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Development of the monolithic AlGaN deep ultraviolet sensing system on a Si substrate

Research Project

Project/Area Number 15H03998
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionToyota Technological Institute

Principal Investigator

IWATA NAOTAKA  豊田工業大学, 工学(系)研究科(研究院), 教授 (40708939)

Co-Investigator(Kenkyū-buntansha) 荒木 努  立命館大学, 理工学部, 教授 (20312126)
黒瀬 範子  立命館大学, 総合科学技術研究機構, プロジェクト研究員 (50520540)
青柳 克信  立命館大学, 総合科学技術研究機構, 上席研究員 (70087469)
神谷 格  豊田工業大学, 工学(系)研究科(研究院), 教授 (10374018)
Research Collaborator KAMIYA itaru  
Project Period (FY) 2015-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥16,770,000 (Direct Cost: ¥12,900,000、Indirect Cost: ¥3,870,000)
Fiscal Year 2017: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2016: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2015: ¥7,800,000 (Direct Cost: ¥6,000,000、Indirect Cost: ¥1,800,000)
Keywords窒化物半導体 / 結晶成長 / 結晶欠陥 / 深紫外 / センサー / ダイオード / トランジスタ / 格子欠陥 / デバイス / エピタキシャル / 先端機能デバイス / オーミック電極 / 保護膜
Outline of Final Research Achievements

In order to realize the deep ultraviolet sensor system, technologies for AlGaN vertical devices on Si substrates were investigated. Through study on formation of conductive via holes in the AlN buffer layer on the Si substrate, shape, density and conductivity of the via holes have been found to be depended on the off angle from the (111) plane. In the study of re-grown crystal embedded in the via hole, diodes fabricated were characterized. Although rectification and light receiving characteristics were obtained for the deep ultraviolet photodiode, rectification characteristics deteriorated when forward current was applied. In device technologies, surface passivation with the atomic layer deposited SiN film with HCl pretreatment has been developed. As for acceptor activation of Mg-doped GaN, when the ArF excimer laser was irradiated to the sample provided with the mask, activation of the opening region has been realized for the first time.

Academic Significance and Societal Importance of the Research Achievements

Si上へのAlGaNの成長には、Siのメルトバック現象を防ぐAlNの形成が必要である。しかし、AlNは不純物準位が深いために導電性が得られず、縦に電流を流すデバイスの作製は困難であった。これを解決するSi上のAlNに導電性ビアホールを形成する技術を確立した。この技術による深紫外ダイオードで整流性と受光特性を得たが、順方向電流の印可では整流特性が劣化した。これら技術も確立されれば、安価なSi基板上での深紫外センシングシステムが可能となる。開発した表面パッシベーション技術と初めて実現したArFエキシマレーザ照射によるアクセプタ活性化技術は、特性の優れたデバイスを簡便に作製する重要な成果である。

Report

(4 results)
  • 2018 Final Research Report ( PDF )
  • 2017 Annual Research Report
  • 2016 Annual Research Report
  • 2015 Annual Research Report
  • Research Products

    (19 results)

All 2019 2018 2017 2016 2015 Other

All Journal Article (2 results) (of which Peer Reviewed: 2 results,  Open Access: 1 results) Presentation (15 results) (of which Int'l Joint Research: 7 results,  Invited: 1 results) Remarks (2 results)

  • [Journal Article] Laser-induced local activation of Mg-doped GaN with a high lateral resolution for high power vertical devices2018

    • Author(s)
      Noriko Kurose, Kota Matsumoto, Fumihiko Yamada, Teuku Muhammad Roffi, Itaru Kamiya, Naotaka Iwata, and Yoshinobu Aoyagi
    • Journal Title

      AIP Advances

      Volume: 8 Issue: 1 Pages: 015329-015329

    • DOI

      10.1063/1.5009970

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] InGaAs Triangular Barrier Photodiodes for High-Responsivity Detection of Near-Infrared Light2016

    • Author(s)
      Kazuya Sugimura, Masato Ohmor, Takeshi Noda, Tomoya Kojima, Sakunari Kado, Pavel Vitushinskiy, Naotaka Iwata, and Hiroyuki Sakaki
    • Journal Title

      Applied Physics Express

      Volume: 9 Issue: 6 Pages: 062101-062101

    • DOI

      10.7567/apex.9.062101

    • NAID

      210000137928

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Presentation] Laser-induced local activation of Mg-doped GaN and AlGaN for high power vertical devices2019

    • Author(s)
      Noriko Kurose, Naotaka Iwata, and Itaru Kamiya
    • Organizer
      SPIE Photonics West 2019
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 様々なp型GaNゲート構造をドライエッチングで形成したAlGaN/GaNGaNGaN高電子移動度トランジスタの特性2019

    • Author(s)
      近藤孝明、赤澤良彦、岩田直高
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Effects of p-GaN gate structures and their fabrication process on performances of normally-off AlGaN/GaN HEMTs2019

    • Author(s)
      Takaaki Kondo, Yoshihiko Akazawa, and Naotaka Iwata
    • Organizer
      11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2019)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] p型GaNゲートを用いたノーマリオフ動作AlGaN/GaN高電子移動度トランジスタ2018

    • Author(s)
      赤澤良彦、近藤孝明、吉川慎也、岩田直高、榊裕之
    • Organizer
      第65回春季応用物理学会学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 選択ドライエッチングがp型GaNゲートAlGaN/GaNGaNGaN高電子移動度トランジスタの特性へ及ぼす影響2018

    • Author(s)
      近藤孝明、赤澤良彦、岩田直高
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Effect of inductively coupled plasma reactive ion etching on performances of p-GaN gate AlGaN/GaN HEMTs2018

    • Author(s)
      Yoshihiko Akazawa, Takaaki Kondo, and Naotaka Iwata
    • Organizer
      International Workshop on Nitride Semiconductors 2018
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] HCl表面処理とプラズマ励起原子層堆積 SiNx膜による AlGaN/GaN HEMTの表面安定化2017

    • Author(s)
      鈴木貴之、 土屋晃祐、 大保崇博、 赤澤良彦、 下野貴史、 松本滉太、 江口卓也、 岩田直高
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜 (神奈川県横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] MgドープGaNのレーザー誘起による活性化とその局所制御2017

    • Author(s)
      松本滉大、黒瀬範子、下野貴史、岩田直高、山田郁彦、神谷格、青柳克信
    • Organizer
      第78回秋季応用物理学会学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 放射光XRD・HAXPESによるAl/Ti/AlGaNの界面反応層の結晶構造及び化学結合状態評価2017

    • Author(s)
      安野聡、小金澤智之、鈴木貴之、岩田直高
    • Organizer
      第78回秋季応用物理学会学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] MgドープGaNへのレーザー照射による局所活性化と結晶性のその場観測2017

    • Author(s)
      松本滉太、黒瀬範子、山田郁彦、神谷格、青柳克信、岩田直高
    • Organizer
      IEEE Metro Area Workshop in Nagoya
    • Related Report
      2017 Annual Research Report
  • [Presentation] プラズマ励起原子層堆積プラズマ励起原子層堆積保護膜によるAlGaN/GaN HEMTの表面安定化2016

    • Author(s)
      鈴木貴之、 山田富明、 河合亮輔、 川口翔平、 張東岩、 岩田直高
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ (新潟県新潟市)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] Study on Nitridation of α-(AlGa)2O3 Using Rf Plasma for AlGaN Growth2016

    • Author(s)
      A. Buma, N. Masuda, T. Araki, Y. Nanishi, M. Oda, T. Hitora
    • Organizer
      The 18th International Conference on Crystal Growth and Epitaxy (ICCGE-18)
    • Place of Presentation
      Nagoya Congress Center (愛知県名古屋市)
    • Year and Date
      2016-08-07
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Realization of Conductive AlN Epitaxial Layer on Si Substrate using Spontaneously Formed Nano-Size Via-Holes for Vertical AlGaN High Power FET2016

    • Author(s)
      Noriko Kurose, Kota Ozeki, Tsutomu Araki, Naotaka Iwata, Itaru Kamiya, and Yoshinobu Aoyagi
    • Organizer
      The 43rd International Symposium on Compound Semiconductors (ISCS)
    • Place of Presentation
      Toyama International Conference Center (富山県富山市)
    • Year and Date
      2016-06-26
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] SiNx Passivated GaN HEMT by Plasma Enhanced Atomic Layer Deposition2016

    • Author(s)
      Takayuki Suzuk, Tomiaki Yamada, Ryosuke Kawai, Shohei Kawaguchi, Dongyan Zhang, and Naotaka Iwata
    • Organizer
      The 43rd International Symposium on Compound Semiconductors (ISCS)
    • Place of Presentation
      Toyama International Conference Center (富山県富山市)
    • Year and Date
      2016-06-26
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] A New Technique to Make an Insulating AlN Thin Film to be Conductive by Spontaneous Via Holes formed by MOCVD and its Application to realize Vertical UV LED on n+Si Substrate2015

    • Author(s)
      Noriko Kurose and Yoshinobu Aoyagi
    • Organizer
      AVS 62nd International Symposium & Exhibition
    • Place of Presentation
      San Jose Convention Center, San Jose, California, USA
    • Year and Date
      2015-10-18
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Remarks] 研究者プロフィール 岩田直高

    • URL

      http://ttiweb.toyota-ti.ac.jp/public/user.php

    • Related Report
      2016 Annual Research Report
  • [Remarks] 豊田工業大学研究者情報システム 電子情報分野 電子デバイス 教授 岩田直高

    • URL

      http://ttiweb.toyota-ti.ac.jp/1432/pub_teacher_show.php?n=141

    • Related Report
      2015 Annual Research Report

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Published: 2015-04-16   Modified: 2020-03-30  

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