| Budget Amount *help |
¥16,510,000 (Direct Cost: ¥12,700,000、Indirect Cost: ¥3,810,000)
Fiscal Year 2017: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2016: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2015: ¥7,670,000 (Direct Cost: ¥5,900,000、Indirect Cost: ¥1,770,000)
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| Outline of Final Research Achievements |
(100)/(001)-oriented tetragonal Pb(Zr0.5Ti0.5)O3 epitaxial films with 2 micro meter in thickness were grown on Si, SrTiO3 and CaF2 substrates. Volume fraction of (001) orientation, Vc, changed by the thermal strain above Curie temperature. Vc value increased by the pooling process for all films. There two contributions to the piezoelectric response were observed for all films by the XRD observation under applied an electric field.
Orientation change from (001) to (100) orientation plays a main role for the piezoelectric response. In addition, films on Si substrates show the maximum orientation change and macroscopic piezoelectric response.
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