Development of environmentally conscious cleaning method using cryogenic fine solid particles and its application to high density hydrogen storage
| Project/Area Number |
15H03913
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Fluid engineering
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| Research Institution | Tohoku University |
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Principal Investigator |
ISHIMOTO JUN 東北大学, 流体科学研究所, 教授 (10282005)
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| Co-Investigator(Kenkyū-buntansha) |
堀邊 英夫 大阪市立大学, 大学院工学研究科, 教授 (00372243)
松浦 一雄 愛媛大学, 大学院理工学研究科, 准教授 (20423577)
真田 俊之 静岡大学, 大学院総合科学技術研究科, 准教授 (50403978)
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| Co-Investigator(Renkei-kenkyūsha) |
OCHIAI NAOYA 東北大学, 流体科学研究所, 助教 (40614508)
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| Research Collaborator |
Combescure Alain INSA de Lyon, LaMCoS, 教授
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| Project Period (FY) |
2015-04-01 – 2018-03-31
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| Project Status |
Completed (Fiscal Year 2017)
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| Budget Amount *help |
¥17,030,000 (Direct Cost: ¥13,100,000、Indirect Cost: ¥3,930,000)
Fiscal Year 2017: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
Fiscal Year 2016: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2015: ¥10,140,000 (Direct Cost: ¥7,800,000、Indirect Cost: ¥2,340,000)
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| Keywords | 混相流 / 極低温 / 微粒化 / 流体解析 / 噴霧 / 半導体洗浄 / 超高熱流束 / 冷却 / ナノ洗浄 |
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| Outline of Final Research Achievements |
The application of cryogenic high-speed spray of micro-solid nitrogen (SN2) to the non-aqueous resist-removal and ultra-cleaning system of semiconductor wafer is a focus of great interest.
In the present study, we have newly developed the new single-component micro-nano SN2 particle production method by using super adiabatic Laval nozzle (converging-diverging nozzle). The physical photo resist removal-cleaning performance using cryogenic particulate spray are investigated by a new type of integrated ToF-SIMS, XPS measurement coupled supercomputing technique. As a result, it has been clarified that the newly developed cryogenic spray cleaning method is effective particularly for the removal and cleaning process of novolac type resists.
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Report
(4 results)
Research Products
(39 results)
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[Journal Article] Integrated Computational Study for Total Atomization Process of Primary Breakup to Spray Droplet Formation in Injector Nozzle2016
Author(s)
Ochiai, N., Ishimoto, J., Arioka, A., Yamaguchi, N., Sasaki, Y., and Furukawa, N.
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Journal Title
SAE Technical Paper
Volume: 2016-02-3303
DOI
Related Report
Peer Reviewed
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