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チップ上光配線のための極低消費電力・高速動作メンブレンレーザの研究

Research Project

Project/Area Number 15J04654
Research Category

Grant-in-Aid for JSPS Fellows

Allocation TypeSingle-year Grants
Section国内
Research Field Communication/Network engineering
Research InstitutionTokyo Institute of Technology

Principal Investigator

平谷 拓生  東京工業大学, 大学院理工学研究科(工学系), 特別研究員(DC2)

Project Period (FY) 2015-04-24 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥1,900,000 (Direct Cost: ¥1,900,000)
Fiscal Year 2016: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 2015: ¥1,000,000 (Direct Cost: ¥1,000,000)
Keywords半導体レーザ / 薄膜レーザ / DFB / DR
Outline of Annual Research Achievements

本研究では、LSIチップ内部の長距離配線における課題を解決するために薄膜光集積回路の導入を検討しており、その光源であるメンブレンレーザの高性能化を主目的としている。昨年度までに、分布反射型構造を導入した構造を提案・作製しこれまでの約2倍程度の微分量子効率を実現した。しかしながら、理論値と実験値の間には6倍程度の大きな差が生じていた。また、昨年度までは静特性の評価のみにとどまっており、動特性についても評価が必要であった。これらの点を踏まえ、今年度はメンブレンレーザの低しきい値電流、高効率および高速動作の実現を目指した。これに加え、チップ上応用では必須となる高温動作化に向けて温度特性についても検討した。
まず、光取り出し効率が低い理由としては、活性DFB領域で決まる発振波長と受動DBRのブラッグ波長が一致していないことによる反射率の低下や前方に集積された受動光導波路における損失の影響などが考えられる。今回、発振波長とDBRのブラッグ波長が一致するようにそれぞれの領域の回折格子周期を設計した。また、導波路の影響を無視できるように、活性DFB領域において劈開を行った。その結果、DFB領域長61 μmの素子において、しきい値電流0.48 mA、前面外部微分量子効率26%の低しきい値電流・高効率動作が得られた。この効率はこれまでに報告されたSi基板上GaInAsP/InPメンブレンレーザの中で最大である。さらに、この素子を用いて動特性の評価を行ったところ3dB帯域として9.7GHzという値が得られ10Gb/s動作に十分な帯域を確認した。10Gb/sの信号伝送実験においては、雑音の影響でエラーフリー動作は得られなかったが、端面反射の抑制などにより改善可能である。
最後に、DFB領域長30μmの素子について温度特性の評価を行い、1mA以下のしきい値電流で90℃までの連続発振を実現した。

Research Progress Status

28年度が最終年度であるため、記入しない。

Strategy for Future Research Activity

28年度が最終年度であるため、記入しない。

Report

(2 results)
  • 2016 Annual Research Report
  • 2015 Annual Research Report
  • Research Products

    (36 results)

All 2017 2016 2015

All Journal Article (10 results) (of which Peer Reviewed: 10 results,  Open Access: 4 results,  Acknowledgement Compliant: 9 results) Presentation (26 results) (of which Int'l Joint Research: 12 results,  Invited: 4 results)

  • [Journal Article] 90 °C continuous-wave operation of GaInAsP/InP membrane distributed-reflector laser on Si substrate2017

    • Author(s)
      Takuo Hiratani, Daisuke Inoue, Takahiro Tomiyasu, Kai Fukuda, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Journal Title

      Applied Physics Express

      Volume: vol.10 Issue: 3 Pages: 032702-032702

    • DOI

      10.7567/apex.10.032702

    • NAID

      210000135787

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Preliminary reliability test of lateral-current-injection GaInAsP/InP membrane distributed feedback laser on Si substrate fabricated by adhesive wafer bonding2017

    • Author(s)
      Kai Fukuda, Daisuke Inoue, Takuo Hiratani, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: vol. 56 Issue: 2 Pages: 028002-028002

    • DOI

      10.7567/jjap.56.028002

    • NAID

      210000147447

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Study of Slow-light-enhanced Membrane Photodetector for Realizing On-chip Interconnection with Low Power Consumption2017

    • Author(s)
      Zhichen Gu, Takuo Hiratani, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Journal Title

      Journal of Optical Society of America

      Volume: vol.34 Issue: 2 Pages: 440-446

    • DOI

      10.1364/josab.34.000440

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Transformation Physics and Camouflage2016

    • Author(s)
      Tomohiro Amemiya, Masato Taki, Toru Kanazawa, Takuo Hiratani, and Shigehisa Arai
    • Journal Title

      IEICE Transactions on Electronics

      Volume: J99-C Pages: 67-83

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Low-bias current 10 Gbit/s direct modulation of GaInAsP/InP membrane DFB laser on silicon2016

    • Author(s)
      Daisuke Inoue, Takuo Hiratani, Kai Fukuda, Takahiro Tomiyasu, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Journal Title

      Optics Express

      Volume: vol.24 Issue: 16 Pages: 18571-18579

    • DOI

      10.1364/oe.24.018571

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Energy Cost Analysis of Membrane Distributed-Reflector Lasers for On-chip Optical Interconnects2015

    • Author(s)
      Takuo Hiratani, Takahiko Shindo, Kyohei Doi, Yuki Atsuji, Daisuke Inoue, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Journal Title

      IEEE Journal of Selected Topics in Quantum Electronics

      Volume: 21 Issue: 6 Pages: 1503410-1503410

    • DOI

      10.1109/jstqe.2015.2456334

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Low Threshold Current Operation of Membrane DFB Laser with Surface Grating Bonded on Si Substrate2015

    • Author(s)
      Yuki Atsuji, Kyohei Doi, Takuo Hiratani, Daisuke Inoue, Jieun Lee, Yuki Atsumi, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 54 Issue: 8 Pages: 080301-080301

    • DOI

      10.7567/jjap.54.080301

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Monolithic Integration of Membrane-based Butt-jointed Built-in DFB Lasers and PIN Photodiodes Bonded on Si Substrate2015

    • Author(s)
      Daisuke Inoue, Takuo Hiratani, Yuki Atsuji, Takahiro Tomiyasu, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Journal Title

      IEEE Journal of Selected Topics in Quantum Electronics

      Volume: 21 Issue: 6 Pages: 1502907-1502907

    • DOI

      10.1109/jstqe.2015.2435898

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] High-modulation efficiency operation of GaInAsP/InP membrane distributed feedback laser on Si substrate2015

    • Author(s)
      Daisuke Inoue, Takuo Hiratani, Takahiro Tomiyasu, Kai Fukuda, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Journal Title

      Optics Express

      Volume: 23 Issue: 22 Pages: 29024-29031

    • DOI

      10.1364/oe.23.029024

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Room-temperature continuous-wave operation of membrane distributed-reflector laser2015

    • Author(s)
      Takuo Hiratani, Daisuke Inoue, Takahiro Tomiyasu, Yuki Atsuji, Kai Fukuda, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Journal Title

      Applied Physics Express

      Volume: 8 Issue: 11 Pages: 112701-112701

    • DOI

      10.7567/apex.8.112701

    • NAID

      210000137701

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] Temperature dependence of membrane distributed-reflector laser on silicon substrate2017

    • Author(s)
      Takuo Hiratani, Daisuke Inoue, Takahiro Tomiyasu, Kai Fukuda, Tomohiro Amemiya, Nobuhiko Nishiyama, and Shigehisa Arai
    • Organizer
      The 64th JSAP Spring Meeting
    • Place of Presentation
      Yokohama, Japan
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] Temperature Dependence of Threshold Current of GaInAsP/InP Membrane DFB Lasers by Bragg Wavelength Detuning2017

    • Author(s)
      Kai Fukuda, Daisuke Inoue, Takuo Hiratani, Takahiro Tomiyasu, Tatsuya Uryu, Tomohiro Amemiya, Nobuhiko Nishiyama, and Shigehisa Arai
    • Organizer
      The 64th JSAP Spring Meeting
    • Place of Presentation
      Yokohama, Japan
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] GaInAsP/InP Membrane DR Lasers with Low Differential Resistance2017

    • Author(s)
      Nagisa Nakamura, Takahiro Tomiyasu, Takuo Hiratani, Daisuke Inoue, Tomohiro Amemiya, Nobuhiko Nishiyama, and Shigehisa Arai
    • Organizer
      The 64th JSAP Spring Meeting
    • Place of Presentation
      Yokohama, Japan
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] 10 Gbit/s Data Transmission through Optical Link by Using Membrane DFB Laser and PIN-PD2016

    • Author(s)
      Daisuke Inoue, Takuo Hiratani, Kai Fukuda, Zhichen Gu, Takahiro Tomiyasu, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Organizer
      The 2016 IEEE Photonics Conference, 29th Annual Conference of the IEEE Photonics Society (IPC)
    • Place of Presentation
      Hawaii, USA
    • Year and Date
      2016-10-02
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Realization of High Efficiency Operation of Membrane Distributed-Reflector Laser2016

    • Author(s)
      Takuo Hiratani, Daisuke Inoue, Takahiro Tomiyasu, Kai Fukuda, Tomohiro Amemiya, Nobuhiko Nishiyama, and Shigehisa Arai
    • Organizer
      IEICE 2016 Society Conference
    • Place of Presentation
      Sapporo, Japan
    • Year and Date
      2016-09-20
    • Related Report
      2016 Annual Research Report
  • [Presentation] 10 Gbit/s Optical Link Using Membrane DFB Laser Integrated with PIN-Photodiode2016

    • Author(s)
      Daisuke Inoue, Takuo Hiratani, Kai Fukuda, Takahiro Tomiyasu, Tomohiro Amemiya, Nobuhiko Nishiyama, and Shigehisa Arai
    • Organizer
      IEICE 2016 Society Conference
    • Place of Presentation
      Sapporo, Japan
    • Year and Date
      2016-09-20
    • Related Report
      2016 Annual Research Report
  • [Presentation] Bandwidth Analysis of Membrane DFB Laser by Impedance Measurements2016

    • Author(s)
      Tatsuya Uryu, Daisuke Inoue, Takuo Hiratani, Kai Fukuda, Takahiro Tomiyasu, Tomohiro Amemiya, Nobuhiko Nishiyama, and Shigehisa Arai
    • Organizer
      IEICE 2016 Society Conference
    • Place of Presentation
      Sapporo, Japan
    • Year and Date
      2016-09-20
    • Related Report
      2016 Annual Research Report
  • [Presentation] Investigation on the Waveguide Loss Reduction of Semiconductor Membrane Laser2016

    • Author(s)
      Takahiro Tomiyasu, Takuo Hiratani, Daisuke Inoue, Kai Fukuda, Tomohiro Amemiya, Nobuhiko Nishiyama, and Shigehisa Arai
    • Organizer
      IEICE 2016 Society Conference
    • Place of Presentation
      Sapporo, Japan
    • Year and Date
      2016-09-20
    • Related Report
      2016 Annual Research Report
  • [Presentation] Investigation of bandwidth of membrane photodetector using slow light effect2016

    • Author(s)
      Zhichen Gu, Daisuke Inoue, Takuo Hiratani, Tomohiro Amemiya, Nobuhiko Nishiyama, and Shigehisa Arai
    • Organizer
      The 77th JSAP Autumn Meeting
    • Place of Presentation
      Niigata, Japan
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] High Asymmetric Light Output Characteristics of Membrane Distributed-Reflector Laser on Si Substrate2016

    • Author(s)
      Takuo Hiratani, Daisuke Inoue, Takahiro Tomiyasu, Kai Fukuda, Tomohiro Amemiya, Nobuhiko Nishiyama, and Shigehisa Arai
    • Organizer
      The 25th IEEE International Semiconductor Laser Conference (ISLC 2016)
    • Place of Presentation
      Kobe, Japan
    • Year and Date
      2016-09-12
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Impedance Analysis of High-speed Lateral-current-injection Membrane DFB Laser on Silicon2016

    • Author(s)
      Daisuke Inoue, Takuo Hiratani, Kai Fukuda, Takahiro Tomiyasu, Tomohiro Amemiya, Nobuhiko Nishiyama, and Shigehisa Arai
    • Organizer
      The 25th IEEE International Semiconductor Laser Conference (ISLC 2016)
    • Place of Presentation
      Kobe, Japan
    • Year and Date
      2016-09-12
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Membrane Distributed-reflector Lasers2016

    • Author(s)
      Shigehisa Arai, Nobuhiko Nishiyama, Tomohiro Amemiya, Takuo Hiratani, and Daisuke Inoue
    • Organizer
      Optoelectronics and Communications Conference 2016(OECC2016)
    • Place of Presentation
      Niigata, Japan
    • Year and Date
      2016-07-03
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 10 Gbps Operation of Membrane DFB Laser on Silicon with Record High Modulation Efficiency2016

    • Author(s)
      Daisuke Inoue, Takuo Hiratani, Kai Fukuda, Takahiro Tomiyasu, Tomohiro Amemiya, Nobuhiko Nishiyama, and Shigehisa Arai
    • Organizer
      The 28th International Conference on Indium Phosphide and Related Materials (IPRM)
    • Place of Presentation
      Toyama, Japan
    • Year and Date
      2016-06-26
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] GaInAsP/InP Membrane Lasers2016

    • Author(s)
      Shigehisa Arai, Nobuhiko Nishiyama, Tomohiro Amemiya, Takuo Hiratani, and Daisuke Inoue
    • Organizer
      Conference on Lasers and Electro-Optics 2016 (CLEO 2016)
    • Place of Presentation
      San Jose, USA
    • Year and Date
      2016-06-05
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Si基板上GaInAsP/InP薄膜DFBレーザの初期信頼性2016

    • Author(s)
      福田快, 井上大輔, 平谷拓生, 雨宮智宏, 西山伸彦, 荒井滋久
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] フォトニック結晶構造を導入した薄膜型光検出器の検討2016

    • Author(s)
      コシチン, 井上大輔, 平谷拓生, 雨宮智宏, 西山伸彦, 荒井滋久
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] 表面回折格子を有する半導体薄膜DBR レーザの光出力特性2016

    • Author(s)
      平谷拓生, 井上大輔, 冨安高弘, 福田快, 瓜生達也, 雨宮智宏, 西山伸彦, 荒井滋久
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] Si基板上GaInAsP/InP薄膜DFBレーザの高変調効率動作2016

    • Author(s)
      井上大輔, 平谷拓生, 福田快, 冨安高弘, 雨宮智宏, 西山伸彦, 荒井滋久
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] Integrated Membrane-based DFB and DR Lasers2016

    • Author(s)
      Shigehisa Arai, Nobuhiko Nishiyama, Takuo Hiratani, Daisuke Inoue
    • Organizer
      hotonic West 2016, SPIE
    • Place of Presentation
      San Francisco, USA
    • Year and Date
      2016-01-28
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] High Modulation Efficiency of Sub-milliampere Threshold GaInAsP/InP Membrane DFB Laser2015

    • Author(s)
      Daisuke Inoue, Takuo Hiratani, Kai Fukuda, Takahiro Tomiyasu, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Organizer
      The 2015 IEEE Photonics Conference, 28th Annual Conference of the IEEE Photonics Society (IPC)
    • Place of Presentation
      Reston, USA
    • Year and Date
      2015-10-04
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Si基板上GaInAsP/InP薄膜DFBレーザの直接変調応答2015

    • Author(s)
      井上大輔, 平谷拓生, 福田快, 冨安高弘, 雨宮智宏, 西山伸彦, 荒井滋久
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
  • [Presentation] 分布反射器を有する半導体薄膜光検出器の構造設計2015

    • Author(s)
      平谷拓生, 雨宮智宏, 西山伸彦, 荒井滋久
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
  • [Presentation] Room-temperature Continuous-wave Operation of λ/4-shifted Membrane Distributed Feedback Lasers2015

    • Author(s)
      Takahiro Tomiyasu, Daisuke Inoue, Takuo Hiratani, Yuki Atsuji, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Organizer
      The 11th Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR 2015)
    • Place of Presentation
      Busan, Korea
    • Year and Date
      2015-08-24
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Semiconductor Membrane Distributed-reflector (DR) Laser2015

    • Author(s)
      Takuo Hiratani, Daisuke Inoue, Takahiro Tomiyasu, Yuki Atsuji, Kai Fukuda, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Organizer
      Compound Semiconductor Week 2015, 27th International Conference on Indium Phosphide and Related Materials.
    • Place of Presentation
      California, USA
    • Year and Date
      2015-06-28
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] (Invited) Membrane Photonic Integration on Si Platform2015

    • Author(s)
      Tomohiro Amemiya, Takuo Hiratani, Daisuke Inoue, Takahiro Tomiyasu, Kai Fukuda, Nobuhiko Nishiyama, Shigehisa Arai
    • Organizer
      The 20th Opto Electronics and Communications Conference (OECC 2015)
    • Place of Presentation
      Shanghai, China
    • Year and Date
      2015-06-28
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Integration of Membrane-based DFB Laser and PIN Photodiode on Si Substrate toward On-chip Interconnection2015

    • Author(s)
      Daisuke Inoue, Takuo Hiratani, Yuki Atsuji, Takahiro Tomiyasu, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Organizer
      The IEEE Optical Interconnects Conference 2015 (OI Conference 2015)
    • Place of Presentation
      San Diego, USA
    • Year and Date
      2015-04-20
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research

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Published: 2015-11-26   Modified: 2024-03-26  

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