A MEMS Tunable Resonator Array for THz Spatial Modulators

• Project/Area Number: 15H03984
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Electron device/Electronic equipment
• Research Institution: The University of Tokyo
• Principal Investigator: TOSHIYOSHI HIROSHI 東京大学, 先端科学技術研究センター, 教授 (50282603)
• Research Collaborator: HAN Zhengli 国立研究開発法人理化学研究所, 光量子工学研究領域, 基礎科学特別研究員 (20752702)
• Project Period (FY): 2015-04-01 – 2018-03-31
• Project Status: Completed (Fiscal Year 2017)
• Budget Amount: ¥15,080,000 (Direct Cost: ¥11,600,000、Indirect Cost: ¥3,480,000); Fiscal Year 2017: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000); Fiscal Year 2016: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000); Fiscal Year 2015: ¥7,930,000 (Direct Cost: ¥6,100,000、Indirect Cost: ¥1,830,000)
• Keywords: MEMS / THz / マイクロマシン / テラヘルツ光 / メタマテリアル / マイクロ波 / ミリ波 / テラヘルツ波

Outline of Final Research Achievements

This work presents a novel tunable cross-slot resonator as a digital pixel for spatially modulated THz filter based on the MEMS electrostatic actuation mechanism. The tunable filter performance is theoretically studied by using the electromagnetic wave simulation and experimentally confirmed by performing THz measurement on proof-of-concept device developed by the surface micromachining process.

Research Products

• [Journal Article] An Active Metamaterial Antenna with MEMS-modulated Scanning Radiation Beams (2016)
  • Author(s): Yong Luo, Kazutaka Kikuta, Zhengli Han, Takuya Takahashi, Akira Hirose, Hiroshi Toshiyoshi
  • Journal Title: IEEE Electron Device Letters Volume: - Issue: 7 Pages: 1-4
  • DOI: 10.1109/led.2016.2565559
  • Peer Reviewed
• [Journal Article] Terahertz Devices with Reconfigurable Metamaterials by Surface Micromachining Technique (2015)
  • Author(s): Zhengli Han, Kenta Kohno, Hiroyuki Fujita, Kazuhiko Hirakawa, and Hiroshi Toshiyoshi
  • Journal Title: IEEJ Transactions on Sensors and Micromachines Volume: 135 Issue: 11 Pages: 450-453
  • DOI: 10.1541/ieejsmas.135.450
  • NAID: 130005106180
  • ISSN: 1341-8939, 1347-5525
  • Peer Reviewed
• [Journal Article] Programmable leaky-wave antenna with periodic J-shaped metamaterial patches (2015)
  • Author(s): Yong Luo, Kazutaka Kikuta, Zhengli Han, Takuya Takahashi, Akira Hirose, and Hiroshi Toshiyoshi
  • Journal Title: Elec. Lett. Volume: vol. 51, no. 10 Issue: 10 Pages: 733-734
  • DOI: 10.1049/el.2015.0206
  • Peer Reviewed
• [Journal Article] Tunable Terahertz Filter and Modulator Based on Electrostatic MEMS Reconfigurable SRR Array (2015)
  • Author(s): Zhengli Han, Kenta Kohno, Hiroyuki Fujita, Kazuhiko Hirakawa, and Hiroshi Toshiyoshi
  • Journal Title: IEEE Journal of Selected Topics in Quantum Electronics (JSTQE) Volume: vol. 21, no. 4 Pages: 2700809-2700809
  • Peer Reviewed
• [Presentation] Tunable Terahertz Bandpass Filter using MEMS Reconfigurable Metamaterial (2017)
  • Author(s): Kazuhide Ichikawa, Zhengli Han, Hiroshi Toshiyoshi
  • Organizer: Optical MEMS and Nanophotonics (OMN2017)
• [Presentation] MEMS Metamaterial Tunable Filters for THz Optics (2017)
  • Author(s): Kazuhide Ichikawa, Zhengli Han, Hiroshi Toshiyoshi
  • Organizer: Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD 2017)
• [Presentation] Structure Reconfigurable Metamaterial Plate with MEMS Technique for THz Wave Beam Shaping (2017)
  • Author(s): Zhengli Han and Hiroshi Toshiyoshi
  • Organizer: 11th International Congress on Engineered Material Platforms for Novel Wave Phenomena (Metamaterials 2017)
• [Presentation] MEMS Reconfigurable Metamaterials for a Switchable THz Band Pass Filter (2017)
  • Author(s): Zhengli Han and Hiroshi Toshiyoshi
  • Organizer: 8th International Conference on Surface Plasmon Photonics (SPP8)
• [Presentation] ＭＥＭＳ可変メタマテリアルを用いたテラヘルツ・バンドパスフィルタ (2017)
  • Author(s): 市川和秀、韓 正利、高橋巧也、年吉 洋
  • Organizer: 電気学会 第３４回「センサ・マイクロマシンと応用システム」シンポジウム
• [Presentation] Coupling Mechanism Analysis for MEMS Reconfigurable Metamateerial Device (2016)
  • Author(s): Zhengli Han and Hiroshi Toshiyoshi
  • Organizer: IEEE Int. Conf. on Optical MEMS and Nanophotonics (OMN 2016)
  • Place of Presentation: Singapore
  • Year and Date: 2016-07-31
  • Int'l Joint Research
• [Presentation] A THz Dynamic Switch with MEMS Metamaterial Method (2016)
  • Author(s): Zhengli Han, Takuya Takahashi, Hiroshi Toshiyoshi
  • Organizer: 第６３回応用物理学会春季学術講演会
  • Place of Presentation: 東京工業大学・大岡山キャンパス((東京都）
  • Year and Date: 2016-03-19
• [Presentation] A Switchable THz Band Pass Filter with MEMS Reconfigurable Metamaterials (2015)
  • Author(s): Zhengli Han, Kenta Kohno, Kazuhiko Hirakawa, Hiroyuki Fujita, Hiroshi Toshiyoshi
  • Organizer: 電気学会第３２回「センサ・マイクロマシンと応用システム」シンポジウム
  • Place of Presentation: 朱鷺メッセ（新潟コンベンションセンター）
  • Year and Date: 2015-10-28
• [Presentation] An Active Metematerials Antenna Controlled by RF-MEMS Switches (2015)
  • Author(s): Yong Luo, Zhengli Han, Kazutaka Kikuta, Takuya Takahashi, Akira Hirose, Hiroyuki Fujita, and Hiroshi Toshiyoshi
  • Organizer: 18th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2015)
  • Place of Presentation: Anchorage(USA)
  • Year and Date: 2015-06-21
  • Int'l Joint Research
• [Presentation] ＭＥＭＳスプリットリング共振子アレイを用いたテラヘルツ光可変フレネルレンズ (2015)
  • Author(s): 韓 正利、河野健太、平川一彦、藤田博之、年吉 洋
  • Organizer: 電気学会Ｅ部門総合研究会
  • Place of Presentation: 九州大学医学部百年講堂（福岡県)