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Investigation of a substrate with both high heat exhausting and elctro magnetic noise sielding layer for power supply on chip applications

Research Project

Project/Area Number 15H03965
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Power engineering/Power conversion/Electric machinery
Research InstitutionKyushu Institute of Technology

Principal Investigator

Matsumoto Satoshi  九州工業大学, 大学院工学研究院, 教授 (10577282)

Co-Investigator(Kenkyū-buntansha) 長谷川 雅考  国立研究開発法人産業技術総合研究所, 材料・化学領域, 研究グループ長 (20357776)
馬場 昭好  九州工業大学, マイクロ化総合技術センター, 准教授 (80304872)
新海 聡子  九州工業大学, マイクロ化総合技術センター, 准教授 (90374785)
Project Period (FY) 2015-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥16,770,000 (Direct Cost: ¥12,900,000、Indirect Cost: ¥3,870,000)
Fiscal Year 2017: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2016: ¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2015: ¥8,190,000 (Direct Cost: ¥6,300,000、Indirect Cost: ¥1,890,000)
Keywords集積化電源 / DCーDCコンバータ / POL / 小型電源 / パワーSoC / DCーDCコンバーター / 電力工学 / パワーエレクトロニクス / パワーSupply on Chip / スイッチング電源 / 集積化 / 3次元構造 / ノイズ遮蔽 / 3次元パワーSoC / 3次元IC / 集積システム
Outline of Final Research Achievements

Research and development trend for power supply is how to reduce the volume and power-SoC(Supply on Chip) is attracted attentions because it can ultimate miniaturization of the power supply. On the other hand, reduction in the size of the power supply has a limitation because of self-heating. In addition, it faces the problem electro magnetic noise. In this study, we develop process technology for implementing the heat exhaust structure and electro magnetic noise shielding layer. We also clarify usefulness of these structure and magnetic noise shielding layer.

Report

(5 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Annual Research Report
  • 2015 Annual Research Report
  • Products Report
  • Research Products

    (50 results)

All 2018 2017 2016 2015 Other

All Int'l Joint Research (3 results) Journal Article (9 results) (of which Int'l Joint Research: 2 results,  Peer Reviewed: 9 results) Presentation (35 results) (of which Int'l Joint Research: 19 results,  Invited: 16 results) Patent(Industrial Property Rights) (3 results)

  • [Int'l Joint Research] National Taiwan University of Science and Technology(NTUST)(台湾)

    • Related Report
      Products Report
  • [Int'l Joint Research] Swiss Federal Laboratories for Materials Science and Technology(Empa)(スイス)

    • Related Report
      Products Report
  • [Int'l Joint Research]

    • Related Report
      Products Report
  • [Journal Article] Potassium-doped n-type bilayer graphene2018

    • Author(s)
      T. Yamada, Y. Okigawa, M. Hasegawa
    • Journal Title

      APPLIED PHYSICS LETTERS

      Volume: 112 Issue: 4 Pages: 043105-043105

    • DOI

      10.1063/1.5012808

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Impact of the 3D Stacking Power Supply on Chip for High Frequency DC-DC Converte2017

    • Author(s)
      K. Hiura, Y. Ikeda, Y. Hino, and S.Matsumoto
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 54 Issue: 4S Pages: 04CR13-04CR13

    • DOI

      10.7567/jjap.56.04cr13

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Aptamer strategy for ATP detection on nanocrystalline diamond functionalized by a nitrogen and hydrogen radical beam system2017

    • Author(s)
      E. Suaebah, Y. Seshimo, M. Shibata, S. Kono, M. Hasegawa, and H. Kawarada
    • Journal Title

      J. Appl. Phys.

      Volume: 121 Issue: 4 Pages: 044506-044506

    • DOI

      10.1063/1.4974984

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Aptamer-Based Carboxyl-Terminated Nanocrystalline Diamond Sensing Arrays for Adenosine Triphosphate Detection2017

    • Author(s)
      E. Suaebah, T. Naramura, M. Myodo, M. Hasegawa, S. Shoji, J. J. Buendia, H. Kawarada
    • Journal Title

      Sensors

      Volume: 17 Issue: 7 Pages: 1686-1686

    • DOI

      10.3390/s17071686

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Strain analysis of plasma CVD graphene for roll-to-roll production by scanning transmission electron microscopy and Raman spectroscop2017

    • Author(s)
      R. Kato, Y. Koga, K. Matsuishi, M. Hasegawa
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Issue: 3 Pages: 030307-030307

    • DOI

      10.7567/jjap.56.030307

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Reduced operating temperature of active layer Si covered by nanocrystalline diamond film2017

    • Author(s)
      S.Duangchan, Y.Koishikawa, R. Shirahama, K. Oishi, A. Baba, S. Matsumoto and M.Hasegawa
    • Journal Title

      Journal of Material Science ; Materials in Electronics

      Volume: 28 Pages: 617-624

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Impact of three-dimensional stacking silicon on diamond substrate for the electrostatic discharge protection device2016

    • Author(s)
      Y. Ikeda, K. Nakagawa, W. Yoshida, and S. Matsumoto
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55

    • NAID

      210000146434

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] High growth rate chemical vapor deposition of graphene under low pressure by RF plasma assistance2016

    • Author(s)
      R. Kato, S. Minami, M. Hasegawa
    • Journal Title

      CARBON

      Volume: 96 Pages: 1008-1013

    • DOI

      10.1016/j.carbon.2015.10.061

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] High performance of polymer organic light-emitting diodes on smooth transparent sheet with graphene films synthesized by plasma treatment2015

    • Author(s)
      Y. Okigawa, W. Mizutani, K. Suzuki, M. Ishihara, T. Yamada, and M. Hasegawa
    • Journal Title

      JAPANESE JOURNAL OF APPLIED PHYSICS

      Volume: 54 Issue: 9 Pages: 095103-095103

    • DOI

      10.7567/jjap.54.095103

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Presentation] Design consideration of a 3D stacked power supply on chip2018

    • Author(s)
      K.Ono, K.Hiura, and S. Matsumoto
    • Organizer
      2018 IEEE Electronic Components and Technology Conference
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 希釈溶媒を変化させたTMAHによるGaN表面処理2018

    • Author(s)
      今熊豪,宇崎滉太,新海聡子
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Cl2およびBCl3を用いたICP-RIEによるGaN表面粗さへの影響2018

    • Author(s)
      宇崎滉太,今熊豪,新海聡子
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Design consideration of 3d stacked power supply on chip2018

    • Author(s)
      Kota Ono, Kengo Hiura, and Satoshi Matsumoto
    • Organizer
      2018 IEEE Electronic Components and Technology Conference(ECTC)
    • Related Report
      Products Report
  • [Presentation] Potential of the 0.35um CMOS gate driver technology for the GaN power devices2017

    • Author(s)
      S. Miyano,T. Akagi, S. Abe, and S.Matsumoto
    • Organizer
      Extended Abstract of the 2016 International Conference on Solid State Devices and Materials
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Potential of a power supply on chip for solar cell based energy harvesting systems2017

    • Author(s)
      K.Yamada, K. Hiura, and S. Matsumoto
    • Organizer
      Proc. The 12th IEEE International Conference on Power Electronics and Drive systems,
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Design consideration of a three-dimensional stacked power supply on chip for high power density DC-DC converter2017

    • Author(s)
      K. Hiura and S.Matsumoto
    • Organizer
      The 2nd International Symposium on Biomedical Engineering,
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of Silicon on Diamond Structure with an Ultra-Thin SiO2 Bonding Layer by Sputter Etching Method2017

    • Author(s)
      M.Nagata, R.Shirahama, S.Duangchan, and Akiyoshi Baba
    • Organizer
      Digest of 30th International Microprocesses and Nanotechnology Conference
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of graphene and related materials in AIST2017

    • Author(s)
      Masataka Hasegawa R. Kato, Y. Okigawa, T. Yamada, W. Mizutani, M. Ishihar
    • Organizer
      Graphene Malaysia 2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] High-Throughput Synthesis of Atomic Layer Graphene by Plasma CVD2017

    • Author(s)
      M. Hasegawa
    • Organizer
      IUMRS-ICAM 2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] TMAH溶液のエッチングによるGaNの表面粗さの改善2017

    • Author(s)
      今熊豪,宇崎滉太,新海聡子
    • Organizer
      平成29年度応用物理学会九州支部学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] ICP-RIEを施したGaN表面のエッチングダメージ評価2017

    • Author(s)
      宇崎滉太,今熊豪,新海聡子
    • Organizer
      平成29年度応用物理学会九州支部学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] A Silicon Based Multi-Tens MHz Gate Driver IC for GaN Power Devices2017

    • Author(s)
      T. Akagi, S.Miyano, S. Abe, and S.Matsumoto
    • Organizer
      2017 IEEE Applied Power Electronics Conference and Exposition
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ナノ結晶ダイヤモンド薄膜、グラフェン2016

    • Author(s)
      長谷川 雅考
    • Organizer
      第1回 3次元パワーSoC実用化に向けての技術調査委員会
    • Place of Presentation
      東京
    • Year and Date
      2016-03-04
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] 工業利用に向けたグラフェンの開発2016

    • Author(s)
      長谷川 雅考
    • Organizer
      nano tech 2016 メインシアター グラフェンスペシャル 次世代カーボン素材の最新状況
    • Place of Presentation
      東京
    • Year and Date
      2016-01-27
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] グラフェンの研究開発~合成技術の向上と用途開発の最新技術動向~2016

    • Author(s)
      長谷川 雅考
    • Organizer
      <速習セミナー〉グラフェンの研究開発
    • Place of Presentation
      東京
    • Year and Date
      2016-01-25
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] Impact of the 3D Stacking Power Supply on Chip for High Frequency DC-DC Converter2016

    • Author(s)
      K. Hiura, Y. Ikeda, Y. Hino, and S.Matsumoto
    • Organizer
      the 2016 International Conference on Solid State Devices and Materials
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Evaluation of ON-Chip Inductor and Transformer for Isolated Power-SoC2016

    • Author(s)
      S. Abe, T. Akagi, and S. Matsumoto
    • Organizer
      International Power Supply on Chip Workshop 2016
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Potential of the 3D stacking power SoC for high frequency switching applications2016

    • Author(s)
      Y. Ikeda, K. Hiura, Y. Hino, and S. Matsumoto
    • Organizer
      International Power Supply on Chip Workshop 2016
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Numerical evaluations of 3D stacking power SoC2016

    • Author(s)
      W. Yoshida, K. Hiura, and S. Matsumoto
    • Organizer
      International Power Supply on Chip Workshop 2016
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] The Influence of Plasma Conditions on Surface-Activation that Affect the Bonded Area2016

    • Author(s)
      S. Duangchan, R.Shirahama, T.Murayama, S.Hamada and A.Baba
    • Organizer
      Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of graphene and related materials in TASC and AIST2016

    • Author(s)
      M. Hasegawa
    • Organizer
      Graphene 2016, Genova, Italy
    • Related Report
      Products Report
    • Invited
  • [Presentation] Development of graphene and related materials in TASC and AIST2016

    • Author(s)
      M. Hasegawa
    • Organizer
      Graphene Workshop 2016, 新竹, 台湾
    • Related Report
      Products Report
    • Invited
  • [Presentation] カーボン系新材料の最前線2015

    • Author(s)
      長谷川 雅考、加藤 隆一、沖川 侑揮、南 聡史、石原 正統、山田 貴壽、水谷 亘
    • Organizer
      日本真空学会2015年12月研究例会
    • Place of Presentation
      東京
    • Year and Date
      2015-12-16
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] Graphene synthesis by plasma process towards high-throughput production2015

    • Author(s)
      M. Hasegawa, R. Kato, Y. Okigawa, S. Minami, M. Ishihara, T. Yamada, and W. Mizutani
    • Organizer
      EMN Hong Kong Meeting
    • Place of Presentation
      Hong Kong, Chaina
    • Year and Date
      2015-12-09
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 透明導電膜への応用のためのグラフェンのプラズマ合成2015

    • Author(s)
      長谷川 雅考
    • Organizer
      第56回真空に関する連合講演会
    • Place of Presentation
      つくば
    • Year and Date
      2015-12-01
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] High-throughput synthesis of graphene by plasma assistance2015

    • Author(s)
      M. Hasegawa
    • Organizer
      1st Japan-EU Workshop on Graphene and Related 2D Materials
    • Place of Presentation
      Tokyo, japan
    • Year and Date
      2015-10-31
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] デバイスシミュレーションによる3次元パワーSoC向けESD保護素子の検討2015

    • Author(s)
      池田裕帆,中川謙太郎,吉田 航,松本 聡
    • Organizer
      電気学会電子デバイス・半導体電力変換合同研究会
    • Place of Presentation
      長崎
    • Year and Date
      2015-10-29
    • Related Report
      2015 Annual Research Report
  • [Presentation] Synthesis of Graphene Transparent Conductive Films toward Large Area Flexible Devices2015

    • Author(s)
      M. Hasegawa, R. Kato, Y. Okigawa, S. Minami, M. Ishihara, T. Yamada, and W. Mizutani
    • Organizer
      GRAPCHINA 2015
    • Place of Presentation
      Qingdaou, Chaina
    • Year and Date
      2015-10-28
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Impact of 3D Stacking Silicon on Diamond Substrate for the ESD Protection Device2015

    • Author(s)
      Y.Ikeda, K.Nakagawa, and S.Matsumoto
    • Organizer
      2015 International conference on solid state devices and materials(SSDM2016)
    • Place of Presentation
      Sapporo, Japan
    • Year and Date
      2015-09-26
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Numerical evaluations of a silicon on diamond structure for 3D-power supply on chip2015

    • Author(s)
      W. Yoshida, K.Nakagawa, S.Matsumoto, and M.Hasegawa
    • Organizer
      電気学会C部門大会
    • Place of Presentation
      長崎
    • Year and Date
      2015-08-26
    • Related Report
      2015 Annual Research Report
  • [Presentation] Synthesis of Flexible Graphene Transparent Conductive Films by Using Plasma Technique2015

    • Author(s)
      M. Hasegawa, R. Kato, Y. Okigawa, S. Minami, M. Ishihara, and T. Yamada
    • Organizer
      The 15th International Meeting on Information Display (iMiD 2015)
    • Place of Presentation
      Daegu, Korea
    • Year and Date
      2015-08-18
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] グラフェンの工業生産に向けた 量産技術2015

    • Author(s)
      長谷川 雅考
    • Organizer
      S&T出版セミナー 高品質・高性能グラフェンの低コスト量産技術 と用途展開に向けた機能化法
    • Place of Presentation
      東京
    • Year and Date
      2015-07-09
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] Synthesis of Flexible Graphene Transparent Conductive Films by Using Plasma Technique2015

    • Author(s)
      M. Hasegawa, R. Kato, Y. Okigawa, S. Minami, M. Ishihara, and T. Yamada
    • Organizer
      The 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices(AM-FPD'15)
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2015-07-01
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Development of graphene and related materials in TASC2015

    • Author(s)
      M. Hasegawa
    • Organizer
      Graphene Canada 2015, Montreal, Canada
    • Related Report
      Products Report
    • Invited
  • [Patent(Industrial Property Rights)] グラフェンシート導電性改善法及び導電性が改善されたグラフェンシートを用いた電極構造2017

    • Inventor(s)
      水谷亘、沖川侑揮、長谷川雅考
    • Industrial Property Rights Holder
      水谷亘、沖川侑揮、長谷川雅考
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2017-112372
    • Filing Date
      2017
    • Related Report
      2017 Annual Research Report
  • [Patent(Industrial Property Rights)] 半導体集積回路装置及びその製造方法2016

    • Inventor(s)
      松本 聡、長谷川雅考
    • Industrial Property Rights Holder
      松本 聡、長谷川雅考
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2016-048113
    • Filing Date
      2016-03-11
    • Related Report
      2015 Annual Research Report
  • [Patent(Industrial Property Rights)] 電磁波吸収遮蔽体及びその製造方法2015

    • Inventor(s)
      石原正統、長谷川雅考、加藤悠人、堀部雅弘
    • Industrial Property Rights Holder
      石原正統、長谷川雅考、加藤悠人、堀部雅弘
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2015-206686
    • Filing Date
      2015-10-20
    • Related Report
      2015 Annual Research Report

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Published: 2015-04-16   Modified: 2022-08-25  

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