Study on impurity control in an extremely-low concentration range for obtaining highly-functional diamond crystals

• Project/Area Number: 15H03980
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Electronic materials/Electric materials
• Research Institution: National Institute for Materials Science
• Principal Investigator: TERAJI TOKUYUKI 国立研究開発法人物質・材料研究機構, 機能性材料研究拠点, 主幹研究員 (50332747)
• Co-Investigator(Renkei-kenkyūsha): KOIDE Yasuo 国立研究開発法人物質・材料研究機構, 技術開発・共用部門, 部門長 (70195650) ; WATANABE Kenji 国立研究開発法人物質・材料研究機構, 機能性材料研究拠点, 主席研究員 (20343840)
• Project Period (FY): 2015-04-01 – 2018-03-31
• Project Status: Completed (Fiscal Year 2017)
• Budget Amount: ¥16,770,000 (Direct Cost: ¥12,900,000、Indirect Cost: ¥3,870,000); Fiscal Year 2017: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000); Fiscal Year 2016: ¥6,890,000 (Direct Cost: ¥5,300,000、Indirect Cost: ¥1,590,000); Fiscal Year 2015: ¥7,800,000 (Direct Cost: ¥6,000,000、Indirect Cost: ¥1,800,000)
• Keywords: 電子・電気材料 / 結晶成長 / ダイヤモンド / 不純物制御 / 電子・電気材料工学

Outline of Final Research Achievements

In this study, two research items, “ultra-high purity diamond growth” and “ppb-range donor/acceptor control”, were carried out. In the former case, we succeeded to grow high-purity diamond films by suppress incorporation of nitrogen and silicon through modification of diamond growth system. Finally, ultra-high purity diamond plate with nitrogen concentration of 0.08ppb（1.4×1013 cm-3）was successfully grown. In the latter case, we proposed unique growth condition which is based on methane/nitrogen mixture gas with nitrogen concentration is as low as 500ppm.

Research Products

• [Int'l Joint Research] Ulm大/Stuttgart大(ドイツ)
• [Int'l Joint Research] CEA Sacley/CNRSネール研(フランス)
• [Int'l Joint Research] Melbourne大/Macquarie大(オーストラリア)
• [Int'l Joint Research] Harvard大/MIT(米国)
• [Int'l Joint Research] Hasselt大(ベルギー)
• [Int'l Joint Research]
• [Journal Article] Spin properties of dense near-surface ensembles of nitrogen-vacancy centers in diamond (2018)
  • Author(s): Tetienne J.-P.、de Gille R. W.、Broadway D. A.、Teraji T.、Lillie S. E.、McCoey J. M.、Dontschuk N.、Hall L. T.、Stacey A.、Simpson D. A.、Hollenberg L. C. L.
  • Journal Title: Physical Review B Volume: 97 Issue: 8 Pages: 0854021-11
  • DOI: 10.1103/physrevb.97.085402
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Nitrogen-Vacancy Centers Created by N+ Ion Implantation Through Screening SiO2 Layers on Diamond (2017)
  • Author(s): K. Ito, H. Saito, K. Sasaki, H. Watanabe, T. Teraji, K. M. Itoh, and E. Abe
  • Journal Title: Appl. Phys. Lett. Volume: 110 Issue: 21 Pages: 213105-213105
  • DOI: 10.1063/1.4984060
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Photoluminescence excitation spectroscopy of SiV- and GeV- color center in diamond (2017)
  • Author(s): Haubler Stefan、Thiering Gergo、Dietrich Andreas、Waasem Niklas、Teraji Tokuyuki、Isoya Junichi、Iwasaki Takayuki、Hatano Mutsuko、Jelezko Fedor、Gali Adam、Kubanek Alexander
  • Journal Title: New Journal of Physics Volume: 19 Issue: 6 Pages: 063036-063036
  • DOI: 10.1088/1367-2630/aa73e5
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Plasma etching phenomena in heavily boron-doped diamond growth (2017)
  • Author(s): Fiori Alexandre、Teraji Tokuyuki
  • Journal Title: Diamond Relat. Mater. Volume: 76 Pages: 38-43
  • DOI: 10.1016/j.diamond.2017.04.007
  • Peer Reviewed
• [Journal Article] (Invited) Ultrapure Homoepitaxial Diamond Films Grown by Chemical Vapor Deposition (2017)
  • Author(s): Teraji Tokuyuki
  • Journal Title: ECS Transactions Volume: 80 Issue: 4 Pages: 271-276
  • DOI: 10.1149/08004.0271ecst
  • Peer Reviewed
• [Journal Article] Mechanism of reverse current increase of vertical-type diamond Schottky diodes (2017)
  • Author(s): Teraji T.、Fiori A.、Kiritani N.、Tanimoto S.、Gheeraert E.、Koide Y.
  • Journal Title: Journal of Applied Physics Volume: 122 Issue: 13 Pages: 135304-135304
  • DOI: 10.1063/1.4994570
  • Peer Reviewed / Open Access / Int'l Joint Research
• [Journal Article] Reducing energy dissipation and surface effect of diamond nanoelectromechanical resonators by annealing in oxygen ambient (2017)
  • Author(s): Wu Haihua、Sang Liwen、Teraji Tokuyuki、Li Tiefu、Wu Kongping、Imura Masataka、You Jianqiang、Koide Yasuo、Liao Meiyong
  • Journal Title: Carbon Volume: 124 Pages: 281-287
  • DOI: 10.1016/j.carbon.2017.08.069
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Diffusion of Vacancies Created by High-Energy Heavy Ion Strike Into Diamond (2017)
  • Author(s): Onoda Shinobu、Tatsumi Kazumasa、Haruyama Moriyoshi、Teraji Tokuyuki、Isoya Junichi、Kada Wataru、Ohshima Takeshi、Hanaizumi Osamu
  • Journal Title: physica status solidi (a) Volume: 214 Issue: 11 Pages: 1700160-1700160
  • DOI: 10.1002/pssa.201700160
  • Peer Reviewed
• [Journal Article] Displacement current of Au/p-diamond Schottky contacts (2017)
  • Author(s): Aoki Toshichika、Teraji Tokuyuki、Koide Yasuo、Shiojima Kenji
  • Journal Title: Materials Science in Semiconductor Processing Volume: 70 Pages: 207-212
  • DOI: 10.1016/j.mssp.2016.12.012
  • Peer Reviewed
• [Journal Article] Characteristic Luminescence Correlated with Leaky Diamond Schottky Barrier Diodes (2017)
  • Author(s): Shimaoka Takehiro、Teraji Tokuyuki、Watanabe Kenji、Koizumi Satoshi
  • Journal Title: physica status solidi (a) Volume: 214 Issue: 11 Pages: 1700180-1700180
  • DOI: 10.1002/pssa.201700180
  • Peer Reviewed
• [Journal Article] Improvement of the quality factor of single crystal diamond mechanical resonators (2017)
  • Author(s): M. Liao, M. Toda, L. Sang, T. Teraji, M. Imura, and Y. Koide
  • Journal Title: Jpn. J. Appl. Phys. Volume: 56 Issue: 2 Pages: 0241011-5
  • DOI: 10.7567/jjap.56.024101
  • NAID: 210000147429
  • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
• [Journal Article] Atomic composition of WC/and Zr/O-terminated diamond Schottky interfaces close to ideality (2017)
  • Author(s): J.C. Pinero, D. Araujo, A. Fiori, A. Traore, M.P. Villar, D. Eon, P. Muret, J. Pernot, T. Teraji
  • Journal Title: Appl. Surf. Sci. Volume: 395 Pages: 200-207
  • DOI: 10.1016/j.apsusc.2016.04.166
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Effect of a radical exposure nitridation surface on the charge stability of shallow nitrogen-vacancy centers in diamond (2017)
  • Author(s): T. Kageura, K. Kato, H. Yamano, E. Suaebah, M. Kajiya, S. Kawai, M. Inaba, T. Tanii, M. Haruyama, K. Yamada, S. Onoda, W. Kada, O. Hanaizumi, T. Teraji, J. Isoya, S. Kono, and H. Kawarada
  • Journal Title: Appl.Phys.Express Volume: 10 Issue: 5 Pages: 0555031-4
  • DOI: 10.7567/apex.10.055503
  • NAID: 210000135854
  • Peer Reviewed / Open Access / Int'l Joint Research / Acknowledgement Compliant
• [Journal Article] Charge state stabilization of shallow nitrogen vacancy centers in diamond by oxygen surface modification (2017)
  • Author(s): H. Yamano, S. Kawai, K. Kato, T. Kageura, M. Inaba, T. Okada, I. Higashimata, M. Haruyama, T. Tanii, K. Yamada, S. Onoda, W. Kada, O. Hanaizumi, T. Teraji, J. Isoya, and H. Kawarada
  • Journal Title: Jpn. J. Appl. Phys. Volume: 56 Issue: 4S Pages: 04CK08-04CK08
  • DOI: 10.7567/jjap.56.04ck08
  • NAID: 210000147635
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Homoepitaxial diamond chemical vapor deposition for ultra-light doping (2016)
  • Author(s): T. Teraji, J. Isoya, K. Watanabe, S. Koizumi, Y. Koide
  • Journal Title: Materials Science Semiconductor Processing Volume: ー Pages: 197-202
  • DOI: 10.1016/j.mssp.2016.11.012
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Competition between electric field and magnetic field noise in the decoherence of a single spin in diamond (2016)
  • Author(s): P. Jamonneau, M. Lesik, J. P. Tetienne, I. Alvizu, L. Mayer, A. Dreau, S. Kosen, J.-F. Roch, S. Pezzagna, J. Meijer, T. Teraji, Y. Kubo, P. Bertet, J. R. Maze, and V. Jacques
  • Journal Title: Phys. Rev. B Volume: 93 Issue: 2 Pages: 0243051-5
  • DOI: 10.1103/physrevb.93.024305
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Polarization- and Frequency-Tunable Microwave Circuit for Selective Excitation of Nitrogen-Vacancy Spins in Diamond (2016)
  • Author(s): J. Herrmann, M. A. Appleton, K. Sasaki, Y. Monnai, T. Teraji, K. M. Itoh, and E. Abe
  • Journal Title: Appl. Phys. Lett. Volume: 109 Issue: 18 Pages: 1831111-4
  • DOI: 10.1063/1.4967378
  • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
• [Journal Article] 超高純度ホモエピタキシャルダイヤモンド膜─極微量不純物と欠陥の検出・可視化─ (2016)
  • Author(s): 寺地徳之
  • Journal Title: NEW DIAMOND Volume: 121 Pages: 34-38
  • Acknowledgement Compliant
• [Journal Article] 超高純度ダイヤモンド気相成長 スピントロニクス研究の新たな礎 (2016)
  • Author(s): 寺地徳之
  • Journal Title: 応用物理 Volume: 8 Pages: 870-874
  • NAID: 130007715238
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Fluorescence Polarization Switching from a Single Silicon Vacancy Colour Centre in Diamond (2015)
  • Author(s): Yan Liu, Gengxu Chen, Youying Rong, Liam Paul McGuinness, Fedor Jelezko, Syuto Tamura, Takashi Tanii, Tokuyuki Teraji, Shinobu Onoda, Takeshi Ohshima, Junichi Isoya, Takahiro Shinada, E Wu, and Heping Zeng
  • Journal Title: Sci. Rep. Volume: 5 Issue: 1 Pages: 122441-9
  • DOI: 10.1038/srep12244
  • Peer Reviewed / Open Access / Int'l Joint Research
• [Journal Article] New application of NV centers in CVD diamonds as a fluorescent nuclear track detector (2015)
  • Author(s): Shinobu Onoda, Moriyoshi Haruyama, Tokuyuki Teraji, Junichi Isoya, Wataru Kada, Osamu Hanaizumi, Takeshi Ohshima
  • Journal Title: Physica Status Solidi A Volume: 212 Issue: 11 Pages: 2641-2644
  • DOI: 10.1002/pssa.201532219
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] High-quality and high-purity homoepitaxial diamond (100) film growth under high oxygen concentration condition (2015)
  • Author(s): T. Teraji
  • Journal Title: J. Appl. Phys. Volume: 118 Issue: 11 Pages: 1153041-8
  • DOI: 10.1063/1.4929962
  • Peer Reviewed
• [Journal Article] Imaging of diamond defect sites by electron-beam-induced current (2015)
  • Author(s): S. Kono, T. Teraji, H. Kodama, and A. Sawabe
  • Journal Title: Diamond Relat. Mater. Volume: 59 Pages: 54-61
  • DOI: 10.1016/j.diamond.2015.09.006
  • Peer Reviewed
• [Journal Article] Homoepitaxial diamond film growth: High purity, high crystalline quality,isotopic enrichment, and single color center formation (2015)
  • Author(s): Tokuyuki Teraji, Takashi Yamamoto, Kenji Watanabe, Yasuo Koide, Junichi Isoya, Shinobu Onoda, Takeshi Ohshima, Lachlan J. Rogers, Fedor Jelezko, Philipp Neumann
  • Journal Title: Phys. Status Solidi A Volume: 212 Issue: 11 Pages: 2365-2384
  • DOI: 10.1002/pssa.201532449
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Direct determination of the barrier height of Ti-based ohmic contact on p-type diamond (001) (2015)
  • Author(s): S. Kono, T. Teraji, H. Kodama, K. Ichikawa, S. Ohnishi, A. Sawabe
  • Journal Title: Diamond Relat. Mater. Volume: 60 Pages: 117-122
  • DOI: 10.1016/j.diamond.2015.10.028
  • Peer Reviewed
• [Journal Article] Investigation of the silicon vacancy color center for quantum key distribution (2015)
  • Author(s): Yan Liu, Petr Siyushev, Youying Rong, Botao Wu, Liam Paul McGuinness, Fedor Jelezko, Syuto Tamura, Takashi Tanii, Tokuyuki Teraji, Shinobu Onoda, Takeshi Ohshima, Junichi Isoya, Takahiro Shinada, Heping Zeng, and E Wu
  • Journal Title: Opt. Exp. Volume: 23 Issue: 26 Pages: 32961-32967
  • DOI: 10.1364/oe.23.032961
  • Peer Reviewed / Open Access / Int'l Joint Research
• [Journal Article] ホモエピタキシャルダイヤモンド薄膜の高品質化と高純度化を目指して (2015)
  • Author(s): 寺地徳之
  • Journal Title: NEW DIAMOND Volume: 116 Pages: 18-21
  • Acknowledgement Compliant
• [Journal Article] 窒素分子イオン注入による室温ダイヤモンドスピン量子レジスタの作製 (2015)
  • Author(s): ) 山本 卓，寺地 徳之，小野田 忍，大島 武，小泉 聡，Fedor Jelezko，磯谷 順一
  • Journal Title: NEW DIAMOND Volume: 116 Pages: 22-25
  • Int'l Joint Research
• [Presentation] High Purity and High Quality Homoepitaxial Diamond Growth for Quantum Information and Quantum Sensing Device Applications (2017)
  • Author(s): T. Teraji
  • Organizer: 2017 MRS Spring Meeting & Exhibit (Phoenix Convention Center, Phoenix, Arizona, 2017.4.20)
  • Int'l Joint Research
• [Presentation] Homoepitaxial chemical vapor deposition of diamond film for ultra-light doping (2017)
  • Author(s): T. Teraji, J. Isoya, K. Watanabe, S. Koizumi, and Y. Koide
  • Organizer: NDNC2017 (Shangri-La Hotel, Cairns, Australia, 2017.5.29)
  • Int'l Joint Research
• [Presentation] High purity homoepitaxial diamond (111) film growth (2017)
  • Author(s): T. Teraji
  • Organizer: DCM2017 (Svenska Massan, Gothenburg, Sweden, 2017.9.6).
  • Int'l Joint Research
• [Presentation] Ultrapure Homoepitaxial Diamond Films Grown By Chemical Vapor Deposition (2017)
  • Author(s): T. Teraji
  • Organizer: 232nd ECS Meeting (National Harbor, MD, 2017.10.4)
  • Int'l Joint Research / Invited
• [Presentation] High Purity Diamond Films Growth for Electronic Device Application (2017)
  • Author(s): T. Teraji
  • Organizer: OIST Diamond Workshop 2017 (OIST, Okinawa, 2017.10.30)
  • Int'l Joint Research
• [Presentation] 炭化タングステン縦型ダイヤモンドショットキーダイオードの漏れ電流増加機構 (2017)
  • Author(s): 寺地徳之，フィオリ アレクサンドレ，桐谷範彦，谷本 智，ゲラール エチェン，小出康夫
  • Organizer: 第31回ダイヤモンドシンポジウム(関西学院大学，西宮，2017.11.21).
• [Presentation] Growth of Ultrapure Homoepitaxial Diamond Films by Chemical Vapor Deposition (2017)
  • Author(s): T. Teraji
  • Organizer: 2017 MRS Fall Meeting & Exhibit (Hynes Convention Center, Boston, Massachusetts, 2017.11.28).
  • Int'l Joint Research / Invited
• [Presentation] Mechanism of reverse current increase of vertical-type WC diamond Schottky diodes (2017)
  • Author(s): T. Teraji, A. Fiori, N. Kiritani, S. Tanimoto, E. Gheeraert, and Y. Koide
  • Organizer: HASSELT DIAMOND WORKSHOP SBDD XXIII (Cultural Centre, Hasselt, Belgium, 2018.3.8).
  • Int'l Joint Research
• [Presentation] Defect reduction in homoepitaxial diamond films for high blocking voltage Schottky diodes (2017)
  • Author(s): T. Teraji, H. Umezawa
  • Organizer: SBDD XXII
  • Place of Presentation: Cultural Centre, Hasselt, Belgium
  • Int'l Joint Research
• [Presentation] High Purity and High Quality Homoepitaxial Diamond Growth for Power Device Application (2016)
  • Author(s): T. Teraji
  • Organizer: 2016 MRS Fall Meeting & Exhibit
  • Place of Presentation: Phoenix Convention Center, Phoenix, Arizona
  • Year and Date: 2016-03-31
  • Int'l Joint Research / Invited
• [Presentation] 超高純度ダイヤモンドの成長とカラーセンターの極微量濃度制御 (2016)
  • Author(s): 寺地徳之
  • Organizer: 物理学会第71回年次大会
  • Place of Presentation: 東北学院大学，仙台市
  • Year and Date: 2016-03-21
  • Invited
• [Presentation] 酸素添加条件で成長したホモエピタキシャルダイヤモンド(100)薄膜中の欠陥評価 (2016)
  • Author(s): 寺地徳之、渡邊賢司
  • Organizer: 第63回応用物理学会学術講演会
  • Place of Presentation: 東京工業大学，大岡山
  • Year and Date: 2016-03-20
• [Presentation] 超高純度ダイヤモンドの成長とその物性 (2016)
  • Author(s): 寺地徳之
  • Organizer: 第8回窒化物半導体結晶成長講演
  • Place of Presentation: 京都大学，京都市
  • Invited
• [Presentation] High quality homoepitaxial diamond growth by chemical vapor deposition for high-performance electronic devices (2016)
  • Author(s): T. Teraji
  • Organizer: NDNC2016
  • Place of Presentation: THE WESTIN XIAN, XIAN, China
  • Int'l Joint Research / Invited
• [Presentation] Ultrapure diamond growth by microwave plasma-assisted chemical vapor deposition (2016)
  • Author(s): T. Teraji
  • Organizer: 7th International Symposium on Control of Semiconductor Interfaces, ISCSI-VII
  • Place of Presentation: Nagoya Univ., Nagoya
  • Int'l Joint Research
• [Presentation] ダイヤモンド半導体の基礎物性と結晶成長 (2016)
  • Author(s): 寺地徳之
  • Organizer: 理研セミナー
  • Place of Presentation: 理化学研究所，和光市
  • Invited
• [Presentation] 3D imaging of defects in high-purity homoepitaxial diamond (100) films (2016)
  • Author(s): T. Teraji, K. Watanabe
  • Organizer: DCM2016
  • Place of Presentation: Le Corum, Montpellier, France
  • Int'l Joint Research
• [Presentation] Defect Reduction in Homoepitaxial Diamond Films for High Breakdown Voltage Schottky Diodes (2016)
  • Author(s): T. Teraji, H. Umezawa
  • Organizer: SSDM2016
  • Place of Presentation: International Congress Center, Tsukuba
  • Int'l Joint Research
• [Presentation] 寺地徳之，渡邊賢司 (2016)
  • Author(s): 酸素添加条件で成長したホモエピタキシャルダイヤモンド薄膜の 欠陥評価
  • Organizer: 第30回ダイヤモンドシンポジウム
  • Place of Presentation: 東京大学, 目黒
• [Presentation] Smart Nano-Scale Interlayer Formation for SBD Electrical Properties Stable above 600K (2015)
  • Author(s): A. Fiori, T. Teraji, J.C. Pinero, D. Araujo Y. Koide
  • Organizer: 2015 MRS Fall Meeting & Exhibit
  • Place of Presentation: The Westin Copley Place, Boston, Massachusetts
  • Year and Date: 2015-11-30
  • Int'l Joint Research
• [Presentation] 電子線誘起電流(EBIC)法によるダイヤモンドの欠陥位置の視覚化 (2015)
  • Author(s): 河野省三、寺地徳之、児玉英之、澤邊厚仁
  • Organizer: 第29回ダイヤモンドシンポジウム
  • Place of Presentation: 東京理科大学, 金町
  • Year and Date: 2015-11-18
• [Presentation] 表面終端と空乏層厚の変化による浅いNV センターの電荷状態制御 (2015)
  • Author(s): 加藤かなみ，山野楓，蔭浦泰資，柴田将暢，稲葉優文，小池悟大，谷井孝至，磯谷順一，小野田忍，寺地徳之，川原田洋
  • Organizer: 第29回ダイヤモンドシンポジウム
  • Place of Presentation: 東京理科大学, 金町
  • Year and Date: 2015-11-17
• [Presentation] 09 keV からサブGeV のイオン注入を用いて形成したNV センターの特性評価 (2015)
  • Author(s): 小野田忍，春山盛善，寺地徳之，磯谷順一，C. Muller, L. McGuinness, P. Balasubramanian, B. Naydenov, F. Jelezko，小池悟大，東又 格，稲葉優文，大島武，加田渉，花泉修，谷井孝至，川原田洋
  • Organizer: 第29回ダイヤモンドシンポジウム
  • Place of Presentation: 東京理科大学, 金町
  • Year and Date: 2015-11-17
• [Presentation] ナノホールレジストマスクを用いたNV センタ配列の作製 (2015)
  • Author(s): 小池悟大，東又格，寺地徳之，小野田忍，稲葉優文，P. Balasubramanian, B. Naydenov, F. Jelezko，大島武，品田高宏，川原田洋，磯谷順一，谷井孝至
  • Organizer: 第29回ダイヤモンドシンポジウム
  • Place of Presentation: 東京理科大学, 金町
  • Year and Date: 2015-11-17
• [Presentation] 表面水素終端化による浅いNV センターへの影響 (2015)
  • Author(s): 山野楓，稲葉優文，蔭浦泰資，加藤かなみ，小池悟大，谷井孝至，小野田忍，寺地徳之，磯谷順一，川原田洋
  • Organizer: 第29回ダイヤモンドシンポジウム
  • Place of Presentation: 東京理科大学, 金町
  • Year and Date: 2015-11-17
• [Presentation] 水素終端ダイヤモンド(001)表面の金オーミック電極の障壁高さ (2015)
  • Author(s): 河野省三、寺地徳之、竹内大輔児玉英之、澤邊厚仁
  • Organizer: 第29回ダイヤモンドシンポジウム
  • Place of Presentation: 東京理科大学, 金町
  • Year and Date: 2015-11-17
• [Presentation] NV Centers in Diamond Used for Detection of Single Ion Track (2015)
  • Author(s): Moriyoshi Haruyama, Shinobu Onoda, Tokuyuki Teraji, Junichi Isoya, Wataru Kada, Takeshi Ohshima, Osamu Hanaizumi
  • Organizer: The 11th Intrernational Workshop on Radiation Effects on Semicoductor Devices for Space Applications (11th RASEDA)
  • Place of Presentation: City Performing Arts Center, Kiryu, Gunnma, Japan
  • Year and Date: 2015-11-12
  • Int'l Joint Research
• [Presentation] High quality homoepitaxial diamond growth by chemical vapor deposition for high-performance electronic devices (2015)
  • Author(s): T. Teraji
  • Organizer: IUMRS-ICAM2015
  • Place of Presentation: ICC JEJU, KOREA
  • Year and Date: 2015-10-27
  • Int'l Joint Research / Invited
• [Presentation] Ultrapure Diamond Growth by Chemical Vapor Deposition (2015)
  • Author(s): T. Teraji
  • Organizer: SSDM2016
  • Place of Presentation: Sapporo Convention Center, Sapporo
  • Year and Date: 2015-09-28
  • Int'l Joint Research / Invited
• [Presentation] Nano-scale interlayer formation for thermally stable SBD electrical properties (2015)
  • Author(s): Alexandre FIORI, Tokuyuki TERAJI, Jose PINERO, Daniel ARAUJO, Yasuo KOIDE
  • Organizer: 第76回応用物理学会秋季学術講演会
  • Place of Presentation: 名古屋国際会議場, 愛知県
  • Year and Date: 2015-09-15
  • Invited
• [Presentation] 重イオン照射を用いたNVセンター形成条件の最適化 (2015)
  • Author(s): 春山盛善、小野田忍、寺地徳之、磯谷順一、加田渉、大島武、花泉 修
  • Organizer: 第76回応用物理学会秋季学術講演会
  • Place of Presentation: 名古屋国際会議場, 愛知県
  • Year and Date: 2015-09-15
• [Presentation] ナノホールレジストマスクを用いたNVセンタ配列の作製 (2015)
  • Author(s): 東又 格、小池悟大，寺地徳之，小野田忍，稲葉優文，Priyadharshini Balasubramanian，Boris Naydenov，Fedor Jelezko，大島武，品田高宏，川原田洋，磯谷順一，谷井孝至
  • Organizer: 第76回応用物理学会秋季学術講演会
  • Place of Presentation: 名古屋国際会議場, 愛知県
  • Year and Date: 2015-09-05
• [Presentation] Diamond film growth for formation of single photon source (2015)
  • Author(s): T. Teraji
  • Organizer: Diamond Quantum Sensing Workshop 2015
  • Place of Presentation: Kagawa International Conference Hall, Takamatsu, Japan
  • Year and Date: 2015-08-05
  • Int'l Joint Research
• [Presentation] Diamond surface fluorescence for device sensing (2015)
  • Author(s): Masafumi Inaba, Hayate Yamano, Kanami Kato, Taisuke Kageura, M. Shibata, Shinobu Onoda, Tokuyuki Teraji, Junichi Isoya,Takashi Tanii, Hiroshi Kawarada
  • Organizer: Diamond surface fluorescence for device sensing
  • Place of Presentation: Kagawa International Conference Hall, Takamatsu, Japan
  • Year and Date: 2015-08-05
  • Int'l Joint Research
• [Presentation] Oxycarbide Formation for Ideal and Thermally Stable Diamond Schottky-barrier Diodes/Oxycarbide Formation for Ideal and Thermally Stable Diamond Schottky-barrier Diodes (2015)
  • Author(s): A. Fiori, T. Teraji, Y. Koide
  • Organizer: 3rd - French-Japanese workshop on diamond power devices
  • Place of Presentation: C-Suite hotel, Nimes, France
  • Year and Date: 2015-07-09
  • Int'l Joint Research / Invited
• [Presentation] Reproducible Growth of Homoepitaxial Diamond Thicker (>10um) Film with Low Defect Density (2015)
  • Author(s): T. Teraji
  • Organizer: 3rd - French-Japanese workshop on diamond power devices
  • Place of Presentation: C-Suite hotel, Nimes, France
  • Year and Date: 2015-07-08
  • Int'l Joint Research / Invited
• [Presentation] Interlayer effects on the electrical property of WC/diamond Schottky diodes (2015)
  • Author(s): A. Fiori, T. Teraji, Y. Koide
  • Organizer: 9th International Conference on New Diamond & Nano Carbon -NDNC2015
  • Place of Presentation: Shizuoka GRANSHIP, Shizuoka, Japan
  • Year and Date: 2015-05-27
  • Int'l Joint Research
• [Presentation] Imaging of Diamond Defect Sites by Electron Beam Induced Current (2015)
  • Author(s): S. Kono, T. Teraji, H. Kodama, A. Sawabe
  • Organizer: 9th International Conference on New Diamond & Nano Carbon -NDNC2015
  • Place of Presentation: Shizuoka GRANSHIP, Shizuoka, Japan
  • Year and Date: 2015-05-26
  • Int'l Joint Research
• [Presentation] Homoepitaxial diamond film growth for single color centers (2015)
  • Author(s): T. Teraji
  • Organizer: 9th International Conference on New Diamond & Nano Carbon -NDNC2015
  • Place of Presentation: Shizuoka GRANSHIP, Shizuoka, Japan
  • Year and Date: 2015-05-25
  • Int'l Joint Research