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2軸干渉グリッド定在波一括転写と自律的精度保証による次世代光ナノグリッド基準創出

Research Project

Project/Area Number 15H02212
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionTohoku University

Principal Investigator

高 偉  東北大学, 工学研究科, 教授 (70270816)

Co-Investigator(Kenkyū-buntansha) 清水 裕樹  東北大学, 工学研究科, 准教授 (70606384)
伊東 聡  東北大学, 工学研究科, 助教 (00624818)
Project Period (FY) 2015-04-01 – 2019-03-31
Project Status Granted (Fiscal Year 2015)
Budget Amount *help
¥19,110,000 (Direct Cost: ¥14,700,000、Indirect Cost: ¥4,410,000)
Fiscal Year 2015: ¥19,110,000 (Direct Cost: ¥14,700,000、Indirect Cost: ¥4,410,000)
Keywords超精密計測 / 生産工学 / 加工学

URL: 

Published: 2015-04-16   Modified: 2022-11-04  

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