] Remarkable Breakdown Voltage Enhancement in A1GaN Channel HEMTs operation of A1GaN channel high electron mobility transistors with sufficien tly low resistive source/drain contact formed by Si ion implantation2007

    • Author(s)
      T. Nanjo,
    • Organizer
      2007 International Electron Devices Meeting (IEDM2007)
    • Place of Presentation
      Washington, DC, USA
    • Related Report
      2007 Annual Research Report
  • [Presentation] 高品質A1Nと流量変調法短周期超格子層を用いた280nm帯深紫外LED2007

    • Author(s)
      武内 道一
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Related Report
      2007 Annual Research Report
  • [Presentation] 280nm帯深紫外LEDのA1反射層による光取り出し効率の向上2007

    • Author(s)
      大塚 匠
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Related Report
      2007 Annual Research Report
  • [Presentation] 280nm帯深紫外LED用n-A1GaN層の考察2007

    • Author(s)
      大石 真
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Related Report
      2007 Annual Research Report
  • [Presentation] レーザーリフトオフ対応超格子吸光層を用いた大面積縦型深紫外LEDの作製2007

    • Author(s)
      前川 倫宏,
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Related Report
      2007 Annual Research Report
  • [Presentation] 終端バリア層厚制御によるA1GaN系深紫外LEDの注入効率の向上2007

    • Author(s)
      武内 道一
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Related Report
      2007 Annual Research Report
  • [Presentation] AlyGa1-yN/AlxGa1-xNショットキーダイオード特性のA1組成依存性2007

    • Author(s)
      南條 拓真
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Related Report
      2007 Annual Research Report
  • [Presentation] MOCVD growth of vertical-type A1GaN deep-UV light emitting diodes2007

    • Author(s)
      武内 道一
    • Organizer
      第26回電子材料シンポジウム(EMS-26)
    • Place of Presentation
      滋賀県守山
    • Related Report
      2007 Annual Research Report
  • [Presentation] Improvement in emission intensity of A1GaN deep ultraviolet light-emitting diodes by carrier confinement enhancement in thin quantum well2007

    • Author(s)
      青柳 克信,
    • Organizer
      第26回電子材料シンポジウム(EMS-26)
    • Place of Presentation
      滋賀県守山
    • Related Report
      2007 Annual Research Report
  • [Presentation] "Quaternary InA1GaN quantum-dot UV-LED emitting at 335 nm fabricated by an anti-surfactant method"2007

    • Author(s)
      H. Hirayama,
    • Organizer
      International Conference on Nitride Semiconductors (ICNS-7)
    • Place of Presentation
      Las Vegas, USA
    • Related Report
      2007 Annual Research Report
  • [Presentation] 「深紫外発光InA1GaN4元混晶量子ドットの形成と電流注入発光」2007

    • Author(s)
      藤川紗千恵、
    • Organizer
      2007秋応用物理学会(第68回)
    • Place of Presentation
      北海道工業大学
    • Related Report
      2007 Annual Research Report
  • [Presentation] Ultra-quality of Bi_4Ti_3O_<12> ferroelectric thin films via flux-mediated epitaxy2007

    • Author(s)
      Yuji Matsumoto
    • Organizer
      European Multifunctional Materials Workshop
    • Place of Presentation
      Haholmen Havstuer Karvag, N-6530 Averoy, Norway
    • Related Report
      2007 Annual Research Report
  • [Presentation] GENERAL APPLICATION OF SOLID-LIQUID INTERFACE TO NANO MATERILALS PROCESSING IN VACUUM2007

    • Author(s)
      松本 祐司
    • Organizer
      2th International Symposium on Integrated Molecular and Macromolecular Materials
    • Place of Presentation
      北京化工大学(中国)
    • Related Report
      2007 Annual Research Report
  • [Presentation] Flux-mediated epitaxy: Application of nano-scale solid-liquid interface in vacuum to vapor phase oxide epitaxy2007

    • Author(s)
      松本 祐司
    • Organizer
      International Symposium on Advanced Nanodevices and Nanotechnology
    • Place of Presentation
      Waikoloa Beach Marriott Re sort & Spa
    • Related Report
      2007 Annual Research Report
  • [Presentation] MOCVD法による酸化亜鉛薄膜成長2007

    • Author(s)
      角谷正友,
    • Organizer
      東北大学金属材料研究所ワークショップ
    • Place of Presentation
      東北大学多元物質科学研究所
    • Related Report
      2007 Annual Research Report
  • [Presentation] Combinatorial Laser processing for Oxide and Organic Electronics2007

    • Author(s)
      H. Koinuma,
    • Organizer
      Laserion 2007
    • Place of Presentation
      Tegernsee, Germany
    • Related Report
      2007 Annual Research Report
  • [Presentation] Combinatorial laser processing for high throughput experimentation of oxide and molecular electronics2007

    • Author(s)
      H. Koinuma,
    • Organizer
      Workshop on Molecular Nano-Electronic Devices
    • Place of Presentation
      京都大学
    • Related Report
      2007 Annual Research Report
  • [Presentation] フォトニック結晶による非線形光学効果増大を実証(招待講演)2006

    • Author(s)
      井上 振一郎
    • Organizer
      nano tech 2006
    • Place of Presentation
      東京
    • Year and Date
      2006-02-22
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 高非線形性フォトニック結晶による非線形光学応答増大の発現と制御(招待講演)2006

    • Author(s)
      井上 振一郎
    • Organizer
      応用物理学会・量子エレクトロニクス研究会「フォトンマニピュレーションとその応用」
    • Place of Presentation
      長野
    • Year and Date
      2006-01-13
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Improvement of crystalline quality for Al-and N-polar AlN layers bymodified flow-modulation MOCVD growth(Invited Talk)2006

    • Author(s)
      M.Takeuchi
    • Organizer
      4th International Workshop on Bulk Nitride Semiconductors(IWBNS-4)
    • Place of Presentation
      Shiga,Japan
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Polarity dependent of AlN{0001}decomposition In flowing H_2(Invited Talk)2006

    • Author(s)
      Y.Kumagai
    • Organizer
      4th International Workshop on Bulk Nitride Semiconductors(IWBNS-4)
    • Place of Presentation
      Shiga,Japan
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Improvement of crystalline quality for Al- and N-polar A1N layers by modified flow-modulation MOCVD growth, (invited talk)2006

    • Author(s)
      M. Takeuchi
    • Organizer
      4th International Workshop on Bulk Nitride. Semiconductors(IWBNS-4)
    • Place of Presentation
      Shiga, Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Polarity dependent of AIN { 0001} decomposition in flowing H_2, (invited talk)2006

    • Author(s)
      Y. Kumagai
    • Organizer
      4th International Workshop on Bulk Nitride Semiconductors(IWBNS-4)
    • Place of Presentation
      Shiga, Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Enhancement of optical nonlinearity by nonlinear photonic crystals(invited talk)2006

    • Author(s)
      S. Inoue
    • Organizer
      Jpn. Society of Applied Physics
    • Place of Presentation
      Nagano
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Evidence of enhancement of optical Nonlinearity by photonic crystal(invited talk)2006

    • Author(s)
      S. Inoue
    • Organizer
      Nano tech 2006
    • Place of Presentation
      Tokyo
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Research on nonlinear devices by photonic Crystals(invited talk)2006

    • Author(s)
      S. Inoue
    • Organizer
      Seminar on Nanoscience and Technology
    • Place of Presentation
      Wako
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fabrication of nonlinear photonic crystals and their applications(Invited Talk)2005

    • Author(s)
      S.Inoue
    • Organizer
      Photonics West 2005
    • Place of Presentation
      San Jose,CA.
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Characteristics of Two Dimensional Nonlinear Photonic Crystals and those applications (Invited Talk)2005

    • Author(s)
      S.Inoue
    • Organizer
      ICIM'O5(The 6th International Conference on Intelligent Materials and Systems)
    • Place of Presentation
      Ichigaya,Japan
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Photonic Crystal and III-N Quantum Dot Laser(Invited Talk)2005

    • Author(s)
      Y.Aoyagi
    • Organizer
      CLEO 2005(The Conference on Lasers and Electro-Optics 2005)
    • Place of Presentation
      Baltimore,USA
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fabrication of nonlinear photonic crystals and their applications, (invited talk)2005

    • Author(s)
      S. Inoue
    • Organizer
      Photonics West 2005
    • Place of Presentation
      San Jose, CA.
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Characteristics of Two Dimensional Nonlinear Photonic Crystals and those applications, (invited talk)2005

    • Author(s)
      S. Inoue
    • Organizer
      ICIM' 05(The 6th International Conference on Intelligent Materials and Systems)
    • Place of Presentation
      Ichigaya, Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Photonic Crystal and III-N Quantum Dot Laser, (invited talk)2005

    • Author(s)
      Y. Aoyagi
    • Organizer
      CLEO 2005(The Conference on Lasers and Electro-Optics 2005)
    • Place of Presentation
      Baltimore, USA
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] フォトニック結晶による光非線形デバイスの研究(招待講演)2004

    • Author(s)
      井上 振一郎
    • Organizer
      ナノサイエンステクノロジーセミナー
    • Place of Presentation
      和光
    • Year and Date
      2004-05-20
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Nonlinear Photonic Crystal Fabrication and Application of the PhotonicCrystal to Nonlinear Photonic Devices(Invited Talk)2004

    • Author(s)
      S.Inoue
    • Organizer
      Swiss-Japanese Nanoscience Workshop
    • Place of Presentation
      Nara,Japan
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Nonlinear Photonic Crystal Fabrication and Application of the Photonic Crystal to Nonlinear Photonic Devices(invited talk)2004

    • Author(s)
      S. Inoue
    • Organizer
      Swiss-Japanese Nanoscience Workshop
    • Place of Presentation
      Nara, Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] High-throughput screening of binary and ternary dielectric oxides by combinatorial technoloev(Invited Talk)2003

    • Author(s)
      H.Koinuma
    • Organizer
      2003 Meeting of the Electrochemical Society
    • Place of Presentation
      Paris,France
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] High-throughput screening of binary and oxides by combinatorial technology, (invited talk)2003

    • Author(s)
      H. Koinuma
    • Organizer
      2003 Meeting of the Electrochemical ternary dielectric Society
    • Place of Presentation
      Paris
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Book] 先端材料光物性2008

    • Author(s)
      青柳克信
    • Publisher
      コロナ社
    • Related Report
      2007 Annual Research Report
  • [Book] 光学設計2006

    • Author(s)
      青柳 克信
    • Publisher
      情報機構
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Book] LED最新技術動向〜性能向上、課題解決集〜、第5章、紫外LEDの短波長化と高効率化の課題と展望2005

    • Author(s)
      平山 秀樹
    • Publisher
      情報機構
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Book] Quaternary InAlGaN-based UV LEDs, Optoelectronic Devices:III-V Nitres Chaper112004

    • Author(s)
      H.Hirayama
    • Publisher
      Elsevier
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Book] コンビナトリアルテクノロジー明日を開く'ものつくり'の世界6.3.3エピタキシャル蛍光体薄膜のコンビ合成と最適化2004

    • Author(s)
      山本 幸生
    • Publisher
      丸善
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Book] 「次世代エレクトロニクス薄膜技術」、第6章コンビナトリアルテクノロジー集積化薄膜技術による材料開発の革新2003

    • Author(s)
      松本 祐司
    • Publisher
      株式会社シーエムシー出版
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Book] 先端化学シリーズ「海洋天然物 錯体 コンビナトリアル 全合成」10「固体材料、デバイス開発を高速化する集積化マテリアルチソプ技術」2003

    • Author(s)
      鯉沼 秀臣
    • Publisher
      丸善株式会社
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] フォトニック結晶2007

    • Inventor(s)
      井上 振一郎
    • Industrial Property Rights Holder
      東京工業大学
    • Patent Publication Number
      2007-286635
    • Filing Date
      2007-06-18
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] フォトニック結晶2007

    • Inventor(s)
      井上 振一郎
    • Industrial Property Rights Holder
      東京工業大学
    • Patent Publication Number
      2007-148463
    • Filing Date
      2007-03-19
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 「加熱プレス機」2007

    • Inventor(s)
      川崎宏治, 青柳克信
    • Industrial Property Rights Holder
      東京工業大学
    • Industrial Property Number
      2007-018879
    • Filing Date
      2007
    • Related Report
      2006 Annual Research Report
  • [Patent(Industrial Property Rights)] 窒化物系深紫外発光素子およびその製造方法2006

    • Inventor(s)
      青柳 克信
    • Industrial Property Rights Holder
      東京工業大学
    • Filing Date
      2006-03-20
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Overseas
  • [Patent(Industrial Property Rights)] 窒化物半導体の製造方法2005

    • Inventor(s)
      武内 道一
    • Industrial Property Rights Holder
      東京工業大学
    • Patent Publication Number
      2006-278402
    • Filing Date
      2005-03-28
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] AlGaN系深紫外発光素子およびその製造方法2005

    • Inventor(s)
      青柳 克信
    • Industrial Property Rights Holder
      東京工業大学
    • Industrial Property Number
      2005-092801
    • Filing Date
      2005-03-29
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] フォトニック結晶導波路のフォトニックバンド構造の測定方法およびその装置2005

    • Inventor(s)
      井上 振一郎
    • Industrial Property Rights Holder
      東京工業大学
    • Patent Publication Number
      2006-275568
    • Filing Date
      2005-03-28
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 発明の名称:蛍光体とその製造方法2005

    • Inventor(s)
      鯉沼 秀臣
    • Industrial Property Rights Holder
      東京工業大学
    • Patent Publication Number
      2007-161891
    • Filing Date
      2005-12-14
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] レーザーリフトオフ法およびレーザーリフトオフ装置2005

    • Inventor(s)
      川崎宏治, 青柳克信
    • Industrial Property Rights Holder
      東京工業大学
    • Industrial Property Number
      2005-342734
    • Filing Date
      2005-11-28
    • Related Report
      2005 Annual Research Report
  • [Patent(Industrial Property Rights)] 半導体成長用基板および半導体膜の製造方法2004

    • Inventor(s)
      青柳 克信
    • Industrial Property Rights Holder
      東京工業大学
    • Patent Publication Number
      2006-185962
    • Filing Date
      2004-12-24
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] フォトニック結晶構造を有する光素子2004

    • Inventor(s)
      井上 振一郎
    • Industrial Property Rights Holder
      東京工業大学
    • Patent Publication Number
      2005-250429
    • Filing Date
      2004-03-06
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 4元組成傾斜膜の作成方法及びこの方法を用いた2元組成、膜厚傾斜膜の作製方法2004

    • Inventor(s)
      鯉沼 秀臣
    • Industrial Property Rights Holder
      東京工業大学
    • Industrial Property Number
      2003-079193
    • Filing Date
      2004-03-12
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Overseas
  • [Patent(Industrial Property Rights)] フォトニック結晶2003

    • Inventor(s)
      井上 振一郎
    • Industrial Property Rights Holder
      東京工業大学
    • Patent Publication Number
      2004-133429
    • Filing Date
      2003-08-29
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary

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Published: 2003-04-01   Modified: 2016-04-21  

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