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Development of less-toxic mid-infrared photodetectors by merging quantum wells and metasurfaces

Research Project

Project/Area Number 15H02011
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Nano/Microsystems
Research InstitutionNational Institute for Materials Science

Principal Investigator

Miyazaki Hideki  国立研究開発法人物質・材料研究機構, 機能性材料研究拠点, グループリーダー (10262114)

Co-Investigator(Kenkyū-buntansha) 間野 高明  国立研究開発法人物質・材料研究機構, 機能性材料研究拠点, 主幹研究員 (60391215)
川津 琢也  国立研究開発法人物質・材料研究機構, 機能性材料研究拠点, 主任研究員 (00444076)
Research Collaborator KASAYA Takeshi  
Project Period (FY) 2015-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥41,080,000 (Direct Cost: ¥31,600,000、Indirect Cost: ¥9,480,000)
Fiscal Year 2018: ¥8,450,000 (Direct Cost: ¥6,500,000、Indirect Cost: ¥1,950,000)
Fiscal Year 2017: ¥11,050,000 (Direct Cost: ¥8,500,000、Indirect Cost: ¥2,550,000)
Fiscal Year 2016: ¥11,310,000 (Direct Cost: ¥8,700,000、Indirect Cost: ¥2,610,000)
Fiscal Year 2015: ¥10,270,000 (Direct Cost: ¥7,900,000、Indirect Cost: ¥2,370,000)
Keywordsマイクロ・ナノデバイス / メタマテリアル / メタ表面 / 量子井戸 / 中赤外光 / 赤外検出器
Outline of Final Research Achievements

HgCdTe have long been utilized for high-sensitivity detection of mid-infrared radiation in the wavelength range of 5-10 μm. However, their replacement with less toxic materials is demanded. In this study, GaAs/AlGaAs quantum well infrared photodetectors that are less toxic but have no responsivity for normal incident light are sandwiched between Au layers to form metasurfaces, and exhibited the maximum responsivity as high as 2.23 A/W (external quantum efficiency 39.4%) for unpolarized normal incidence at the wavelength of 7.0 μm, which is sufficient for practical application.

Academic Significance and Societal Importance of the Research Achievements

環境測定、自動運転、警備活動のために中赤外線の利用がますます注目される中、ROHS指令や水俣条約により使用が難しい水銀カドミウムテルライドに代わる中赤外線検出器の選択肢を提供できた。その上では、これまで基礎研究の対象であったメタ表面の電場回転機能と電場増機能が本質的な役割を果たした。また、プラズモン共鳴に必須の平滑性・急峻性と、微弱な光電流の取り出しに必要なオーミック性を兼ね備えた金属/半導体界面の形成方法を明らかにした。この技術も今後のメタ表面の光電子デバイス応用を加速すると期待している。

Report

(5 results)
  • 2018 Annual Research Report   Final Research Report ( PDF )
  • 2017 Annual Research Report
  • 2016 Annual Research Report
  • 2015 Annual Research Report
  • Research Products

    (29 results)

All 2019 2018 2017 2016 2015

All Journal Article (7 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 5 results,  Open Access: 3 results) Presentation (20 results) (of which Int'l Joint Research: 8 results,  Invited: 16 results) Book (1 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Double-Sided Nonalloyed Ohmic Contacts to Si-doped GaAs for Plasmoelectronic Devices2019

    • Author(s)
      Mano Takaaki、Miyazaki Hideki T.、Kasaya Takeshi、Noda Takeshi、Sakuma Yoshiki
    • Journal Title

      ACS Omega

      Volume: 4 Issue: 4 Pages: 7300-7307

    • DOI

      10.1021/acsomega.8b03260

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] プラズモニクスを利用した熱放射制御とガスセンシングへの応用2019

    • Author(s)
      宮崎英樹
    • Journal Title

      金属

      Volume: 89 Pages: 10-18

    • Related Report
      2018 Annual Research Report
  • [Journal Article] プラズモン共鳴を利用したガス濃度計測用赤外光源2018

    • Author(s)
      宮崎英樹
    • Journal Title

      プラズモニック化学研究会NewsLetter

      Volume: 1 Pages: 2-3

    • Related Report
      2018 Annual Research Report
    • Open Access
  • [Journal Article] ナノフォトニクスを利用した熱放射制御材料2018

    • Author(s)
      宮崎英樹
    • Journal Title

      日本赤外線学会誌

      Volume: 27 Pages: 18-26

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Mass-productive fabrication of a metal-insulator-metal plasmon waveguide with a linear taper for nanofocusing2016

    • Author(s)
      K. Wongpanya, T. Kasaya, H. T. Miyazaki, H. Oosato, Y. Sugimoto, and W. Pijitrojana
    • Journal Title

      Appl. Phys. B

      Volume: 122 Issue: 9 Pages: 238-238

    • DOI

      10.1007/s00340-016-6515-8

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] 光放射メタ表面の創製と応用2016

    • Author(s)
      宮崎英樹, 岩長祐伸
    • Journal Title

      レーザー研究

      Volume: 44 Pages: 10-14

    • NAID

      130007957212

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Ultraviolet-nanoimprinted packaged metasurface thermal emitters for infrared CO2 sensing2015

    • Author(s)
      H. T. Miyazaki, T. Kasaya, H. Oosato, Y. Sugimoto, B. Choi, M. Iwanaga, and K. Sakoda
    • Journal Title

      Sci. Technol. Adv. Mater.

      Volume: 16 Issue: 3 Pages: 035005-035005

    • DOI

      10.1088/1468-6996/16/3/035005

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] Plasmonic devices for mid-infared application2019

    • Author(s)
      H. T. Miyazaki
    • Organizer
      The 11th International Conference on the Science and Technology for Advanced Ceramics (STAC-11)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Metamaterial quantum well infrared photodetectors based on plasmon-enhanced intersubband transition2019

    • Author(s)
      H. T. Miyazaki, T. Mano, T. Kasaya, H. Oosato, K. Watanabe, Y. Sugimoto, T. Kawazu, T. Ochiai, Y. Arai, and A. Shigetou
    • Organizer
      the 7th International Workshop on Epitaxial Growth and Fundamental Properties of Semiconductor Nanostructures (SemiconNano2019)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Nanophotonics: a frontier cultivated by microassembly2018

    • Author(s)
      H. T. Miyazaki
    • Organizer
      2018 International Conference on Electronics Packaging and IMAPS All Asia Conference (ICEP-IAAC 2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Nonalloyed Ohmic Contacts to Buried n-GaAs Appearing After Reversed Wafer Transfer2018

    • Author(s)
      T. Mano, H. T. Miyazaki, T. Kasaya, T. Noda, and Y. Sakuma
    • Organizer
      2018 International Conference on Solid State Devices and Materials (SSDM 2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] メタマテリアルと量子井戸を融合したサブバンド間遷移型赤外線検出器2018

    • Author(s)
      宮崎英樹, 間野高明
    • Organizer
      第14回量子ナノ材料セミナー
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] ナノ構造をつくって光をあやつる2018

    • Author(s)
      宮崎英樹
    • Organizer
      千葉市科学館「大人が楽しむ科学教室2018」
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] CO2センサのためのメタマテリアル赤外光源2018

    • Author(s)
      宮崎英樹
    • Organizer
      RIKEN-NIMS第2回マテリアルズイノベーションコア Workshop
    • Related Report
      2018 Annual Research Report
  • [Presentation] 光をあやつる人工ナノ構造-フォトニック結晶からメタマテリアルまで-2018

    • Author(s)
      宮崎英樹
    • Organizer
      第22回名古屋大学VBLシンポジウム(2018年度)「光とナノ」
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] 光放射メタ表面の創製と応用2018

    • Author(s)
      宮崎英樹, 岩長祐伸
    • Organizer
      レーザー学会学術講演会第38回年次大会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] メタ表面赤外線検出器のためのn-GaAsへのノンアロイオーミック接合2018

    • Author(s)
      間野高明, 宮崎英樹, 笠谷岳士, 野田武司, 佐久間芳樹
    • Organizer
      2018年第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] メタ表面量子井戸赤外線検出器2018

    • Author(s)
      宮崎英樹, 間野高明, 笠谷岳士, 大里啓孝, 渡邉一弘, 杉本喜正, 川津琢也, 新井志大, 重藤暁津
    • Organizer
      2018年第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Nanophotonics: a frontier cultivated by microassembly2018

    • Author(s)
      H. T. Miyazaki
    • Organizer
      International Conference on Electronics Packaging and IMAPS All Asia Conference
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] プラズモン共振器を用いたガスセンシング用赤外光源2017

    • Author(s)
      宮崎英樹
    • Organizer
      第12回プラズモニック化学シンポジウム
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] Manipulation of light waves by controlled nanostructures2017

    • Author(s)
      H. T. Miyazaki
    • Organizer
      Thailand - Japan Joint Research Meeting on Nanomaterials and Nanocomposites
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 金属メタ表面を用いたCO2ガスセンサー用中赤外光源2017

    • Author(s)
      宮崎英樹
    • Organizer
      日本真空学会2017年1月研究例会
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] 光をあやつるナノ構造-光のアンテナ,フォトニック結晶,メタ表面赤外光源-2016

    • Author(s)
      宮崎英樹
    • Organizer
      強光子場科学研究懇談会平成27年度第2回懇談会
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] ナノフォトニクスによる熱輻射制御2016

    • Author(s)
      宮崎英樹
    • Organizer
      2016年第77回秋季応用物理学会学術講演会
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] Photonics, Plasmonics & Metamaterials research in NIMS2015

    • Author(s)
      H. T. Miyazaki
    • Organizer
      The first NIMS-IMRE Workshop on Materials Science
    • Place of Presentation
      物質・材料研究機構(茨城県つくば市)
    • Year and Date
      2015-10-21
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] UVナノインプリント法で作製したCO2センサ用メタ表面熱放射赤外光源2015

    • Author(s)
      宮崎英樹
    • Organizer
      電気学会E部門総合研究会マイクロマシン・センサシステム研究会
    • Place of Presentation
      九州大学(福岡県福岡市)
    • Year and Date
      2015-07-03
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] UV-nanoimprinted metasurface thermal emitters for infrared CO2 sensing2015

    • Author(s)
      H. T. Miyazaki, T. Kasaya, H. Oosato, Y. Sugimoto, B. Choi, M. Iwanaga, and K. Sakoda
    • Organizer
      The 5th Korea-Japan Metamaterials Forum
    • Place of Presentation
      Seoul National University(韓国ソウル市)
    • Year and Date
      2015-06-29
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Book] Micro- and Nanophotonic Technologies2017

    • Author(s)
      H. T. Miyazaki
    • Total Pages
      13
    • Publisher
      Wiley
    • ISBN
      9783527340378
    • Related Report
      2016 Annual Research Report
  • [Patent(Industrial Property Rights)] 半導体装置、半導体装置の製造方法、赤外線光電変換素子、赤外線検出素子、および赤外線発光素子2018

    • Inventor(s)
      間野高明, 宮崎英樹, 佐久間芳樹, 野田武司
    • Industrial Property Rights Holder
      物質・材料研究機構
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2018-037337
    • Filing Date
      2018
    • Related Report
      2017 Annual Research Report

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Published: 2015-04-16   Modified: 2020-03-30  

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