| Budget Amount *help |
¥16,510,000 (Direct Cost: ¥12,700,000、Indirect Cost: ¥3,810,000)
Fiscal Year 2017: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000)
Fiscal Year 2016: ¥5,980,000 (Direct Cost: ¥4,600,000、Indirect Cost: ¥1,380,000)
Fiscal Year 2015: ¥7,020,000 (Direct Cost: ¥5,400,000、Indirect Cost: ¥1,620,000)
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| Outline of Final Research Achievements |
Multi-atomic force microscopic (AFM) probe with imaging and other functions have been expected as molecular operation tools, in particular in biology research field. In this research, novel fabrication process technologies of sub-μm-gapped dual Si AFM probe with hollow-structure was established. Large deflectable twin cantilevers with high quality magneto-strictive thin film actuator was also developed for the function of dual cantilever switching.
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