Development of surface process technology with high speed and no damage by huge composite cluster

Research Project

Project/Area Number	15H04157
Research Category	Grant-in-Aid for Scientific Research (B)
Allocation Type	Single-year Grants
Section	一般
Research Field	Material processing/Microstructural control engineering
Research Institution	Kyoto University
Principal Investigator	Seki Toshio 京都大学, 工学研究科, 講師 (00402975)
Project Period (FY)	2015-04-01 – 2018-03-31
Project Status	Completed (Fiscal Year 2017)
Budget Amount *help	¥14,040,000 (Direct Cost: ¥10,800,000、Indirect Cost: ¥3,240,000) Fiscal Year 2017: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000) Fiscal Year 2016: ¥5,720,000 (Direct Cost: ¥4,400,000、Indirect Cost: ¥1,320,000) Fiscal Year 2015: ¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Keywords	クラスター / イオンビーム / 中性ビーム / 反応性エッチング / ナノプロセス / 表面処理 / 複合ビーム
Outline of Final Research Achievements	We have used the gas cluster generation technology originating from Kyoto University to develop the formation of huge complex cluster ions and acceleration control technology by controlling the initial cluster velocity of large clusters by mixing He to material gas. As a result, we succeeded in developing a huge composite cluster beam forming technology with energy control in the range of 0.1 to 0.4 eV / atom.

Report

(2 results)