Lift-off based microfabrication of functional oxides

• Project/Area Number: 15H06029
• Research Category: Grant-in-Aid for Research Activity Start-up
• Allocation Type: Single-year Grants
• Research Field: Inorganic materials/Physical properties
• Research Institution: Tohoku University
• Principal Investigator: Harada Takayuki 東北大学, 金属材料研究所, 助教 (90609942)
• Project Period (FY): 2015-08-28 – 2017-03-31
• Project Status: Completed (Fiscal Year 2016)
• Budget Amount: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000); Fiscal Year 2016: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000); Fiscal Year 2015: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
• Keywords: 微細加工 / 機能性物質 / デバイス / 電子・電気材料 / 強相関エレクトロニクス / 量子エレクトロニクス / メゾスコピック系 / セラミックス / 酸化物エレクトロニクス / 微細加工技術

Outline of Final Research Achievements

Advance in materials science has brought various materials with interesting functionality. Microfabrication of thin films is essential to use such materials in real devices. Here, we have developed a versatile process usable to pattern wide varieties of materials without deteriorating their properties. The key is to use a easily-soluble sacrificial layer as a template. After growing a target material, the template layer is removed by a suitable etchant to get a device structure. This method can open a way to fabricate devices with new functionality out of emerging materials.

Research Products

• [Int'l Joint Research] マックスプランク固体研究所(ドイツ)
• [Journal Article] Superconducting coupling across a spin-filtering manganite tunnel barrier with magnetic disorder (2016)
  • Author(s): T. Harada, M. Matvejeff, R. Takahashi, *M. Lippmaa
  • Journal Title: Europhys. Lett. Volume: 115 Issue: 6 Pages: 67005-67005
  • DOI: 10.1209/0295-5075/115/67005
  • Peer Reviewed / Open Access / Acknowledgement Compliant
• [Journal Article] Hydrostatic pressure response of an oxide-based two-dimensional electron system (2016)
  • Author(s): J. Zabaleta, V. S. Borisov, R. Wanke, H. O. Jeschke, S. C. Parks, B. Baum, A. Teker, T. Harada, K. Syassen, T. Kopp, N. Pavlenko, R. Valenti, J. Mannhart
  • Journal Title: Physical Review B Volume: 93 Issue: 23 Pages: 235117-235117
  • DOI: 10.1103/physrevb.93.235117
  • Peer Reviewed / Int'l Joint Research