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Development of advanced soft x-ray focusing system with a symmetric rotational mirror

Research Project

Project/Area Number 15H02041
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Quantum beam science
Research InstitutionThe University of Tokyo

Principal Investigator

Mimura Hidekazu  東京大学, 大学院工学系研究科(工学部), 准教授 (30362651)

Project Period (FY) 2015-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥41,340,000 (Direct Cost: ¥31,800,000、Indirect Cost: ¥9,540,000)
Fiscal Year 2018: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2017: ¥5,850,000 (Direct Cost: ¥4,500,000、Indirect Cost: ¥1,350,000)
Fiscal Year 2016: ¥17,160,000 (Direct Cost: ¥13,200,000、Indirect Cost: ¥3,960,000)
Fiscal Year 2015: ¥13,130,000 (Direct Cost: ¥10,100,000、Indirect Cost: ¥3,030,000)
KeywordsX線集光 / 超精密加工 / 軟X線 / 軟X線 / X線ミラー / X線ミラー / 回転楕円ミラー / X線集光 / 高次高調波 / SPring-8 / 形状修正 / 放射光 / 応用光学 / 生産工学 / 顕微鏡 / X線 / 回転体ミラー / 軟X線集光 / 精密部品加工
Outline of Final Research Achievements

Various analysis methods using x-rays such as x-ray photoemission spectroscopy and x-ray absorption spectroscopy are indispensable for developing advanced materials. One of key technologies for improving the performance of these methods is x-ray focusing.
The purpose of this study is the development of mirror-based focusing soft x-rays whose wavelength ranges are from 1 nm to 10 nm.By employing a symmetric rotational mirror, it is possible to focus soft x-rays into a nanometer size. In this study, we improve the figure accuracy of the mirror and proposed two-stage soft x-ray focusing system in which a ring-focusing mirror and a symmetric rotational mirror are installed. We performed basic research on soft x-ray focusing with a mirror using high order harmonic generation source and constructed the two-stage soft x-ray focusing system at a beamline of SPring-8. We confirmed the size of soft x-ray focused beam is less than 200 nm at a wavelength of 3 nm .

Academic Significance and Societal Importance of the Research Achievements

ミラーによる軟X線集光システムは理論的な性能は高いが、その作製が困難であったため利用されていなかった。本研究により、ミラーの製造技術が大幅に進歩するとともに、実際に軟X線集光が実証され、今後、ミラーによる集光技術が普及すると考えている。その結果、多くのX線分析装置の性能が向上し、電池材料や半導体材料の新規開発に貢献する。

Report

(5 results)
  • 2019 Final Research Report ( PDF )
  • 2018 Annual Research Report
  • 2017 Annual Research Report
  • 2016 Annual Research Report
  • 2015 Annual Research Report
  • Research Products

    (92 results)

All 2020 2019 2018 2017 2016 2015

All Journal Article (23 results) (of which Peer Reviewed: 19 results,  Acknowledgement Compliant: 13 results,  Open Access: 3 results) Presentation (66 results) (of which Int'l Joint Research: 22 results,  Invited: 7 results) Patent(Industrial Property Rights) (3 results)

  • [Journal Article] Soft x-ray nanobeam formed by an ellipsoidal mirror2020

    • Author(s)
      Yoko Takeo, Akihiro Suzuki, Hiroto Motoyama, Yoshinori Takei, Takehiro Kume, Yusuke Matsuzawa, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, and Hidekazu Mimura1Applied Physics Letters
    • Journal Title

      Applied Physics Letters

      Volume: 116 Issue: 12 Pages: 121102-121102

    • DOI

      10.1063/1.5144932

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Broadband nano-focusing of high-order harmonics in soft X-ray region with ellipsoidal mirro2019

    • Author(s)
      H. Motoyama, A. Iwasaki, Y. Takei, T. Kume, S. Egawa, T. Sato, K. Yamanouchi, H. Mimura
    • Journal Title

      Applied Physics Letters

      Volume: 114 Issue: 24 Pages: 241102-241102

    • DOI

      10.1063/1.5091587

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Probing the spatial coherence of soft X-ray beams with Fresnel mirrors at BL25SU of SPring-82019

    • Author(s)
      Y. Takeo, H. Motoyama, Y. Senba, H. Kishimoto, H. Ohashi, and H. Mimura
    • Journal Title

      Journal of Synchrotron Radiation

      Volume: 26 Issue: 3 Pages: 756-761

    • DOI

      10.1107/s1600577519002583

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Differential deposition for producing microstructure2018

    • Author(s)
      H. Motoyama, M. Nagayama, and H. Mimura
    • Journal Title

      Precision Engineering

      Volume: 印刷中

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] System Development for Fabricating Mandrel of Soft X-ray Rotating-Body Mirror (2<sup>nd</sup> Report)2017

    • Author(s)
      武井 良憲, 三村 秀和
    • Journal Title

      Journal of the Japan Society for Precision Engineering

      Volume: 83 Issue: 6 Pages: 585-592

    • DOI

      10.2493/jjspe.83.585

    • NAID

      130005689946

    • ISSN
      0912-0289, 1882-675X
    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Precise characterization of focused vortex beams2017

    • Author(s)
      Takahiro Saito, Yoko Takeo, and Hidekazu Mimura
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Issue: 9 Pages: 092501-092501

    • DOI

      10.7567/jjap.56.092501

    • NAID

      210000148263

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Optical design of a sub-1-μm focusing system for soft x-ray free electron lasers2017

    • Author(s)
      H. Motoyama, S. Owada, K. Tono, T. Koyama, H. Ohashi, M. Yabashi, and H. Mimura
    • Journal Title

      Proceeding of SPIE

      Volume: 10386 Pages: 1038609-1038609

    • DOI

      10.1117/12.2271282

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Three-dimensional Shape Measurement for X-ray Ellipsoidal Mirror2017

    • Author(s)
      T. Kume, Y. Takei, S. Egawa, G. Yamaguchi, H. Motoyama, and H. Mimura,
    • Journal Title

      Proceeding of SPIE

      Volume: 10385 Pages: 22-22

    • DOI

      10.1117/12.2273666

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A Fundamental Study of Local Electrochemical Nano-processing2017

    • Author(s)
      G.Yamaguchi, T. Kume, H. Mimura
    • Journal Title

      International Journal of Electrical Machining

      Volume: 22 Pages: 36-41

    • NAID

      130005712362

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] System Development for Fabricating Mandrel of Soft X-ray Rotating-Body Mirror (1st Report)2017

    • Author(s)
      武井良憲,三村秀和
    • Journal Title

      Journal of the Japan Society for Precision Engineering

      Volume: 83 Issue: 3 Pages: 245-250

    • DOI

      10.2493/jjspe.83.245

    • NAID

      130005436044

    • ISSN
      0912-0289, 1882-675X
    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] 電鋳法による高精度表面転写プロセスの開発2017

    • Author(s)
      三村秀和
    • Journal Title

      電気加工学会誌

      Volume: 51(126) Pages: 147-151

    • Related Report
      2016 Annual Research Report
    • Acknowledgement Compliant
  • [Journal Article] Development of high-order harmonic focusing system based on ellipsoidal mirror2016

    • Author(s)
      H. Motoyama, T. Sato, A. Iwasaki, S. Egawa, K. Yamanouchi, and H. Mimura
    • Journal Title

      Review of Scientific Instruments

      Volume: 87 Issue: 5 Pages: 051803-051803

    • DOI

      10.1063/1.4950735

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] 高精度回転楕円ミラーによる高強度EUV・軟X線ビーム形成2016

    • Author(s)
      三村秀和
    • Journal Title

      光アライアンス

      Volume: 27(2) Pages: 45-49

    • NAID

      40020888126

    • Related Report
      2016 Annual Research Report
    • Acknowledgement Compliant
  • [Journal Article] 高精度電鋳法の開発と軟X線集光ミラーの作製2016

    • Author(s)
      三村秀和
    • Journal Title

      Electrochemistry

      Volume: 84(9) Pages: 721-725

    • Related Report
      2016 Annual Research Report
    • Acknowledgement Compliant
  • [Journal Article] ナノ精度表面製造法とX線集光ミラー2016

    • Author(s)
      三村秀和
    • Journal Title

      応用物理

      Volume: 85(11) Pages: 957-961

    • NAID

      130007715294

    • Related Report
      2016 Annual Research Report
    • Acknowledgement Compliant
  • [Journal Article] Evaluation of figure accuracy of Wolter mirror fabricated by electroforming2016

    • Author(s)
      S. Egawa, T. Kume, Y. Takeo, Y. Takei, H. Motoyama and H. Mimura
    • Journal Title

      Proceeding of SPIE

      Volume: 9687 Pages: 968705-968705

    • DOI

      10.1117/12.2243422

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Influence of Residual Stress of Electrodeposited Layer on Shape Replication Accuracy in Ni Electroforming2016

    • Author(s)
      T. kume, S. Egawa, G. Yamaguchi, H. Mimura
    • Journal Title

      Procedia CIRP

      Volume: 42 Pages: 783-787

    • DOI

      10.1016/j.procir.2016.02.319

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Development of an Ion Beam Sputter Deposition System for Producing Complex-Shaped X-ray Mirrors2016

    • Author(s)
      H. Motoyama, M. Nagayama, and H. Mimura
    • Journal Title

      Procedia CIRP

      Volume: 42 Pages: 512-515

    • DOI

      10.1016/j.procir.2016.02.242

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Development of surface profiler for master mandrel of x-ray ellipsoidal mirror2016

    • Author(s)
      Y. Takei, H. Mimura
    • Journal Title

      Proceeding of SPIE

      Volume: 9962 Pages: 99620C-99620C

    • DOI

      10.1117/12.2235314

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Development of internal stress measurement technique for Ni electroforming using Shack.Hartmann sensor2016

    • Author(s)
      T. Kume, S. Egawa, and H. Mimura
    • Journal Title

      International Journal of Electrical Machining

      Volume: 21 Issue: 0 Pages: 25-30

    • DOI

      10.2526/ijem.21.25

    • NAID

      130005395684

    • ISSN
      1341-7908, 2188-5117
    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Evaluation of surface figure error profile of ultra-precise ellipsoidal mirror for soft X-ray focusing2016

    • Author(s)
      Y. Takeo, T. Saito, H. Mimura
    • Journal Title

      Proceeding of SPIE

      Volume: 9588 Pages: 95880A-95880A

    • DOI

      10.1117/12.2188824

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Two-stage reflective optical system for achromatic 10 nm x-ray focusing2015

    • Author(s)
      H. Motoyama and H. Mimura
    • Journal Title

      J. Phys. B: At. Mol. Opt. Phys.

      Volume: 48 Issue: 24 Pages: 244002-244002

    • DOI

      10.1088/0953-4075/48/24/244002

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of ellipsoidal focusing mirror for soft x-ray and extreme ultraviolet light2015

    • Author(s)
      H. Mimura, Y. Takei, T. Saito, T. Kume, H. Motoyama, S. Egawa, Y. Takeo, T. Higashi,
    • Journal Title

      Proceeding of SPIE

      Volume: 9588 Pages: 95880L-95880L

    • DOI

      10.1117/12.2187455

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] 軟X線タイコグラフィを用いた回転楕円ミラーの形状評価2019

    • Author(s)
      竹尾陽子,鈴木明大,仙波泰徳,岸本輝,大橋治彦,三村秀和
    • Organizer
      2019年度精密工学会秋季大会学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 回転楕円ミラーによるナノ集光ビームを用いた軟X線タイコグラフィ顕微鏡の開発2018

    • Author(s)
      竹尾陽子,鈴木明大,仙波泰徳,岸本輝,大橋治彦,三村秀和
    • Organizer
      日本光学会年次学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 精密銅電鋳法の転写精度に及ぼす電析条件の影響,2018年度精密工学会春季大会学術講演会2018

    • Author(s)
      山口豪太,久米健大,三村秀和
    • Organizer
      2018年度精密工学会春季大会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 軟X線集光用回転楕円ミラーの高精度化 -直接的形状修正法の開発と実証-2018

    • Author(s)
      横前俊也,本山央人,三村秀和
    • Organizer
      第31回日本放射光学会年会・放射光科学合同シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] 回転楕円軟X線ミラー内面形状修正法の開発 -ミラー内面修正性能の評価-2018

    • Author(s)
      横前俊也,本山央人,三村秀和
    • Organizer
      2018年精密工学会春季大会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 回転楕円ミラーを用いた軟X線自由電子レーザー集光システムの開発2018

    • Author(s)
      本山央人,大和田成起,久米健大,山口豪太,犬伏雄一,登野健介,小山貴久,江川悟,大橋治彦,矢橋牧名,三村秀和
    • Organizer
      第31回日本放射光学会年会・放射光科学合同シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] ナノ精度コピーによる超高精度ミラー作製2017

    • Author(s)
      三村秀和
    • Organizer
      科学技術振興機構 新技術説明会
    • Place of Presentation
      JST東京本部
    • Year and Date
      2017-03-16
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] 回転楕円ミラー評価のための高精度波面計測装置の開発2017

    • Author(s)
      齋藤貴宏,竹尾陽子,江川悟,三村秀和
    • Organizer
      2017年度精密工学会春季大会
    • Place of Presentation
      慶応義塾大学
    • Year and Date
      2017-03-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] 高分解能スティッチング干渉計測における高精度つなぎ合わせ角度決定法2017

    • Author(s)
      松澤雄介、三村秀和
    • Organizer
      2017年度精密工学会春季大会学術講演会
    • Place of Presentation
      慶應義塾大学
    • Year and Date
      2017-03-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] 回転楕円ミラーによる高次高調波集光システムの開発2017

    • Author(s)
      本山央人、岩崎純史、佐藤堯洋、武井良憲、久米健大、江川悟、山内薫、三村秀和
    • Organizer
      2017年度精密工学会春季大会学術講演会
    • Place of Presentation
      慶應義塾大学
    • Year and Date
      2017-03-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] ピンホール成膜による高分解能形状修正成膜法の開発2017

    • Author(s)
      西岡勇人、本山央人、三村秀和
    • Organizer
      2017年度精密工学会春季大会学術講演会
    • Place of Presentation
      慶應義塾大学
    • Year and Date
      2017-03-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] 銅電析による高精度電鋳法の開発2017

    • Author(s)
      山口豪太,久米健大,三村秀和
    • Organizer
      2017年度精密工学会春季大会学術講演会
    • Place of Presentation
      慶應義塾大学
    • Year and Date
      2017-03-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] 回転楕円ミラー用マンドレルの3次元高精度形状計測法の開発2017

    • Author(s)
      久米健大、武井良憲、三村秀和
    • Organizer
      2017年度精密工学会春季大会学術講演会
    • Place of Presentation
      慶應義塾大学
    • Year and Date
      2017-03-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] 高精度ミラーを用いた軟X線のナノ集光2017

    • Author(s)
      三村秀和
    • Organizer
      物性研究所短期研究会「新世代光源で切り拓く物質科学と生命科学の融合領域」
    • Place of Presentation
      東京大学
    • Year and Date
      2017-03-08
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] 高精度X線ミラー製造のための超精密形状計測法2017

    • Author(s)
      三村秀和
    • Organizer
      H28年度長さクラブ講演会
    • Place of Presentation
      機械振興会館
    • Year and Date
      2017-02-24
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] 回転楕円ミラーの作製のための高精度電鋳法の開発2017

    • Author(s)
      山口豪太,久米健大,三村秀和
    • Organizer
      第30回日本放射光学会年会・放射光科学合同シンポジウム
    • Place of Presentation
      神戸芸術センター
    • Year and Date
      2017-01-07
    • Related Report
      2016 Annual Research Report
  • [Presentation] 回転楕円ミラーによる軟X線集光2017

    • Author(s)
      三村秀和,本山央人,竹尾陽子,武井良憲, 松澤雄介, 久米健大, 仙波泰徳,岸本輝, 大橋治彦
    • Organizer
      第30回日本放射光学会年会・放射光科学合同シンポジウム
    • Place of Presentation
      神戸芸術センター
    • Year and Date
      2017-01-07
    • Related Report
      2016 Annual Research Report
  • [Presentation] Three-dimensional Shape Measurement for X-ray Ellipsoidal Mirror2017

    • Author(s)
      T. Kume, Y. Takei, S. Egawa, G. Yamaguchi, H. Motoyama, and H. Mimura
    • Organizer
      2017 SPIE Optics + Photonics
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Replication Accuracy of Electroforming Process for X-ray Ellipsoidal Mirror2017

    • Author(s)
      T. Kume, Y. Takei, S. Egawa, G. Yamaguchi, H. Motoyama, and H. Mimura
    • Organizer
      International Conference on X-ray Optics and Application 2017 (XOPT'2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Construction of a soft x-ray transmission microscope for evaluation of Wolter mirror optics2017

    • Author(s)
      S. Egawa, H. Motoyama, A. Iwasaki, K. Yamanouchi, H. Mimura
    • Organizer
      International Conference on X-ray Optics, Detectors, Sources, and their Applications 2017 (XOPT2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication process of precise mandrel for Wolte mirror2017

    • Author(s)
      S. Egawa, Y. Takei, Y. Matsuzawa, H. Motoyama, T. Kume, Y. Takeo and H. Mimura
    • Organizer
      The 24th Congress of the International Commission for Optics (ICO-24)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of Ellipsoidal Mirror by Cu Electroforming2017

    • Author(s)
      G. Yamaguchi, T. Kume, H. Mimura
    • Organizer
      International Conference on X-ray Optics and Applications 2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of Cu-electroformed Mirrors for X-ray Focusing2017

    • Author(s)
      G. Yamaguchi, T. Kume, H. Mimura
    • Organizer
      7th International Conference of Asian Society for Precision Engineering and Nanotechnology
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of differential deposition method for inner surfaces of ellipsoidal x-ray mirrors2017

    • Author(s)
      S. Yokomae, H. Motoyama, and H. Mimura
    • Organizer
      7th International Conference of Asian Society for Precision Engineering and Nanotechnology
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] イオンビームスパッタ成膜による回転体ミラーの内面形状修正2017

    • Author(s)
      横前俊也,本山央人,三村秀和
    • Organizer
      2017年度精密工学会秋季大会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 回転体X線ミラー内面への追加成膜プロセスの開発2017

    • Author(s)
      横前俊也,本山央人,三村秀和
    • Organizer
      第14回X線結像光学シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] Focusing EUV light with ellipsoidal mirror2017

    • Author(s)
      H. Motoyama, and H. Mimura
    • Organizer
      International Conference on X-ray Optics, Detectors, Sources, and their Applications 2017 (XOPT2017)
    • Related Report
      2017 Annual Research Report
  • [Presentation] Development of EUV focusing system based on ellipsoidal mirror2017

    • Author(s)
      H. Motoyama, and H. Mimura
    • Organizer
      2017 SPIE Optics + Photonics
    • Related Report
      2017 Annual Research Report
  • [Presentation] Focusing EUV high-order harmonics at the diffraction limit2017

    • Author(s)
      H. Motoyama, A. Iwasaki, T. Sato, H. Mimura, and K. Yamanouchi
    • Organizer
      14th International conference on multiphoton processes
    • Related Report
      2017 Annual Research Report
  • [Presentation] 高精度回転楕円ミラーによる軟X線ナノ集光2016

    • Author(s)
      三村秀和
    • Organizer
      第76回ELIDセミナー
    • Place of Presentation
      理化学研究所
    • Year and Date
      2016-12-22
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] Development of Pulse Electrodeposition for Removal of Hydrogen Bubbles Adhering to Cathode2016

    • Author(s)
      T. Kume, G. Yamaguchi, and H. Mimura
    • Organizer
      Electrochemistry 2016
    • Place of Presentation
      Goslar, Germany,
    • Year and Date
      2016-09-26
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 常温Ni電鋳におけるパルス電析条件の検討2016

    • Author(s)
      山口豪太,久米健大,三村秀和
    • Organizer
      2016年度精密工学会秋季大会学術講演会
    • Place of Presentation
      茨城大学
    • Year and Date
      2016-09-06
    • Related Report
      2016 Annual Research Report
  • [Presentation] X線集光用回転楕円ミラーマンドレル作製プロセスの開発2016

    • Author(s)
      武井良憲,松澤雄介,三村秀和
    • Organizer
      2016年度精密工学会秋季大会学術講演会
    • Place of Presentation
      茨城大学
    • Year and Date
      2016-09-06
    • Related Report
      2016 Annual Research Report
  • [Presentation] Development of a surface profiler for mandrel of ellipsoidal soft x-ray focusing mirror2016

    • Author(s)
      Y. Takei, H. Mimura
    • Organizer
      2016 Optics + Photonics
    • Place of Presentation
      San Diego USA
    • Year and Date
      2016-08-28
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Current status of the development of two-staged focusing system for soft X-ray lasers2016

    • Author(s)
      H. Motoyama, T. Sato, A. Iwasaki, Y. Takeo, Y. Senba, H. Ohashi, K. Yamanouchi, and H. Mimura
    • Organizer
      International Conference on X-ray Optics, Detectors, Sources, and their Applications 2016 (XOPT2016)
    • Place of Presentation
      Yokohama, Japan
    • Year and Date
      2016-05-18
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Current status of development of ultraprecise Wolter mirror for soft X-ray microscopy2016

    • Author(s)
      S. Egawa, T. Kume, Y. Takei, Y. Takeo, H. Motoyama and H. Mimura
    • Organizer
      International Conference on X-ray Optics, Detectors, Sources, and their Applications 2016 (XOPT2016)
    • Place of Presentation
      Yokohama, Japan
    • Year and Date
      2016-05-18
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Evaluation of degree of spatial coherence at a soft X-ray beamline of SPring-82016

    • Author(s)
      Y. Takeo, H. Motoyama, Y. Senba, H. Kisimoto, H. Ohashi and H. Mimura
    • Organizer
      International Conference on X-ray Optics, Detectors, Sources, and their Applications 2016 (XOPT2016)
    • Place of Presentation
      Yokohama, Japan
    • Year and Date
      2016-05-18
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Wavefront measurement using ptychographic phase retrieval for evaluating figure and alignment errors of ellipsoidal mirror2016

    • Author(s)
      Y. Takeo, T. Saito and H. Mimura
    • Organizer
      International Conference on X-ray Optics, Detectors, Sources, and their Applications 2016 (XOPT2016)
    • Place of Presentation
      Yokohama, Japan
    • Year and Date
      2016-05-18
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Electroforming process specialized for fabrication of x-ray ellipsoidal mirror2016

    • Author(s)
      T. Kume, S. Egawa, Y. Takeo, and H. Mimura
    • Organizer
      International Conference on X-ray Optics, Detectors, Sources, and their Applications 2016 (XOPT2016)
    • Place of Presentation
      Yokohama, Japan
    • Year and Date
      2016-05-18
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of figure correction system for master mandrel of ellipsoidal x-ray mirror,2016

    • Author(s)
      Y. Takei, T. Higashi and H. Mimura
    • Organizer
      International Conference on X-ray Optics, Detectors, Sources, and their Applications 2016 (XOPT2016)
    • Place of Presentation
      Yokohama, Japan
    • Year and Date
      2016-05-18
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Replication result of Wolter mirror for soft x-ray microscopy by electroforming2016

    • Author(s)
      S. Egawa, T. Kume, Y. Takeo, Y. Takei, H. Motoyama and H. Mimura
    • Organizer
      The 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies
    • Place of Presentation
      Suzhou China
    • Year and Date
      2016-04-27
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of an Ion Beam Sputter Deposition System for Producing Complex-Shaped X-ray Mirrors2016

    • Author(s)
      H. Motoyama, M. Nagayama, and H. Mimura
    • Organizer
      18th CIRP Conference on Electro Physical and Chemical Machining (ISEM XVIII)
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2016-04-19
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Influence of Residual Stress of Electrodeposited Layer on Shape Replication Accuracy in Ni Electroforming2016

    • Author(s)
      T. Kume, S. Egawa, G. Yamaguchi, and H. Mimura
    • Organizer
      18th CIRP Conference on Electro Physical and Chemical Machining (ISEM XVIII)
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2016-04-19
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ピンホールマスクを 用いた高分解能形状 修正成膜法の開発  第 2 報-数値制御シ ステムによる任意形 状創成-2016

    • Author(s)
      長山光、本山央人、三村秀和
    • Organizer
      2016年精密工学会春季大会
    • Place of Presentation
      東京理科大学
    • Year and Date
      2016-03-15
    • Related Report
      2015 Annual Research Report
  • [Presentation] 位相回復法を用いた転楕円ミラーの形状計測高精度化2016

    • Author(s)
      竹尾陽子、齋藤貴宏、三村秀和
    • Organizer
      2016年度精密工学会春季大会
    • Place of Presentation
      東京理科大学
    • Year and Date
      2016-03-15
    • Related Report
      2015 Annual Research Report
  • [Presentation] 放射光ナノビーム開発の現状と展望2016

    • Author(s)
      三村秀和
    • Organizer
      東北放射光施設(SLiT-J)利用分野調査検討ワークショップ
    • Place of Presentation
      東北大学
    • Year and Date
      2016-01-19
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] 回転楕円ミラーによる高次高調波集光システムの開発と自由電子レーザへの展開2016

    • Author(s)
      本山央人、佐藤尭洋、岩崎純史、江川悟、山内薫、三村秀和
    • Organizer
      第29回日本放射光学会年会・放射光科学合同シンポジウム
    • Place of Presentation
      東京大学
    • Year and Date
      2016-01-09
    • Related Report
      2015 Annual Research Report
  • [Presentation] 複雑な形状を有するX線ミラー作製のための高分解能形状修正成膜法の開発2016

    • Author(s)
      長山光、本山央人、三村秀和
    • Organizer
      第29回日本放射光学会年会・放射光科学合同シンポジウム
    • Place of Presentation
      東京大学
    • Year and Date
      2016-01-09
    • Related Report
      2015 Annual Research Report
  • [Presentation] 軟X線結像のためのウォルターミラーの開発2016

    • Author(s)
      江川悟、竹尾陽子、本山央人、久米健大、武井良憲、三村秀和
    • Organizer
      第29回日本放射光学会年会・放射光科学合同シンポジウム
    • Place of Presentation
      東京大学
    • Year and Date
      2016-01-09
    • Related Report
      2015 Annual Research Report
  • [Presentation] 極限集光光学システムによる超高強度X線パルスの実現2016

    • Author(s)
      三村秀和
    • Organizer
      レーザー学会学術講演会第36回年次大会
    • Place of Presentation
      名城大学
    • Year and Date
      2016-01-09
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] 高精度マンドレル作製と高精度形状転写による軟 X 線回転楕円ミラーの作製2016

    • Author(s)
      武井良憲,久米健大,竹尾陽子,三村秀和
    • Organizer
      第29回日本放射光学会年会・放射光科学シンポジウム
    • Place of Presentation
      東京大学
    • Related Report
      2015 Annual Research Report
  • [Presentation] フレネルミラー光学系による軟X線ビームの空間コヒーレンス評価2016

    • Author(s)
      竹尾陽子、本山央人、仙波泰徳、岸本 輝、大橋治彦、三村秀和
    • Organizer
      第29回日本放射光学会年会・放射光科学合同シンポジウム
    • Place of Presentation
      東京大学
    • Related Report
      2015 Annual Research Report
  • [Presentation] 軟X線用回転体集光ミラー開発の現状と今後の展開2015

    • Author(s)
      三村秀和
    • Organizer
      X線ナノ集光技術研究会2015
    • Place of Presentation
      東京大学
    • Year and Date
      2015-10-31
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] 回転楕円ミラーによる軟X線集光システムの開発2015

    • Author(s)
      本山央人、佐藤尭洋、岩崎純史、江川悟、山内薫、三村秀和
    • Organizer
      日本光学会年次学術講演会 Optics & Photonics Japan 2015
    • Place of Presentation
      筑波大学東京キャンパス文京校舎
    • Year and Date
      2015-10-28
    • Related Report
      2015 Annual Research Report
  • [Presentation] 軟X線結像用ウォルターミラーの形状評価と結像性能の予測2015

    • Author(s)
      江川悟、久米健大、武井良憲、竹尾陽子、斎藤貴宏、三村秀和
    • Organizer
      日本光学会年次学術講演会 Optics & Photonics Japan 2015
    • Place of Presentation
      筑波大学東京キャンパス文京校舎
    • Year and Date
      2015-10-28
    • Related Report
      2015 Annual Research Report
  • [Presentation] タイコグラフィ位相回復法による集光波面計測の高精度化2015

    • Author(s)
      竹尾陽子、齋藤貴宏、三村秀和
    • Organizer
      日本光学会年次学術講演会 Optics & Photonics Japan 2015
    • Place of Presentation
      筑波大学東京キャンパス文京校舎
    • Year and Date
      2015-10-28
    • Related Report
      2015 Annual Research Report
  • [Presentation] Ptychographic phase retrieval method for characterizing ultra-precise ellipsoidal mirrors2015

    • Author(s)
      Y. Takeo, T. Saito, H. Mimura
    • Organizer
      SPIE Optifab 2015
    • Place of Presentation
      Rochester USA
    • Year and Date
      2015-10-12
    • Related Report
      2015 Annual Research Report
  • [Presentation] 電析膜の内部応力測定と電鋳法の形状転写性能評価2015

    • Author(s)
      久米健大、江川悟、山口豪太、三村秀和
    • Organizer
      2015年度精密工学会秋季大会
    • Place of Presentation
      東北大学
    • Year and Date
      2015-09-04
    • Related Report
      2015 Annual Research Report
  • [Presentation] イオンビームスパッタ成膜法による回転楕円ミラーの内面形状修正装置の開発2015

    • Author(s)
      本山央人、長山光、三村秀和
    • Organizer
      2015年精密工学会秋季大会
    • Place of Presentation
      東北大学
    • Year and Date
      2015-09-04
    • Related Report
      2015 Annual Research Report
  • [Presentation] ピンホールマスクを用いた高分解能形状修正成膜手法の開発修正装置の開発2015

    • Author(s)
      長山光、本山央人、三村秀和
    • Organizer
      2015年精密工学会秋季大会
    • Place of Presentation
      東北大学
    • Year and Date
      2015-09-04
    • Related Report
      2015 Annual Research Report
  • [Presentation] 軟X線結像用ウォルターミラーの作製と形状精度の評価2015

    • Author(s)
      江川悟、久米健大、竹尾陽子、斎藤貴宏、武井良憲、三村秀和
    • Organizer
      2015年精密工学会秋季大会
    • Place of Presentation
      東北大学
    • Year and Date
      2015-09-04
    • Related Report
      2015 Annual Research Report
  • [Presentation] 回転楕円ミラー用マンドレルの形状計測装置の開発とその形状修正加工2015

    • Author(s)
      武井良憲,東隆裕,三村秀和
    • Organizer
      2015年度精密工学会秋季大会
    • Place of Presentation
      東北大学
    • Year and Date
      2015-09-04
    • Related Report
      2015 Annual Research Report
  • [Presentation] Development of ellipsoidal focusing mirror for soft x-ray and extreme ultraviolet light2015

    • Author(s)
      H. Mimura, Y. Takei, T. Saito, T. Kume, H. Motoyama, S. Egawa, Y. Takeo, T. Higashi
    • Organizer
      2015 Optics + Photonics
    • Place of Presentation
      San Diego USA
    • Year and Date
      2015-08-09
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Evaluation of surface figure error profile of ultra-precise ellipsoidal mirror for soft X-ray focusing2015

    • Author(s)
      Y. Takeo, T. Saito, H. Mimura
    • Organizer
      2015 Optics + Photonics
    • Place of Presentation
      San Diego USA
    • Year and Date
      2015-08-09
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High-order Harmonics Focusing with Ellipsoidal Mirror in Soft X-ray Region2015

    • Author(s)
      H. Motoyama, T. Sato, A. Iwasaki, S. Egawa, K. Yamanouchi, and H. Mimura
    • Organizer
      International Workshop on X-Ray Optics and Metrology (IWXM2015)
    • Place of Presentation
      Berkeley, USA
    • Year and Date
      2015-07-13
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Effect of Electrodeposition Conditions on Replication Accuracy of Electroforming2015

    • Author(s)
      T. Kume, S. Egawa, and H. Mimura
    • Organizer
      EUSPEN 15th International Conference
    • Place of Presentation
      Leuven, Belgium
    • Year and Date
      2015-07-01
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Patent(Industrial Property Rights)] 精密電鋳法のための気泡除去方法2017

    • Inventor(s)
      山口豪太、三村秀和
    • Industrial Property Rights Holder
      東京大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2017-096795
    • Filing Date
      2017
    • Related Report
      2017 Annual Research Report
  • [Patent(Industrial Property Rights)] 精密電鋳のための気泡除去方法2016

    • Inventor(s)
      久米健大、三村秀和
    • Industrial Property Rights Holder
      久米健大、三村秀和
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2016-113951
    • Filing Date
      2016-06-07
    • Related Report
      2016 Annual Research Report
  • [Patent(Industrial Property Rights)] 高NA集光素子の出口波面計測方法及び出口波面計測システム2015

    • Inventor(s)
      竹尾陽子、三村秀和
    • Industrial Property Rights Holder
      東京大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2015-158575
    • Filing Date
      2015-08-10
    • Related Report
      2015 Annual Research Report

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Published: 2015-04-16   Modified: 2022-11-04  

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