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半導体薄膜構造による極低消費電力モノリシック光集積回路の研究

Research Project

Project/Area Number 15J11776
Research Category

Grant-in-Aid for JSPS Fellows

Allocation TypeSingle-year Grants
Section国内
Research Field Electron device/Electronic equipment
Research InstitutionTokyo Institute of Technology

Principal Investigator

井上 大輔  東京工業大学, 理工学研究科, 特別研究員(DC1)

Project Period (FY) 2015-04-24 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥2,800,000 (Direct Cost: ¥2,800,000)
Fiscal Year 2017: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 2016: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 2015: ¥1,000,000 (Direct Cost: ¥1,000,000)
Keywords薄膜レーザ / DFBレーザ / オンチップ光配線 / 光配線 / 半導体レーザ / 半導体薄膜レーザ / 極低消費電力動作
Outline of Annual Research Achievements

近年、Si-LSIチップにおける電気配線層は信号遅延や発熱の増大によってチップ全体の性能を律速する要因となっている。そこで既存の銅電気配線の代替となる、新規の配線技術が求められている。本研究では、Ⅲ-Ⅴ族半導体薄膜構造を用いた光配線技術を提案している。薄膜構造がもたらす高い比屈折率差によって極低電力なDFBレーザ光源を高密度に集積した光配線が実現できる。上述の研究目的に沿って以下の研究成果を挙げた。
(1) 薄膜レーザの極低消費電力動作
薄膜分布反射型レーザの100 fJ/bitを下回る極低消費電力動作の実証を行った。測定系が持つ周波数特性を信号源で補償することで素子特性を正確に評価した。バイアス電流1.06 mAにおいてデータレート20 Gbit/sのアイ開口を得ることに成功した。その結果1bitの送信に必要なビットエラーレートとしては6.4×10-10乗が得られた。その結果1bitの送信に必要な消費電力としては93 fJ/bitが得られた。以上から、薄膜レーザを用いることでSi基板上に100 fJ/bitを下回る消費電力での動作する光源を集積可能であることを示した。
(2) 直接成長技術によるSi上集積光源
カリフォルニア大学サンタバーバラ校(UCSB)との共同研究でSi基板上に直接成長技術を用いてIII-V族半導体光源を集積する方法検討した。貼り付けを用いて集積する方法と比べ、直接成長技術ではSi基板の全面にIII-V族半導体を形成できることから高集積光集積回路や光源の低コスト化に期待がされている。Si基板に直接成長された量子ドットレーザの直接変調特性の評価を行い3dB帯域としては6.5 GHzが得られた。10 Gbit/sの大信号変調を行い明瞭なアイ開口と10GEthernet maskをクリアする信号品質を有していることを示した。

Research Progress Status

29年度が最終年度であるため、記入しない。

Strategy for Future Research Activity

29年度が最終年度であるため、記入しない。

Report

(3 results)
  • 2017 Annual Research Report
  • 2016 Annual Research Report
  • 2015 Annual Research Report
  • Research Products

    (21 results)

All 2018 2017 2016 2015 Other

All Int'l Joint Research (1 results) Journal Article (5 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 5 results,  Open Access: 4 results,  Acknowledgement Compliant: 3 results) Presentation (15 results) (of which Int'l Joint Research: 10 results)

  • [Int'l Joint Research] University of California, Santa Barbara(米国)

    • Related Report
      2017 Annual Research Report
  • [Journal Article] Directly modulated 1.3 μm quantum dot lasers epitaxially grown on silicon2018

    • Author(s)
      Daisuke Inoue, Daehwan Jung, Justin Norman, Yating Wan, Nobuhiko Nishiyama, Shigehisa Arai, Arthur C. Gossard, John E. Bowers
    • Journal Title

      Optics Express

      Volume: 26 Issue: 6 Pages: 7022-7033

    • DOI

      10.1364/oe.26.007022

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Integrated Optical Link on Si Substrate Using Membrane Distributed-Feedback Laser and p-i-n Photodiode2017

    • Author(s)
      Daisuke Inoue, Takuo Hiratani, Kai Fukuda, Takahiro Tomiyasu, Zhichen Gu, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Journal Title

      IEEE Journal of Selected Topics in Quantum Electronics

      Volume: 23 Issue: 6 Pages: 3700208-3700208

    • DOI

      10.1109/jstqe.2017.2716184

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Low-bias current 10 Gbit/s direct modulation of GaInAsP/InP membrane DFB laser on silicon2016

    • Author(s)
      Daisuke Inoue, Takuo Hiratani, Kai Fukuda, Takahiro Tomiyasu, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Journal Title

      Optics Express

      Volume: vol.24 Issue: 16 Pages: 18571-18579

    • DOI

      10.1364/oe.24.018571

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Monolithic Integration of Membrane-based Butt-jointed Built-in DFB Lasers and PIN Photodiodes Bonded on Si Substrate2015

    • Author(s)
      Daisuke Inoue, Takuo Hiratani, Yuki Atsuji, Takahiro Tomiyasu, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Journal Title

      IEEE Journal of Selected Topics in Quantum Electronics

      Volume: 21 Issue: 6 Pages: 1502907-1502907

    • DOI

      10.1109/jstqe.2015.2435898

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] High-modulation efficiency operation of GaInAsP/InP membrane distributed feedback laser on Si substrate2015

    • Author(s)
      Daisuke Inoue, Takuo Hiratani, Takahiro Tomiyasu, Kai Fukuda, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Journal Title

      Optics Express

      Volume: 23 Issue: 22 Pages: 29024-29031

    • DOI

      10.1364/oe.23.029024

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Presentation] High-speed direct modulation of 1.3 μm InAs quantum dot laser grown on on-axis (001) Si substrate2018

    • Author(s)
      Daisuke Inoue, Daehwan Jung, Yating Wan, Justin Norman, Nobuhiko Nishiyama, Shigehisa Arai, Arthur C. Gossard, John E. Bowers
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Bragg Wavelength Detuning Effect on Temperature Dependences of GaInAsP/InP Membrane Lasers2017

    • Author(s)
      Daisuke Inoue, Takuo Hiratani, Kai Fukuda, Takahiro Tomiyasu, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Organizer
      The 24th Congress of the International Commission for Optics (ICO-24)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Temperature dependence of threshold current of GaInAsP/InP membrane lasers with Bragg wavelength detuning2017

    • Author(s)
      Daisuke Inoue, Takuo Hiratani, Kai Fukuda, Takahiro Tomiyasu, Tatsuya Uryu, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Organizer
      The 29th International Conference on Indium Phosphide and Related Materials (IPRM)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ブラッグ波長離調を用いた半導体薄膜DFB/DRレーザのしきい値電流温度依存性2017

    • Author(s)
      井上 大輔, 福田 快, 平谷 拓生, 冨安 高弘, 瓜生 達也, 雨宮 智宏, 西山 伸彦, 荒井 滋久
    • Organizer
      電子情報通信学会 レーザ・量子エレクトロニクス研究会(LQE)
    • Related Report
      2017 Annual Research Report
  • [Presentation] 10 Gbps Operation of Membrane DFB Laser on Silicon with Record High Modulation Efficiency2016

    • Author(s)
      Daisuke Inoue, Takuo Hiratani, Kai Fukuda, Takahiro Tomiyasu, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Organizer
      The International Confarence on Indium phosphide and related materials 2015
    • Place of Presentation
      富山国際会議場
    • Year and Date
      2016-06-26
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Si基板上GaInAsP/InP薄膜DFBレーザの高変調効率動作2016

    • Author(s)
      井上大輔, 平谷拓生, 福田快, 冨安高弘, 雨宮智宏, 西山伸彦, 荒井滋久.
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] 薄膜DFBレーザとPIN-フォトダイオードを集積した10 Gbit/s光リンク2016

    • Author(s)
      井上大輔, 平谷拓生, 福田快, コ シチン, 冨安高弘, 雨宮智宏, 西山伸彦, 荒井滋久
    • Organizer
      電子情報通信学会 2016年ソサイエティ大会
    • Place of Presentation
      札幌
    • Related Report
      2016 Annual Research Report
  • [Presentation] 10 Gbps Operation of Membrane DFB Laser on Silicon with Record High Modulation Efficiency2016

    • Author(s)
      Daisuke Inoue, Takuo Hiratani, Kai Fukuda, Takahiro Tomiyasu, Tomohiro Amemiya, Nobuhiko Nishiyama, and Shigehisa Arai,
    • Organizer
      The 28th International Conference on Indium Phosphide and Related Materials (IPRM)
    • Place of Presentation
      Toyama
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Impedance Analysis of High-speed Lateral-current-injection Membrane DFB Laser on Silicon2016

    • Author(s)
      Daisuke Inoue, Takuo Hiratani, Kai Fukuda, Takahiro Tomiyasu, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Organizer
      The 25th International Semiconductor Laser Conference
    • Place of Presentation
      Kobe
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 10 Gbit/s Data Transmission through Optical Link by Using Membrane DFB Laser and PIN-PD2016

    • Author(s)
      Daisuke Inoue, Takuo Hiratani, Kai Fukuda, Zhichen Gu, Takahiro Tomiyasu, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Organizer
      The 2016 IEEE Photonics Conference, 29th Annual Conference of the IEEE Photonics Society (IPC)
    • Place of Presentation
      Waikoloa, Hawaii
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Direct Modulation Properties of GaInAsP/InP Membrane DFB Laser on Si2015

    • Author(s)
      Daisuke Inoue, Takuo Hiratani, Kai Fukuda, Takahiro Tomiyasu, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Organizer
      The 5th International Symposium on Photonics and Electronics Convergence
    • Place of Presentation
      東京大学
    • Year and Date
      2015-11-30
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High Modulation Efficiency of Sub-milliampere Threshold GaInAsP/InP Membrane DFB Laser2015

    • Author(s)
      Daisuke Inoue, Takuo Hiratani, Kai Fukuda, Takahiro Tomiyasu, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Organizer
      The 2015 IEEE Photonics Conference, 28th Annual Conference of the IEEE Photonics Society
    • Place of Presentation
      Reston
    • Year and Date
      2015-10-04
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Si基板上GaInAsP/InP薄膜DFBレーザの直接変調応答2015

    • Author(s)
      井上大輔, 平谷拓生, 福田快, 冨安高弘, 雨宮智宏, 西山伸彦, 荒井滋久.
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
  • [Presentation] Monolithic Integration of Low Threshold-current Membrane DFB Laser and Low Dark-current PIN Photodiode2015

    • Author(s)
      Daisuke Inoue, Takuo Hiratani, Takahiro Tomiyasu, Kai Fukuda, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai.
    • Organizer
      The International Nano-Optoelectronics Workshop 2015
    • Place of Presentation
      東京大学
    • Year and Date
      2015-08-03
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Integration of Membrane-based DFB Laser and PIN Photodiode on Si Substrate toward On-chip Interconnection,2015

    • Author(s)
      Daisuke Inoue, Takuo Hiratani, Yuuki Atsudi, Takahiro Tomiyasu, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Organizer
      The IEEE Optical Interconnects Conference 2015
    • Place of Presentation
      San Diego
    • Year and Date
      2015-04-20
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research

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Published: 2015-11-26   Modified: 2024-03-26  

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