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Surface acoustic wave motor with sapphire wave guide

Research Project

Project/Area Number 15H03943
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionTokyo Institute of Technology

Principal Investigator

Kurosawa Minoru  東京工業大学, 工学院, 准教授 (70170090)

Project Period (FY) 2015-04-01 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥14,170,000 (Direct Cost: ¥10,900,000、Indirect Cost: ¥3,270,000)
Fiscal Year 2018: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2017: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Fiscal Year 2016: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2015: ¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Keywordsアクチュエータ / 圧電アクチュエータ / 超音波モータ / リニアモータ / マイクロモータ / 弾性表面波素子 / 摩擦駆動 / MEMS / 圧電デバイス / 弾性表面波 / 進行波 / 超音波 / 圧電材料 / マイクロマシン / トライボロジー / レイリー波
Outline of Final Research Achievements

The surface acoustic wave (SAW) motor, as a type of traveling wave ultrasonic motor, has been studied for years. A Rayleigh wave is excited by a unidirectional interdigital transducer (U-IDT) in a lithium niobate stator. Through frictional force, a driven slider can achieve linear motion. At the contact surfaces of the stator and slider, one problem observed is the lack of tolerance to wear. Owing to the large mohs hardness, a novel approach to the fabrication of a sapphire stator is investigated to improve frictional durability. In the novel sapphire stator, the Rayleigh wave, generated by the lithium niobate U-IDT transducer, is transmitted to the sapphire stator surface through pure mechanical integration. Through measurement results, the sapphire stator is evaluated via the admittance characteristics of the wave excitation unit, the normal vibration of the Rayleigh wave, and the horizontal vibration velocity of the Rayleigh wave.

Academic Significance and Societal Importance of the Research Achievements

サファイアと同じ組成であるアルミナ・セラミクスを摩擦材として実用化された超音波モータでは,動作距離10,000km(推定10,000時間)の寿命を実現している。アルミナ・セラミクスの単結晶材料であるサファイアを摩擦駆動部に用いることで高い耐久性が期待できる。振動発生部には,単結晶ニオブ酸リチウムを用いることで高いパワー密度を実現し,摩擦駆動部には,耐摩耗性と機械強度に優れた単結晶サファイアを用いることで高い耐久性を目指しているのが,本弾性表面波モータである。

Report

(5 results)
  • 2019 Final Research Report ( PDF )
  • 2018 Annual Research Report
  • 2017 Annual Research Report
  • 2016 Annual Research Report
  • 2015 Annual Research Report
  • Research Products

    (12 results)

All 2019 2018 2017 2016

All Journal Article (1 results) (of which Peer Reviewed: 1 results,  Open Access: 1 results) Presentation (11 results) (of which Int'l Joint Research: 7 results,  Invited: 2 results)

  • [Journal Article] Excitation of Rayleigh wave with sapphire/LiNbO3 mechanical integration for surface acoustic wave motor2018

    • Author(s)
      D. Kong, M. K. Kurosawa
    • Journal Title

      Jpn. J. Appl. Phys.,

      Volume: vol. 57, no. 7S1

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] A Novel Approach to Swimmer Actuation via Leaky Surface Acoustic Wave2019

    • Author(s)
      D. Kong, K. Nishio, M. K. Kurosawa
    • Organizer
      The 32nd IEEE International Conference on Micro Electro Mechanical Systems
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] SAWデバイスによるジェット推進型スイマー2019

    • Author(s)
      西尾一輝, 孔徳卿, 黒澤実
    • Organizer
      日本音響学会2019年春季研究発表会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Mechanical vibration conversion to RF power using piezoelectric transducers2018

    • Author(s)
      M. K. Kurosawa
    • Organizer
      The 12th Japan-Korea Conference on Ferroelectrics
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] IDT Reflector Improvement to Investigate Wave Leakage for a Surface Acoustic Wave Motor2018

    • Author(s)
      D. Kong, M. K. Kurosawa
    • Organizer
      IWPMA2018
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] A Novel Swimmer Actuator Via Leaky Surface Acoustic Wave2018

    • Author(s)
      D. Kong, M. K. Kurosawa
    • Organizer
      2018 IEEE International Ultrasonics Symp.
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 弾性表面波による新型スイマーアクチュエータ2018

    • Author(s)
      孔 徳卿, 黒澤 実
    • Organizer
      第39回超音波エレクトロニクスの基礎と応用に関するシンポジウム
    • Related Report
      2018 Annual Research Report
  • [Presentation] 弾性表面波モータの予圧分布変動が与える推力への影響2017

    • Author(s)
      形屋寛行,黒澤実
    • Organizer
      電子情報通信学会 超音波研究会
    • Place of Presentation
      京都市・同志社大学
    • Year and Date
      2017-01-26
    • Related Report
      2016 Annual Research Report
  • [Presentation] Excitation of Rayleigh Wave with Sapphire-LiNbO3 Mechanical Integration for Surface Acoustic Wave Motor2017

    • Author(s)
      Deqing Kong, Minoru Kuribayashi Kurosawa
    • Organizer
      Proceedings of Symposium on Ultrasonic Electronics, Vol. 38
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Stator evaluation in a surface acoustic wave motor2017

    • Author(s)
      D. Kong and M. K. Kurosawa
    • Organizer
      Baltic Conference Series, Stockholm, Sweden, 8-11 October
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] The Novel Sapphire Stator in a Surface Acoustic Wave Motor2016

    • Author(s)
      D. Kong and M. K. Kurosawa
    • Organizer
      IEEE International Ultrasonics Symposium 2016
    • Place of Presentation
      Vinci Convention Center, Tours, France
    • Year and Date
      2016-09-20
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 弾性表面波モータの予圧変動が与える推力への影響2016

    • Author(s)
      形屋寛行,黒澤実
    • Organizer
      日本音響学会2016年春季研究発表会
    • Place of Presentation
      横浜市・桐蔭横浜大学
    • Year and Date
      2016-03-10
    • Related Report
      2015 Annual Research Report

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Published: 2015-04-16   Modified: 2022-11-04  

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