Spectral polarization nano topometry for 3D nanostructure and constituent element
| Project/Area Number |
15H03941
|
|---|
| Research Category |
Grant-in-Aid for Scientific Research (B)
|
| Allocation Type | Single-year Grants |
|---|
| Section | 一般 |
|---|
| Research Field |
Intelligent mechanics/Mechanical systems
|
|---|
| Research Institution | Utsunomiya University |
|---|
Principal Investigator |
Otani Yukitoshi 宇都宮大学, 工学(系)研究科(研究院), 教授 (10233165)
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
セラノオG ダビッドI 宇都宮大学, 学内共同利用施設等, 特任研究員 (80747270)
|
|---|
| Research Collaborator |
Nathan Hagen
Kawabata Shuichi
|
|---|
| Project Period (FY) |
2015-04-01 – 2018-03-31
|
| Project Status |
Completed (Fiscal Year 2017)
|
| Budget Amount *help |
¥17,030,000 (Direct Cost: ¥13,100,000、Indirect Cost: ¥3,930,000)
Fiscal Year 2017: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Fiscal Year 2016: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Fiscal Year 2015: ¥11,570,000 (Direct Cost: ¥8,900,000、Indirect Cost: ¥2,670,000)
|
|---|
| Keywords | ナノ形状計測 / ナノ構造 / ナノ材料 / 分光偏光計 / シングルピクセルカメラ / 分光ミュラー行列 / ストークス・パラメータ / 計測工学 / 解析・評価 / 超精密計測 / 応用光学・量子光工学 / 知能機械 / 3次元形状計測 / 材料解析 / 分光偏光解析 / ナノ形状 |
|---|
| Outline of Final Research Achievements |
We proposed a spectral Stokes polarimeter and a spectral Mueller matrix polarimeter with high speed and accuracy by photo-elastic modulators. A super continuum laser is used for a light source by selecting specified spectrum using a Tellurium dioxide acoustic-optic tunable filter. A three-dimensional nano-structure is analyzed by structured birefringence and diattenuation from high precision partial and full Mueller matrix comparing with simulated data by boundary element method(BEM). We succeeded to determine a few nano meters of sensitivity of nano structures and show the possibilities for constituent element
from spectral information.
|
Report
(4 results)
Research Products
(14 results)
