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Diamond NEMS logic for extrem environments

Research Project

Project/Area Number 15H03999
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionNational Institute for Materials Science

Principal Investigator

Liao Meiyong Liao  国立研究開発法人物質・材料研究機構, 機能性材料研究拠点, 主幹研究員 (70528950)

Co-Investigator(Kenkyū-buntansha) 戸田 雅也  東北大学, 工学研究科, 准教授 (40509890)
小出 康夫  国立研究開発法人物質・材料研究機構, 技術開発・共用部門, 部門長 (70195650)
Project Period (FY) 2015-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥16,770,000 (Direct Cost: ¥12,900,000、Indirect Cost: ¥3,870,000)
Fiscal Year 2018: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2017: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2016: ¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
Fiscal Year 2015: ¥7,410,000 (Direct Cost: ¥5,700,000、Indirect Cost: ¥1,710,000)
Keywordsダイヤモンド / ナノマシン / MEMS / Q値 / MEMS / スイッチ / NEMS / 品質因子 / ロジック / MEMS/NEMS / 電子機械スイッチ
Outline of Final Research Achievements

In extreme environments, such as high temperature or strong radiation in nuclear power plants, automobiles, and propulsion systems for combustion control in aerospace, etc., thermally stable and radiation hard electrical logic circuits is in demand to safely respond and control the electrical signals quickly. Conventional semiconductor devices suffer from thermal leakage current, reduced power handling, and low on / off ratio at high temperatures. Nanomachine switches, in which the on-off operation is controlled by electrostatic actuation with a physical air / vacuum gap, have nearly zero leakage current even at high temperatures and an infinite on / off ratio. In this research, we aim to develop diamond nanomachine logic circuits that can be operated in extreme environments in order to overcome the problems of the conventional switches by utilizing single crystal diamond MEMS technology.

Academic Significance and Societal Importance of the Research Achievements

半導体集積回路の集積率に伴う構造の微細化によって、回路のリーク電流は大きく、消費電力は高くなってしまう問題がある。ダイヤモンドナノマシンスイッチは、既存の半導体デバイスと比べて、耐高温や耐放射線性特性を持つため、高温下においてもリーク電流は無視できるほど小さく、極限環境下でも低消費電力動作が可能である。そのため、本研究成果は、省エネルギー・高信頼性を有す集積回路として期待できる。

Report

(5 results)
  • 2018 Annual Research Report   Final Research Report ( PDF )
  • 2017 Annual Research Report
  • 2016 Annual Research Report
  • 2015 Annual Research Report
  • Research Products

    (43 results)

All 2019 2018 2017 2016 2015

All Journal Article (14 results) (of which Int'l Joint Research: 9 results,  Peer Reviewed: 13 results,  Acknowledgement Compliant: 4 results,  Open Access: 2 results) Presentation (24 results) (of which Int'l Joint Research: 13 results,  Invited: 8 results) Book (2 results) Patent(Industrial Property Rights) (3 results)

  • [Journal Article] Energy‐Efficient Metal-Insulator-Metal‐Semiconductor Field‐Effect Transistors Based on 2D Carrier Gases2019

    • Author(s)
      Liao Meiyong、Sang Liwen、Shimaoka Takehiro、Imura Masataka、Koizumi Satoshi、Koide Yasuo
    • Journal Title

      Advanced Electronic Materials

      Volume: 1 Issue: 5 Pages: 1800832-1800832

    • DOI

      10.1002/aelm.201800832

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Ultrahigh Performance On-Chip Single Crystal Diamond NEMS/MEMS with Electrically Tailored Self-Sensing Enhancing Actuation2018

    • Author(s)
      Liao Meiyong、Sang Liwen、Teraji Tokuyuki、Koizumi Satoshi、Koide Yasuo
    • Journal Title

      Advanced Materials Technologies

      Volume: 4 Issue: 2 Pages: 1800325-1800325

    • DOI

      10.1002/admt.201800325

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Pico-thermogravimetric material properties analysis using diamond cantilever beam2018

    • Author(s)
      Voiculescu Ioana、Liao Meiyong、Zakerin Marjan、Berger Ruediger、Ono Takahito、Toda Masaya
    • Journal Title

      Sensors and Actuators, A: Physical

      Volume: 271 Pages: 356-363

    • DOI

      10.1016/j.sna.2018.01.004

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Reducing intrinsic energy dissipation in diamond-on-diamond mechanical resonators toward one million quality factor2018

    • Author(s)
      Wu Haihua、Sang Liwen、Li Yumeng、Teraji Tokuyuki、Li Tiefu、Imura Masataka、You Jianqiang、Koide Yasuo、Toda Masaya、Liao Meiyong
    • Journal Title

      Physical Review Materials

      Volume: 2 Issue: 9 Pages: 090601-090601

    • DOI

      10.1103/physrevmaterials.2.090601

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A density functional study of the effect of hydrogen on electronic properties and band discontinuity at anatase TiO2/diamond interface2018

    • Author(s)
      Kongping Wu, Meiyong Liao, Liwen Sang, Jiangwei Liu, Masataka Imura, Haitao Ye, Yasuo Koide
    • Journal Title

      Journal of Applied Physics

      Volume: 123 Issue: 16 Pages: 161599-161599

    • DOI

      10.1063/1.5002176

    • Related Report
      2018 Annual Research Report 2017 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] 単結晶ダイヤモンドMEMSデバイスの研究2018

    • Author(s)
      廖 梅勇, 井村 将隆, サン リウエン, 寺地 徳之, 小泉 聡, 小出 康夫
    • Journal Title

      NEW DIAMOND FORUM

      Volume: 34 Pages: 12-16

    • Related Report
      2018 Annual Research Report 2017 Annual Research Report
  • [Journal Article] Pico-thermogravimetric material properties analysis using diamond cantilever beam2018

    • Author(s)
      Ioana Voiculescu, Meiyong Liao, Marjan Zakerin, Rudiger Berger, Takahito Ono, Masaya Toda
    • Journal Title

      Sensor and Actuators A: Physical

      Volume: 271 Pages: 356-363

    • DOI

      10.1109/transducers.2017.7994519

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Reducing energy dissipation and surface effect of diamond nanoelectromechanical resonators by annealing in oxygen ambient2017

    • Author(s)
      Wu Haihua、Sang Liwen、Teraji Tokuyuki、Li Tiefu、Wu Kongping、Imura Masataka、You Jianqiang、Koide Yasuo、Liao Meiyong
    • Journal Title

      Carbon

      Volume: 124 Pages: 281-287

    • DOI

      10.1016/j.carbon.2017.08.069

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Improvement of the quality factor of single crystal diamond mechanical resonators2017

    • Author(s)
      M. Liao, M. Toda, L. Sang, T. Teraji, M. Imura, and Y. Koide
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 56 Issue: 2 Pages: 0241011-5

    • DOI

      10.7567/jjap.56.024101

    • NAID

      210000147429

    • Related Report
      2017 Annual Research Report 2016 Annual Research Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Effect of off-cut angle of hydrogen-terminated diamond(111) substrate on the quality of AlN towards high-density AlN/diamond(111) interface hole channel2017

    • Author(s)
      Masataka Imura, Ryan G. Banal, Meiyong Liao, Jiangwei Liu, Takashi Aizawa, Akihiro Tanaka, Hideo Iwai, Takaaki Mano, and Yasuo Koide
    • Journal Title

      J. Appl. Phys.

      Volume: 121 Issue: 2 Pages: 025702-025702

    • DOI

      10.1063/1.4972979

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Assembly of a high-dielectric constant thin TiOx layer directly on H-terminated semiconductor diamond2016

    • Author(s)
      J. Zhao, J. Liu, L.W. Sang, M. Y. Liao, D. Coathup, M. Imura, BG Shi, C. Z. Gu, Y Koide, H. T. Ye
    • Journal Title

      Applied Physics Letters

      Volume: 108 Issue: 1 Pages: 012105-012105

    • DOI

      10.1063/1.4939650

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Assembly of a high-dielectric constant thin TiOx layer directly on H-terminated semiconductor diamond2016

    • Author(s)
      J. Zhao, J.W.Liu, L.W. Sang, M.Y. Liao,* D. Coatchup, M. Imura. C.Z.Gu, H. Ye
    • Journal Title

      Appl. Phys. Lett

      Volume: 108 Pages: 012105-012105

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Impedance analysis of Al2O3/H-terminated diamond MOS structures2015

    • Author(s)
      M.Y. Liao, J.W. Liu, L. W. Sang. D. Coatchup, J. L. Li, M. Imura, Y. Koide, H. Ye
    • Journal Title

      Appl.Phys. Lett

      Volume: 106 Issue: 8 Pages: 083506-083506

    • DOI

      10.1063/1.4913597

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Wide-Bandgap Semiconductors: Nanostructures, Defects, and Applications2015

    • Author(s)
      Meiyong Liao, Thomas Stergiopoulos, Jose Alvarez, Guihua Zhang
    • Journal Title

      Journal of Nanomaterials

      Volume: 2015 Issue: 1 Pages: 713896-713896

    • DOI

      10.1155/2015/713896

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Presentation] Semiconductor diamond electronics, photonics and electro mechanics2018

    • Author(s)
      廖 梅勇
    • Organizer
      2018 Asia Conference on Nanoscience and Nanotechnology
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 超高品質因子を持つ単結晶ダイヤモンドMEMS共振子2018

    • Author(s)
      廖 梅勇, ウ ハイファ, サン リウエン, 井村 将隆, 寺地 徳之, 小出 康夫
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] High-quality diamond epitaxial layer growth and electron devices application2018

    • Author(s)
      5.KOIDE, Yasuo, LIU, Jiangwei, IMURA, Masataka, LIAO, Meiyong
    • Organizer
      SSDM
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] Single crystal diamond MEMS: Concpet, Fabrication, and Applications2018

    • Author(s)
      LIAO, Meiyong, KOIDE, Yasuo
    • Organizer
      International Conference on Expanding Frontiers of Carbon MEMS. 2018
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Ultrahigh Quality factor diamond MEMS resonator2018

    • Author(s)
      廖 梅勇 ウ ハイファ サン リウエン 寺地 徳之 井村 将隆 小出 康夫
    • Organizer
      The 6th French Japanese workshop on diamond power devices
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 超高品質因子を持つダイヤモンドカンチレバーおよび センシング機能を一体化した単結晶ダイヤモンドMEMSセンサチップ2018

    • Author(s)
      廖 梅勇
    • Organizer
      ナノ茶論第10回セミナー
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] 超高品質因子ダイヤモンド機械共振子に向ける固有エネルギー損失の低減2018

    • Author(s)
      廖 梅勇,Haihua Wu,Liwen Sang,寺地徳之,井村将隆,小出康夫
    • Organizer
      第32回ダイヤモンドシンポジウム
    • Related Report
      2018 Annual Research Report
  • [Presentation] 単結晶ダイヤモンド機械共振子のエネルギー散逸機構2017

    • Author(s)
      Meiyong Liao, 戸田 雅也, Liwen Sang, 菱田俊一, 井村将隆, 田中秀治, 小出康夫
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      横浜パシフィコ
    • Year and Date
      2017-03-19
    • Related Report
      2016 Annual Research Report
  • [Presentation] Semiconductor diamond: from fundamental to applications2017

    • Author(s)
      Meiyong Liao
    • Organizer
      The 8th Asia-Pacific Workshop on Widegap Semiconductors
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] High quality factor submicron-thick single crystal diamond cantilevers.2017

    • Author(s)
      13.ウ ハイファ, サン リウエン, 小出 康夫, 廖 梅勇.
    • Organizer
      つくば医工連携フォーラム 2017
    • Related Report
      2017 Annual Research Report
  • [Presentation] Surface effect and improvement of the quality factor of single crystal diamond NEMS resonators .2017

    • Author(s)
      Meiyong Liao, Haihua Wu, Liwen Sang, Tokuyuki Teraji, Masataka Imura, Yasuo Koide
    • Organizer
      28th International Conference on Diamond and Carbon Materials. 2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Reducing energy dissipation and surface effect of diamond nanoelectromechanical resonators by annealing in oxygen ambient.2017

    • Author(s)
      Meiyong Liao
    • Organizer
      EMRS 2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 16.ltra-high quality factor single crystal diamond MEMS resonators.. 20172017

    • Author(s)
      Meiyong Liao, Yasuo Koide
    • Organizer
      OIST Diamond Workshop 2017 (ODW2017).
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] .超高品質因子を持つ単結晶ダイヤモンドMEMS振動子.2017

    • Author(s)
      Meiyong Liao, Tukuyuki Teraji, Yasuo Koide
    • Organizer
      第31回ダイヤモンドシンポジウム. 2017
    • Related Report
      2017 Annual Research Report
  • [Presentation] Single crystal diamond MEMS.2017

    • Author(s)
      Meiyong Liao
    • Organizer
      International Symposium on Single Crystal Diamond and Elect. 2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] High quality factor submicron-thick single crystal diamond cantilevers”2017

    • Author(s)
      H. H. Wu, L. W. Sang, 小出 康夫, M. Y. Liao
    • Organizer
      つくば医工連携フォーラム
    • Place of Presentation
      つくば市物質材料研究機構
    • Related Report
      2016 Annual Research Report
  • [Presentation] Diamond MEMS2017

    • Author(s)
      M. Y. Liao
    • Organizer
      The 1st Leader-ICYS Workshop
    • Place of Presentation
      つくば市物質材料研究機構
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Diamond: a unique semiconductor for electronics and MEMS/NEMS devices2016

    • Author(s)
      M. Y. Liao
    • Organizer
      12th IUPAC International Conference on Novel Materials
    • Place of Presentation
      Changsha, China
    • Year and Date
      2016-10-14
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Diamond: Unique Semiconductor for MEMS2016

    • Author(s)
      Meiyong Liao
    • Organizer
      International Conference on Novel Materials and their Synthesis (NMS-XII)
    • Place of Presentation
      Changsha, China
    • Year and Date
      2016-10-14
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 単結晶ダイヤモンド機械共振子の品質係数の向上2016

    • Author(s)
      Meiyong Liao, 戸田 雅也, Liwen Sang, 寺地徳之, 井村将隆, 小出康夫
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      鷺メッセ(新潟県新潟市)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] Single Crystal Diamond Micromechanical and Nanomechanical Resonators2016

    • Author(s)
      M. Y. Liao, M Toda, S. Liwen, S. Hishita, M. Imura, S Tanaka, Y. Koide
    • Organizer
      The 10th International Conference on New Diamond and Nano Carbon
    • Place of Presentation
      Xi'an, China
    • Year and Date
      2016-05-22
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Single crystal diamond micromechanical and nanomechanical resonators2016

    • Author(s)
      M.Y. Liao, M. Toda, L.W Sang, M. Imura, S. Hishita, S. Tanaka, Y. Koide
    • Organizer
      The 10th International Conference on New Diamond and Nano Carbons 2016
    • Place of Presentation
      Xi'an, China
    • Year and Date
      2016-05-22
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 単結晶ダイヤモンド機械共振子のエネルギー散逸機構2016

    • Author(s)
      廖 梅勇、戸田 雅也東北、桑 、井村将隆、菱田俊一、田中秀治、 小出康夫
    • Organizer
      2016年 第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学 大岡山キャンパス
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] Impedance Analysis of Hydrogen-Terminated Diamond MOS Structure2015

    • Author(s)
      Meiyong Liao、Jiangwei Liu、Liwen Sang 、David Coatchup、Jianglin Li、Masataka Imura、Yasuo Koide、Haitao Ye
    • Organizer
      MRS Fall Meeting 2015
    • Place of Presentation
      Boston, USA
    • Year and Date
      2015-11-29
    • Related Report
      2015 Annual Research Report
  • [Book] Ultra-wide Bandgap Semiconductor Materials2019

    • Author(s)
      Liao Meiyong, Shen Bo, Wang Zhanguo
    • Total Pages
      475
    • Publisher
      Elsevier
    • ISBN
      9780128154687
    • Related Report
      2018 Annual Research Report
  • [Book] Single Crystal Diamond Micromechanical and Nanomechanical Resonators in Novel Aspects of Diamond2019

    • Author(s)
      Liao Meiyong, Koide Yasuo, Sang Liwen
    • Total Pages
      524
    • Publisher
      Springer
    • ISBN
      9783030124694
    • Related Report
      2018 Annual Research Report
  • [Patent(Industrial Property Rights)] 半導体装置、パワーデバイスおよび制御用電子装置2019

    • Inventor(s)
      リャオ メイヨン/サン リウエン/小泉 聡/小出 康夫
    • Industrial Property Rights Holder
      国立研究開発法人物質・材料研究機構
    • Industrial Property Rights Type
      特許
    • Filing Date
      2019
    • Related Report
      2018 Annual Research Report
  • [Patent(Industrial Property Rights)] 電子素子、温度センサー、磁気センサー、振動センサーおよび加速度センサー2018

    • Inventor(s)
      リャオ メイヨン/小出 康夫
    • Industrial Property Rights Holder
      国立研究開発法人物質・材料研究機構
    • Industrial Property Rights Type
      特許
    • Filing Date
      2018
    • Related Report
      2018 Annual Research Report
  • [Patent(Industrial Property Rights)] ダイヤモンド構造体、ダイヤモンド・カンチレバー、およびダイヤモンド構造体の製造方法2018

    • Inventor(s)
      リャオメイヨン/小出康夫/サンリウエン
    • Industrial Property Rights Holder
      国立研究開発法人物質・材料研究機構
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2018-022665
    • Filing Date
      2018
    • Related Report
      2017 Annual Research Report

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Published: 2015-04-16   Modified: 2020-03-30  

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