| Co-Investigator(Kenkyū-buntansha) |
清水 裕樹 東北大学, 工学研究科, 准教授 (70606384)
松隈 啓 東北大学, 工学研究科, 助教 (90728370)
陳 遠流 東北大学, 工学研究科, 准教授 (90794058)
伊東 聡 東北大学, 工学研究科, 助教 (00624818)
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| Budget Amount *help |
¥101,010,000 (Direct Cost: ¥77,700,000、Indirect Cost: ¥23,310,000)
Fiscal Year 2019: ¥19,110,000 (Direct Cost: ¥14,700,000、Indirect Cost: ¥4,410,000)
Fiscal Year 2018: ¥26,910,000 (Direct Cost: ¥20,700,000、Indirect Cost: ¥6,210,000)
Fiscal Year 2017: ¥24,440,000 (Direct Cost: ¥18,800,000、Indirect Cost: ¥5,640,000)
Fiscal Year 2016: ¥10,140,000 (Direct Cost: ¥7,800,000、Indirect Cost: ¥2,340,000)
Fiscal Year 2015: ¥20,410,000 (Direct Cost: ¥15,700,000、Indirect Cost: ¥4,710,000)
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| Outline of Final Research Achievements |
Aiming to create a Frontier of the precision optical metrology, the absolute optical scale comb that can be realized by a fusion of the two-axis optical nano-grid reference artifact and the optical frequency comb has been developed. A multi-beam interferometer has been developed to fabricate two-axis optical nano-grid reference artifact with a sub-micrometric grating pitch over a size of 100mm×100mm. In addition, the self-calibration method has been developed for the evaluation of the Z-out-of-flatness and the XY-directional pitch deviation of the optical nano-grid reference artifact. Furthermore, a method of generating the absolute optical scale comb with the enhancement of the dispersive function of the optical nano-grid reference artifact has been established.
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