Lift-off based microfabrication of functional oxides

Research Project

Project/Area Number	15H06029
Research Category	Grant-in-Aid for Research Activity Start-up
Allocation Type	Single-year Grants
Research Field	Inorganic materials/Physical properties
Research Institution	Tohoku University
Principal Investigator	Harada Takayuki 東北大学, 金属材料研究所, 助教 (90609942)
Project Period (FY)	2015-08-28 – 2017-03-31
Project Status	Completed (Fiscal Year 2016)
Budget Amount *help	¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000) Fiscal Year 2016: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000) Fiscal Year 2015: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Keywords	微細加工 / 機能性物質 / デバイス / 電子・電気材料 / 強相関エレクトロニクス / 量子エレクトロニクス / メゾスコピック系 / セラミックス / 酸化物エレクトロニクス / 微細加工技術
Outline of Final Research Achievements	Advance in materials science has brought various materials with interesting functionality. Microfabrication of thin films is essential to use such materials in real devices. Here, we have developed a versatile process usable to pattern wide varieties of materials without deteriorating their properties. The key is to use a easily-soluble sacrificial layer as a template. After growing a target material, the template layer is removed by a suitable etchant to get a device structure. This method can open a way to fabricate devices with new functionality out of emerging materials.