Budget Amount *help |
¥24,050,000 (Direct Cost: ¥18,500,000、Indirect Cost: ¥5,550,000)
Fiscal Year 2017: ¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
Fiscal Year 2016: ¥7,020,000 (Direct Cost: ¥5,400,000、Indirect Cost: ¥1,620,000)
Fiscal Year 2015: ¥11,570,000 (Direct Cost: ¥8,900,000、Indirect Cost: ¥2,670,000)
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Outline of Final Research Achievements |
Atmospheric-pressure plasma-based processing for the fabrication of organic-inorganic hybrid silica membranes under normal temperature and pressure was developed in the present study. In this study, a plasma reactor was newly designed for the membrane fabrication. The effects of the chemical structure of precursors, the composition of plasma working gas, and the plasma power on the gas permeation properties of the membranes were investigated. Consequently, hybrid silica membranes with molecular sieving property was successfully fabricated under normal temperature and pressure, by a one step with a short processing time. The results of the present study provide a practical membrane fabrication technique, which can significantly lower the processing temperature of silica membrane fabrication.
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