| Budget Amount *help |
¥22,100,000 (Direct Cost: ¥17,000,000、Indirect Cost: ¥5,100,000)
Fiscal Year 2017: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2016: ¥6,630,000 (Direct Cost: ¥5,100,000、Indirect Cost: ¥1,530,000)
Fiscal Year 2015: ¥11,440,000 (Direct Cost: ¥8,800,000、Indirect Cost: ¥2,640,000)
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| Outline of Final Research Achievements |
During deposition of metallic films, a morphological change from discontinuous islands to a continuous film occurs. The morphological change happens when film thickness is a few nanometers. In this study, a novel sensor that detects the morphological change without contacting substrate nor film was developed. Experiments with different substrates and deposition conditions were carried out, and applicability of the developed sensor was evaluated. Then, an equivalent circuit that reproduces the measurement setup was developed, and the detailed mechanism of the developed sensor was clarified using the circuit.
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