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Fabrication of organic/inorganic hybrid silica membranes via atmospheric-pressure plasma-polymerization

Research Project

Project/Area Number 15H05553
Research Category

Grant-in-Aid for Young Scientists (A)

Allocation TypeSingle-year Grants
Research Field Properties in chemical engineering process/Transfer operation/Unit operation
Research InstitutionHiroshima University

Principal Investigator

Nagasawa Hiroki  広島大学, 工学研究科, 助教 (30633937)

Project Period (FY) 2015-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥24,050,000 (Direct Cost: ¥18,500,000、Indirect Cost: ¥5,550,000)
Fiscal Year 2017: ¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
Fiscal Year 2016: ¥7,020,000 (Direct Cost: ¥5,400,000、Indirect Cost: ¥1,620,000)
Fiscal Year 2015: ¥11,570,000 (Direct Cost: ¥8,900,000、Indirect Cost: ¥2,670,000)
Keywords大気圧プラズマ / 化学気相蒸着法 / シリカ膜 / 分子ふるい膜 / 膜分離 / ハイブリッドシリカ膜 / 多孔性無機膜 / 大気圧プラズマCVD / 気体分離膜 / 超薄膜 / 気体分離
Outline of Final Research Achievements

Atmospheric-pressure plasma-based processing for the fabrication of organic-inorganic hybrid silica membranes under normal temperature and pressure was developed in the present study. In this study, a plasma reactor was newly designed for the membrane fabrication. The effects of the chemical structure of precursors, the composition of plasma working gas, and the plasma power on the gas permeation properties of the membranes were investigated. Consequently, hybrid silica membranes with molecular sieving property was successfully fabricated under normal temperature and pressure, by a one step with a short processing time. The results of the present study provide a practical membrane fabrication technique, which can significantly lower the processing temperature of silica membrane fabrication.

Report

(4 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Annual Research Report
  • 2015 Annual Research Report
  • Research Products

    (16 results)

All 2018 2017 2016 2015

All Journal Article (2 results) (of which Peer Reviewed: 2 results,  Acknowledgement Compliant: 1 results) Presentation (13 results) (of which Int'l Joint Research: 5 results,  Invited: 1 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Atmospheric-Pressure Plasma-Enhanced Chemical Vapor Deposition of Hybrid Silica Membranes2018

    • Author(s)
      Hiroki Nagasawa, Yuta Yamamoto, Masakoto Kanezashi, Toshinori Tsuru
    • Journal Title

      Journal of Chenmical Engineering of Japan

      Volume: 51

    • NAID

      130007485228

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Atmospheric-Pressure Plasma-Enhanced Chemical Vapor Deposition of Microporous Silica Membranes for Gas Separation2017

    • Author(s)
      Hiroki Nagasawa, Yuta Yamamoto, Nobukazu Tsuda, Masakoto Kanezashi, Tomohisa Yoshioka, Toshinori Tsuru
    • Journal Title

      Journal of Membrane Science

      Volume: 524 Pages: 644-651

    • DOI

      10.1016/j.memsci.2016.11.067

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] 誘電体バリア放電反応器によるシリカ膜のプラズマCVD製膜2018

    • Author(s)
      長澤 寛規,香川 貴彦,金指 正言,都留 稔了
    • Organizer
      化学工学会第83年会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 大気圧プラズマを用いた多孔性シリカ分離膜の製膜と気体透過特性2017

    • Author(s)
      長澤 寛規,山本 裕太,金指 正言,都留 稔了
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      横浜
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] リモートプラズマによるシリカ膜の常圧CVD製膜2017

    • Author(s)
      長澤 寛規,山本 裕太,金指 正言,都留 稔了
    • Organizer
      日本膜学会第39年会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Atmospheric-pressure plasma-enhanced chemical vapor deposition of silica membranes for gas separation2017

    • Author(s)
      Hiroki Nagasawa, Yuta Yamamoto, Masakoto Kanezashi, Toshinori Tsuru
    • Organizer
      The 11th International Congress on Membranes and Membrane Processes (ICOM 2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of microporous organo-silica membranes and their applications for molecular separation2017

    • Author(s)
      Hiroki Nagasawa
    • Organizer
      International Workshop on Materials, Membranes, Energy and Water Management
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 誘電体バリア放電を用いたシリカ膜の大気圧プラズマCVD製膜2017

    • Author(s)
      香川 貴彦,長澤 寛規,金指 正言,都留 稔了
    • Organizer
      化学工学会第49回秋季大会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Plasma-Enhanced CVD of Amorphous Carbon Membranes: Gas Permeation Behavior at High Temperature2016

    • Author(s)
      Nagasawa H, Kanezashi M, Yoshioka T and Tsuru T
    • Organizer
      The 10th Conference of Aseanian Membrane Society
    • Place of Presentation
      Nara
    • Year and Date
      2016-07-26
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Microporous organosilica membranes prepared via plasma-enhanced chemical vapor deposition2016

    • Author(s)
      Nagasawa H, Kanezashi M, Yoshioka T and Tsuru T
    • Organizer
      14th International Conference on Inorganic Membranes
    • Place of Presentation
      Atlanta, USA
    • Year and Date
      2016-07-10
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Atmospheric-pressure plasma deposition of microporous silica membranes for molecular separation2016

    • Author(s)
      Nagasawa H, Yamamoto Y, Kanezashi M, Yoshoka T and Tsuru T
    • Organizer
      14th International Conference on Inorganic Membranes
    • Place of Presentation
      Atlanta, USA
    • Year and Date
      2016-07-10
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Atmospheric-pressure plasma deposition of microporous silica membranes for molecular separation2016

    • Author(s)
      Hiroki Nagasawa, Yuta Yamamoto, Masakoto Kanezashi, Tomohisa Yoshioka, Toshinori Tsuru
    • Organizer
      14th International Conference on Inorganic Membranes
    • Place of Presentation
      Atlanta, GA, USA
    • Year and Date
      2016-07-10
    • Related Report
      2015 Annual Research Report
  • [Presentation] 大気圧プラズマCVD法によるオルガノシリカ分子ふるい膜の作製2016

    • Author(s)
      長澤 寛規,山本 裕太,金指 正言,吉岡 朋久,都留 稔了
    • Organizer
      日本膜学会第38年会
    • Place of Presentation
      東京
    • Year and Date
      2016-05-10
    • Related Report
      2016 Annual Research Report
  • [Presentation] 大気圧プラズマCVD法によるシリカ膜の作製2016

    • Author(s)
      長澤 寛規, 山本 裕太, 金指 正言, 吉岡 朋久, 都留 稔了
    • Organizer
      化学工学会第79年会
    • Place of Presentation
      関西大学, 吹田
    • Year and Date
      2016-03-13
    • Related Report
      2015 Annual Research Report
  • [Presentation] 大気圧プラズマを用いたシリカ系分離膜の作製および特性評価2015

    • Author(s)
      山本 裕太, 長澤 寛規, 金指 正言, 吉岡 朋久, 都留 稔了
    • Organizer
      膜シンポジウム2015
    • Place of Presentation
      神戸大学,神戸
    • Year and Date
      2015-11-25
    • Related Report
      2015 Annual Research Report
  • [Patent(Industrial Property Rights)] 気体分離フィルタの製造方法2016

    • Inventor(s)
      都留 稔了,長澤 寛規,金指 正言
    • Industrial Property Rights Holder
      広島大学
    • Industrial Property Rights Type
      特許
    • Filing Date
      2016-01-29
    • Related Report
      2015 Annual Research Report

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Published: 2015-04-16   Modified: 2019-03-29  

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