Development of an ultrasonic sensor for detecting formation of a continuous film during deposition
| Project/Area Number |
15H05503
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| Research Category |
Grant-in-Aid for Young Scientists (A)
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| Allocation Type | Single-year Grants |
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| Research Field |
Materials/Mechanics of materials
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| Research Institution | Osaka University |
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Principal Investigator |
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| Project Period (FY) |
2015-04-01 – 2018-03-31
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| Project Status |
Completed (Fiscal Year 2017)
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| Budget Amount *help |
¥22,100,000 (Direct Cost: ¥17,000,000、Indirect Cost: ¥5,100,000)
Fiscal Year 2017: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2016: ¥6,630,000 (Direct Cost: ¥5,100,000、Indirect Cost: ¥1,530,000)
Fiscal Year 2015: ¥11,440,000 (Direct Cost: ¥8,800,000、Indirect Cost: ¥2,640,000)
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| Keywords | 超音波センサ / 金属膜 / 連続膜 / 共振 / 圧電体 / 薄膜 / 形態変化モニタリング / 内部摩擦 / 共振周波数 / ナノ薄膜 |
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| Outline of Final Research Achievements |
During deposition of metallic films, a morphological change from discontinuous islands to a continuous film occurs. The morphological change happens when film thickness is a few nanometers. In this study, a novel sensor that detects the morphological change without contacting substrate nor film was developed. Experiments with different substrates and deposition conditions were carried out, and applicability of the developed sensor was evaluated. Then, an equivalent circuit that reproduces the measurement setup was developed, and the detailed mechanism of the developed sensor was clarified using the circuit.
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Report
(4 results)
Research Products
(10 results)
