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ナノグラフェン材料を応用した高感度ひずみセンサの開発

Research Project

Project/Area Number 15J07910
Research Category

Grant-in-Aid for JSPS Fellows

Allocation TypeSingle-year Grants
Section国内
Research Field Materials/Mechanics of materials
Research InstitutionTohoku University

Principal Investigator

楊 猛  東北大学, 工学研究科, 特別研究員(PD)

Project Period (FY) 2015-04-24 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥1,940,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥240,000)
Fiscal Year 2016: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2015: ¥900,000 (Direct Cost: ¥900,000)
Keywordsグラフェンナノリボン / ひずみセンサ
Outline of Annual Research Achievements

本研究では,医療・介護ロボットの触覚や動き,脈拍や人体の動きなどをリアルモニタリングするために,グラフェンナノリボンを用いた大変形可能・超高感度ひずみセンサの開発を目標とし,CVD法を用いて高品質のグラフェン薄膜を成膜する技術を確立するとともに,成膜されたグラフェンを用いてグラフェンナノリボンを作製する技術を開発し,その電気特性の評価を行った.
まず、熱CVD法を用いたアセチレンガスによる成膜において触媒であるCu薄膜の表面への酸化処理,アニール処理による表面の向配性の制御,またCu薄膜をポケット状へ加工することによるアセチレンの流量制御により,グラフェン核形成速度を制御することにより,高品質・単層グラフェン薄膜を成膜することに成功した.成膜されたグラフェン薄膜をCu薄膜上からグラフェンナノリボンへ加工するにはSiO2/Si基板上への転写が必須である.そのため、PMMAを用いたグラフェン薄膜転写プロセスの検討を行い,転写基板であるSiO2/Si基板表面への酸素プラズマ処理を施すことでグラフェン薄膜を全面転写することに成功した.また、グラフェンナノリボンの電気特性を計測するために金属電極をグラフェン薄膜上へ形成させる必要がある.そのためにSi基板を用いた遮断マスクを用いたグラフェン薄膜上金属電極の作製の検討を行い,グラフェン薄膜上へ金属電極を形成させることに成功した.さらに金属電極を形成した後,グラフェンナノリボン形成のためにHSQレジストを用いたEBリソグラフィ技術を用いて最小幅約40 nmのHSQ/GNR層の作製に成功した.作製されたグラフェンナノリボンのI-V特性は良好な値を示し,金属電極とグラフェンナノリボンのオーミックコンタクトが形成されていることを確認した.

Research Progress Status

28年度が最終年度であるため、記入しない。

Strategy for Future Research Activity

28年度が最終年度であるため、記入しない。

Report

(2 results)
  • 2016 Annual Research Report
  • 2015 Annual Research Report
  • Research Products

    (17 results)

All 2017 2016 2015 Other

All Journal Article (5 results) (of which Peer Reviewed: 5 results,  Open Access: 1 results,  Acknowledgement Compliant: 4 results) Presentation (11 results) (of which Int'l Joint Research: 6 results) Remarks (1 results)

  • [Journal Article] HIGHLY-SENSITIVE GRAPHENE NANO-RIBBON-BASE STRAIN SENSOR2016

    • Author(s)
      S. Sasaki, M. Yang, K. Suzuki and H. Miura
    • Journal Title

      Proceedings of the ASME 2016 International Mechanical Engineering Congress and Exposition (IMECE2016)

      Volume: IMECE2016-67602 Pages: 1-7

    • DOI

      10.1115/imece2016-67602

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electronic properties and strain sensitivity of CVD-grown graphene with acetylene2016

    • Author(s)
      Meng Yang, Shinichirou Sasaki, Masato Ohnishi, Ken Suzuki, and Hideo Miura
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 4S Pages: 1-9

    • DOI

      10.7567/jjap.55.04ep05

    • NAID

      210000146412

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] “Control of the nucleation and quality of graphene grown by low-pressure chemical vapor deposition with acetylene”2016

    • Author(s)
      M. Yang, S. Sasaki, K. Suzuki and H. Miura,
    • Journal Title

      Applied Surface Science

      Volume: 366 Pages: 219-226

    • DOI

      10.1016/j.apsusc.2016.01.089

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Characterization of the electronic properties and strain sensitivity of graphene formed by C2H2 chemical vapor deposition2015

    • Author(s)
      M. Yang, M. Ohnishi, K. Suzuki and H. Miura,
    • Journal Title

      ASME 2015 International Mechanical Engineering Congress & Exposition (IMECE2015) Proceedings

      Volume: No.IMECE2015-53313 Pages: 1-8

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Effect of three dimensional strain on the electronic properties of graphene nanoribbons2015

    • Author(s)
      M. Yang, M. Ohnishi, K. Suzuki and H. Miura,
    • Journal Title

      International Technical Conference and Exhibition on Packaging (InterPACK2015&ICNMM2015) Proceedings

      Volume: No. InterPACK2015-48239 Pages: 1-9

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] グラフェンナノリボン応用ひずみセンサの開発2017

    • Author(s)
      笹木真一郎,鈴木研,三浦英生
    • Organizer
      日本機械学会東北支部 第52期総会・講演会
    • Place of Presentation
      東北大学工学部青葉記念会館
    • Related Report
      2016 Annual Research Report
  • [Presentation] HIGHLY-SENSITIVE GRAPHENE NANO-RIBBON-BASE STRAIN SENSOR2016

    • Author(s)
      S. Sasaki, M. Yang, K. Suzuki and H. Miura
    • Organizer
      ASME 2016 International Mechanical Engineering Congress and Exposition (IMECE2016)
    • Place of Presentation
      Phoenix Convention Center, Phoenix, USA
    • Year and Date
      2016-11-13
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] グラフェンの電子状態と電気伝導性に及ぼすひずみの影響2016

    • Author(s)
      楊猛
    • Organizer
      日本機械学会第29回計算力学講演会
    • Place of Presentation
      名古屋大学 豊田講堂
    • Year and Date
      2016-09-22
    • Related Report
      2016 Annual Research Report
  • [Presentation] Rapid growth of high-quality graphene on Cu (111) surface using C2H2- based chemical vapour deposition2016

    • Author(s)
      Meng Yang, Shinichirou Sasaki, Ken Suzuki and Hideo Miura
    • Organizer
      27th International Conference on Diamond and Carbon Materials (ICDCM)
    • Place of Presentation
      Le Corum Congress Center, Montpellier, France
    • Year and Date
      2016-09-04
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] グラフェン応用フレキシブルひずみセンサ試作と評価2016

    • Author(s)
      笹木真一郎、楊猛、鈴木研、三浦英生
    • Organizer
      日本機械学会東北支部第51期総会
    • Place of Presentation
      東北大学工学部青葉記念会館、宮城県仙台市
    • Year and Date
      2016-03-11
    • Related Report
      2015 Annual Research Report
  • [Presentation] フレキシブル基板を用いたグラフェンひずみセンサの試作・評価2015

    • Author(s)
      笹木真一郎、楊猛、鈴木研、三浦英生
    • Organizer
      日本機械学会M&M2015材料力学カンファレンス
    • Place of Presentation
      慶応義塾大学矢上キャンパス、神奈川県横浜市
    • Year and Date
      2015-11-21
    • Related Report
      2015 Annual Research Report
  • [Presentation] "CHARACTERIZATION OF THE ELECTRONIC PROPERTIES AND STRAIN SENSITIVITY OF GRAPHENE FORMED BY C2H2 CHEMICAL VAPOR DEPOSITON"2015

    • Author(s)
      Meng Yang, Shinichiro Sasaki, Masato Ohnishi, Ken Suzuki and Hideo Miura,
    • Organizer
      ASME2015 International Mechanical Engineering Congress and Exposition (IMECE2015)
    • Place of Presentation
      Hilton Americas Houston and George R. Brown Convention Center, Houston, Texas, USA
    • Year and Date
      2015-11-13
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] グラフェンナノリボン電気伝導性の三次元ひずみ場依存性2015

    • Author(s)
      楊猛、大西正人、鈴木研、三浦英生
    • Organizer
      日本機械学会第28回計算力学講演会(CMD2015)
    • Place of Presentation
      横浜国立大学理工学部講義棟、神奈川県横浜市
    • Year and Date
      2015-10-10
    • Related Report
      2015 Annual Research Report
  • [Presentation] "Study of the Electronic Properties and Strain sensitivity of Chemical Vapor Deposition-Grown Graphene from C2H2"2015

    • Author(s)
      Meng Yang, Shinichiro Sasaki, Masato Ohnishi, Ken Suzuki and Hideo Miura,
    • Organizer
      2015 INTERNATIONAL CONFERENCE ON SOLID STATE DEVICES AND MATERIALS (ssdm2015)
    • Place of Presentation
      Sapporo Convention Center, Sapporo, Hokkaido, Japan
    • Year and Date
      2015-09-27
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of Highly-sensitive Strain Sensor using Graphene2015

    • Author(s)
      Shinichirou Sasaki, Meng Yang, Ken Suzuki, Hideo Miura
    • Organizer
      The 17th Electronic Materials and Packaging Conference (EMAP2015)
    • Place of Presentation
      Portland State University, Portland, OR, USA
    • Year and Date
      2015-09-01
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] "Effect of Three-dimensional Strain on the Electronic Properties of Graphene Nanoribbons”2015

    • Author(s)
      Meng Yang, Shinichiro Sasaki, Masato Ohnishi, Ken Suzuki and Hideo Miura,
    • Organizer
      2015 International Technical Conference and Exhibition on Packaging (InterPACK2015)
    • Place of Presentation
      The Fairmont San Francisco Hotel, San Francisco, California, USA
    • Year and Date
      2015-07-06
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Remarks] 三浦・鈴木研究室

    • URL

      http://www.miura.rift.mech.tohoku.ac.jp/academy_jp.htm

    • Related Report
      2015 Annual Research Report

URL: 

Published: 2015-11-26   Modified: 2024-03-26  

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