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Study on impurity control in an extremely-low concentration range for obtaining highly-functional diamond crystals

Research Project

Project/Area Number 15H03980
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionNational Institute for Materials Science

Principal Investigator

TERAJI TOKUYUKI  国立研究開発法人物質・材料研究機構, 機能性材料研究拠点, 主幹研究員 (50332747)

Co-Investigator(Renkei-kenkyūsha) KOIDE Yasuo  国立研究開発法人物質・材料研究機構, 技術開発・共用部門, 部門長 (70195650)
WATANABE Kenji  国立研究開発法人物質・材料研究機構, 機能性材料研究拠点, 主席研究員 (20343840)
Project Period (FY) 2015-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥16,770,000 (Direct Cost: ¥12,900,000、Indirect Cost: ¥3,870,000)
Fiscal Year 2017: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2016: ¥6,890,000 (Direct Cost: ¥5,300,000、Indirect Cost: ¥1,590,000)
Fiscal Year 2015: ¥7,800,000 (Direct Cost: ¥6,000,000、Indirect Cost: ¥1,800,000)
Keywords電子・電気材料 / 結晶成長 / ダイヤモンド / 不純物制御 / 電子・電気材料工学
Outline of Final Research Achievements

In this study, two research items, “ultra-high purity diamond growth” and “ppb-range donor/acceptor control”, were carried out. In the former case, we succeeded to grow high-purity diamond films by suppress incorporation of nitrogen and silicon through modification of diamond growth system. Finally, ultra-high purity diamond plate with nitrogen concentration of 0.08ppb(1.4×1013 cm-3)was successfully grown. In the latter case, we proposed unique growth condition which is based on methane/nitrogen mixture gas with nitrogen concentration is as low as 500ppm.

Report

(4 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Annual Research Report
  • 2015 Annual Research Report
  • Research Products

    (73 results)

All 2018 2017 2016 2015 Other

All Int'l Joint Research (6 results) Journal Article (28 results) (of which Int'l Joint Research: 14 results,  Peer Reviewed: 25 results,  Open Access: 4 results,  Acknowledgement Compliant: 9 results) Presentation (39 results) (of which Int'l Joint Research: 24 results,  Invited: 12 results)

  • [Int'l Joint Research] Ulm大/Stuttgart大(ドイツ)

    • Related Report
      2017 Annual Research Report
  • [Int'l Joint Research] CEA Sacley/CNRSネール研(フランス)

    • Related Report
      2017 Annual Research Report
  • [Int'l Joint Research] Melbourne大/Macquarie大(オーストラリア)

    • Related Report
      2017 Annual Research Report
  • [Int'l Joint Research] Harvard大/MIT(米国)

    • Related Report
      2017 Annual Research Report
  • [Int'l Joint Research] Hasselt大(ベルギー)

    • Related Report
      2017 Annual Research Report
  • [Int'l Joint Research]

    • Related Report
      2017 Annual Research Report
  • [Journal Article] Spin properties of dense near-surface ensembles of nitrogen-vacancy centers in diamond2018

    • Author(s)
      Tetienne J.-P.、de Gille R. W.、Broadway D. A.、Teraji T.、Lillie S. E.、McCoey J. M.、Dontschuk N.、Hall L. T.、Stacey A.、Simpson D. A.、Hollenberg L. C. L.
    • Journal Title

      Physical Review B

      Volume: 97 Issue: 8 Pages: 0854021-11

    • DOI

      10.1103/physrevb.97.085402

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Nitrogen-Vacancy Centers Created by N+ Ion Implantation Through Screening SiO2 Layers on Diamond2017

    • Author(s)
      K. Ito, H. Saito, K. Sasaki, H. Watanabe, T. Teraji, K. M. Itoh, and E. Abe
    • Journal Title

      Appl. Phys. Lett.

      Volume: 110 Issue: 21 Pages: 213105-213105

    • DOI

      10.1063/1.4984060

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Photoluminescence excitation spectroscopy of SiV- and GeV- color center in diamond2017

    • Author(s)
      Haubler Stefan、Thiering Gergo、Dietrich Andreas、Waasem Niklas、Teraji Tokuyuki、Isoya Junichi、Iwasaki Takayuki、Hatano Mutsuko、Jelezko Fedor、Gali Adam、Kubanek Alexander
    • Journal Title

      New Journal of Physics

      Volume: 19 Issue: 6 Pages: 063036-063036

    • DOI

      10.1088/1367-2630/aa73e5

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Plasma etching phenomena in heavily boron-doped diamond growth2017

    • Author(s)
      Fiori Alexandre、Teraji Tokuyuki
    • Journal Title

      Diamond Relat. Mater.

      Volume: 76 Pages: 38-43

    • DOI

      10.1016/j.diamond.2017.04.007

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] (Invited) Ultrapure Homoepitaxial Diamond Films Grown by Chemical Vapor Deposition2017

    • Author(s)
      Teraji Tokuyuki
    • Journal Title

      ECS Transactions

      Volume: 80 Issue: 4 Pages: 271-276

    • DOI

      10.1149/08004.0271ecst

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Mechanism of reverse current increase of vertical-type diamond Schottky diodes2017

    • Author(s)
      Teraji T.、Fiori A.、Kiritani N.、Tanimoto S.、Gheeraert E.、Koide Y.
    • Journal Title

      Journal of Applied Physics

      Volume: 122 Issue: 13 Pages: 135304-135304

    • DOI

      10.1063/1.4994570

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Reducing energy dissipation and surface effect of diamond nanoelectromechanical resonators by annealing in oxygen ambient2017

    • Author(s)
      Wu Haihua、Sang Liwen、Teraji Tokuyuki、Li Tiefu、Wu Kongping、Imura Masataka、You Jianqiang、Koide Yasuo、Liao Meiyong
    • Journal Title

      Carbon

      Volume: 124 Pages: 281-287

    • DOI

      10.1016/j.carbon.2017.08.069

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Diffusion of Vacancies Created by High-Energy Heavy Ion Strike Into Diamond2017

    • Author(s)
      Onoda Shinobu、Tatsumi Kazumasa、Haruyama Moriyoshi、Teraji Tokuyuki、Isoya Junichi、Kada Wataru、Ohshima Takeshi、Hanaizumi Osamu
    • Journal Title

      physica status solidi (a)

      Volume: 214 Issue: 11 Pages: 1700160-1700160

    • DOI

      10.1002/pssa.201700160

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Displacement current of Au/p-diamond Schottky contacts2017

    • Author(s)
      Aoki Toshichika、Teraji Tokuyuki、Koide Yasuo、Shiojima Kenji
    • Journal Title

      Materials Science in Semiconductor Processing

      Volume: 70 Pages: 207-212

    • DOI

      10.1016/j.mssp.2016.12.012

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Characteristic Luminescence Correlated with Leaky Diamond Schottky Barrier Diodes2017

    • Author(s)
      Shimaoka Takehiro、Teraji Tokuyuki、Watanabe Kenji、Koizumi Satoshi
    • Journal Title

      physica status solidi (a)

      Volume: 214 Issue: 11 Pages: 1700180-1700180

    • DOI

      10.1002/pssa.201700180

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Improvement of the quality factor of single crystal diamond mechanical resonators2017

    • Author(s)
      M. Liao, M. Toda, L. Sang, T. Teraji, M. Imura, and Y. Koide
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 56 Issue: 2 Pages: 0241011-5

    • DOI

      10.7567/jjap.56.024101

    • NAID

      210000147429

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Atomic composition of WC/and Zr/O-terminated diamond Schottky interfaces close to ideality2017

    • Author(s)
      J.C. Pinero, D. Araujo, A. Fiori, A. Traore, M.P. Villar, D. Eon, P. Muret, J. Pernot, T. Teraji
    • Journal Title

      Appl. Surf. Sci.

      Volume: 395 Pages: 200-207

    • DOI

      10.1016/j.apsusc.2016.04.166

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Effect of a radical exposure nitridation surface on the charge stability of shallow nitrogen-vacancy centers in diamond2017

    • Author(s)
      T. Kageura, K. Kato, H. Yamano, E. Suaebah, M. Kajiya, S. Kawai, M. Inaba, T. Tanii, M. Haruyama, K. Yamada, S. Onoda, W. Kada, O. Hanaizumi, T. Teraji, J. Isoya, S. Kono, and H. Kawarada
    • Journal Title

      Appl.Phys.Express

      Volume: 10 Issue: 5 Pages: 0555031-4

    • DOI

      10.7567/apex.10.055503

    • NAID

      210000135854

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Charge state stabilization of shallow nitrogen vacancy centers in diamond by oxygen surface modification2017

    • Author(s)
      H. Yamano, S. Kawai, K. Kato, T. Kageura, M. Inaba, T. Okada, I. Higashimata, M. Haruyama, T. Tanii, K. Yamada, S. Onoda, W. Kada, O. Hanaizumi, T. Teraji, J. Isoya, and H. Kawarada
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 56 Issue: 4S Pages: 04CK08-04CK08

    • DOI

      10.7567/jjap.56.04ck08

    • NAID

      210000147635

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Homoepitaxial diamond chemical vapor deposition for ultra-light doping2016

    • Author(s)
      T. Teraji, J. Isoya, K. Watanabe, S. Koizumi, Y. Koide
    • Journal Title

      Materials Science Semiconductor Processing

      Volume: ー Pages: 197-202

    • DOI

      10.1016/j.mssp.2016.11.012

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Competition between electric field and magnetic field noise in the decoherence of a single spin in diamond2016

    • Author(s)
      P. Jamonneau, M. Lesik, J. P. Tetienne, I. Alvizu, L. Mayer, A. Dreau, S. Kosen, J.-F. Roch, S. Pezzagna, J. Meijer, T. Teraji, Y. Kubo, P. Bertet, J. R. Maze, and V. Jacques
    • Journal Title

      Phys. Rev. B

      Volume: 93 Issue: 2 Pages: 0243051-5

    • DOI

      10.1103/physrevb.93.024305

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Polarization- and Frequency-Tunable Microwave Circuit for Selective Excitation of Nitrogen-Vacancy Spins in Diamond2016

    • Author(s)
      J. Herrmann, M. A. Appleton, K. Sasaki, Y. Monnai, T. Teraji, K. M. Itoh, and E. Abe
    • Journal Title

      Appl. Phys. Lett.

      Volume: 109 Issue: 18 Pages: 1831111-4

    • DOI

      10.1063/1.4967378

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] 超高純度ホモエピタキシャルダイヤモンド膜─極微量不純物と欠陥の検出・可視化─2016

    • Author(s)
      寺地徳之
    • Journal Title

      NEW DIAMOND

      Volume: 121 Pages: 34-38

    • Related Report
      2016 Annual Research Report
    • Acknowledgement Compliant
  • [Journal Article] 超高純度ダイヤモンド気相成長 スピントロニクス研究の新たな礎2016

    • Author(s)
      寺地徳之
    • Journal Title

      応用物理

      Volume: 8 Pages: 870-874

    • NAID

      130007715238

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Fluorescence Polarization Switching from a Single Silicon Vacancy Colour Centre in Diamond2015

    • Author(s)
      Yan Liu, Gengxu Chen, Youying Rong, Liam Paul McGuinness, Fedor Jelezko, Syuto Tamura, Takashi Tanii, Tokuyuki Teraji, Shinobu Onoda, Takeshi Ohshima, Junichi Isoya, Takahiro Shinada, E Wu, and Heping Zeng
    • Journal Title

      Sci. Rep.

      Volume: 5 Issue: 1 Pages: 122441-9

    • DOI

      10.1038/srep12244

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] New application of NV centers in CVD diamonds as a fluorescent nuclear track detector2015

    • Author(s)
      Shinobu Onoda, Moriyoshi Haruyama, Tokuyuki Teraji, Junichi Isoya, Wataru Kada, Osamu Hanaizumi, Takeshi Ohshima
    • Journal Title

      Physica Status Solidi A

      Volume: 212 Issue: 11 Pages: 2641-2644

    • DOI

      10.1002/pssa.201532219

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] High-quality and high-purity homoepitaxial diamond (100) film growth under high oxygen concentration condition2015

    • Author(s)
      T. Teraji
    • Journal Title

      J. Appl. Phys.

      Volume: 118 Issue: 11 Pages: 1153041-8

    • DOI

      10.1063/1.4929962

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Imaging of diamond defect sites by electron-beam-induced current2015

    • Author(s)
      S. Kono, T. Teraji, H. Kodama, and A. Sawabe
    • Journal Title

      Diamond Relat. Mater.

      Volume: 59 Pages: 54-61

    • DOI

      10.1016/j.diamond.2015.09.006

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Homoepitaxial diamond film growth: High purity, high crystalline quality,isotopic enrichment, and single color center formation2015

    • Author(s)
      Tokuyuki Teraji, Takashi Yamamoto, Kenji Watanabe, Yasuo Koide, Junichi Isoya, Shinobu Onoda, Takeshi Ohshima, Lachlan J. Rogers, Fedor Jelezko, Philipp Neumann
    • Journal Title

      Phys. Status Solidi A

      Volume: 212 Issue: 11 Pages: 2365-2384

    • DOI

      10.1002/pssa.201532449

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Direct determination of the barrier height of Ti-based ohmic contact on p-type diamond (001)2015

    • Author(s)
      S. Kono, T. Teraji, H. Kodama, K. Ichikawa, S. Ohnishi, A. Sawabe
    • Journal Title

      Diamond Relat. Mater.

      Volume: 60 Pages: 117-122

    • DOI

      10.1016/j.diamond.2015.10.028

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Investigation of the silicon vacancy color center for quantum key distribution2015

    • Author(s)
      Yan Liu, Petr Siyushev, Youying Rong, Botao Wu, Liam Paul McGuinness, Fedor Jelezko, Syuto Tamura, Takashi Tanii, Tokuyuki Teraji, Shinobu Onoda, Takeshi Ohshima, Junichi Isoya, Takahiro Shinada, Heping Zeng, and E Wu
    • Journal Title

      Opt. Exp.

      Volume: 23 Issue: 26 Pages: 32961-32967

    • DOI

      10.1364/oe.23.032961

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] ホモエピタキシャルダイヤモンド薄膜の高品質化と高純度化を目指して2015

    • Author(s)
      寺地徳之
    • Journal Title

      NEW DIAMOND

      Volume: 116 Pages: 18-21

    • Related Report
      2015 Annual Research Report
    • Acknowledgement Compliant
  • [Journal Article] 窒素分子イオン注入による室温ダイヤモンドスピン量子レジスタの作製2015

    • Author(s)
      ) 山本 卓,寺地 徳之,小野田 忍,大島 武,小泉 聡,Fedor Jelezko,磯谷 順一
    • Journal Title

      NEW DIAMOND

      Volume: 116 Pages: 22-25

    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High Purity and High Quality Homoepitaxial Diamond Growth for Quantum Information and Quantum Sensing Device Applications2017

    • Author(s)
      T. Teraji
    • Organizer
      2017 MRS Spring Meeting & Exhibit (Phoenix Convention Center, Phoenix, Arizona, 2017.4.20)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Homoepitaxial chemical vapor deposition of diamond film for ultra-light doping2017

    • Author(s)
      T. Teraji, J. Isoya, K. Watanabe, S. Koizumi, and Y. Koide
    • Organizer
      NDNC2017 (Shangri-La Hotel, Cairns, Australia, 2017.5.29)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High purity homoepitaxial diamond (111) film growth2017

    • Author(s)
      T. Teraji
    • Organizer
      DCM2017 (Svenska Massan, Gothenburg, Sweden, 2017.9.6).
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ultrapure Homoepitaxial Diamond Films Grown By Chemical Vapor Deposition2017

    • Author(s)
      T. Teraji
    • Organizer
      232nd ECS Meeting (National Harbor, MD, 2017.10.4)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] High Purity Diamond Films Growth for Electronic Device Application2017

    • Author(s)
      T. Teraji
    • Organizer
      OIST Diamond Workshop 2017 (OIST, Okinawa, 2017.10.30)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 炭化タングステン縦型ダイヤモンドショットキーダイオードの漏れ電流増加機構2017

    • Author(s)
      寺地徳之,フィオリ アレクサンドレ,桐谷範彦,谷本 智,ゲラール エチェン,小出康夫
    • Organizer
      第31回ダイヤモンドシンポジウム(関西学院大学,西宮,2017.11.21).
    • Related Report
      2017 Annual Research Report
  • [Presentation] Growth of Ultrapure Homoepitaxial Diamond Films by Chemical Vapor Deposition2017

    • Author(s)
      T. Teraji
    • Organizer
      2017 MRS Fall Meeting & Exhibit (Hynes Convention Center, Boston, Massachusetts, 2017.11.28).
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Mechanism of reverse current increase of vertical-type WC diamond Schottky diodes2017

    • Author(s)
      T. Teraji, A. Fiori, N. Kiritani, S. Tanimoto, E. Gheeraert, and Y. Koide
    • Organizer
      HASSELT DIAMOND WORKSHOP SBDD XXIII (Cultural Centre, Hasselt, Belgium, 2018.3.8).
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Defect reduction in homoepitaxial diamond films for high blocking voltage Schottky diodes2017

    • Author(s)
      T. Teraji, H. Umezawa
    • Organizer
      SBDD XXII
    • Place of Presentation
      Cultural Centre, Hasselt, Belgium
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High Purity and High Quality Homoepitaxial Diamond Growth for Power Device Application2016

    • Author(s)
      T. Teraji
    • Organizer
      2016 MRS Fall Meeting & Exhibit
    • Place of Presentation
      Phoenix Convention Center, Phoenix, Arizona
    • Year and Date
      2016-03-31
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 超高純度ダイヤモンドの成長とカラーセンターの極微量濃度制御2016

    • Author(s)
      寺地徳之
    • Organizer
      物理学会第71回年次大会
    • Place of Presentation
      東北学院大学,仙台市
    • Year and Date
      2016-03-21
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] 酸素添加条件で成長したホモエピタキシャルダイヤモンド(100)薄膜中の欠陥評価2016

    • Author(s)
      寺地徳之、渡邊賢司
    • Organizer
      第63回応用物理学会学術講演会
    • Place of Presentation
      東京工業大学,大岡山
    • Year and Date
      2016-03-20
    • Related Report
      2015 Annual Research Report
  • [Presentation] 超高純度ダイヤモンドの成長とその物性2016

    • Author(s)
      寺地徳之
    • Organizer
      第8回窒化物半導体結晶成長講演
    • Place of Presentation
      京都大学,京都市
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] High quality homoepitaxial diamond growth by chemical vapor deposition for high-performance electronic devices2016

    • Author(s)
      T. Teraji
    • Organizer
      NDNC2016
    • Place of Presentation
      THE WESTIN XIAN, XIAN, China
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Ultrapure diamond growth by microwave plasma-assisted chemical vapor deposition2016

    • Author(s)
      T. Teraji
    • Organizer
      7th International Symposium on Control of Semiconductor Interfaces, ISCSI-VII
    • Place of Presentation
      Nagoya Univ., Nagoya
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ダイヤモンド半導体の基礎物性と結晶成長2016

    • Author(s)
      寺地徳之
    • Organizer
      理研セミナー
    • Place of Presentation
      理化学研究所,和光市
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] 3D imaging of defects in high-purity homoepitaxial diamond (100) films2016

    • Author(s)
      T. Teraji, K. Watanabe
    • Organizer
      DCM2016
    • Place of Presentation
      Le Corum, Montpellier, France
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Defect Reduction in Homoepitaxial Diamond Films for High Breakdown Voltage Schottky Diodes2016

    • Author(s)
      T. Teraji, H. Umezawa
    • Organizer
      SSDM2016
    • Place of Presentation
      International Congress Center, Tsukuba
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 寺地徳之,渡邊賢司2016

    • Author(s)
      酸素添加条件で成長したホモエピタキシャルダイヤモンド薄膜の 欠陥評価
    • Organizer
      第30回ダイヤモンドシンポジウム
    • Place of Presentation
      東京大学, 目黒
    • Related Report
      2016 Annual Research Report
  • [Presentation] Smart Nano-Scale Interlayer Formation for SBD Electrical Properties Stable above 600K2015

    • Author(s)
      A. Fiori, T. Teraji, J.C. Pinero, D. Araujo Y. Koide
    • Organizer
      2015 MRS Fall Meeting & Exhibit
    • Place of Presentation
      The Westin Copley Place, Boston, Massachusetts
    • Year and Date
      2015-11-30
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 電子線誘起電流(EBIC)法によるダイヤモンドの欠陥位置の視覚化2015

    • Author(s)
      河野省三、寺地徳之、児玉英之、澤邊厚仁
    • Organizer
      第29回ダイヤモンドシンポジウム
    • Place of Presentation
      東京理科大学, 金町
    • Year and Date
      2015-11-18
    • Related Report
      2015 Annual Research Report
  • [Presentation] 表面終端と空乏層厚の変化による浅いNV センターの電荷状態制御2015

    • Author(s)
      加藤かなみ,山野楓,蔭浦泰資,柴田将暢,稲葉優文,小池悟大,谷井孝至,磯谷順一,小野田忍,寺地徳之,川原田洋
    • Organizer
      第29回ダイヤモンドシンポジウム
    • Place of Presentation
      東京理科大学, 金町
    • Year and Date
      2015-11-17
    • Related Report
      2015 Annual Research Report
  • [Presentation] 09 keV からサブGeV のイオン注入を用いて形成したNV センターの特性評価2015

    • Author(s)
      小野田忍,春山盛善,寺地徳之,磯谷順一,C. Muller, L. McGuinness, P. Balasubramanian, B. Naydenov, F. Jelezko,小池悟大,東又 格,稲葉優文,大島武,加田渉,花泉修,谷井孝至,川原田洋
    • Organizer
      第29回ダイヤモンドシンポジウム
    • Place of Presentation
      東京理科大学, 金町
    • Year and Date
      2015-11-17
    • Related Report
      2015 Annual Research Report
  • [Presentation] ナノホールレジストマスクを用いたNV センタ配列の作製2015

    • Author(s)
      小池悟大,東又格,寺地徳之,小野田忍,稲葉優文,P. Balasubramanian, B. Naydenov, F. Jelezko,大島武,品田高宏,川原田洋,磯谷順一,谷井孝至
    • Organizer
      第29回ダイヤモンドシンポジウム
    • Place of Presentation
      東京理科大学, 金町
    • Year and Date
      2015-11-17
    • Related Report
      2015 Annual Research Report
  • [Presentation] 表面水素終端化による浅いNV センターへの影響2015

    • Author(s)
      山野楓,稲葉優文,蔭浦泰資,加藤かなみ,小池悟大,谷井孝至,小野田忍,寺地徳之,磯谷順一,川原田洋
    • Organizer
      第29回ダイヤモンドシンポジウム
    • Place of Presentation
      東京理科大学, 金町
    • Year and Date
      2015-11-17
    • Related Report
      2015 Annual Research Report
  • [Presentation] 水素終端ダイヤモンド(001)表面の金オーミック電極の障壁高さ2015

    • Author(s)
      河野省三、寺地徳之、竹内大輔児玉英之、澤邊厚仁
    • Organizer
      第29回ダイヤモンドシンポジウム
    • Place of Presentation
      東京理科大学, 金町
    • Year and Date
      2015-11-17
    • Related Report
      2015 Annual Research Report
  • [Presentation] NV Centers in Diamond Used for Detection of Single Ion Track2015

    • Author(s)
      Moriyoshi Haruyama, Shinobu Onoda, Tokuyuki Teraji, Junichi Isoya, Wataru Kada, Takeshi Ohshima, Osamu Hanaizumi
    • Organizer
      The 11th Intrernational Workshop on Radiation Effects on Semicoductor Devices for Space Applications (11th RASEDA)
    • Place of Presentation
      City Performing Arts Center, Kiryu, Gunnma, Japan
    • Year and Date
      2015-11-12
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High quality homoepitaxial diamond growth by chemical vapor deposition for high-performance electronic devices2015

    • Author(s)
      T. Teraji
    • Organizer
      IUMRS-ICAM2015
    • Place of Presentation
      ICC JEJU, KOREA
    • Year and Date
      2015-10-27
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Ultrapure Diamond Growth by Chemical Vapor Deposition2015

    • Author(s)
      T. Teraji
    • Organizer
      SSDM2016
    • Place of Presentation
      Sapporo Convention Center, Sapporo
    • Year and Date
      2015-09-28
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Nano-scale interlayer formation for thermally stable SBD electrical properties2015

    • Author(s)
      Alexandre FIORI, Tokuyuki TERAJI, Jose PINERO, Daniel ARAUJO, Yasuo KOIDE
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場, 愛知県
    • Year and Date
      2015-09-15
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] 重イオン照射を用いたNVセンター形成条件の最適化2015

    • Author(s)
      春山盛善、小野田忍、寺地徳之、磯谷順一、加田渉、大島武、花泉 修
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場, 愛知県
    • Year and Date
      2015-09-15
    • Related Report
      2015 Annual Research Report
  • [Presentation] ナノホールレジストマスクを用いたNVセンタ配列の作製2015

    • Author(s)
      東又 格、小池悟大,寺地徳之,小野田忍,稲葉優文,Priyadharshini Balasubramanian,Boris Naydenov,Fedor Jelezko,大島武,品田高宏,川原田洋,磯谷順一,谷井孝至
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場, 愛知県
    • Year and Date
      2015-09-05
    • Related Report
      2015 Annual Research Report
  • [Presentation] Diamond film growth for formation of single photon source2015

    • Author(s)
      T. Teraji
    • Organizer
      Diamond Quantum Sensing Workshop 2015
    • Place of Presentation
      Kagawa International Conference Hall, Takamatsu, Japan
    • Year and Date
      2015-08-05
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Diamond surface fluorescence for device sensing2015

    • Author(s)
      Masafumi Inaba, Hayate Yamano, Kanami Kato, Taisuke Kageura, M. Shibata, Shinobu Onoda, Tokuyuki Teraji, Junichi Isoya,Takashi Tanii, Hiroshi Kawarada
    • Organizer
      Diamond surface fluorescence for device sensing
    • Place of Presentation
      Kagawa International Conference Hall, Takamatsu, Japan
    • Year and Date
      2015-08-05
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Oxycarbide Formation for Ideal and Thermally Stable Diamond Schottky-barrier Diodes/Oxycarbide Formation for Ideal and Thermally Stable Diamond Schottky-barrier Diodes2015

    • Author(s)
      A. Fiori, T. Teraji, Y. Koide
    • Organizer
      3rd - French-Japanese workshop on diamond power devices
    • Place of Presentation
      C-Suite hotel, Nimes, France
    • Year and Date
      2015-07-09
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Reproducible Growth of Homoepitaxial Diamond Thicker (>10um) Film with Low Defect Density2015

    • Author(s)
      T. Teraji
    • Organizer
      3rd - French-Japanese workshop on diamond power devices
    • Place of Presentation
      C-Suite hotel, Nimes, France
    • Year and Date
      2015-07-08
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Interlayer effects on the electrical property of WC/diamond Schottky diodes2015

    • Author(s)
      A. Fiori, T. Teraji, Y. Koide
    • Organizer
      9th International Conference on New Diamond & Nano Carbon -NDNC2015
    • Place of Presentation
      Shizuoka GRANSHIP, Shizuoka, Japan
    • Year and Date
      2015-05-27
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Imaging of Diamond Defect Sites by Electron Beam Induced Current2015

    • Author(s)
      S. Kono, T. Teraji, H. Kodama, A. Sawabe
    • Organizer
      9th International Conference on New Diamond & Nano Carbon -NDNC2015
    • Place of Presentation
      Shizuoka GRANSHIP, Shizuoka, Japan
    • Year and Date
      2015-05-26
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Homoepitaxial diamond film growth for single color centers2015

    • Author(s)
      T. Teraji
    • Organizer
      9th International Conference on New Diamond & Nano Carbon -NDNC2015
    • Place of Presentation
      Shizuoka GRANSHIP, Shizuoka, Japan
    • Year and Date
      2015-05-25
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research

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Published: 2015-04-16   Modified: 2019-03-29  

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