Control and device application of multi-axis MEMS scanner by single driving apparatus
| Project/Area Number |
15H05514
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| Research Category |
Grant-in-Aid for Young Scientists (A)
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| Allocation Type | Single-year Grants |
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| Research Field |
Intelligent mechanics/Mechanical systems
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| Research Institution | Waseda University |
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Principal Investigator |
Iwase Eiji 早稲田大学, 理工学術院, 准教授 (70436559)
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| Project Period (FY) |
2015-04-01 – 2018-03-31
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| Project Status |
Completed (Fiscal Year 2017)
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| Budget Amount *help |
¥23,400,000 (Direct Cost: ¥18,000,000、Indirect Cost: ¥5,400,000)
Fiscal Year 2017: ¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2016: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2015: ¥13,130,000 (Direct Cost: ¥10,100,000、Indirect Cost: ¥3,030,000)
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| Keywords | マイクロマシン / マイクロ・ナノデバイス / MEMSスキャナ / ナノマイクロメカトロニクス |
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| Outline of Final Research Achievements |
Our objective in this research is to realize a three-dimensional (3-D) operation of a Micro-Electro-Mechanical Systems (MEMS) scanner with three resonant modes and a single driving apparatus by a single superposed signal with three frequencies. We fabricated a 3-D MEMS scanner with a single pair of beams having three resonant modes. We demonstrated the 3-D operation by a single driving apparatus using the Lorentz force. In addition, we have shown that the displacements are proportional to the voltage amplitudes of each resonant frequency in the superposed signal.
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Report
(4 results)
Research Products
(9 results)
