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Development of localized light-controlled cell-in-microfactories for the production of composite microparticle functional structures

Research Project

Project/Area Number 15H02214
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionThe University of Tokyo

Principal Investigator

Takahashi Satoru  東京大学, 先端科学技術研究センター, 教授 (30283724)

Co-Investigator(Kenkyū-buntansha) 高増 潔  東京大学, 大学院工学系研究科(工学部), 教授 (70154896)
道畑 正岐  東京大学, 大学院工学系研究科(工学部), 准教授 (70588855)
Project Period (FY) 2015-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥43,420,000 (Direct Cost: ¥33,400,000、Indirect Cost: ¥10,020,000)
Fiscal Year 2018: ¥5,850,000 (Direct Cost: ¥4,500,000、Indirect Cost: ¥1,350,000)
Fiscal Year 2017: ¥10,920,000 (Direct Cost: ¥8,400,000、Indirect Cost: ¥2,520,000)
Fiscal Year 2016: ¥18,330,000 (Direct Cost: ¥14,100,000、Indirect Cost: ¥4,230,000)
Fiscal Year 2015: ¥8,320,000 (Direct Cost: ¥6,400,000、Indirect Cost: ¥1,920,000)
Keywordsマイクロファクトリ / セルインマイクロファクトリ / ナノマイクロ加工 / マクロファクトリ
Outline of Final Research Achievements

By utilizing the inherent remote-control, parallel processing, and multiple information propagation properties of light energy and the active and passive responses of near-field photons generated locally by the interaction with the target object, we are aiming to develop a cell-in-micro-factory concept on a scale of several micrometers to several tens of millimeters that can autonomously produce precision functional components and devices.
Specifically, we develop a dynamically localized light-field parallel-controlled cell-in-micro-factory for the production of multifunctional microdevices (composite microparticulate functional structures) based on multiple microparticle composites, which is difficult to achieve using chemical approaches.

Academic Significance and Societal Importance of the Research Achievements

今日,スマートフォンに代表される最先端デバイスでは,10nm以下の微細構造を制御したものづくりがなされている.一方で,製品自体は,人が把持できるサイズのものに限定されている.本研究は,次世代においてその存在が期待されている,人が把持できないような新概念微細機能製品を創出するために不可欠な要素技術開発の意義を有する.すなわち,本研究の成果は,歴史的に,道具(工業製品)は人が把持できることが前提となっている概念自体の変革を促すものであり,全く新しい製品群概念を導出する点で,学術的に及ばず社会科学的に極めて大きな意義を有するものである.

Report

(5 results)
  • 2019 Final Research Report ( PDF )
  • 2018 Annual Research Report
  • 2017 Annual Research Report
  • 2016 Annual Research Report
  • 2015 Annual Research Report
  • Research Products

    (47 results)

All 2019 2018 2017 2016 2015 Other

All Journal Article (7 results) (of which Peer Reviewed: 7 results,  Open Access: 3 results) Presentation (38 results) (of which Int'l Joint Research: 20 results,  Invited: 4 results) Remarks (1 results) Patent(Industrial Property Rights) (1 results) (of which Overseas: 1 results)

  • [Journal Article] In-process measurement for cure depth control of nano stereolithography using evanescent light2019

    • Author(s)
      S. Takahashi, D. Kong, M. Michihata, K. Takamasu
    • Journal Title

      CIRP Annals - Manufacturing Technology

      Volume: 68 Issue: 1 Pages: 527-530

    • DOI

      10.1016/j.cirp.2019.04.072

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of nano/micro dual-periodic structures by multi-beam evanescent wave interference lithography using spatial beats2019

    • Author(s)
      Masui Shuzo、Torii Yuki、Michihata Masaki、Takamasu Kiyoshi、Takahashi Satoru
    • Journal Title

      Optics Express

      Volume: 27 Issue: 22 Pages: 31522-31522

    • DOI

      10.1364/oe.27.031522

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] In-process Measurement of Gradient Boundary of Resin in Evanescent-wave-based Nano-stereolithography using Reflection Interference Near Critical Angle2018

    • Author(s)
      Deqing Kong, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Journal Title

      Journal of Photopolymer Science and Technology

      Volume: 31 Issue: 3 Pages: 441-446

    • DOI

      10.2494/photopolymer.31.441

    • NAID

      130007481467

    • ISSN
      0914-9244, 1349-6336
    • Year and Date
      2018-06-25
    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Modified Linnik microscopic interferometry for quantitative depth evaluation of diffraction-limited microgroove2018

    • Author(s)
      Ye Shiwei、Takahashi Satoru、Michihata Masaki、Takamasu Kiyoshi
    • Journal Title

      Measurement Science and Technology

      Volume: 29 Issue: 5 Pages: 054011-054011

    • DOI

      10.1088/1361-6501/aab008

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] In-Process Measurement of Thickness of Cured Resin in Evanescent-Wave-Based Nano-stereolithography Using Critical Angle Reflection2018

    • Author(s)
      Kong Deqing、Michihata Masaki、Takamasu Kiyoshi、Takahashi Satoru
    • Journal Title

      Nanomanufacturing and Metrology

      Volume: 1 Issue: 2 Pages: 112-124

    • DOI

      10.1007/s41871-018-0013-z

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] One-shot stereolithography for biomimetic micro hemisphere covered with relief structure2018

    • Author(s)
      Suzuki Yuki、Suzuki Kunikazu、Michihata Masaki、Takamasu Kiyoshi、Takahashi Satoru
    • Journal Title

      Precision Engineering

      Volume: 54 Pages: 353-360

    • DOI

      10.1016/j.precisioneng.2018.07.004

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Evanescent Light Exposing System under Nitrogen Purge for Nano- Stereolithography2016

    • Author(s)
      Yuki Suzuki, Hiroyuki Tahara, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Journal Title

      Procedia CIRP

      Volume: 42 Pages: 77-80

    • DOI

      10.1016/j.procir.2016.02.192

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] Fabrication of dual-periodic nanostructures with multi-exposure interference lithography using Lloyd’s mirror2019

    • Author(s)
      S. Masui, M. Michihata, K. Takamasu, S. Takahashi
    • Organizer
      8th International Conference of Asian Society for Precision Engineering and Nanotechnology(ASPEN2019)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of nano-and micro-structured surface using spatial beat of evanescent wave interference lithography2019

    • Author(s)
      Shuzo Masui, Masaki, Michihata, Kiyoshi Takamasu, Satoru Takahash
    • Organizer
      Proceedings of the 19th international conference of the european society for precision engineering and nanotechnology (euspen 2019)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Improvement of quantitative depth evaluation for diffraction-limited microgroove using LED light source2018

    • Author(s)
      Ye Shiwei, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      XXII World Congress of the International Measurement Confederation (IMEKO 2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] In-Process Measurement of Resin’s Curing Degree in Micro-Stereolithography Using Internal Reflection at Critical Angle2018

    • Author(s)
      D. Kong, M. Michihata, K. Takamasu, S. Takahashi
    • Organizer
      XXII World Congress of the International Measurement Confederation (IMEKO 2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Investigation of super-resolution microscopy by use of a nano-patterned substrate2018

    • Author(s)
      Ryoko Sakuma, Hiromasa Kume, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      17th International Conference on Precision Engineering (ICPE 2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Basic Study on Cell-in-Microfactory System with Localized Light Control - Analysis on handling performance of microparticles based on near-surface light wave -2018

    • Author(s)
      Seiko Furuya, Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      17th International Conference on Precision Engineering (ICPE 2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of Functional Subwavelength Structured Surface Using Evanescent Wave Interference Lithography2018

    • Author(s)
      Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Toshihiko Shibanuma, Hironao Tanaka, Satoru Takahashi
    • Organizer
      17th International Conference on Precision Engineering (ICPE 2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究(第3報)-FDTD法によるマイクロ粒子の整理駆動現象の解明-2018

    • Author(s)
      古谷成康,増井周造,道畑正岐,高増潔,高橋哲
    • Organizer
      2018 年度精密工学会秋季大会学術講演会,函館,2018
    • Related Report
      2018 Annual Research Report
  • [Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究(第 3 報)一FDTD 法によるマイクロ粒子の整理駆動現象の解明一2018

    • Author(s)
      古谷成康,増井周造,道畑正岐,高増潔,高橋哲
    • Organizer
      2018年度精密工学会秋季大会学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] エバネッセント光多方位干渉造形法による次世代表面機能構造の創製(第 3 報)一うなりによる干渉強度分布の変調特性検討一2018

    • Author(s)
      増井周造,道畑正岐,高増潔,高橋哲
    • Organizer
      2018年度精密工学会秋季大会学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 臨界角照明を用いたナノ光造形硬化樹脂のインプロセス計測(基本原理の検証)2018

    • Author(s)
      道畑正岐,孔徳卿,高増潔,高橋哲
    • Organizer
      日本機械学会 2018年度年次大会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究(第 4 報)一定在波制御によるマイクロ粒子整列・搬送に関する研究一2018

    • Author(s)
      藤原和,増井周造,道畑正岐,高増潔,高橋哲
    • Organizer
      2019年度精密工学会春季大会学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究(第2 報)-界面近接光波の任意制御によるマイクロ粒子整理・搬送システムの検討-,2018

    • Author(s)
      古谷成康,増井周造,道畑正岐,高増潔,高橋哲
    • Organizer
      2018 年度精密工学会春季大会学術講演会,中央大学,2018,P33
    • Related Report
      2017 Annual Research Report
  • [Presentation] エバネッセント光多方位干渉造形法による次世代表面機能構造の創製(第2 報)-サブ波長表面構造の造形と光学特性評価-,2018

    • Author(s)
      増井周造,鈴木裕貴,道畑正岐,高増潔,高橋哲,柴沼俊彦,田中大直
    • Organizer
      2018 年度精密工学会春季大会学術講演会,中央大学,2018,K08
    • Related Report
      2017 Annual Research Report
  • [Presentation] Basic Study on Cell-in-Microfactory System with Localized Light Control2018

    • Author(s)
      Seiko Furuya, Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      17th International Conference on Precision Engineering
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of Functional Subwavelength Structured Surface Using Evanescent Wave Interference Lithography2018

    • Author(s)
      Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Toshihiko Shibanuma, Hironao Tanaka, Satoru Takahashi
    • Organizer
      17th International Conference on Precision Engineering
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Highly Sensitive Back-Focal-Plane Interferometry for Tracking Nanoparticle Position2017

    • Author(s)
      Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, and Satoru Takahashi
    • Organizer
      Conference on Lasers and Electro-Optics (CLEO2017)
    • Place of Presentation
      San Jose, USA
    • Year and Date
      2017-05-14
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] エバネッセント露光型ナノ光造形法に関する研究(第26報)ー多光束干渉によるミリオーダ領域のサブミクロン表面微細構造創製ー2017

    • Author(s)
      鈴木裕貴,松本侑己,道畑正岐,高増潔,高橋哲
    • Organizer
      2017年度精密工学会春季学術講演会
    • Place of Presentation
      神奈川
    • Year and Date
      2017-03-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] エバネッセント露光型ナノ光造形法に関する研究(第27報)-エバネッセント光による面内形状制御性の解析-2017

    • Author(s)
      松本侑己,鈴木裕貴,道畑正岐,高増潔,高橋哲,工藤宏人
    • Organizer
      2017年度精密工学会春季学術講演会
    • Place of Presentation
      神奈川
    • Year and Date
      2017-03-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] Highly Sensitive Back-Focal-Plane Interferometry for Tracking Nanoparticle Position2017

    • Author(s)
      Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      CLEO2017, San Jose, USA
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High sensitive and super resolution optical inspection of nanodefects on Si wafer surface using infrared standing evanescent wave2017

    • Author(s)
      Satoru Takahashi
    • Organizer
      ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] New Developments for Next-generation Precision Engineering Opened with Localized Light Energy Control2017

    • Author(s)
      Satoru Takahashi
    • Organizer
      ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Thoretical Analysis of Multi-Beam Interference Lithography Combining Evanescent and Propagation Light2017

    • Author(s)
      Shuzo Masui, Yuki Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] New Developments on Micro/nano Manufacturing Science based on Evanescent Light2017

    • Author(s)
      Satoru Takahashi
    • Organizer
      IMCC2017(17th International Manufacturing Conference in China)& ICMTE2017(6th International Conference of Manufacturing Technology Engineers
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] エバネッセント光多方位干渉造形法による次世代表面機能構造の創製(第1 報)-RCWA 法を用いた光学特性解析-,2017

    • Author(s)
      増井周造,鈴木裕貴,道畑正岐,高増潔,高橋哲
    • Organizer
      -,2017 年度精密工学会秋季大会学術講演会,大阪大学,2017,L23
    • Related Report
      2017 Annual Research Report
  • [Presentation] Improved back-focal-plane interferometry for monitoring nanoparticle position2016

    • Author(s)
      Shuzo Masui, Yousuke Horita, Masaki Michihata, Kiyoshi Takamasu, and Satoru Takahashi
    • Organizer
      International Symposium on Optomechatronic Technology 2016
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2016-11-07
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Theoretical Analysis of Improved Back-Focal-Plane Interferometry for Monitoring Nanoparticle Position2016

    • Author(s)
      Shuzo Masui, Yousuke Horita, Masaki Michihata, Kiyoshi Takamasu, and Satoru Takahashi
    • Organizer
      ASPE2016 Annual Meeting
    • Place of Presentation
      Portland, USA
    • Year and Date
      2016-10-23
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Theoretical Analysis of Improved Back-Focal-Plane Interferometry for Monitoring Nanoparticle Position2016

    • Author(s)
      Shuzo Masui, Yousuke Horita, Masaki Michihata, Kiyoshi Takamasu, and Satoru Takahashi
    • Organizer
      31st Annual Meeting of the American Society for Precision Engineering
    • Place of Presentation
      Portland, Oregon, USA
    • Year and Date
      2016-10-23
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] エバネッセント露光型ナノ光造形法に関する研究―エバネッセント露光用光硬化性樹脂の開発―2016

    • Author(s)
      松本侑己,鈴木裕貴,道畑正岐,高増潔,高橋哲
    • Organizer
      日本機械学会 第11回生産加工・工作機械部門講演会
    • Place of Presentation
      愛知
    • Year and Date
      2016-10-22
    • Related Report
      2016 Annual Research Report
  • [Presentation] 後側焦点面干渉法を用いた光触媒ナノ加工粒子変位計測の高感度化2016

    • Author(s)
      増井周造,堀田陽亮,道畑正岐,高増潔,高橋哲
    • Organizer
      日本機械学会年次大会2016
    • Place of Presentation
      福岡
    • Year and Date
      2016-09-12
    • Related Report
      2016 Annual Research Report
  • [Presentation] 後側焦点面干渉法を用いた光触媒ナノ加工粒子変位計測の高感度化2016

    • Author(s)
      増井周造・堀田陽亮・道畑正岐・高増 潔・高橋 哲
    • Organizer
      日本機械学会2016年度年次大会
    • Place of Presentation
      九州
    • Year and Date
      2016-09-11
    • Related Report
      2015 Annual Research Report
  • [Presentation] エバネッセント露光型ナノ光造形法に関する研究(第25報)ー機能性評価に向けた表面微細構造創製装置の開発ー2016

    • Author(s)
      鈴木裕貴,松本侑己,道畑正岐,高増潔,高橋哲
    • Organizer
      2016年度精密工学会春秋学術講演会
    • Place of Presentation
      茨城
    • Year and Date
      2016-09-06
    • Related Report
      2016 Annual Research Report
  • [Presentation] 全方位姿勢制御型光触媒ナノ加工工具に関する研究(第2報)-液相内における工具創製の実験的検討-2016

    • Author(s)
      堀田陽亮・儲 博懐・増井周造・道畑正岐・高増 潔・高橋 哲
    • Organizer
      2016年度精密工学会春季学術講演会
    • Place of Presentation
      東京
    • Year and Date
      2016-03-15
    • Related Report
      2015 Annual Research Report
  • [Presentation] 光触媒ナノ加工工具に関する基礎的研究(第9報)-ナノ粒子位置同定法の検討-2016

    • Author(s)
      増井周造・堀田陽亮・道畑正岐・高増 潔・高橋 哲
    • Organizer
      2016年度精密工学会春季学術講演会
    • Place of Presentation
      東京
    • Year and Date
      2016-03-15
    • Related Report
      2015 Annual Research Report
  • [Presentation] 光触媒ナノ工具に関する基礎的研究(第10報)-銀担持による工具チップ性能の向上-2016

    • Author(s)
      儲 博懐・堀田陽亮・増井周造・道畑正岐・高増 潔・高橋 哲
    • Organizer
      2016年度精密工学会春季学術講演会
    • Place of Presentation
      東京
    • Year and Date
      2016-03-15
    • Related Report
      2015 Annual Research Report
  • [Presentation] Challenge of Evanescent Light Exposing Micro-Stereolithography2016

    • Author(s)
      S. Takahashi
    • Organizer
      JSAP-OSA Joint Symposia 2016
    • Place of Presentation
      Niigata, Japan
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 全方位姿勢制御型光触媒ナノ加工工具に関する研究(第1報)-姿勢制御ユニット創製に関する実験的検討-2015

    • Author(s)
      堀田陽亮・儲 博懐・道畑正岐・高増 潔・高橋 哲
    • Organizer
      2015年度精密工学会秋季学術講演会
    • Place of Presentation
      東北
    • Year and Date
      2015-09-04
    • Related Report
      2015 Annual Research Report
  • [Presentation] Fundamental study on fabrication of multi-functional micro device based on micro-beads using photocatalytic reaction2015

    • Author(s)
      Yosuke Horita, Shotaro Kadoya, Masaki Michihata, Kiyoshi Takamasu and Satoru Takahashi
    • Organizer
      The 6th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2015)
    • Place of Presentation
      Harbin, China
    • Year and Date
      2015-08-15
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Remarks] 東京大学 先端科学技術研究センター 高橋研究室

    • URL

      http://www.photon.rcast.u-tokyo.ac.jp/index.html

    • Related Report
      2017 Annual Research Report
  • [Patent(Industrial Property Rights)] 母型の製造方法2016

    • Inventor(s)
      高橋哲,鈴木裕貴,鈴木邦和,道畑正岐,高増潔,田中大直,西村涼
    • Industrial Property Rights Holder
      東京大学,JXエネルギー株式会社
    • Industrial Property Rights Type
      特許
    • Filing Date
      2016-08-17
    • Related Report
      2016 Annual Research Report
    • Overseas

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Published: 2015-04-16   Modified: 2022-11-04  

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