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Study on room temperature atomic layer deposition and its application

Research Project

Project/Area Number 15H03536
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Nanomaterials engineering
Research InstitutionYamagata University

Principal Investigator

Hirose Fumihiko  山形大学, 大学院理工学研究科, 教授 (50372339)

Project Period (FY) 2015-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥14,560,000 (Direct Cost: ¥11,200,000、Indirect Cost: ¥3,360,000)
Fiscal Year 2017: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2016: ¥6,370,000 (Direct Cost: ¥4,900,000、Indirect Cost: ¥1,470,000)
Fiscal Year 2015: ¥5,980,000 (Direct Cost: ¥4,600,000、Indirect Cost: ¥1,380,000)
Keywords原子層堆積 / 薄膜 / 吸着 / 太陽電池 / 赤外吸収分光 / 原子層堆積法 / ナノコーティング / 複合吸着 / 色素増感太陽電池 / ゼオライト / ナノ材料 / 複合材料・物性 / マイクロ・ナノデバイス / 原子分子処理 / 複合 / 金属酸化膜 / 酸化 / 金属腐食
Outline of Final Research Achievements

In this study, we aimed to develop a combinative oxide RT depositon method by using RT atomic layer depoition (ALD). By investigating the coadsorption reaction of the different precursors, we constructed the ALD process where the Al/(Al+Si) atomic ratio can be controlled in the range from 0.4 to 0.8. The fabricated alumina-silica film is applicable as an adsorbent of cations. When we apply this film to the photoanodes of the dye sensitized solar cells, it was confirmed that the photo current was enhanced. The present technology is applicable for decorating the photoanodes to enhance the power generation efficiency of dye sensitized solar cells.

Report

(4 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Annual Research Report
  • 2015 Annual Research Report
  • Research Products

    (22 results)

All 2018 2017 2016 2015 Other

All Int'l Joint Research (1 results) Journal Article (6 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 6 results,  Acknowledgement Compliant: 3 results) Presentation (12 results) (of which Int'l Joint Research: 7 results,  Invited: 1 results) Remarks (1 results) Patent(Industrial Property Rights) (2 results)

  • [Int'l Joint Research] Chimi Paris Tech(フランス)

    • Related Report
      2015 Annual Research Report
  • [Journal Article] Room-temperature atomic layer deposition of SnO2 using tetramethyltin and its application to TFT fabrication2018

    • Author(s)
      Kentaro Tokoro, Shunsuke Saito, Kensaku Kanomata, Masanori Miura, Bashir Ahmmad, Shigeru Kubota, Fumihiko Hirose
    • Journal Title

      IEICE TRANSACTIONS on ELECTRONICS

      Volume: 印刷中

    • NAID

      130006729734

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 室温原子層堆積法とその応用2017

    • Author(s)
      廣瀬 文彦
    • Journal Title

      応用物理

      Volume: 86 Pages: 796-800

    • NAID

      130007715566

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Room-Temperature Atomic Layer Deposition of Aluminum Silicate and its Application in Dye sensitized Solar Cells2017

    • Author(s)
      Takahiro Imai, Yoshiharu Mori, Kensaku Kanomata, Masanori Miura, Bashir Ahmmad, Shigeru Kubota, Fumihiko Hirose
    • Journal Title

      Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

      Volume: 36 Issue: 1

    • DOI

      10.1116/1.5002716

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Room temperature atomic layer deposition of TiO2 on gold nanoparticles2017

    • Author(s)
      K. Tokoro, K. Kanomata, B. Ahammad, S. Kubota, F. Hirose)
    • Journal Title

      J. Vac. Sci. Technol. A

      Volume: 35 Issue: 1

    • DOI

      10.1116/1.4971398

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Room-temperature atomic layer deposition of ZrO2 using tetrakis(ethylmethylamino)zirconium and plasma-excited humidified argon2016

    • Author(s)
      K. Kanomata, K. Tokoro, T. Imai, P. Pansila, M. Miura, B. Ahmmad, S. Kubota, K. Hirahara, F. Hirose
    • Journal Title

      Applied Surface Science

      Volume: 387 Pages: 497-502

    • DOI

      10.1016/j.apsusc.2016.06.122

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Growth kinetics of temperature-controlled atomic layer deposition of GaN using trimethlgallium and remote-plasma-excited NH32015

    • Author(s)
      P. Pugboon Pansila, K. Kanomata, M. Miura, B. Ahammad, S. Kubota, F. Hirose
    • Journal Title

      Applied Surface Science

      Volume: 357 Pages: 1920-1927

    • DOI

      10.1016/j.apsusc.2015.09.138

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Presentation] Room Temperature Atomic Layer Deposition and its applications2018

    • Author(s)
      F.Hirose
    • Organizer
      The international workshop on Frontier and Cutting-edge Technologies over 2D Materials
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] Room-temperature Atomic Layer Deposition of Al2O3 for Anticorrosion Coating on metal surfaces2017

    • Author(s)
      Kensaku Kanomata, Makoto Ishikawa, Masanori Miura, Bashir Ahmmad, Shigeru Kubota, Kazuhiro Hirahara, Fumihiko Hirose
    • Organizer
      ECS meeting 231th
    • Related Report
      2017 Annual Research Report
  • [Presentation] Au-core TiO2 shell nanoparticles produced by atomic layer deposition2017

    • Author(s)
      F. Hirose, K. Kanomata, M. Miura, K. Kikuchi, B. Ahmmad, S. Kubota
    • Organizer
      ECS meeting 231th
    • Related Report
      2017 Annual Research Report
  • [Presentation] Room Temperature atomic layer deposition of Al2O3 for anticorrosion coating on metal surfaces2017

    • Author(s)
      K. Kanomata, M. Ishikawa, M. Miura, B. Ahmmad, S. Kubota, F. Hirose
    • Organizer
      ALD 2017
    • Related Report
      2017 Annual Research Report
  • [Presentation] Effects of SiO2 and TiO2 Combination Coating on TiO2 Nanoparticle Electrodes in Dye Sensitized Solar Cells2016

    • Author(s)
      Kensaku Kanomata, Yuki Kato, Takahiro Imai, Masanori Miura, Bashir Ahmmad, Shigeru Kubota, and Fumihiko Hirose
    • Organizer
      Prime2016
    • Place of Presentation
      アラモアナコンベンションセンター、ホノルル、アメリカ
    • Year and Date
      2016-10-14
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Room-temperature atomic layer deposition of zirconium oxide using plasma excited water vapor2016

    • Author(s)
      K. Tokoro, K. Kanomata, B. Ahammad, S. Kubota, F. Hirose
    • Organizer
      ALD2016
    • Place of Presentation
      ダブリン国際会議場、ダブリン、アイルランド
    • Year and Date
      2016-07-25
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] RT Atomic Layer Deposition of ZrO2 By Using Plasma Excited Water Vapor2016

    • Author(s)
      K. Kanomata , K. Tokoro, T. Imai, P. P. Pansila, M. Miura , B. Ahmmad , S. Kubota K. Hirahara, and F. Hirose
    • Organizer
      229ECSミーティング
    • Place of Presentation
      サンディエゴ国際会議場、サンディエゴ、アメリカ
    • Year and Date
      2016-05-30
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] RT atomic layer deposition of TiO2 and its application to nanoparticle coating2016

    • Author(s)
      K. Kanomata, K. Kikuchi, B. Ahmmad, S. Kubota, F. Hirose
    • Organizer
      The Joint Symposium of 10th International Symposium on Medical, Bio- and Nano-Electronics, and 7th International Workshop on Nanostructures & Nanoelectronics
    • Place of Presentation
      東北大学 仙台
    • Year and Date
      2016-03-03
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Temperature-controlled atomic layer deposition of GaN using plasma-excited nitrogen source2015

    • Author(s)
      P.Pungboon Pansila, Kensaku Kanomata, Bashir Ahammad, Shigeru Kubota, Fumihiko Hirose
    • Organizer
      電子情報通信学会電子デバイス研究会
    • Place of Presentation
      大阪市立大学 大阪
    • Year and Date
      2015-11-27
    • Related Report
      2015 Annual Research Report
  • [Presentation] Invesitgation on Reaction Mechanism of Room-temperature HfO2 Atomic Layer Deposition using Multiple Internal Reflection Infrared Spectroscopy2015

    • Author(s)
      K. Kanomata, H. Ohba, P. Pungboon Pansila, B. Ahmmad, S. Kubota, K Hirahara, F. Hirose
    • Organizer
      Atomic Layer deposition 2015
    • Place of Presentation
      ポートランドヒルトン ポートランド 米国
    • Year and Date
      2015-06-30
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Room-temperature Atomic Layer Deposition of Al2O3 for Anticorrosion Coating using Trimethlaluminum and remote-plasma excited water vapor2015

    • Author(s)
      K. Kanomata, H. Ohba, P. Pungboon Pansila, B. Ahmmad, S. Kubota, K Hirahara, F. Hirose
    • Organizer
      Atomic Layer deposition 2015
    • Place of Presentation
      ポートランドヒルトン ポートランド 米国
    • Year and Date
      2015-06-30
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] RT atomicl layer deposition of Al2O3 by using remote plasma excited water vapor2015

    • Author(s)
      K. Kanomata, H. Ohba, P. Pungboon Pansila, B. Ahmmad, S. Kubota, K Hirahara, F. Hirose
    • Organizer
      The electrochemical society
    • Place of Presentation
      シカゴヒルトン シカゴ 米国
    • Year and Date
      2015-05-27
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Remarks] 室温原子層堆積法

    • URL

      http://fhirose.yz.yamagata-u.ac.jp/concept.html

    • Related Report
      2017 Annual Research Report
  • [Patent(Industrial Property Rights)] 金属酸化物薄膜形成装置及び金属酸化物薄膜形成方法2017

    • Inventor(s)
      廣瀬文彦、三浦正範、石川誠
    • Industrial Property Rights Holder
      山形大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2017-220417
    • Filing Date
      2017
    • Related Report
      2017 Annual Research Report
  • [Patent(Industrial Property Rights)] 酸化物薄膜形成方法及び酸化物薄膜形成装置2016

    • Inventor(s)
      廣瀬文彦
    • Industrial Property Rights Holder
      山形大学
    • Industrial Property Rights Type
      特許
    • Filing Date
      2016-02-05
    • Related Report
      2015 Annual Research Report

URL: 

Published: 2015-04-16   Modified: 2019-03-29  

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