Spectral polarization nano topometry for 3D nanostructure and constituent element

• Project/Area Number: 15H03941
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Intelligent mechanics/Mechanical systems
• Research Institution: Utsunomiya University
• Principal Investigator: Otani Yukitoshi 宇都宮大学, 工学(系)研究科(研究院), 教授 (10233165)
• Co-Investigator(Kenkyū-buntansha): セラノオG ダビッドI 宇都宮大学, 学内共同利用施設等, 特任研究員 (80747270)
• Research Collaborator: Nathan Hagen ; Kawabata Shuichi
• Project Period (FY): 2015-04-01 – 2018-03-31
• Project Status: Completed (Fiscal Year 2017)
• Budget Amount: ¥17,030,000 (Direct Cost: ¥13,100,000、Indirect Cost: ¥3,930,000); Fiscal Year 2017: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000); Fiscal Year 2016: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000); Fiscal Year 2015: ¥11,570,000 (Direct Cost: ¥8,900,000、Indirect Cost: ¥2,670,000)
• Keywords: ナノ形状計測 / ナノ構造 / ナノ材料 / 分光偏光計 / シングルピクセルカメラ / 分光ミュラー行列 / ストークス・パラメータ / 計測工学 / 解析・評価 / 超精密計測 / 応用光学・量子光工学 / 知能機械 / 3次元形状計測 / 材料解析 / 分光偏光解析 / ナノ形状

Outline of Final Research Achievements

We proposed a spectral Stokes polarimeter and a spectral Mueller matrix polarimeter with high speed and accuracy by photo-elastic modulators. A super continuum laser is used for a light source by selecting specified spectrum using a Tellurium dioxide acoustic-optic tunable filter. A three-dimensional nano-structure is analyzed by structured birefringence and diattenuation from high precision partial and full Mueller matrix comparing with simulated data by boundary element method(BEM). We succeeded to determine a few nano meters of sensitivity of nano structures and show the possibilities for constituent element
from spectral information.

Research Products

• [Journal Article] Stokes polarimeter performance: general noise model and analysis (2018)
  • Author(s): Nathan Hagen, Yukitoshi Otani
  • Journal Title: Applied Optics Volume: 57 Issue: 15 Pages: 4283-4296
  • DOI: 10.1364/ao.57.004267
  • Peer Reviewed
• [Journal Article] A partial Mueller matrix polarimeter using two photoelastic modulator and polarizer pairs (2017)
  • Author(s): Nia Natasha Tipol, Shuichi Kawabata, Yukitoshi Otani
  • Journal Title: Proceedings SPIE, Polarization Science and Remote Sensing VIII Volume: 10407 Pages: 1040713-1040713
  • DOI: 10.1117/12.2272940
  • NAID: 130006434681
• [Journal Article] Accuracy enhancement of dual rotating Mueller matrix imaging polarimeter by diattenuation and retardance error calibration approach (2017)
  • Author(s): Kaustav Bhattacharyya, David Ignacio Serrano-Garca , Yukitoshi Otani
  • Journal Title: Optics communications Volume: 392 Pages: 48-53
  • Peer Reviewed
• [Presentation] Real-time Stokes polarimeter using three polarized beam splitter (2017)
  • Author(s): Shuhei Shibata, Shuichi Kawabata, Yukitoshi Otani
  • Organizer: SPIE Optics and Photonics
  • Int'l Joint Research
• [Presentation] A partial Mueller matrix polarimeter using two photoelastic modulator and polarizer pairs (2017)
  • Author(s): Nia Natasha TIPOL, Shuichi KAWABATA, Yukitoshi OTANI
  • Organizer: ICO17 International Comission for Optics
  • Int'l Joint Research
• [Presentation] Spectroscopic Stokes imaging polarimeter for defect detection (2017)
  • Author(s): Yukitoshi Otani, Shuhei Shibata, Hiroshi Hasegawa
  • Organizer: International Symposium on Optomechatronic Technology 2017
  • Int'l Joint Research / Invited
• [Presentation] A simple and fast Stokes polarimeter (2017)
  • Author(s): Shuichi Kawabata, Shuhei Shibata and Yukitoshi Otani
  • Organizer: International Symposium on Optomechatronic Technology 2017
  • Int'l Joint Research / Invited
• [Presentation] Reflection type of microscope for Mueller matrix polarimeter (2017)
  • Author(s): Tomohisa Horiguchi, Yukitoshi Otani, Nathan Hagen
  • Organizer: ICO17 International Comission for Optics
  • Int'l Joint Research
• [Presentation] PBSによる小型リアルタイム偏光計 (2017)
  • Author(s): 柴田 秀平，川畑州一，大谷幸利
  • Organizer: 応用物理学会秋季大会
• [Presentation] A partial Mueller matrix polarimeter using two photoelastic modulator and polarizer pairs (2017)
  • Author(s): ニア ナターシャ ティポル，川畑州一，大谷幸利
  • Organizer: 精密工学会秋季大会
• [Presentation] A partial Mueller matrix polarimeter using two photoelastic modulator and polarizer pairs (2016)
  • Author(s): Nia Natasha TIPOL , Shuichi KAWABATA and Yukitoshi OTANI
  • Organizer: International Symposium on Optomechatronic Technology (ISOT 2016 Itabashi Tokyo)
  • Place of Presentation: 東京・板橋
  • Year and Date: 2016-11-09
• [Presentation] ラインセンサー型分光ミュラー行列偏光計の空間情報を利用したナノ構造の欠陥検出 (2016)
  • Author(s): 二宮真,柴田秀平,杉坂純一郎,大谷幸利
  • Organizer: Optics and Photonics Japan 2016予稿集
  • Place of Presentation: 東京・筑波大学東京校
  • Year and Date: 2016-11-01
• [Presentation] A partial Mueller matrix polarimeter using two photoelastic modulator and polarizer pairs (2016)
  • Author(s): Nia Natasha TIPOL, Shuichi KAWABATA, Yukitoshi OTANI
  • Organizer: 応用物理学会春季学術講演会
  • Place of Presentation: 東京工業大学大岡山キャンパス
  • Year and Date: 2016-03-19
• [Remarks] 大谷・ヘーガン研究室
  • URL: http://www.otanilab.org