| Budget Amount *help |
¥151,970,000 (Direct Cost: ¥116,900,000、Indirect Cost: ¥35,070,000)
Fiscal Year 2019: ¥20,930,000 (Direct Cost: ¥16,100,000、Indirect Cost: ¥4,830,000)
Fiscal Year 2018: ¥20,540,000 (Direct Cost: ¥15,800,000、Indirect Cost: ¥4,740,000)
Fiscal Year 2017: ¥23,010,000 (Direct Cost: ¥17,700,000、Indirect Cost: ¥5,310,000)
Fiscal Year 2016: ¥21,580,000 (Direct Cost: ¥16,600,000、Indirect Cost: ¥4,980,000)
Fiscal Year 2015: ¥65,910,000 (Direct Cost: ¥50,700,000、Indirect Cost: ¥15,210,000)
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| Outline of Final Research Achievements |
The goal of this study is to achieve fundamental understanding of plasma-surface interactions of advanced plasma processes used in the modern industries. To meet this goal, we have established a multi-scale coupled simulation system connecting density-functional-theory (DFT)-based first principles quantum mechanical simulations of surface chemical reactions with macroscopic plasma simulations via several intermediate-scale simulations for the system. The simulation system was verified and improved by the comparative study with corresponding experiments that we also performed simultaneously. In addition, using this simulation system, we have clarified surface reaction mechanisms of various plasma processes used in the semiconductor industry. As to biomaterial processing, we have established a new technique for surface modification of artificial bones via plasma polymerization.
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