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Interface engineering of functional oxide heterostructures

Research Project

Project/Area Number 15H02022
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionTohoku University

Principal Investigator

Tsukazaki Atsushi  東北大学, 金属材料研究所, 教授 (50400396)

Research Collaborator SHIBATA naoya  
Project Period (FY) 2015-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥42,640,000 (Direct Cost: ¥32,800,000、Indirect Cost: ¥9,840,000)
Fiscal Year 2018: ¥5,590,000 (Direct Cost: ¥4,300,000、Indirect Cost: ¥1,290,000)
Fiscal Year 2017: ¥6,370,000 (Direct Cost: ¥4,900,000、Indirect Cost: ¥1,470,000)
Fiscal Year 2016: ¥5,590,000 (Direct Cost: ¥4,300,000、Indirect Cost: ¥1,290,000)
Fiscal Year 2015: ¥25,090,000 (Direct Cost: ¥19,300,000、Indirect Cost: ¥5,790,000)
Keywords薄膜界面物性 / 酸化物 / 誘電性 / 導電性 / 電界効果 / 表面・界面物性 / 結晶工学 / 誘電体物性 / 半導体物性
Outline of Final Research Achievements

In this research project, we aim to develop the functional interface based on oxide heterostructures especially for superior electrical conduction. One research target is a perovskite BaSnO3 heterostructure. Interface engineering with (Sr,Ba)SnO3/BaSnO3 improves electrical conduction and performance of field-effect operation at the interface. Other target is a LiNbO3-type stannates. LiNbO3-type ASnO3 thin films (A = Mg, Mn, Zn) are firstly synthesized by pulsed-laser deposition or molecular-beam epitaxy technique. By applying these films to the channel in field-effect transistors (FET), electrical conduction is well controlled electrostatically. Moreover, the threshold voltage in the FET operation depends crystalline direction, demonstrating the formation of polar interface based on the LiNbO3 structure. We expect that the interface engineering in this study corroborates a new functionality of electrical conduction combining with polarization at the interfaces.

Academic Significance and Societal Importance of the Research Achievements

本研究では、昨今用途の拡大している透明導電膜の候補材料としてのBaSnO3薄膜の可能性を探究し、希少元素を含むITOの代替えとして活用の期待できることを示したことが意義深い。また、強誘電性を示すLiNbO3型酸化物薄膜の開発は、Pbフリーの強誘電体探索に対して有用な指針を与えた。これらの観点に加えて、新たな酸化物界面制御技術の開発を進めたことは、多様な酸化物の特性を活用した新たな薄膜素子の開発を切り拓く重要な基盤技術に位置づけられる。特に、機能としての界面伝導性や誘電性の活用に対して、元素戦略的な視点からも有効な成果であり、社会的にも貢献しうる成果と言える。

Report

(5 results)
  • 2018 Annual Research Report   Final Research Report ( PDF )
  • 2017 Annual Research Report
  • 2016 Annual Research Report
  • 2015 Annual Research Report
  • Research Products

    (38 results)

All 2019 2018 2017 2016 2015 Other

All Int'l Joint Research (1 results) Journal Article (7 results) (of which Peer Reviewed: 7 results,  Open Access: 6 results,  Acknowledgement Compliant: 2 results) Presentation (28 results) (of which Int'l Joint Research: 11 results,  Invited: 12 results) Remarks (2 results)

  • [Int'l Joint Research] Max Planck Institute(ドイツ)

    • Related Report
      2018 Annual Research Report
  • [Journal Article] Thin-film stabilization of LiNbO3-type ZnSnO3 and MgSnO3 by molecular-beam epitaxy2019

    • Author(s)
      K. Fujiwara, H. Minato, J. Shiogai, A. Kumamoto, N. Shibata, A. Tsukazaki
    • Journal Title

      APL Materials

      Volume: 7 Issue: 2 Pages: 22505-22505

    • DOI

      10.1063/1.5054289

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Growth control of corundum-derivative MnSnO3 thin films by pulsed-laser deposition2019

    • Author(s)
      K. Miura, K. Fujiwara, A. Tsukazaki
    • Journal Title

      AIP Advances

      Volume: 9 Issue: 3

    • DOI

      10.1063/1.5090407

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Highly conductive PdCoO2 ultrathin films for transparent electrodes2018

    • Author(s)
      T. Harada, K. Fujiwara, and A. Tsukazaki
    • Journal Title

      APL Materials

      Volume: 6 Issue: 4 Pages: 046107-046107

    • DOI

      10.1063/1.5027579

    • Related Report
      2018 Annual Research Report 2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] High-mobility field-effect transistor based on crystalline ZnSnO3 thin films2018

    • Author(s)
      H. Minato, K. Fujiwara, A. Tsukazaki
    • Journal Title

      AIP Advances

      Volume: 8 Issue: 5

    • DOI

      10.1063/1.5034403

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Enhanced electron mobility at the two-dimensional metallic surface of BaSnO3 electric-double-layer transistor at low temperatures2017

    • Author(s)
      K. Fujiwara, K. Nishihara, J. Shiogai, and A. Tsukazaki
    • Journal Title

      Applied Physics Letters

      Volume: 110 Issue: 20

    • DOI

      10.1063/1.4983611

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Improvement of electron mobility in La:BaSnO3 thin films by insertion of an atomically flat insulating (Sr,Ba)SnO3 buffer layer2016

    • Author(s)
      J. Shiogai, K. Nishihara, K. Sato, and A. Tsukazaki
    • Journal Title

      AIP Advances

      Volume: 6 Issue: 6

    • DOI

      10.1063/1.4953808

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] High field-effect mobility at the (Sr,Ba)SnO3/BaSnO3 interface2016

    • Author(s)
      K. Fujiwara, K. Nishihara, J. Shiogai, and A. Tsukazaki
    • Journal Title

      AIP Advances

      Volume: 6 Issue: 8

    • DOI

      10.1063/1.4961637

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Presentation] PdCoO2/b-Ga2O3エピタキシャルショットキー接合2019

    • Author(s)
      原田尚之、伊藤俊、塚﨑敦
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] A layered oxide PdCoO2 with conductivity comparable with Au: a thin-film approach2019

    • Author(s)
      T. Harada, K. Sugawara, T. Miyakawa, T. Nakamura, H. Oinuma, T. Takahashi, T. Sato, T. Nojima, K. Fujiwara, A. Tsukazaki
    • Organizer
      The 2nd Symposium for World Leading Research Centers-Materials Science and Spintronics-
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Emergent phenomena at the thin film heterointerface2018

    • Author(s)
      A. Tsukazaki
    • Organizer
      Summit of Materials Science (SMS2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Spin-orbit interaction investigated by weak anti-localization in perovskite BaSn1-xPbxO3 thin films2018

    • Author(s)
      J. Shiogai, T. Chida, K. Hashimoto, K. Fujiwara, T. Sasaki, and A. Tsukazaki
    • Organizer
      Summit of Materials Science (SMS2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] An oxide as conductive as gold: PdCoO2 with graphene-like 2D Pd Sheets2018

    • Author(s)
      T. Harada, K. Sugawara, T. Miyakawa, T. Nakamura, H. Oinuma, T. Takahashi, T. Sato, K. Fujiwara, A. Tsukazaki
    • Organizer
      Summit of Materials Science (SMS2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Field-effect transistor based on crystalline ZnSnO3 grown by molecular beam epitaxy2018

    • Author(s)
      K. Fujiwara, H. Minato, A. Tsukazaki
    • Organizer
      7th international symposium on transparent conductive materials
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Nonlinear Hall effect originated from the surface of PdCoO2 ultrathin films2018

    • Author(s)
      T. Harada, K. Sugawara, T. Miyakawa, T. Nakamura, H. Oinuma, T. Takahashi, T. Sato, K. Fujiwara, A. Tsukazaki
    • Organizer
      25th International Workshop on Oxide Electronics
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] デラフォサイト型層状酸化物PdCoO2の極薄膜化と物性2018

    • Author(s)
      原田尚之、菅原克明、宮川智樹、中村剛慶、追沼暉、高橋隆、佐藤宇史、藤原宏平、塚﨑敦
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 薄膜合成と界面制御による酸化物トランジスタの機能向上2018

    • Author(s)
      藤原 宏平、塚﨑 敦
    • Organizer
      日本セラミックス協会 第31回秋季シンポジウム
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] Microfabrication of functional thin films using LaAlO3/BaOx water-soluble sacrificial templates2018

    • Author(s)
      T. Harada, A. Tsukazaki
    • Organizer
      KIST-KINKEN symposium
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] パルスレーザー堆積法によるイルメナイト型MnSnO3薄膜の作製2018

    • Author(s)
      三浦径、藤原宏平、塚﨑敦
    • Organizer
      第135回東北大学金属材料研究所講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 分子線エピタキシー法によるZnSnO3およびMgSnO3の薄膜安定化2018

    • Author(s)
      湊博哉、藤原宏平、塩貝純一、熊本明仁、柴田直哉、塚﨑敦
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] ペロブスカイト構造BaSn1-xPbxO3薄膜における弱反局在効果の観測2018

    • Author(s)
      千田琢丸、塩貝純一、藤原宏平、塚﨑敦
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 機能性薄膜の汎用的微細化プロセスとデバイス開発2018

    • Author(s)
      原田 尚之、C. Woltmann, P. Wittlich, J. Mannhart, 塚﨑敦
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] Weak anti-localization in perovskite BaSn1-xPbxO3 thin films2018

    • Author(s)
      J. Shiogai, T. Chida, K. Fujiwara, A. Tsukazaki
    • Organizer
      Kick-off Symposium for World Leading Research Centers - Materials Science and Spintronics -
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Microfabrication process using LaAlOx / BaOx water-soluble sacrificial bilayers2018

    • Author(s)
      T. Harada, A. Tsukazaki
    • Organizer
      SPIE Photonics west
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Electron mobility enhancement in electrostatically gated BaSnO3 films2017

    • Author(s)
      K. Fujiwara, K. Nishihara, J. Shiogai, A. Tsukazaki
    • Organizer
      第27回日本MRS年次大会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] 薄膜・界面物性研究の展望2017

    • Author(s)
      塚﨑敦
    • Organizer
      金研共同利用・共同研究ワークショップ 「物性物理分野における協働展開」
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] ポスト遷移金属の酸化物を用いた薄膜素子研究2017

    • Author(s)
      藤原宏平、塚﨑敦
    • Organizer
      ポスト新機能物質開発のための戦略会議
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] スズ系複酸化物のエピタキシャル成長と電子機能開拓2017

    • Author(s)
      藤原 宏平、西原 和貴、塩貝 純一、塚﨑 敦
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県横浜市)
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] BaSnO3 thin-film transistors with high field-effect mobility2016

    • Author(s)
      Kohei Fujiwara, Kazuki Nishihara, Junichi Shiogai, and Atsushi Tsukazaki
    • Organizer
      SMS 2016: Summit of Materials Science
    • Place of Presentation
      東北大学金属材料研究所(宮城県仙台市)
    • Year and Date
      2016-05-18
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 高電界効果移動度を有するBaSnO3薄膜電界効果トランジスタ2016

    • Author(s)
      西原 和貴、藤原 宏平、塩貝 純一、塚﨑 敦
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学大岡山キャンパス(東京都目黒区)
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] 分子線エピタキシー法を用いた酸化物系ヘテロ構造の作製と物性2016

    • Author(s)
      塚﨑 敦
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学大岡山キャンパス(東京都目黒区)
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] High field-effect mobility at the (Sr,Ba)SnO3 interface2016

    • Author(s)
      K. Fujiwara, A. Tsukazaki
    • Organizer
      Mini-workshop on oxides and related materials
    • Place of Presentation
      東北大学片平キャンパス(宮城県仙台市)
    • Year and Date
      2016-02-24
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] Inフリー透明導電膜の伝導度向上と安定性向上に向けた新技術開拓2016

    • Author(s)
      塚﨑 敦
    • Organizer
      低炭素社会基盤材料融合研究センター第7回ワークショップ
    • Place of Presentation
      東北大学金属材料研究所(宮城県仙台市)
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] Field-effect transistor based on atomically flat perovskite BaSnO3 films2015

    • Author(s)
      K. Fujiwara, K. Nishihara, J. Shiogai, A. Tsukazaki
    • Organizer
      RIKEN Topical meeting on Oxide Interfaces 2015
    • Place of Presentation
      理化学研究所(埼玉県和光市)
    • Year and Date
      2015-11-05
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 原子層平坦(Sr,Ba)SnO3バッファー層導入によるLa:BaSnO3薄膜の移動度の向上2015

    • Author(s)
      西原 和貴、塩貝 純一、塚﨑 敦
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場(愛知県名古屋市)
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
  • [Presentation] 原子層平坦(Sr,Ba)SnO3バッファー層導入によるLa:BaSnO3薄膜の移動度の向上2015

    • Author(s)
      西原 和貴、塩貝 純一、塚﨑 敦
    • Organizer
      第129回東北大学金属材料研究所講演会
    • Place of Presentation
      東北大学金属材料研究所(宮城県仙台市)
    • Year and Date
      2015-05-29
    • Related Report
      2015 Annual Research Report
  • [Remarks] 東北大学金属材料研究所 低温物理学研究部門HP

    • URL

      http://mu.imr.tohoku.ac.jp/

    • Related Report
      2018 Annual Research Report
  • [Remarks] 塚﨑研究室HP

    • URL

      http://mu.imr.tohoku.ac.jp/

    • Related Report
      2015 Annual Research Report

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Published: 2015-04-16   Modified: 2020-03-30  

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