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Development of imprinting process with laser-machining

Research Project

Project/Area Number 15H04161
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Material processing/Microstructural control engineering
Research InstitutionKyushu University

Principal Investigator

TSUMORI Fujio  九州大学, 工学研究院, 准教授 (10343237)

Co-Investigator(Kenkyū-buntansha) 河野 正道  九州大学, 工学研究院, 教授 (50311634)
中島 裕典  九州大学, 工学研究院, 助教 (70432862)
Co-Investigator(Renkei-kenkyūsha) NAKAJIMA Hironori  九州大学, 大学院工学研究院, 助教 (70432862)
Project Period (FY) 2015-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥16,770,000 (Direct Cost: ¥12,900,000、Indirect Cost: ¥3,870,000)
Fiscal Year 2017: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
Fiscal Year 2016: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
Fiscal Year 2015: ¥10,920,000 (Direct Cost: ¥8,400,000、Indirect Cost: ¥2,520,000)
Keywordsセラミックス / 微細加工 / 微細流路 / インプリントプロセス / 燃料電池 / SOFC / 微細パターニング / ホットエンボス / 粉末プロセス・粉末冶金 / 粉末プロセス / 粉末冶金 / マイクロ流路
Outline of Final Research Achievements

In this work, we improved nano-imprint lithography (NIL) process. The conventional NIL process uses only polymer material, and formed 2-dimensional pattern. We proposed and developed a new process to fabricate ceramic parts with wavy micro channels. The ceramic channels could be a candidate of the solid oxide fuel cells (SOFC), and our final goal is application of the proposed process to the improved SOFC. During this project, we achieved to fabricate finer channels, leak-testing, control of the process parameters to obtain designed channel structure, optimization of the laser processing. We also discussed to design a new type SOFC with micro channels.

Report

(4 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Annual Research Report
  • 2015 Annual Research Report
  • Research Products

    (24 results)

All 2018 2017 2016 2015 Other

All Journal Article (8 results) (of which Peer Reviewed: 8 results,  Open Access: 6 results,  Acknowledgement Compliant: 6 results) Presentation (15 results) (of which Int'l Joint Research: 6 results,  Invited: 3 results) Remarks (1 results)

  • [Journal Article] Interfacial Pattern Changes of Imprinted Multi-layered Material in Milli- and Micro- scales2018

    • Author(s)
      [5]Kazuhiro Yonekura, Kazuki Tokumaru, Fujio Tsumori
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 印刷中

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Development of multilayer imprint process for solid oxide fuel cells2017

    • Author(s)
      Kazuki TOKUMARU, Fujio TSUMORI, Kentaro KUDO, Toshiko Osada, K. Shinagawa
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Issue: 6S1 Pages: 06GL04-06GL04

    • DOI

      10.7567/jjap.56.06gl04

    • NAID

      120006470932

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Development of multi-layer imprint process for solid oxide fuel cells2017

    • Author(s)
      Kazuki Tokumaru, Fujio Tsumori, Kentaro Kudo, Toshiko Osada, Kazunari Shinagawa
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 印刷中

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Wavy Micro Channels in Micropatterned Ceramic Sheet Formed by Combined Process of Laser Beam Machining and Imprinting2016

    • Author(s)
      Fujio TSUMORI, Simon Hunt, Kentaro Kudo, Toshiko Osada, Hideshi Miura
    • Journal Title

      Journal of the Japan Society of Powder and Powder Metallurgy

      Volume: 63 Issue: 7 Pages: 511-518

    • DOI

      10.2497/jjspm.63.511

    • NAID

      130005164651

    • ISSN
      0532-8799, 1880-9014
    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Development of Corrugated Ceramic Sheet for SOFC Electrolyte by Micro Imprint Process2016

    • Author(s)
      Fujio TSUMORI, Kazuki Tokumaru, Kentaro Kudo, Toshiko Osada, Hideshi Miura
    • Journal Title

      Journal of the Japan Society of Powder and Powder Metallurgy

      Volume: 63 Issue: 7 Pages: 519-523

    • DOI

      10.2497/jjspm.63.519

    • NAID

      130005164659

    • ISSN
      0532-8799, 1880-9014
    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Wavy Micro Channels in Micropatterned Ceramic Sheet Formed by Combined Process of Laser Beam Machining and Imprinting2016

    • Author(s)
      Fujio Tsumori, Simon Hunt, Kentaro Kudo, Toshiko Osada, Hideshi Miura
    • Journal Title

      J. of Jpn Soc. Powder Powder Met.

      Volume: 未定

    • NAID

      130005164651

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Development of Corrugated Ceramic Sheet for SOFC Electrolyte by Micro Imprint Process2016

    • Author(s)
      Fujio Tsumori, Kazuki Tokumaru, Kentaro Kudo, Toshiko Osada, Hideshi Miura
    • Journal Title

      J. of Jpn Soc. Powder Powder Met.

      Volume: 未定

    • NAID

      130005164659

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Formation of ceramic micro-channel by combination of laser beam machining and micro powder imprinting2015

    • Author(s)
      Fujio Tsumori, Simon Hunt, Toshiko Osada, Hideshi Miura
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 54 Issue: 6S1 Pages: 06FM03-06FM03

    • DOI

      10.7567/jjap.54.06fm03

    • NAID

      210000145284

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Presentation] 積層インプリントアルミナ成形体のスケールによる材料変形への影響2018

    • Author(s)
      米倉和啓,徳丸和樹,工藤健太郎,品川一成,津守不二夫
    • Organizer
      日本機械学会九州支部第71期総会講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] セラミックスナノ粒子分散樹脂を用いたインプリントプロセスの高度化2018

    • Author(s)
      津守不二夫
    • Organizer
      応用物理学会ナノインプリント技術研究会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] 積層インプリント成形体のスケールによる界面形状の変化2017

    • Author(s)
      米倉和啓, 徳丸和樹, 津守 不二夫
    • Organizer
      ニューセラミックス懇話会第230回特別研究会
    • Related Report
      2017 Annual Research Report
  • [Presentation] レーザ加工およびインプリントの複合加工による3次元セラミック微小流路の開発2017

    • Author(s)
      徳丸和樹, 津守 不二夫
    • Organizer
      ニューセラミックス懇話会第230回特別研究会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Study on control of interfacial pattern of imprinted multi-layered material2017

    • Author(s)
      Kazuhiro YUNEKURA, Fujio TSUMORI, Kazuki TOKUMARU, Kentaro KUDO, Shinagawa Kazunari
    • Organizer
      The 30th International Microprocesses and Nanotechnology Conference
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of ceramic three-dimensional micro channel by combined process of laser processing and imprinting2017

    • Author(s)
      Kazuki TOKUMARU, Simon HUNT, Fujio TSUMORI, Kentaro KUDO, Shinagawa Kazunari
    • Organizer
      The 30th International Microprocesses and Nanotechnology Conference
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] レーザ加工とインプリント加工の複合プロセスによるセラミック3次元マイクロ流路の開発2017

    • Author(s)
      徳丸和樹, ハント戴紋, 津守 不二夫, 工藤健太郎, 品川 一成
    • Organizer
      第34回「センサ・マイクロマシンと応用システム」シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] Fabrication of Wavy-Electrolyte for SOFC by Micro Imprint Process, 13th International Conference & Exhibition on Ceramic Interconnect & Ceramic Microsystems Technologies2017

    • Author(s)
      Kazuki TOKUMARU, Fujio TSUMORI, Shinagawa Kazunari
    • Organizer
      13th International Conference & Exhibition on Ceramic Interconnect & Ceramic Microsystems Technologies
    • Related Report
      2017 Annual Research Report
  • [Presentation] Fabrication of Wavy-Electrolyte for SOFC by Micro Imprint Process2017

    • Author(s)
      Kazuki TOKUMARU, Fujio TSUMORI, Shinagawa Kazunari
    • Organizer
      13th International Conference & Exhibition on Ceramic Interconnect & Ceramic Microsystems Technologies
    • Place of Presentation
      奈良
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of multi-layer imprint process for solid oxide fuel cell2016

    • Author(s)
      Kazuki Tokumaru, Fujio TSUMORI, Kentaro Kudo, Toshiko Osada, Shinagawa Kazunari
    • Organizer
      29th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      京都
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 粉末プロセスを用いたセラミックス薄層への微細加工2016

    • Author(s)
      津守不二夫
    • Organizer
      日本塑性加工学会東海支部 第81回塑性加工懇談会
    • Place of Presentation
      愛知
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] マイクロインプリントプロセスによるセラミックス微細表面パターニング2016

    • Author(s)
      津守 不二夫, 徳丸和樹, ハント戴紋, 工藤健太郎, 長田 稔子
    • Organizer
      日本機械学会年次大会
    • Place of Presentation
      福岡
    • Related Report
      2016 Annual Research Report
  • [Presentation] 燃料電池高性能化に向けたインプリントプロセスによるセラミックス微細表面加工2016

    • Author(s)
      津守不二夫
    • Organizer
      天田財団産学交流会
    • Place of Presentation
      福岡
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] Development of corrugated ceramic sheet for SOFC electrolyte by micro imprint process2015

    • Author(s)
      Kazuki Tokumaru, Fujio Tsumori, Kentaro Kudo, Toshiko Osada, Hideshi Miura
    • Organizer
      3rd International Conference on Powder Metallurgy in Asia
    • Place of Presentation
      Kyoto
    • Year and Date
      2015-11-09
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Wavy micro channels in micropatterned ceramic sheet formed by combined process of laser beam machining and imprinting2015

    • Author(s)
      Simon Hunt, Fujio Tsumori, Kentaro Kudo, Toshiko Osada, Hideshi Miura
    • Organizer
      3rd International Conference on Powder Metallurgy in Asia
    • Place of Presentation
      Kyoto
    • Year and Date
      2015-11-09
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Remarks] 九州大学大学院工学研究院機械工学部門 材料加工学研究室 研究紹介

    • URL

      http://www.mech.kyushu-u.ac.jp/~zaika/research.html

    • Related Report
      2017 Annual Research Report

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Published: 2015-04-16   Modified: 2019-03-29  

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