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Evaluation of long-term reliability of potassium ion electret film and its verification by device performance

Research Project

Project/Area Number 15H03946
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionShizuoka University

Principal Investigator

Hashiguchi Gen  静岡大学, 電子工学研究所, 教授 (70314903)

Project Period (FY) 2015-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥7,930,000 (Direct Cost: ¥6,100,000、Indirect Cost: ¥1,830,000)
Fiscal Year 2017: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2016: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2015: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000)
Keywordsエレクトレット / カリウムイオン / MEMS / 高温高湿加速試験 / コンデンサーマイクロフォン / 信頼性 / マイクロ・ナノデバイス / 帯電寿命 / マイクロマシン / カリウムイオンエレクトレット / 帯電機構 / 保護膜
Outline of Final Research Achievements

In order to ensure the long-term reliability of the potassium ion electret film, I have examined passivation film against humidity. I first investigated charging principle of the electret and conducted electret charging experiment for the film on which SiN layer is deposited. This resulted in no electret voltage because SiN layer acts as barrier of potassium ion moving during charging process. Therefore we examined Parylene film that can coat after charing. The acceleration tests under 85 degree C and 90 %Rh humidity conditions shows over 50hour life-time to -1dB degradation. I also developed an condensor microphone by using potassium ion electret technique and tested degradation of sound pressure sensitivity under 85 degree C and 70%Rh humidity condition. After 20 hours test , the remarkable deterioration was not observed to the sound pressure sensitivity.

Report

(4 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Annual Research Report
  • 2015 Annual Research Report
  • Research Products

    (19 results)

All 2018 2017 2016 2015

All Journal Article (7 results) (of which Peer Reviewed: 3 results,  Open Access: 1 results) Presentation (9 results) (of which Int'l Joint Research: 3 results,  Invited: 1 results) Book (1 results) Patent(Industrial Property Rights) (2 results)

  • [Journal Article] A Fluidic Vibrational Energy Harvester for Implantable Medical Device Applications2018

    • Author(s)
      INOUE SATOSHI、TAKAHASHI TAKUYA、KUMEMURA MOMOKO、ISHIBASHI KAZUNORI、FUJITA HIROYUKI、HASHIGUCHI GEN、TOSHIYOSHI HIROSHI
    • Journal Title

      Electronics and Communications in Japan

      Volume: 101 Issue: 4 Pages: 15-23

    • DOI

      10.1002/ecj.12035

    • NAID

      210000181710

    • Related Report
      2017 Annual Research Report
  • [Journal Article] アルカリイオンを利用したMEMS用エレクトレット技術とその応用2017

    • Author(s)
      橋口原
    • Journal Title

      自動化推進

      Volume: 2月号 Pages: 16-19

    • Related Report
      2016 Annual Research Report
  • [Journal Article] A Bistable Comb-drive Elecrtostatic Actuator Biased by the Built-In Potential of Potassium Ion Electret2016

    • Author(s)
      (1)M.Suzuki, T.Moriyama, H.Toshiyoshi, H.Ashizawa, Y.Fujita, H.Mitsuya, T.Sugiyama, M.Ataka, H.Toshiyoshi, and G.Hashiguchi,
    • Journal Title

      Journal of Microelectromechanical Systems

      Volume: 25 Issue: 4 Pages: 652-661

    • DOI

      10.1109/jmems.2016.2582215

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] MEMS electrostatic inductive transformer using potassium ion electrets for up- or down-conversion of AC current2016

    • Author(s)
      M.Suzuki, T.Moriyama, H.Toshiyoshi, and G.Hashiguchi
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Pages: 107201-107201

    • NAID

      210000147145

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Charging mechanism of electret film made of potassium-ion-doped SiO22016

    • Author(s)
      G.Hashiguchi, D.Nakasone, T.Sugiyama, M.Ataka, and H.Toshiyoshi
    • Journal Title

      AIP advances

      Volume: 6 Issue: 3 Pages: 035004-035004

    • DOI

      10.1063/1.4943528

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] カリウムイオンエレクトレットを用いた新しいMEMS技術の展開2016

    • Author(s)
      橋口 原
    • Journal Title

      化学工業

      Volume: 67 Pages: 20-25

    • NAID

      130007715753

    • Related Report
      2015 Annual Research Report
  • [Journal Article] 高電荷密度エレクトレットの形成とデバイス応用2016

    • Author(s)
      橋口 原
    • Journal Title

      電気学会誌

      Volume: 136 Pages: 159-162

    • Related Report
      2015 Annual Research Report
  • [Presentation] センサ・マイクロマシン技術の最近の動向と鉄道応用の可能性2017

    • Author(s)
      橋口原
    • Organizer
      平成29年電気学会全国大会シンポジウム
    • Place of Presentation
      富山大学五福キャンパス(富山県富山市)
    • Year and Date
      2017-03-15
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] Electrostatic vibrational energy harvester with ionic liquid and potassium-ion-electret2016

    • Author(s)
      1.C Sano, H Mitsuya, K Ishibashi, S Ono, K Miwa, M Ataka, G Hashiguchi, H Toshiyoshi, H Fujita
    • Organizer
      The 16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications
    • Place of Presentation
      Paris,France
    • Year and Date
      2016-12-06
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 1mW output electrostatic vibratory power generator allowed by optimization of the proof mass2016

    • Author(s)
      2.H Koga, H Mitsuya, T Sugiyama, H Toshiyoshi, G Hashiguchi
    • Organizer
      The 16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications
    • Place of Presentation
      Paris,France
    • Year and Date
      2016-12-06
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Frequency-Independent Vibrational Energy Harvester using Symmetrically Charged Comb-Drive Electrodes with Heavily Doped Ion Electrets2016

    • Author(s)
      3.H. Mitsuya, H. Ashizawa, K. Ishibashi, H. Homma, M. Ataka, G. Hashiguchi, H. Fujita, H. Toshiyoshi
    • Organizer
      The 16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications
    • Place of Presentation
      Paris,France
    • Year and Date
      2016-12-06
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] カリウムイオンエレクトレットを用いた高効率なElectret-MEMS変圧器の開発2016

    • Author(s)
      森山喬史、鈴木雅人、橋口 原
    • Organizer
      平成28年 電気学会全国大会
    • Place of Presentation
      東北大学(宮城県仙台市)
    • Year and Date
      2016-03-16
    • Related Report
      2015 Annual Research Report
  • [Presentation] カリウムイオンエレクトレットの帯電機構と耐久性についての検討2015

    • Author(s)
      下村典子、中曽根大稀、藤田康秀、石橋和徳、杉山達彦、橋口 原
    • Organizer
      電気学会フィジカルセンサ研究会
    • Place of Presentation
      金沢工業大学(石川県野々市市)
    • Year and Date
      2015-11-20
    • Related Report
      2015 Annual Research Report
  • [Presentation] カリウムイオンエレクトレットにおける帯電性能の評価2015

    • Author(s)
      中曽根 大稀、橋口 原、杉山 達彦、石橋 和徳
    • Organizer
      第 7 回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      朱鷺メッセ(新潟県新潟市)
    • Year and Date
      2015-10-28
    • Related Report
      2015 Annual Research Report
  • [Presentation] カリウムイオンエレクトレットを用いた低電圧双安定アクチュエータの提案と特性解析2015

    • Author(s)
      藤田康秀、杉山達彦、橋口 原
    • Organizer
      2015年日本機械学会年次大会
    • Place of Presentation
      北海道大学(北海道札幌市)
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
  • [Presentation] カリウムイオンエレクトレットを用いた低電圧駆動双安定MEMSアクチュエータの提案2015

    • Author(s)
      藤田康秀、杉山達彦、橋口 原
    • Organizer
      電気学会E部門総合研究会
    • Place of Presentation
      九州大学医学部百年講堂(福岡県福岡市)
    • Year and Date
      2015-07-02
    • Related Report
      2015 Annual Research Report
  • [Book] アクチュエータの新材料、駆動制御、最新応用技術:第9章第4節、モデリング手法に基づく櫛歯アクチュエータの解析とエレクトレット化による低電圧駆動・新機能2017

    • Author(s)
      橋口原
    • Total Pages
      10
    • Publisher
      技術情報協会
    • Related Report
      2016 Annual Research Report
  • [Patent(Industrial Property Rights)] MEMS振動素子、MEMS振動素子の製造方法および振動発電素子2017

    • Inventor(s)
      橋口原、古賀英明
    • Industrial Property Rights Holder
      静岡大学、鷺宮製作所
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2017-154475
    • Filing Date
      2017
    • Related Report
      2017 Annual Research Report
  • [Patent(Industrial Property Rights)] MEMS振動素子の製造方法およびMEMS振動素子2017

    • Inventor(s)
      橋口原、古賀英明
    • Industrial Property Rights Holder
      静岡大学、鷺宮製作所
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2017-154474
    • Filing Date
      2017
    • Related Report
      2017 Annual Research Report

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Published: 2015-04-16   Modified: 2019-03-29  

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