Development of advanced soft x-ray focusing system with a symmetric rotational mirror
| Project/Area Number |
15H02041
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Quantum beam science
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| Research Institution | The University of Tokyo |
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Principal Investigator |
Mimura Hidekazu 東京大学, 大学院工学系研究科(工学部), 准教授 (30362651)
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| Project Period (FY) |
2015-04-01 – 2019-03-31
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| Project Status |
Completed (Fiscal Year 2019)
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| Budget Amount *help |
¥41,340,000 (Direct Cost: ¥31,800,000、Indirect Cost: ¥9,540,000)
Fiscal Year 2018: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2017: ¥5,850,000 (Direct Cost: ¥4,500,000、Indirect Cost: ¥1,350,000)
Fiscal Year 2016: ¥17,160,000 (Direct Cost: ¥13,200,000、Indirect Cost: ¥3,960,000)
Fiscal Year 2015: ¥13,130,000 (Direct Cost: ¥10,100,000、Indirect Cost: ¥3,030,000)
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| Keywords | Ｘ線集光 / 超精密加工 / 軟Ｘ線 / 軟X線 / Ｘ線ミラー / X線ミラー / 回転楕円ミラー / X線集光 / 高次高調波 / SPring-8 / 形状修正 / 放射光 / 応用光学 / 生産工学 / 顕微鏡 / Ｘ線 / 回転体ミラー / 軟X線集光 / 精密部品加工 |
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| Outline of Final Research Achievements |
Various analysis methods using x-rays such as x-ray photoemission spectroscopy and x-ray absorption spectroscopy are indispensable for developing advanced materials. One of key technologies for improving the performance of these methods is x-ray focusing.
The purpose of this study is the development of mirror-based focusing soft x-rays whose wavelength ranges are from 1 nm to 10 nm.By employing a symmetric rotational mirror, it is possible to focus soft x-rays into a nanometer size. In this study, we improve the figure accuracy of the mirror and proposed two-stage soft x-ray focusing system in which a ring-focusing mirror and a symmetric rotational mirror are installed. We performed basic research on soft x-ray focusing with a mirror using high order harmonic generation source and constructed the two-stage soft x-ray focusing system at a beamline of SPring-8. We confirmed the size of soft x-ray focused beam is less than 200 nm at a wavelength of 3 nm .
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| Academic Significance and Societal Importance of the Research Achievements |
ミラーによる軟X線集光システムは理論的な性能は高いが、その作製が困難であったため利用されていなかった。本研究により、ミラーの製造技術が大幅に進歩するとともに、実際に軟Ｘ線集光が実証され、今後、ミラーによる集光技術が普及すると考えている。その結果、多くのＸ線分析装置の性能が向上し、電池材料や半導体材料の新規開発に貢献する。
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Report
(5 results)
Research Products
(92 results)
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[Journal Article] Soft x-ray nanobeam formed by an ellipsoidal mirror2020
Author(s)
Yoko Takeo, Akihiro Suzuki, Hiroto Motoyama, Yoshinori Takei, Takehiro Kume, Yusuke Matsuzawa, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, and Hidekazu Mimura1Applied Physics Letters
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Journal Title
Applied Physics Letters
Volume: 116
Issue: 12
Pages: 121102-121102
DOI
Related Report
Peer Reviewed
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[Presentation] 回転楕円ミラーによる軟X線集光2017
Author(s)
三村秀和，本山央人，竹尾陽子，武井良憲, 松澤雄介, 久米健大, 仙波泰徳，岸本輝, 大橋治彦
Organizer
第30回日本放射光学会年会・放射光科学合同シンポジウム
Place of Presentation
神戸芸術センター
Year and Date
2017-01-07
Related Report
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[Presentation] Current status of the development of two-staged focusing system for soft X-ray lasers2016
Author(s)
H. Motoyama, T. Sato, A. Iwasaki, Y. Takeo, Y. Senba, H. Ohashi, K. Yamanouchi, and H. Mimura
Organizer
International Conference on X-ray Optics, Detectors, Sources, and their Applications 2016 (XOPT2016)
Place of Presentation
Yokohama, Japan
Year and Date
2016-05-18
Related Report
Int'l Joint Research
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